JPS4918040A - - Google Patents
Info
- Publication number
- JPS4918040A JPS4918040A JP47119423A JP11942372A JPS4918040A JP S4918040 A JPS4918040 A JP S4918040A JP 47119423 A JP47119423 A JP 47119423A JP 11942372 A JP11942372 A JP 11942372A JP S4918040 A JPS4918040 A JP S4918040A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
- G02B17/0621—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0626—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors
- G02B17/0642—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Microscoopes, Condenser (AREA)
- Lenses (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/244,393 US3982824A (en) | 1971-12-01 | 1972-04-17 | Catoptric lens arrangement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4918040A true JPS4918040A (https=) | 1974-02-18 |
| JPS5336334B2 JPS5336334B2 (https=) | 1978-10-02 |
Family
ID=22922552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11942372A Expired JPS5336334B2 (https=) | 1972-04-17 | 1972-11-30 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5336334B2 (https=) |
| CA (1) | CA1002800A (https=) |
| FR (1) | FR2180636B1 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59197007A (ja) * | 1983-04-22 | 1984-11-08 | Yasuto Ozaki | レ−ザ光により投光線を得る装置 |
| JP2011522256A (ja) * | 2008-05-30 | 2011-07-28 | リガク イノベイティブ テクノロジーズ インコーポレイテッド | 高強度ｘ線ビームシステム |
-
1972
- 1972-11-29 FR FR7242375A patent/FR2180636B1/fr not_active Expired
- 1972-11-30 JP JP11942372A patent/JPS5336334B2/ja not_active Expired
- 1972-11-30 CA CA157,919A patent/CA1002800A/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59197007A (ja) * | 1983-04-22 | 1984-11-08 | Yasuto Ozaki | レ−ザ光により投光線を得る装置 |
| JP2011522256A (ja) * | 2008-05-30 | 2011-07-28 | リガク イノベイティブ テクノロジーズ インコーポレイテッド | 高強度ｘ線ビームシステム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5336334B2 (https=) | 1978-10-02 |
| FR2180636A1 (https=) | 1973-11-30 |
| CA1002800A (en) | 1977-01-04 |
| FR2180636B1 (https=) | 1976-10-29 |