JPS4916380A - - Google Patents

Info

Publication number
JPS4916380A
JPS4916380A JP4987072A JP4987072A JPS4916380A JP S4916380 A JPS4916380 A JP S4916380A JP 4987072 A JP4987072 A JP 4987072A JP 4987072 A JP4987072 A JP 4987072A JP S4916380 A JPS4916380 A JP S4916380A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4987072A
Other languages
Japanese (ja)
Other versions
JPS5235513B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4987072A priority Critical patent/JPS5235513B2/ja
Publication of JPS4916380A publication Critical patent/JPS4916380A/ja
Publication of JPS5235513B2 publication Critical patent/JPS5235513B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP4987072A 1972-05-22 1972-05-22 Expired JPS5235513B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4987072A JPS5235513B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-05-22 1972-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4987072A JPS5235513B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-05-22 1972-05-22

Publications (2)

Publication Number Publication Date
JPS4916380A true JPS4916380A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-13
JPS5235513B2 JPS5235513B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-09-09

Family

ID=12843065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4987072A Expired JPS5235513B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-05-22 1972-05-22

Country Status (1)

Country Link
JP (1) JPS5235513B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033557A (ja) * 1983-08-05 1985-02-20 Konishiroku Photo Ind Co Ltd 電子線露光用マスク素材の製造方法
JPS6093438A (ja) * 1983-10-27 1985-05-25 Konishiroku Photo Ind Co Ltd フオトマスク
JPS6486144A (en) * 1987-09-29 1989-03-30 Fujitsu Ltd Method for patterning resist

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033557A (ja) * 1983-08-05 1985-02-20 Konishiroku Photo Ind Co Ltd 電子線露光用マスク素材の製造方法
JPS6093438A (ja) * 1983-10-27 1985-05-25 Konishiroku Photo Ind Co Ltd フオトマスク
JPS6486144A (en) * 1987-09-29 1989-03-30 Fujitsu Ltd Method for patterning resist

Also Published As

Publication number Publication date
JPS5235513B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-09-09

Similar Documents

Publication Publication Date Title
JPS49108280A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS4897791U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH572343A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG18515A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG18525A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG18556A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG19558A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG19848A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG22338A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH311072A4 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH552237A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH554968A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH559117A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH559433A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH560190A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH561300A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH561647A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH562400A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH562665A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH564147A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH567145A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH567371A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH567608B5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH568041A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH569275A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)