JPS4883776A - - Google Patents

Info

Publication number
JPS4883776A
JPS4883776A JP772073A JP772073A JPS4883776A JP S4883776 A JPS4883776 A JP S4883776A JP 772073 A JP772073 A JP 772073A JP 772073 A JP772073 A JP 772073A JP S4883776 A JPS4883776 A JP S4883776A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP772073A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722202055 external-priority patent/DE2202055A1/de
Priority claimed from DE19722221432 external-priority patent/DE2221432A1/de
Application filed filed Critical
Publication of JPS4883776A publication Critical patent/JPS4883776A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP772073A 1972-01-17 1973-01-17 Pending JPS4883776A (en, 2012)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19722202055 DE2202055A1 (de) 1972-01-17 1972-01-17 Anordnung zum herstellen eines rohres aus halbleitermaterial
DE19722221432 DE2221432A1 (de) 1972-05-02 1972-05-02 Verfahren und vorrichtung zum herstellen von mit ausnehmungen versehenen gegenstaenden aus halbleitermaterial

Publications (1)

Publication Number Publication Date
JPS4883776A true JPS4883776A (en, 2012) 1973-11-08

Family

ID=25762580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP772073A Pending JPS4883776A (en, 2012) 1972-01-17 1973-01-17

Country Status (5)

Country Link
JP (1) JPS4883776A (en, 2012)
BE (1) BE794138A (en, 2012)
FR (1) FR2168398A1 (en, 2012)
IT (1) IT978151B (en, 2012)
NL (1) NL7300628A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391463U (en, 2012) * 1976-12-27 1978-07-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391463U (en, 2012) * 1976-12-27 1978-07-26

Also Published As

Publication number Publication date
FR2168398A1 (en) 1973-08-31
FR2168398B3 (en, 2012) 1976-01-16
BE794138A (fr) 1973-07-17
IT978151B (it) 1974-09-20
NL7300628A (en, 2012) 1973-07-19

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