JPS4878954A - - Google Patents

Info

Publication number
JPS4878954A
JPS4878954A JP48003990A JP399073A JPS4878954A JP S4878954 A JPS4878954 A JP S4878954A JP 48003990 A JP48003990 A JP 48003990A JP 399073 A JP399073 A JP 399073A JP S4878954 A JPS4878954 A JP S4878954A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48003990A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4878954A publication Critical patent/JPS4878954A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0896—Catadioptric systems with variable magnification or multiple imaging planes, including multispectral systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/002—Arrays of reflective systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0856—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors
    • G02B17/086—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors wherein the system is made of a single block of optical material, e.g. solid catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/04—Objectives involving mirrors
JP48003990A 1971-12-31 1972-12-31 Pending JPS4878954A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1924671A CH541140A (de) 1971-12-31 1971-12-31 Beleuchtungsanordnung

Publications (1)

Publication Number Publication Date
JPS4878954A true JPS4878954A (ja) 1973-10-23

Family

ID=4438271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48003990A Pending JPS4878954A (ja) 1971-12-31 1972-12-31

Country Status (8)

Country Link
US (1) US3825322A (ja)
JP (1) JPS4878954A (ja)
CH (1) CH541140A (ja)
DE (1) DE2207748A1 (ja)
FR (1) FR2166202B1 (ja)
GB (1) GB1421991A (ja)
IT (1) IT973171B (ja)
NL (1) NL7217725A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009044143A (ja) * 2007-07-18 2009-02-26 Asml Holding Nv 光波拡散計測用反射屈折光学システム
JP2017072709A (ja) * 2015-10-07 2017-04-13 株式会社トプコン 結像光学部材及び測量機の光学系

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH607021A5 (ja) * 1975-12-30 1978-11-30 Gretag Ag
US4022534A (en) * 1976-03-23 1977-05-10 Kollmorgen Corporation Reflectometer optical system
GB2119112B (en) * 1982-04-27 1985-08-29 Ferranti Plc Optical elements
HU188795B (en) * 1982-05-28 1986-05-28 Koezponti Elelmiszeripari Kutato Intezet,Hu Detecting arrangement for meassuring the intensity of radiation scattering at a given angle from a sample exposed to radiation of given angle of incidence
DE3303140A1 (de) * 1983-01-31 1984-08-02 Bruker Analytische Meßtechnik GmbH, 7512 Rheinstetten Infrarot-spektrometer
DE3421577C2 (de) * 1984-06-09 1986-06-05 Harald Dr.-Ing. 6240 Königstein Krzyminski Gerät zur Reflexionsmessung an farbigen Objekten
JPS61232195A (ja) * 1985-03-29 1986-10-16 サッポロビール株式会社 壜口のキヤツプ検査装置
CH668322A5 (de) * 1985-07-24 1988-12-15 Zumbach Electronic Ag Vorrichtung mit einem telezentrischen, f-theta-korrigierten objektiv fuer kontaktloses messen und verwendung dieser vorrichtung.
US4835380A (en) * 1987-06-11 1989-05-30 U. S. Philips Corporation Scanning device for an optical recording and/or reproducing apparatus
US4865456A (en) * 1987-10-01 1989-09-12 Gretag Aktiengesellschaft Measuring head
NL8803055A (nl) * 1988-12-13 1990-07-02 Philips Nv Optische aftastinrichting, spiegelobjektief geschikt voor toepassing daarin en optisch inschrijf- en/of uitleesapparaat voorzien van deze aftastinrichting.
NL8803048A (nl) * 1988-12-13 1990-07-02 Philips Nv Optische aftastinrichting, spiegelobjektief geschikt voor toepassing daarin en optische inschrijf- en/of uitleesapparaat voorzien van de aftastinrichting.
US5058982A (en) * 1989-06-21 1991-10-22 Orbot Systems Ltd. Illumination system and inspection apparatus including same
IL94368A (en) * 1990-05-11 1993-07-08 Orbot Systems Ltd Optic inspection apparatus and illumination system particularly useful therein
GB9216333D0 (en) * 1992-07-31 1992-09-16 Kodak Ltd Optical means for annular illumination of a spot
JP3382683B2 (ja) * 1993-10-22 2003-03-04 オリンパス光学工業株式会社 共心光学系
GB2357577B (en) * 1998-06-16 2003-08-20 Orbotech Ltd Illuminator for inspecting substantially flat surfaces
IL131284A (en) 1999-08-05 2003-05-29 Orbotech Ltd Illumination for inspecting surfaces of articles
US6476970B1 (en) * 2000-08-10 2002-11-05 Agilent Technologies, Inc. Illumination optics and method
US7324575B2 (en) * 2004-02-17 2008-01-29 Finisar Corporation Lens with reflective surface
TWI254162B (en) * 2005-01-12 2006-05-01 Au Optronics Corp Backlight module, lens for a liquid crystal display and illuminating liquid crystal display
DE102012213194A1 (de) * 2012-07-26 2014-01-30 Osram Gmbh Strahlungsanordnung zum Bereitstellen elektromagnetischer Strahlung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB364004A (en) * 1930-08-25 1931-12-28 Leitz Ernst Gmbh Improvements in or relating to microscopes

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB364004A (en) * 1930-08-25 1931-12-28 Leitz Ernst Gmbh Improvements in or relating to microscopes

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009044143A (ja) * 2007-07-18 2009-02-26 Asml Holding Nv 光波拡散計測用反射屈折光学システム
US8107173B2 (en) 2007-07-18 2012-01-31 Asml Holding N.V. Catadioptric optical system for scatterometry
JP2017072709A (ja) * 2015-10-07 2017-04-13 株式会社トプコン 結像光学部材及び測量機の光学系
CN106990504A (zh) * 2015-10-07 2017-07-28 株式会社拓普康 成像光学构件和测量机的光学系统

Also Published As

Publication number Publication date
US3825322A (en) 1974-07-23
FR2166202A1 (ja) 1973-08-10
CH541140A (de) 1973-08-31
GB1421991A (en) 1976-01-21
FR2166202B1 (ja) 1976-08-27
NL7217725A (ja) 1973-07-03
DE2207748A1 (de) 1973-08-02
IT973171B (it) 1974-06-10

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