BE794138A - Procede et dispositif de fabrication d'objets en matiere semi-conductrice - Google Patents

Procede et dispositif de fabrication d'objets en matiere semi-conductrice

Info

Publication number
BE794138A
BE794138A BE794138DA BE794138A BE 794138 A BE794138 A BE 794138A BE 794138D A BE794138D A BE 794138DA BE 794138 A BE794138 A BE 794138A
Authority
BE
Belgium
Prior art keywords
semiconductor material
manufacturing objects
objects
manufacturing
semiconductor
Prior art date
Application number
Other languages
English (en)
French (fr)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Priority claimed from DE19722202055 external-priority patent/DE2202055A1/de
Priority claimed from DE19722221432 external-priority patent/DE2221432A1/de
Publication of BE794138A publication Critical patent/BE794138A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
BE794138D 1972-01-17 Procede et dispositif de fabrication d'objets en matiere semi-conductrice BE794138A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19722202055 DE2202055A1 (de) 1972-01-17 1972-01-17 Anordnung zum herstellen eines rohres aus halbleitermaterial
DE19722221432 DE2221432A1 (de) 1972-05-02 1972-05-02 Verfahren und vorrichtung zum herstellen von mit ausnehmungen versehenen gegenstaenden aus halbleitermaterial

Publications (1)

Publication Number Publication Date
BE794138A true BE794138A (fr) 1973-07-17

Family

ID=25762580

Family Applications (1)

Application Number Title Priority Date Filing Date
BE794138D BE794138A (fr) 1972-01-17 Procede et dispositif de fabrication d'objets en matiere semi-conductrice

Country Status (5)

Country Link
JP (1) JPS4883776A (en, 2012)
BE (1) BE794138A (en, 2012)
FR (1) FR2168398A1 (en, 2012)
IT (1) IT978151B (en, 2012)
NL (1) NL7300628A (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391463U (en, 2012) * 1976-12-27 1978-07-26

Also Published As

Publication number Publication date
FR2168398A1 (en) 1973-08-31
FR2168398B3 (en, 2012) 1976-01-16
IT978151B (it) 1974-09-20
JPS4883776A (en, 2012) 1973-11-08
NL7300628A (en, 2012) 1973-07-19

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