FR2169232B1 - - Google Patents

Info

Publication number
FR2169232B1
FR2169232B1 FR7302594A FR7302594A FR2169232B1 FR 2169232 B1 FR2169232 B1 FR 2169232B1 FR 7302594 A FR7302594 A FR 7302594A FR 7302594 A FR7302594 A FR 7302594A FR 2169232 B1 FR2169232 B1 FR 2169232B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7302594A
Other versions
FR2169232A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Aeronautics and Space Administration NASA
Original Assignee
National Aeronautics and Space Administration NASA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Aeronautics and Space Administration NASA filed Critical National Aeronautics and Space Administration NASA
Publication of FR2169232A1 publication Critical patent/FR2169232A1/fr
Application granted granted Critical
Publication of FR2169232B1 publication Critical patent/FR2169232B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Microscoopes, Condenser (AREA)
FR7302594A 1972-01-28 1973-01-25 Expired FR2169232B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22167072A 1972-01-28 1972-01-28

Publications (2)

Publication Number Publication Date
FR2169232A1 FR2169232A1 (fr) 1973-09-07
FR2169232B1 true FR2169232B1 (fr) 1978-08-04

Family

ID=22828815

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7302594A Expired FR2169232B1 (fr) 1972-01-28 1973-01-25

Country Status (6)

Country Link
JP (1) JPS4885069A (fr)
CA (1) CA982705A (fr)
DE (1) DE2302121A1 (fr)
FR (1) FR2169232B1 (fr)
GB (1) GB1416043A (fr)
NL (1) NL7301164A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54143579U (fr) * 1978-03-27 1979-10-05
JP3987276B2 (ja) 2000-10-12 2007-10-03 株式会社日立製作所 試料像形成方法
NL1025500C2 (nl) * 2004-02-17 2005-08-19 Fei Co Deeltjesbron met selecteerbare bundelstroom en energiespreiding.
EP2128885A1 (fr) 2008-05-26 2009-12-02 FEI Company Source de particule chargée avec un filtre d'énergie intégrée
DE102009016861A1 (de) * 2009-04-08 2010-10-21 Carl Zeiss Nts Gmbh Teilchenstrahlmikroskop

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285301A (fr) * 1961-11-15

Also Published As

Publication number Publication date
NL7301164A (fr) 1973-07-31
GB1416043A (en) 1975-12-03
FR2169232A1 (fr) 1973-09-07
DE2302121A1 (de) 1973-08-09
CA982705A (en) 1976-01-27
JPS4885069A (fr) 1973-11-12

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Legal Events

Date Code Title Description
ST Notification of lapse