JPS4926477A - - Google Patents

Info

Publication number
JPS4926477A
JPS4926477A JP6831672A JP6831672A JPS4926477A JP S4926477 A JPS4926477 A JP S4926477A JP 6831672 A JP6831672 A JP 6831672A JP 6831672 A JP6831672 A JP 6831672A JP S4926477 A JPS4926477 A JP S4926477A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6831672A
Other languages
Japanese (ja)
Other versions
JPS5010949B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6831672A priority Critical patent/JPS5010949B2/ja
Publication of JPS4926477A publication Critical patent/JPS4926477A/ja
Publication of JPS5010949B2 publication Critical patent/JPS5010949B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Confectionery (AREA)
  • Manufacturing And Processing Devices For Dough (AREA)
JP6831672A 1972-07-07 1972-07-07 Expired JPS5010949B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6831672A JPS5010949B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-07 1972-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6831672A JPS5010949B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-07 1972-07-07

Publications (2)

Publication Number Publication Date
JPS4926477A true JPS4926477A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-08
JPS5010949B2 JPS5010949B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-04-25

Family

ID=13370277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6831672A Expired JPS5010949B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-07 1972-07-07

Country Status (1)

Country Link
JP (1) JPS5010949B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134599U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-09-05 1976-03-15
JPS5257567U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-10-22 1977-04-26
JPS60173614A (ja) * 1984-12-21 1985-09-07 Hitachi Ltd 位置決め装置
JPS6165427A (ja) * 1984-09-07 1986-04-04 Toshiba Corp 移動ステ−ジ装置
JPS61137113A (ja) * 1984-12-07 1986-06-24 Nec Corp アライナ−
JPS62112846U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-12-13 1987-07-18
JPH0620908A (ja) * 1990-12-26 1994-01-28 Korea Electron Telecommun 固体型アクチュエーターを利用したウェーハの精密駆動装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134599U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-09-05 1976-03-15
JPS5257567U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-10-22 1977-04-26
JPS6165427A (ja) * 1984-09-07 1986-04-04 Toshiba Corp 移動ステ−ジ装置
JPS61137113A (ja) * 1984-12-07 1986-06-24 Nec Corp アライナ−
JPS60173614A (ja) * 1984-12-21 1985-09-07 Hitachi Ltd 位置決め装置
JPS62112846U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-12-13 1987-07-18
JPH0620908A (ja) * 1990-12-26 1994-01-28 Korea Electron Telecommun 固体型アクチュエーターを利用したウェーハの精密駆動装置

Also Published As

Publication number Publication date
JPS5010949B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-04-25

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