JPS4914147A - - Google Patents

Info

Publication number
JPS4914147A
JPS4914147A JP48031330A JP3133073A JPS4914147A JP S4914147 A JPS4914147 A JP S4914147A JP 48031330 A JP48031330 A JP 48031330A JP 3133073 A JP3133073 A JP 3133073A JP S4914147 A JPS4914147 A JP S4914147A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48031330A
Other versions
JPS529394B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4914147A publication Critical patent/JPS4914147A/ja
Publication of JPS529394B2 publication Critical patent/JPS529394B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/10—Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving
    • G01B11/105—Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP48031330A 1972-03-17 1973-03-17 Expired JPS529394B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1249472A GB1400253A (en) 1972-03-17 1972-03-17 Gauging dimensions

Publications (2)

Publication Number Publication Date
JPS4914147A true JPS4914147A (ja) 1974-02-07
JPS529394B2 JPS529394B2 (ja) 1977-03-15

Family

ID=10005641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48031330A Expired JPS529394B2 (ja) 1972-03-17 1973-03-17

Country Status (8)

Country Link
US (1) US3829220A (ja)
JP (1) JPS529394B2 (ja)
BE (1) BE796720A (ja)
DE (1) DE2313439A1 (ja)
FR (1) FR2176772B3 (ja)
GB (1) GB1400253A (ja)
IT (1) IT982906B (ja)
NL (1) NL7303838A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5245352A (en) * 1975-10-07 1977-04-09 Canon Inc Scanning device
JPS5369250A (en) * 1976-12-03 1978-06-20 Nippon Carbide Ind Co Ltd Molding compositions of phenol-modified melamine formaldehyde resin
JPS53112768A (en) * 1977-01-25 1978-10-02 Schumag Gmbh Optical scanner and optical scanning method
JPS5422743A (en) * 1977-07-22 1979-02-20 Hitachi Ltd Laser spot scan patten detector
CN114577128A (zh) * 2022-05-09 2022-06-03 广东电网有限责任公司佛山供电局 一种线缆验收方法和装置

