JPS49111580A - - Google Patents
Info
- Publication number
- JPS49111580A JPS49111580A JP49013296A JP1329674A JPS49111580A JP S49111580 A JPS49111580 A JP S49111580A JP 49013296 A JP49013296 A JP 49013296A JP 1329674 A JP1329674 A JP 1329674A JP S49111580 A JPS49111580 A JP S49111580A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19732305188 DE2305188A1 (de) | 1973-02-02 | 1973-02-02 | Verfahren zur herstellung von polierten halbleiteroberflaechen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49111580A true JPS49111580A (ja) | 1974-10-24 |
Family
ID=5870787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49013296A Pending JPS49111580A (ja) | 1973-02-02 | 1974-01-31 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS49111580A (ja) |
| DE (1) | DE2305188A1 (ja) |
| FR (1) | FR2216077B1 (ja) |
| GB (1) | GB1449702A (ja) |
| IT (1) | IT1002811B (ja) |
| NL (1) | NL7401454A (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5230159A (en) * | 1975-09-01 | 1977-03-07 | Wacker Chemitronic | Method of making semiconductor surface without blur |
| JPS6287242A (ja) * | 1985-05-29 | 1987-04-21 | Nippon Shokubai Kagaku Kogyo Co Ltd | 安定な金属酸化物系ゾル組成物 |
| JPS62162462A (ja) * | 1986-01-10 | 1987-07-18 | Rohm Co Ltd | ウエハ表面仕上方法 |
| JPH01153262A (ja) * | 1987-12-10 | 1989-06-15 | Mitsubishi Metal Corp | 鏡面研磨方法 |
| JPH0236067A (ja) * | 1988-07-25 | 1990-02-06 | Toshiba Corp | 研磨方法及びその装置 |
| WO2011122415A1 (ja) | 2010-03-29 | 2011-10-06 | 旭硝子株式会社 | 研磨剤、研磨方法および半導体集積回路装置の製造方法 |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5531582A (en) * | 1978-08-15 | 1980-03-05 | Ibm | Free polishing device |
| DE3517665A1 (de) * | 1985-05-15 | 1986-11-20 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zum polieren von siliciumscheiben |
| DE3545383A1 (de) * | 1985-12-20 | 1987-07-02 | Wacker Chemitronic | Verfahren zum eindiffundieren von wasserstoff in halbleiter-, insbesondere siliciumscheiben |
| JP2651144B2 (ja) * | 1987-01-26 | 1997-09-10 | キヤノン株式会社 | 結晶基材の製造方法 |
| US5226930A (en) * | 1988-06-03 | 1993-07-13 | Monsanto Japan, Ltd. | Method for preventing agglomeration of colloidal silica and silicon wafer polishing composition using the same |
| JPH02146732A (ja) * | 1988-07-28 | 1990-06-05 | Fujitsu Ltd | 研摩液及び研摩方法 |
| NL8802028A (nl) * | 1988-08-16 | 1990-03-16 | Philips Nv | Werkwijze voor het vervaardigen van een inrichting. |
| US5084071A (en) * | 1989-03-07 | 1992-01-28 | International Business Machines Corporation | Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor |
| US6533832B2 (en) * | 1998-06-26 | 2003-03-18 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry and method for using same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3385682A (en) * | 1965-04-29 | 1968-05-28 | Sprague Electric Co | Method and reagent for surface polishing |
-
1973
- 1973-02-02 DE DE19732305188 patent/DE2305188A1/de active Pending
-
1974
- 1974-01-31 JP JP49013296A patent/JPS49111580A/ja active Pending
- 1974-01-31 IT IT4805674A patent/IT1002811B/it active
- 1974-02-01 FR FR7403420A patent/FR2216077B1/fr not_active Expired
- 1974-02-01 NL NL7401454A patent/NL7401454A/xx not_active Application Discontinuation
- 1974-02-04 GB GB512274A patent/GB1449702A/en not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5230159A (en) * | 1975-09-01 | 1977-03-07 | Wacker Chemitronic | Method of making semiconductor surface without blur |
| JPS5410824B2 (ja) * | 1975-09-01 | 1979-05-10 | ||
| JPS6287242A (ja) * | 1985-05-29 | 1987-04-21 | Nippon Shokubai Kagaku Kogyo Co Ltd | 安定な金属酸化物系ゾル組成物 |
| JPS62162462A (ja) * | 1986-01-10 | 1987-07-18 | Rohm Co Ltd | ウエハ表面仕上方法 |
| JPH01153262A (ja) * | 1987-12-10 | 1989-06-15 | Mitsubishi Metal Corp | 鏡面研磨方法 |
| JPH0236067A (ja) * | 1988-07-25 | 1990-02-06 | Toshiba Corp | 研磨方法及びその装置 |
| WO2011122415A1 (ja) | 2010-03-29 | 2011-10-06 | 旭硝子株式会社 | 研磨剤、研磨方法および半導体集積回路装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2216077A1 (ja) | 1974-08-30 |
| NL7401454A (ja) | 1974-08-06 |
| FR2216077B1 (ja) | 1976-04-30 |
| DE2305188A1 (de) | 1974-08-08 |
| GB1449702A (en) | 1976-09-15 |
| IT1002811B (it) | 1976-05-20 |