JPS49122670A - - Google Patents
Info
- Publication number
- JPS49122670A JPS49122670A JP48033191A JP3319173A JPS49122670A JP S49122670 A JPS49122670 A JP S49122670A JP 48033191 A JP48033191 A JP 48033191A JP 3319173 A JP3319173 A JP 3319173A JP S49122670 A JPS49122670 A JP S49122670A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3319173A JPS5317390B2 (ja) | 1973-03-23 | 1973-03-23 | |
US05/451,383 US3966501A (en) | 1973-03-23 | 1974-03-14 | Process of producing semiconductor devices |
FR7409931A FR2222754B1 (ja) | 1973-03-23 | 1974-03-22 | |
NL7403940.A NL161302C (nl) | 1973-03-23 | 1974-03-22 | Werkwijze voor het vervaardigen van een halfgeleiderin- richting. |
DE2414033A DE2414033C3 (de) | 1973-03-23 | 1974-03-22 | Verfahren zur Herstellung von Halbleitervorrichtungen mit selektiv auf einer Oberfläche eines Halbleitersubstrats angeordneten Schichten aus einem Oxid des Substratmaterials |
GB1317974A GB1469436A (en) | 1973-03-23 | 1974-03-25 | Process for producing semiconductor devices |
IT20903/74A IT1007685B (it) | 1973-03-23 | 1974-04-08 | Procedimento per la produzione di dispositivi semiconduttori |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3319173A JPS5317390B2 (ja) | 1973-03-23 | 1973-03-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS49122670A true JPS49122670A (ja) | 1974-11-22 |
JPS5317390B2 JPS5317390B2 (ja) | 1978-06-08 |
Family
ID=12379580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3319173A Expired JPS5317390B2 (ja) | 1973-03-23 | 1973-03-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5317390B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6116530A (ja) * | 1984-07-03 | 1986-01-24 | Matsushita Electronics Corp | 半導体装置の製造方法 |
JPH01259538A (ja) * | 1988-04-11 | 1989-10-17 | Agency Of Ind Science & Technol | 酸化膜の形成方法 |
JPH0370125A (ja) * | 1989-08-10 | 1991-03-26 | Toshiba Corp | 半導体装置の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS472519A (ja) * | 1970-07-10 | 1972-02-07 | ||
JPS509390A (ja) * | 1973-05-22 | 1975-01-30 |
-
1973
- 1973-03-23 JP JP3319173A patent/JPS5317390B2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS472519A (ja) * | 1970-07-10 | 1972-02-07 | ||
JPS509390A (ja) * | 1973-05-22 | 1975-01-30 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6116530A (ja) * | 1984-07-03 | 1986-01-24 | Matsushita Electronics Corp | 半導体装置の製造方法 |
JPH01259538A (ja) * | 1988-04-11 | 1989-10-17 | Agency Of Ind Science & Technol | 酸化膜の形成方法 |
JPH0370125A (ja) * | 1989-08-10 | 1991-03-26 | Toshiba Corp | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5317390B2 (ja) | 1978-06-08 |