FR2176664A1 - - Google Patents

Info

Publication number
FR2176664A1
FR2176664A1 FR7245655A FR7245655A FR2176664A1 FR 2176664 A1 FR2176664 A1 FR 2176664A1 FR 7245655 A FR7245655 A FR 7245655A FR 7245655 A FR7245655 A FR 7245655A FR 2176664 A1 FR2176664 A1 FR 2176664A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7245655A
Other languages
French (fr)
Other versions
FR2176664B1 (Direct
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of FR2176664A1 publication Critical patent/FR2176664A1/fr
Application granted granted Critical
Publication of FR2176664B1 publication Critical patent/FR2176664B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H10P90/126—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/40—Alkaline compositions for etching other metallic material
    • H10P50/642—
    • H10P50/644—
    • H10P50/646—
    • H10P50/692—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
  • Thyristors (AREA)
FR7245655A 1972-03-23 1972-12-21 Expired FR2176664B1 (Direct)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2214197A DE2214197C3 (de) 1972-03-23 1972-03-23 Verfahren zum Ätzen von PN-Übergänge enthaltenden Halbleiterscheiben

Publications (2)

Publication Number Publication Date
FR2176664A1 true FR2176664A1 (Direct) 1973-11-02
FR2176664B1 FR2176664B1 (Direct) 1977-12-30

Family

ID=5839938

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7245655A Expired FR2176664B1 (Direct) 1972-03-23 1972-12-21

Country Status (11)

Country Link
JP (1) JPS525230B2 (Direct)
AT (1) AT325678B (Direct)
BE (1) BE797244A (Direct)
CH (1) CH575175A5 (Direct)
DE (1) DE2214197C3 (Direct)
ES (1) ES409621A1 (Direct)
FR (1) FR2176664B1 (Direct)
GB (1) GB1362507A (Direct)
IT (1) IT972618B (Direct)
NL (1) NL7217673A (Direct)
SE (1) SE378478B (Direct)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1194858A (fr) * 1957-04-24 1959-11-13 Sarkes Tarzian Procédé de traitement des dispositifs semi-conducteurs
FR1266612A (fr) * 1960-06-02 1961-07-17 Solutions d'attaque chimiques pour le traitement en surface des matériaux semiconducteurs
GB980513A (en) * 1961-11-17 1965-01-13 Licentia Gmbh Improvements relating to the use of silicon in semi-conductor devices

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL271850A (Direct) * 1961-02-03
DE1621511A1 (de) * 1967-04-01 1970-07-23 Siemens Ag Verfahren zum Entspiegeln von Siliziumeinkristalloberflaechen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1194858A (fr) * 1957-04-24 1959-11-13 Sarkes Tarzian Procédé de traitement des dispositifs semi-conducteurs
FR1266612A (fr) * 1960-06-02 1961-07-17 Solutions d'attaque chimiques pour le traitement en surface des matériaux semiconducteurs
GB980513A (en) * 1961-11-17 1965-01-13 Licentia Gmbh Improvements relating to the use of silicon in semi-conductor devices

Also Published As

Publication number Publication date
CH575175A5 (Direct) 1976-04-30
NL7217673A (Direct) 1973-09-25
FR2176664B1 (Direct) 1977-12-30
DE2214197B2 (de) 1981-04-23
BE797244A (fr) 1973-07-16
JPS525230B2 (Direct) 1977-02-10
SE378478B (Direct) 1975-09-01
DE2214197C3 (de) 1982-01-14
AT325678B (de) 1975-11-10
ATA1017072A (de) 1975-01-15
DE2214197A1 (de) 1973-09-27
IT972618B (it) 1974-05-31
JPS4915371A (Direct) 1974-02-09
ES409621A1 (es) 1975-12-01
GB1362507A (en) 1974-08-07

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Legal Events

Date Code Title Description
ST Notification of lapse