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4043673A (en) * 1975-04-09 1977-08-23 Autech Corporation Reticle calibrated diameter gauge
US4065212A (en) * 1975-06-30 1977-12-27 International Business Machines Corporation Inspection tool
US4037968A (en) * 1975-12-22 1977-07-26 Monsanto Company Method and apparatus for measuring a dimension of an object in a defined space by scanning with a light beam
CA1076829A (en) * 1975-12-22 1980-05-06 Robert I. Barker Optical method and apparatus for determining stress relaxation
US4146327A (en) * 1976-12-27 1979-03-27 Autech Optical triangulation gauging system
JPS53126499U (ja) * 1977-03-09 1978-10-07
EP0013725A1 (en) * 1979-01-02 1980-08-06 Allied Corporation Remote width measurement system
DE2927845C3 (de) * 1979-07-10 1982-01-28 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Einen Taktmaßstab aufweisender Lichtvorhang
US4399861A (en) * 1979-09-11 1983-08-23 Allied Corporation Casting gap control system
CH648138A5 (de) * 1980-05-08 1985-02-28 Zumbach Electronic Ag Verfahren und vorrichtung zum automatischen regeln einer groesse eines einen extruder verlassenden objekts.
CH658523A5 (de) * 1981-06-04 1986-11-14 Zumbach Electronic Ag Verfahren und vorrichtung zur erzeugung eines telezentrischen lichtstrahls und anwendung des verfahrens.
DE3219388C2 (de) * 1982-05-24 1986-05-22 Dipl.-Ing. Bruno Richter GmbH & Co. Elektronische Betriebskontroll-Geräte KG, 8602 Stegaurach Optisch-elektrische Meßeinrichtung zum Messen der Lage und/oder der Abmessung von Gegenständen
DE3229263C2 (de) * 1982-08-05 1986-11-06 Dipl.-Ing. Bruno Richter GmbH & Co. Elektronische Betriebskontroll-Geräte KG, 8602 Stegaurach Optisch-elektrische Meßeinrichtung zum Messen der Lage und/oder der Abmessung von Gegenständen
DE3229264C2 (de) * 1982-08-05 1986-01-02 Dipl.-Ing. Bruno Richter GmbH & Co. Elektronische Betriebskontroll-Geräte KG, 8602 Stegaurach Optisch-elektrische Meßeinrichtung zum Messen der Lage und/oder der Abmessung von Gegenständen
DE3241770A1 (de) * 1982-11-11 1984-05-17 Dipl.-Ing. Bruno Richter GmbH & Co. Elektronische Betriebskontroll-Geräte KG, 8602 Stegaurach Optisch-elektrische messeinrichtung erhoehter messsicherheit zum messen der lage und/oder der abmessung von gegenstaenden
DE3544290A1 (de) * 1985-12-14 1987-06-25 Fraunhofer Ges Forschung Vorrichtung zur bestimmung der position eines wenigstens eine abtastende lichtquelle aufweisenden positionsgebers
DE3607244A1 (de) * 1986-03-05 1987-09-10 Bat Cigarettenfab Gmbh Vorrichtung zur erfassung der laengskanten eines stabfoermigen objekts
US4706360A (en) * 1986-05-13 1987-11-17 Morton Thiokol, Inc. Thread gage
DE3623318A1 (de) * 1986-07-11 1988-01-21 Thebock & Feil Gmbh Physikalis Vorrichtung zum eindimensionalen vermessen eines objektes
US4849643A (en) * 1987-09-18 1989-07-18 Eaton Leonard Technologies Optical probe with overlapping detection fields
DE3903560A1 (de) * 1988-02-09 1989-08-17 Zeiss Carl Fa Mikroskop mit einem geraet zur vermessung mikroskopischer strukturen
US4959552A (en) * 1988-02-09 1990-09-25 Carl-Zeiss-Stiftung Microscope arranged for measuring microscopic structures
US5008555A (en) * 1988-04-08 1991-04-16 Eaton Leonard Technologies, Inc. Optical probe with overlapping detection fields
DE3831401A1 (de) * 1988-09-15 1990-03-29 Kolb Gmbh & Co Hans Verfahren und vorrichtung zur automatisierten beruehrungsfreien oberflaechenkontrolle von zylindrischen teilen
DE19511978C2 (de) * 1995-04-02 2003-10-16 Storz Karl Gmbh & Co Kg Endoskopisches Verfahren zur Messung von Längen bzw. Abständen sowie Vorrichtung zur Durchführung des Verfahrens
US6614540B1 (en) * 2001-06-28 2003-09-02 Advanced Micro Devices, Inc. Method and apparatus for determining feature characteristics using scatterometry
US6746882B1 (en) * 2002-11-21 2004-06-08 Advanced Micro Devices, Inc. Method of correcting non-linearity of metrology tools, and system for performing same
CN106524932A (zh) * 2016-12-29 2017-03-22 合肥工业大学 对称光桥式自稳激光测径系统及其标定方法、测量方法
JP7137345B2 (ja) * 2018-04-20 2022-09-14 株式会社キーエンス 形状測定装置、形状測定方法、形状測定プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器
DE102018212719A1 (de) * 2018-07-31 2020-02-20 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5245352A (en) * 1975-10-07 1977-04-09 Canon Inc Scanning device
JPS5369250A (en) * 1976-12-03 1978-06-20 Nippon Carbide Ind Co Ltd Molding compositions of phenol-modified melamine formaldehyde resin
JPS53112768A (en) * 1977-01-25 1978-10-02 Schumag Gmbh Optical scanner and optical scanning method
JPS5422743A (en) * 1977-07-22 1979-02-20 Hitachi Ltd Laser spot scan patten detector
CN114577128A (zh) * 2022-05-09 2022-06-03 广东电网有限责任公司佛山供电局 一种线缆验收方法和装置

Also Published As

Publication number Publication date
FR2176772B3 (ja) 1976-03-12
JPS529394B2 (ja) 1977-03-15
FR2176772A1 (ja) 1973-11-02
GB1400253A (en) 1975-07-16
BE796720A (fr) 1973-07-02
NL7303838A (ja) 1973-09-19
IT982906B (it) 1974-10-21
US3829220A (en) 1974-08-13
DE2313439A1 (de) 1973-09-20

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