GB1416043A - Electron microscope aperture system - Google Patents

Electron microscope aperture system

Info

Publication number
GB1416043A
GB1416043A GB194173A GB194173A GB1416043A GB 1416043 A GB1416043 A GB 1416043A GB 194173 A GB194173 A GB 194173A GB 194173 A GB194173 A GB 194173A GB 1416043 A GB1416043 A GB 1416043A
Authority
GB
United Kingdom
Prior art keywords
aperture
annular
objective
layer
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB194173A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Aeronautics and Space Administration NASA
Original Assignee
National Aeronautics and Space Administration NASA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Aeronautics and Space Administration NASA filed Critical National Aeronautics and Space Administration NASA
Publication of GB1416043A publication Critical patent/GB1416043A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Sampling And Sample Adjustment (AREA)
GB194173A 1972-01-28 1973-01-15 Electron microscope aperture system Expired GB1416043A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22167072A 1972-01-28 1972-01-28

Publications (1)

Publication Number Publication Date
GB1416043A true GB1416043A (en) 1975-12-03

Family

ID=22828815

Family Applications (1)

Application Number Title Priority Date Filing Date
GB194173A Expired GB1416043A (en) 1972-01-28 1973-01-15 Electron microscope aperture system

Country Status (6)

Country Link
JP (1) JPS4885069A (fr)
CA (1) CA982705A (fr)
DE (1) DE2302121A1 (fr)
FR (1) FR2169232B1 (fr)
GB (1) GB1416043A (fr)
NL (1) NL7301164A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54143579U (fr) * 1978-03-27 1979-10-05
JP3987276B2 (ja) 2000-10-12 2007-10-03 株式会社日立製作所 試料像形成方法
NL1025500C2 (nl) * 2004-02-17 2005-08-19 Fei Co Deeltjesbron met selecteerbare bundelstroom en energiespreiding.
EP2128885A1 (fr) 2008-05-26 2009-12-02 FEI Company Source de particule chargée avec un filtre d'énergie intégrée
DE102009016861A1 (de) 2009-04-08 2010-10-21 Carl Zeiss Nts Gmbh Teilchenstrahlmikroskop

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285301A (fr) * 1961-11-15

Also Published As

Publication number Publication date
NL7301164A (fr) 1973-07-31
FR2169232B1 (fr) 1978-08-04
DE2302121A1 (de) 1973-08-09
CA982705A (en) 1976-01-27
FR2169232A1 (fr) 1973-09-07
JPS4885069A (fr) 1973-11-12

Similar Documents

Publication Publication Date Title
Telieps et al. An analytical reflection and emission UHV surface electron microscope
Dunlap et al. Introduction to the scanning electron microscope
US4085330A (en) Focused ion beam mask maker
GB1416043A (en) Electron microscope aperture system
US3996468A (en) Electron microscope aperture system
US3294583A (en) Process of coating a silicon semiconductor with indium using an ion beam
Castaing et al. Analytical microscopy by secondary ion imaging techniques
GB1193159A (en) Improvements in or relating to Corpuscular Beam Apparatus
Grzelakowski et al. A new surface microscope for magnetic imaging
US3847689A (en) Method of forming aperture plate for electron microscope
JP2842083B2 (ja) 試料ホルダー、これを用いた試料加工観察システム、試料観察方法、透過形電子顕微鏡及びイオンビーム装置
JPS6345740A (ja) イオンビ−ム装置
US2347965A (en) Art of electron microscopy
US2448594A (en) High resolution microscopy
JPS60100421A (ja) イオンビ−ム装置
GB1031028A (en) Apparatus for the electron-optical inspection of the surfaces of objects
Griffith et al. Low‐energy electron microscopy (LEEM) and mirror electron microscopy (MEM) of biological specimens: Preliminary results with a novel beam separating system
Heinemann et al. Annular objective apertures improve resolution of electron microscopes
HEINEMANN Method of forming aperture plate for electron microscope[Patent]
GB1103426A (en) Improvements in or relating to corpuscular beam microscopes
HEINEMANN Electron microscope aperture system[Patent]
Heinemann Method of forming aperture plate for electron microscope
GB994451A (en) Corpuscular radiation microscope
JPS5684853A (en) Face structure of member located close to electron beam path
JPH08241691A (ja) 減速集束イオンビーム装置

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee