JPS4869485A - - Google Patents
Info
- Publication number
- JPS4869485A JPS4869485A JP10487971A JP10487971A JPS4869485A JP S4869485 A JPS4869485 A JP S4869485A JP 10487971 A JP10487971 A JP 10487971A JP 10487971 A JP10487971 A JP 10487971A JP S4869485 A JPS4869485 A JP S4869485A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10487971A JPS4869485A (ja) | 1971-12-22 | 1971-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10487971A JPS4869485A (ja) | 1971-12-22 | 1971-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4869485A true JPS4869485A (ja) | 1973-09-20 |
Family
ID=14392470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10487971A Pending JPS4869485A (ja) | 1971-12-22 | 1971-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4869485A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5221781A (en) * | 1975-08-12 | 1977-02-18 | Nec Corp | Semiconductor unit producing system |
| JPS57133645A (en) * | 1981-02-12 | 1982-08-18 | Fujitsu Ltd | Semiconductor integrated circuit device and manufacture thereof |
| JPS589337A (ja) * | 1982-06-25 | 1983-01-19 | Hitachi Ltd | 半導体装置の製造方法 |
| JPS58162041A (ja) * | 1982-03-19 | 1983-09-26 | Matsushita Electronics Corp | 薄膜形成方法 |
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1971
- 1971-12-22 JP JP10487971A patent/JPS4869485A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5221781A (en) * | 1975-08-12 | 1977-02-18 | Nec Corp | Semiconductor unit producing system |
| JPS57133645A (en) * | 1981-02-12 | 1982-08-18 | Fujitsu Ltd | Semiconductor integrated circuit device and manufacture thereof |
| JPH0217937B2 (ja) * | 1981-02-12 | 1990-04-24 | Fujitsu Ltd | |
| JPS58162041A (ja) * | 1982-03-19 | 1983-09-26 | Matsushita Electronics Corp | 薄膜形成方法 |
| JPS589337A (ja) * | 1982-06-25 | 1983-01-19 | Hitachi Ltd | 半導体装置の製造方法 |