DE2302121A1 - Elektronenmikroskop - Google Patents
ElektronenmikroskopInfo
- Publication number
- DE2302121A1 DE2302121A1 DE19732302121 DE2302121A DE2302121A1 DE 2302121 A1 DE2302121 A1 DE 2302121A1 DE 19732302121 DE19732302121 DE 19732302121 DE 2302121 A DE2302121 A DE 2302121A DE 2302121 A1 DE2302121 A1 DE 2302121A1
- Authority
- DE
- Germany
- Prior art keywords
- opening
- metallic layer
- lens
- layer
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 17
- 238000011109 contamination Methods 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 239000000356 contaminant Substances 0.000 claims 1
- 238000005286 illumination Methods 0.000 description 12
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000013078 crystal Substances 0.000 description 6
- 230000004075 alteration Effects 0.000 description 5
- 238000001446 dark-field microscopy Methods 0.000 description 4
- 238000000386 microscopy Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000007142 ring opening reaction Methods 0.000 description 2
- 102220536009 NACHT, LRR and PYD domains-containing protein 1_Q87A_mutation Human genes 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000001424 field-emission electron microscopy Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US22167072A | 1972-01-28 | 1972-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2302121A1 true DE2302121A1 (de) | 1973-08-09 |
Family
ID=22828815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732302121 Pending DE2302121A1 (de) | 1972-01-28 | 1973-01-17 | Elektronenmikroskop |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS4885069A (fr) |
| CA (1) | CA982705A (fr) |
| DE (1) | DE2302121A1 (fr) |
| FR (1) | FR2169232B1 (fr) |
| GB (1) | GB1416043A (fr) |
| NL (1) | NL7301164A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009016861A1 (de) * | 2009-04-08 | 2010-10-21 | Carl Zeiss Nts Gmbh | Teilchenstrahlmikroskop |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54143579U (fr) * | 1978-03-27 | 1979-10-05 | ||
| JP3987276B2 (ja) | 2000-10-12 | 2007-10-03 | 株式会社日立製作所 | 試料像形成方法 |
| NL1025500C2 (nl) * | 2004-02-17 | 2005-08-19 | Fei Co | Deeltjesbron met selecteerbare bundelstroom en energiespreiding. |
| EP2128885A1 (fr) | 2008-05-26 | 2009-12-02 | FEI Company | Source de particule chargée avec un filtre d'énergie intégrée |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL285301A (fr) * | 1961-11-15 |
-
1973
- 1973-01-15 GB GB194173A patent/GB1416043A/en not_active Expired
- 1973-01-16 CA CA161,333A patent/CA982705A/en not_active Expired
- 1973-01-17 DE DE19732302121 patent/DE2302121A1/de active Pending
- 1973-01-25 FR FR7302594A patent/FR2169232B1/fr not_active Expired
- 1973-01-26 NL NL7301164A patent/NL7301164A/xx unknown
- 1973-01-27 JP JP1070473A patent/JPS4885069A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009016861A1 (de) * | 2009-04-08 | 2010-10-21 | Carl Zeiss Nts Gmbh | Teilchenstrahlmikroskop |
| US8471203B2 (en) | 2009-04-08 | 2013-06-25 | Carl Zeiss Microscopy Gmbh | Particle-beam microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7301164A (fr) | 1973-07-31 |
| FR2169232B1 (fr) | 1978-08-04 |
| CA982705A (en) | 1976-01-27 |
| FR2169232A1 (fr) | 1973-09-07 |
| GB1416043A (en) | 1975-12-03 |
| JPS4885069A (fr) | 1973-11-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHJ | Non-payment of the annual fee |