FR2220089A1 - - Google Patents

Info

Publication number
FR2220089A1
FR2220089A1 FR7406180A FR7406180A FR2220089A1 FR 2220089 A1 FR2220089 A1 FR 2220089A1 FR 7406180 A FR7406180 A FR 7406180A FR 7406180 A FR7406180 A FR 7406180A FR 2220089 A1 FR2220089 A1 FR 2220089A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7406180A
Other languages
French (fr)
Other versions
FR2220089B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of FR2220089A1 publication Critical patent/FR2220089A1/fr
Application granted granted Critical
Publication of FR2220089B1 publication Critical patent/FR2220089B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7406180A 1973-03-03 1974-02-22 Expired FR2220089B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48025452A JPS5212055B2 (enrdf_load_stackoverflow) 1973-03-03 1973-03-03

Publications (2)

Publication Number Publication Date
FR2220089A1 true FR2220089A1 (enrdf_load_stackoverflow) 1974-09-27
FR2220089B1 FR2220089B1 (enrdf_load_stackoverflow) 1979-03-02

Family

ID=12166404

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7406180A Expired FR2220089B1 (enrdf_load_stackoverflow) 1973-03-03 1974-02-22

Country Status (4)

Country Link
JP (1) JPS5212055B2 (enrdf_load_stackoverflow)
FR (1) FR2220089B1 (enrdf_load_stackoverflow)
GB (1) GB1417361A (enrdf_load_stackoverflow)
NL (1) NL177057C (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366151A (en) * 1976-11-26 1978-06-13 Hitachi Ltd Electron gun unit of electron microscope and equivalent unit
JPS58141554U (ja) * 1982-03-17 1983-09-24 日本電子株式会社 電子銃

Also Published As

Publication number Publication date
GB1417361A (en) 1975-12-10
JPS5212055B2 (enrdf_load_stackoverflow) 1977-04-04
NL177057B (nl) 1985-02-18
DE2408719B2 (de) 1977-06-02
JPS49115467A (enrdf_load_stackoverflow) 1974-11-05
NL177057C (nl) 1985-07-16
NL7402296A (enrdf_load_stackoverflow) 1974-09-05
FR2220089B1 (enrdf_load_stackoverflow) 1979-03-02
DE2408719A1 (de) 1974-09-12

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Legal Events

Date Code Title Description
ST Notification of lapse