JPS49123689A - - Google Patents

Info

Publication number
JPS49123689A
JPS49123689A JP48036742A JP3674273A JPS49123689A JP S49123689 A JPS49123689 A JP S49123689A JP 48036742 A JP48036742 A JP 48036742A JP 3674273 A JP3674273 A JP 3674273A JP S49123689 A JPS49123689 A JP S49123689A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48036742A
Other versions
JPS5313151B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3674273A priority Critical patent/JPS5313151B2/ja
Priority to US434061A priority patent/US3930155A/en
Publication of JPS49123689A publication Critical patent/JPS49123689A/ja
Publication of JPS5313151B2 publication Critical patent/JPS5313151B2/ja
Expired legal-status Critical Current

Links

JP3674273A 1973-01-19 1973-04-02 Expired JPS5313151B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3674273A JPS5313151B2 (ja) 1973-04-02 1973-04-02
US434061A US3930155A (en) 1973-01-19 1974-01-17 Ion microprobe analyser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3674273A JPS5313151B2 (ja) 1973-04-02 1973-04-02

Publications (2)

Publication Number Publication Date
JPS49123689A true JPS49123689A (ja) 1974-11-26
JPS5313151B2 JPS5313151B2 (ja) 1978-05-08

Family

ID=12478166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3674273A Expired JPS5313151B2 (ja) 1973-01-19 1973-04-02

Country Status (1)

Country Link
JP (1) JPS5313151B2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60101850A (ja) * 1983-11-08 1985-06-05 Jeol Ltd イオンビ−ム装置
JPS60200449A (ja) * 1984-03-26 1985-10-09 Hitachi Ltd イオンビ−ムによるプロセス方法と装置
JPH01109350A (ja) * 1987-10-23 1989-04-26 Seiko Instr & Electron Ltd マスクの欠陥修正装置
JPH01167643A (ja) * 1987-12-23 1989-07-03 Res Dev Corp Of Japan マイクロプローブ表面分析装置
JPH02199761A (ja) * 1989-01-30 1990-08-08 Nippon Telegr & Teleph Corp <Ntt> 二次イオン質量分析装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60101850A (ja) * 1983-11-08 1985-06-05 Jeol Ltd イオンビ−ム装置
JPH0326498B2 (ja) * 1983-11-08 1991-04-11 Nippon Electron Optics Lab
JPS60200449A (ja) * 1984-03-26 1985-10-09 Hitachi Ltd イオンビ−ムによるプロセス方法と装置
JPH01109350A (ja) * 1987-10-23 1989-04-26 Seiko Instr & Electron Ltd マスクの欠陥修正装置
JPH0661001B2 (ja) * 1987-10-23 1994-08-10 セイコー電子工業株式会社 マスクの欠陥修正装置
JPH01167643A (ja) * 1987-12-23 1989-07-03 Res Dev Corp Of Japan マイクロプローブ表面分析装置
JPH02199761A (ja) * 1989-01-30 1990-08-08 Nippon Telegr & Teleph Corp <Ntt> 二次イオン質量分析装置

Also Published As

Publication number Publication date
JPS5313151B2 (ja) 1978-05-08

Similar Documents

Publication Publication Date Title
AR201758A1 (ja)
AU476761B2 (ja)
AU465372B2 (ja)
AR201235Q (ja)
AR201231Q (ja)
AU474593B2 (ja)
AU474511B2 (ja)
AU474838B2 (ja)
AU465453B2 (ja)
AU465434B2 (ja)
AU471343B2 (ja)
AU450229B2 (ja)
AU476714B2 (ja)
AR201229Q (ja)
AU466283B2 (ja)
AU476696B2 (ja)
AU472848B2 (ja)
AR199451A1 (ja)
AU477823B2 (ja)
AU461342B2 (ja)
AU471461B2 (ja)
AR200256A1 (ja)
AU476873B1 (ja)
AR210729A1 (ja)
AU477824B2 (ja)