JPS4895293A - - Google Patents

Info

Publication number
JPS4895293A
JPS4895293A JP47026561A JP2656172A JPS4895293A JP S4895293 A JPS4895293 A JP S4895293A JP 47026561 A JP47026561 A JP 47026561A JP 2656172 A JP2656172 A JP 2656172A JP S4895293 A JPS4895293 A JP S4895293A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47026561A
Other versions
JPS5221909B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47026561A priority Critical patent/JPS5221909B2/ja
Priority to US341846A priority patent/US3889115A/en
Publication of JPS4895293A publication Critical patent/JPS4895293A/ja
Publication of JPS5221909B2 publication Critical patent/JPS5221909B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP47026561A 1972-03-17 1972-03-17 Expired JPS5221909B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP47026561A JPS5221909B2 (ja) 1972-03-17 1972-03-17
US341846A US3889115A (en) 1972-03-17 1973-03-16 Ion microanalyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47026561A JPS5221909B2 (ja) 1972-03-17 1972-03-17

Publications (2)

Publication Number Publication Date
JPS4895293A true JPS4895293A (ja) 1973-12-06
JPS5221909B2 JPS5221909B2 (ja) 1977-06-14

Family

ID=12196934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47026561A Expired JPS5221909B2 (ja) 1972-03-17 1972-03-17

Country Status (2)

Country Link
US (1) US3889115A (ja)
JP (1) JPS5221909B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60121654A (ja) * 1983-12-02 1985-06-29 Hitachi Ltd イオンビーム装置

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5243058B2 (ja) * 1974-04-22 1977-10-28
JPS5277574A (en) * 1975-12-24 1977-06-30 Hitachi Ltd Sample visual field selecting device
US4081674A (en) * 1976-01-21 1978-03-28 Hitachi, Ltd. Ion microprobe analyzer
USRE33193E (en) * 1981-09-30 1990-04-03 Hitachi, Ltd. Ion beam processing apparatus and method of correcting mask defects
JPS5856332A (ja) * 1981-09-30 1983-04-04 Hitachi Ltd マスクの欠陥修正方法
DE3335625A1 (de) * 1983-09-30 1985-04-11 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur speicherung der messdaten aus teilbereichen eines sputterkraters, der in einem sekundaerionen-massenspektrometer erzeugt und analysiert wird
JPS6197557A (ja) * 1984-10-19 1986-05-16 Kawasaki Steel Corp 二次イオン質量分析装置
JPS61240553A (ja) * 1985-04-18 1986-10-25 Jeol Ltd イオンビ−ム描画装置
US4874946A (en) * 1985-04-30 1989-10-17 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices
US4754334A (en) * 1987-01-08 1988-06-28 Management Graphics, Inc. Image recorder having automatic alignment method and apparatus
GB8703012D0 (en) * 1987-02-10 1987-03-18 Vg Instr Group Secondary ion mass spectrometer
US4968888A (en) * 1989-07-05 1990-11-06 The United States Of America As Represented By The United States Department Of Energy Pulsed field sample neutralization
US5118941A (en) * 1991-04-23 1992-06-02 The Perkin-Elmer Corporation Apparatus and method for locating target area for electron microanalysis
US5347126A (en) * 1992-07-02 1994-09-13 Arch Development Corporation Time-of-flight direct recoil ion scattering spectrometer
US8110814B2 (en) 2003-10-16 2012-02-07 Alis Corporation Ion sources, systems and methods
US7786452B2 (en) * 2003-10-16 2010-08-31 Alis Corporation Ion sources, systems and methods
US9159527B2 (en) * 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source
US7786451B2 (en) * 2003-10-16 2010-08-31 Alis Corporation Ion sources, systems and methods
US7804068B2 (en) * 2006-11-15 2010-09-28 Alis Corporation Determining dopant information

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034439B1 (ja) * 1969-05-16 1975-11-08
US3644044A (en) * 1970-05-20 1972-02-22 Bell Telephone Labor Inc Method of analyzing a solid surface from photon emissions of sputtered particles

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60121654A (ja) * 1983-12-02 1985-06-29 Hitachi Ltd イオンビーム装置
JPH0588502B2 (ja) * 1983-12-02 1993-12-22 Hitachi Ltd

Also Published As

Publication number Publication date
US3889115A (en) 1975-06-10
JPS5221909B2 (ja) 1977-06-14

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