IT978151B - Procedimento e dispositivo per fabbricare oggetti di materiale semiconduttore provvisti di ca vita - Google Patents

Procedimento e dispositivo per fabbricare oggetti di materiale semiconduttore provvisti di ca vita

Info

Publication number
IT978151B
IT978151B IT1920473A IT1920473A IT978151B IT 978151 B IT978151 B IT 978151B IT 1920473 A IT1920473 A IT 1920473A IT 1920473 A IT1920473 A IT 1920473A IT 978151 B IT978151 B IT 978151B
Authority
IT
Italy
Prior art keywords
vita
procedure
semiconductive material
objects provided
material objects
Prior art date
Application number
IT1920473A
Other languages
English (en)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722202055 external-priority patent/DE2202055A1/de
Priority claimed from DE19722221432 external-priority patent/DE2221432A1/de
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of IT978151B publication Critical patent/IT978151B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
IT1920473A 1972-01-17 1973-01-15 Procedimento e dispositivo per fabbricare oggetti di materiale semiconduttore provvisti di ca vita IT978151B (it)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19722202055 DE2202055A1 (de) 1972-01-17 1972-01-17 Anordnung zum herstellen eines rohres aus halbleitermaterial
DE19722221432 DE2221432A1 (de) 1972-05-02 1972-05-02 Verfahren und vorrichtung zum herstellen von mit ausnehmungen versehenen gegenstaenden aus halbleitermaterial

Publications (1)

Publication Number Publication Date
IT978151B true IT978151B (it) 1974-09-20

Family

ID=25762580

Family Applications (1)

Application Number Title Priority Date Filing Date
IT1920473A IT978151B (it) 1972-01-17 1973-01-15 Procedimento e dispositivo per fabbricare oggetti di materiale semiconduttore provvisti di ca vita

Country Status (5)

Country Link
JP (1) JPS4883776A (it)
BE (1) BE794138A (it)
FR (1) FR2168398A1 (it)
IT (1) IT978151B (it)
NL (1) NL7300628A (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391463U (it) * 1976-12-27 1978-07-26

Also Published As

Publication number Publication date
NL7300628A (it) 1973-07-19
JPS4883776A (it) 1973-11-08
FR2168398B3 (it) 1976-01-16
FR2168398A1 (en) 1973-08-31
BE794138A (fr) 1973-07-17

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