JPS4885069A - - Google Patents
Info
- Publication number
- JPS4885069A JPS4885069A JP48010704A JP1070473A JPS4885069A JP S4885069 A JPS4885069 A JP S4885069A JP 48010704 A JP48010704 A JP 48010704A JP 1070473 A JP1070473 A JP 1070473A JP S4885069 A JPS4885069 A JP S4885069A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US22167072A | 1972-01-28 | 1972-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4885069A true JPS4885069A (enrdf_load_stackoverflow) | 1973-11-12 |
Family
ID=22828815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48010704A Pending JPS4885069A (enrdf_load_stackoverflow) | 1972-01-28 | 1973-01-27 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS4885069A (enrdf_load_stackoverflow) |
| CA (1) | CA982705A (enrdf_load_stackoverflow) |
| DE (1) | DE2302121A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2169232B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1416043A (enrdf_load_stackoverflow) |
| NL (1) | NL7301164A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54143579U (enrdf_load_stackoverflow) * | 1978-03-27 | 1979-10-05 | ||
| JP2005235767A (ja) * | 2004-02-17 | 2005-09-02 | Fei Co | 選択可能なビーム電流及びエネルギーの広がりを備えた粒子源 |
| US7186975B2 (en) | 2000-10-12 | 2007-03-06 | Hitachi, Ltd. | Scanning charged-particle microscope |
| US8461525B2 (en) | 2008-05-26 | 2013-06-11 | Fei Company | Charged particle source with integrated energy filter |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009016861A1 (de) | 2009-04-08 | 2010-10-21 | Carl Zeiss Nts Gmbh | Teilchenstrahlmikroskop |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL285301A (enrdf_load_stackoverflow) * | 1961-11-15 |
-
1973
- 1973-01-15 GB GB194173A patent/GB1416043A/en not_active Expired
- 1973-01-16 CA CA161,333A patent/CA982705A/en not_active Expired
- 1973-01-17 DE DE19732302121 patent/DE2302121A1/de active Pending
- 1973-01-25 FR FR7302594A patent/FR2169232B1/fr not_active Expired
- 1973-01-26 NL NL7301164A patent/NL7301164A/xx unknown
- 1973-01-27 JP JP48010704A patent/JPS4885069A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54143579U (enrdf_load_stackoverflow) * | 1978-03-27 | 1979-10-05 | ||
| US7186975B2 (en) | 2000-10-12 | 2007-03-06 | Hitachi, Ltd. | Scanning charged-particle microscope |
| JP2005235767A (ja) * | 2004-02-17 | 2005-09-02 | Fei Co | 選択可能なビーム電流及びエネルギーの広がりを備えた粒子源 |
| US8461525B2 (en) | 2008-05-26 | 2013-06-11 | Fei Company | Charged particle source with integrated energy filter |
Also Published As
| Publication number | Publication date |
|---|---|
| CA982705A (en) | 1976-01-27 |
| GB1416043A (en) | 1975-12-03 |
| FR2169232A1 (enrdf_load_stackoverflow) | 1973-09-07 |
| NL7301164A (enrdf_load_stackoverflow) | 1973-07-31 |
| FR2169232B1 (enrdf_load_stackoverflow) | 1978-08-04 |
| DE2302121A1 (de) | 1973-08-09 |