JPS4922587A - - Google Patents
Info
- Publication number
- JPS4922587A JPS4922587A JP47064366A JP6436672A JPS4922587A JP S4922587 A JPS4922587 A JP S4922587A JP 47064366 A JP47064366 A JP 47064366A JP 6436672 A JP6436672 A JP 6436672A JP S4922587 A JPS4922587 A JP S4922587A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coupling Device And Connection With Printed Circuit (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6436672A JPS536716B2 (hu) | 1972-06-26 | 1972-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6436672A JPS536716B2 (hu) | 1972-06-26 | 1972-06-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4922587A true JPS4922587A (hu) | 1974-02-28 |
| JPS536716B2 JPS536716B2 (hu) | 1978-03-10 |
Family
ID=13256184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6436672A Expired JPS536716B2 (hu) | 1972-06-26 | 1972-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS536716B2 (hu) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51138464A (en) * | 1975-05-26 | 1976-11-30 | Hitachi Ltd | Device for detecting relative position of plural articles |
| JPS58108745A (ja) * | 1981-12-23 | 1983-06-28 | Canon Inc | 転写装置 |
| JPS60196944A (ja) * | 1984-07-30 | 1985-10-05 | Hitachi Ltd | アライメント方法 |
| JPS6376427A (ja) * | 1986-09-19 | 1988-04-06 | Canon Inc | 露光方法 |
| JPH03101215A (ja) * | 1990-08-07 | 1991-04-26 | Canon Inc | 転写誤差調整方法 |
| JPH0574680A (ja) * | 1992-03-13 | 1993-03-26 | Hitachi Ltd | 投影露光方法 |
| JPH05251303A (ja) * | 1992-04-27 | 1993-09-28 | Nikon Corp | 投影型露光装置 |
| JPH08241859A (ja) * | 1996-01-29 | 1996-09-17 | Hitachi Ltd | 投影露光方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7365962B2 (ja) | 2020-05-12 | 2023-10-20 | 株式会社クボタ | バッテリユニット |
-
1972
- 1972-06-26 JP JP6436672A patent/JPS536716B2/ja not_active Expired
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5742971B2 (hu) * | 1975-05-26 | 1982-09-11 | ||
| JPS51138464A (en) * | 1975-05-26 | 1976-11-30 | Hitachi Ltd | Device for detecting relative position of plural articles |
| JPH0142492B2 (hu) * | 1981-12-23 | 1989-09-13 | Canon Kk | |
| JPS58108745A (ja) * | 1981-12-23 | 1983-06-28 | Canon Inc | 転写装置 |
| JPS60196944A (ja) * | 1984-07-30 | 1985-10-05 | Hitachi Ltd | アライメント方法 |
| JPS6151415B2 (hu) * | 1984-07-30 | 1986-11-08 | Hitachi Ltd | |
| JPS6376427A (ja) * | 1986-09-19 | 1988-04-06 | Canon Inc | 露光方法 |
| JPH03101215A (ja) * | 1990-08-07 | 1991-04-26 | Canon Inc | 転写誤差調整方法 |
| JPH0519298B2 (hu) * | 1990-08-07 | 1993-03-16 | Canon Kk | |
| JPH0574680A (ja) * | 1992-03-13 | 1993-03-26 | Hitachi Ltd | 投影露光方法 |
| JPH05251303A (ja) * | 1992-04-27 | 1993-09-28 | Nikon Corp | 投影型露光装置 |
| JPH0754794B2 (ja) * | 1992-04-27 | 1995-06-07 | 株式会社ニコン | 投影型露光装置 |
| JPH08241859A (ja) * | 1996-01-29 | 1996-09-17 | Hitachi Ltd | 投影露光方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS536716B2 (hu) | 1978-03-10 |