JPS4915371A - - Google Patents
Info
- Publication number
- JPS4915371A JPS4915371A JP48033044A JP3304473A JPS4915371A JP S4915371 A JPS4915371 A JP S4915371A JP 48033044 A JP48033044 A JP 48033044A JP 3304473 A JP3304473 A JP 3304473A JP S4915371 A JPS4915371 A JP S4915371A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H10P90/126—
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/32—Alkaline compositions
- C23F1/40—Alkaline compositions for etching other metallic material
-
- H10P50/642—
-
- H10P50/644—
-
- H10P50/646—
-
- H10P50/692—
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
- Thyristors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2214197A DE2214197C3 (de) | 1972-03-23 | 1972-03-23 | Verfahren zum Ätzen von PN-Übergänge enthaltenden Halbleiterscheiben |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4915371A true JPS4915371A (Direct) | 1974-02-09 |
| JPS525230B2 JPS525230B2 (Direct) | 1977-02-10 |
Family
ID=5839938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48033044A Expired JPS525230B2 (Direct) | 1972-03-23 | 1973-03-22 |
Country Status (11)
| Country | Link |
|---|---|
| JP (1) | JPS525230B2 (Direct) |
| AT (1) | AT325678B (Direct) |
| BE (1) | BE797244A (Direct) |
| CH (1) | CH575175A5 (Direct) |
| DE (1) | DE2214197C3 (Direct) |
| ES (1) | ES409621A1 (Direct) |
| FR (1) | FR2176664B1 (Direct) |
| GB (1) | GB1362507A (Direct) |
| IT (1) | IT972618B (Direct) |
| NL (1) | NL7217673A (Direct) |
| SE (1) | SE378478B (Direct) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB889872A (en) * | 1957-04-24 | 1962-02-21 | Sarkes Tarzian | A method of treating a semi-conductor device |
| FR1266612A (fr) * | 1960-06-02 | 1961-07-17 | Solutions d'attaque chimiques pour le traitement en surface des matériaux semiconducteurs | |
| NL271850A (Direct) * | 1961-02-03 | |||
| GB980513A (en) * | 1961-11-17 | 1965-01-13 | Licentia Gmbh | Improvements relating to the use of silicon in semi-conductor devices |
| DE1621511A1 (de) * | 1967-04-01 | 1970-07-23 | Siemens Ag | Verfahren zum Entspiegeln von Siliziumeinkristalloberflaechen |
-
1972
- 1972-03-23 DE DE2214197A patent/DE2214197C3/de not_active Expired
- 1972-11-29 CH CH1742472A patent/CH575175A5/xx not_active IP Right Cessation
- 1972-11-29 AT AT1017072A patent/AT325678B/de active
- 1972-12-14 ES ES409621A patent/ES409621A1/es not_active Expired
- 1972-12-20 IT IT33232/72A patent/IT972618B/it active
- 1972-12-21 FR FR7245655A patent/FR2176664B1/fr not_active Expired
- 1972-12-27 NL NL7217673A patent/NL7217673A/xx unknown
-
1973
- 1973-01-25 GB GB380173A patent/GB1362507A/en not_active Expired
- 1973-03-22 JP JP48033044A patent/JPS525230B2/ja not_active Expired
- 1973-03-23 BE BE129187A patent/BE797244A/xx unknown
- 1973-03-23 SE SE7304136A patent/SE378478B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CH575175A5 (Direct) | 1976-04-30 |
| NL7217673A (Direct) | 1973-09-25 |
| FR2176664B1 (Direct) | 1977-12-30 |
| DE2214197B2 (de) | 1981-04-23 |
| BE797244A (fr) | 1973-07-16 |
| JPS525230B2 (Direct) | 1977-02-10 |
| SE378478B (Direct) | 1975-09-01 |
| DE2214197C3 (de) | 1982-01-14 |
| AT325678B (de) | 1975-11-10 |
| FR2176664A1 (Direct) | 1973-11-02 |
| ATA1017072A (de) | 1975-01-15 |
| DE2214197A1 (de) | 1973-09-27 |
| IT972618B (it) | 1974-05-31 |
| ES409621A1 (es) | 1975-12-01 |
| GB1362507A (en) | 1974-08-07 |