JPS49115467A - - Google Patents

Info

Publication number
JPS49115467A
JPS49115467A JP48025452A JP2545273A JPS49115467A JP S49115467 A JPS49115467 A JP S49115467A JP 48025452 A JP48025452 A JP 48025452A JP 2545273 A JP2545273 A JP 2545273A JP S49115467 A JPS49115467 A JP S49115467A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48025452A
Other languages
Japanese (ja)
Other versions
JPS5212055B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48025452A priority Critical patent/JPS5212055B2/ja
Priority to NL7402296A priority patent/NL177057C/xx
Priority to FR7406180A priority patent/FR2220089B1/fr
Priority to DE19742408719 priority patent/DE2408719C3/de
Priority to GB945174A priority patent/GB1417361A/en
Publication of JPS49115467A publication Critical patent/JPS49115467A/ja
Publication of JPS5212055B2 publication Critical patent/JPS5212055B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP48025452A 1973-03-03 1973-03-03 Expired JPS5212055B2 (enrdf_load_stackoverflow)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP48025452A JPS5212055B2 (enrdf_load_stackoverflow) 1973-03-03 1973-03-03
NL7402296A NL177057C (nl) 1973-03-03 1974-02-20 Elektronenkanon van het veldemissie-type.
FR7406180A FR2220089B1 (enrdf_load_stackoverflow) 1973-03-03 1974-02-22
DE19742408719 DE2408719C3 (de) 1973-03-03 1974-02-22 Feldemissionselektronenquelle
GB945174A GB1417361A (en) 1973-03-03 1974-03-01 Electron gun assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48025452A JPS5212055B2 (enrdf_load_stackoverflow) 1973-03-03 1973-03-03

Publications (2)

Publication Number Publication Date
JPS49115467A true JPS49115467A (enrdf_load_stackoverflow) 1974-11-05
JPS5212055B2 JPS5212055B2 (enrdf_load_stackoverflow) 1977-04-04

Family

ID=12166404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48025452A Expired JPS5212055B2 (enrdf_load_stackoverflow) 1973-03-03 1973-03-03

Country Status (4)

Country Link
JP (1) JPS5212055B2 (enrdf_load_stackoverflow)
FR (1) FR2220089B1 (enrdf_load_stackoverflow)
GB (1) GB1417361A (enrdf_load_stackoverflow)
NL (1) NL177057C (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366151A (en) * 1976-11-26 1978-06-13 Hitachi Ltd Electron gun unit of electron microscope and equivalent unit
JPS58141554U (ja) * 1982-03-17 1983-09-24 日本電子株式会社 電子銃

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366151A (en) * 1976-11-26 1978-06-13 Hitachi Ltd Electron gun unit of electron microscope and equivalent unit
JPS58141554U (ja) * 1982-03-17 1983-09-24 日本電子株式会社 電子銃

Also Published As

Publication number Publication date
NL177057B (nl) 1985-02-18
NL7402296A (enrdf_load_stackoverflow) 1974-09-05
FR2220089B1 (enrdf_load_stackoverflow) 1979-03-02
FR2220089A1 (enrdf_load_stackoverflow) 1974-09-27
JPS5212055B2 (enrdf_load_stackoverflow) 1977-04-04
NL177057C (nl) 1985-07-16
GB1417361A (en) 1975-12-10
DE2408719A1 (de) 1974-09-12
DE2408719B2 (de) 1977-06-02

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