JPS4869485A - - Google Patents

Info

Publication number
JPS4869485A
JPS4869485A JP10487971A JP10487971A JPS4869485A JP S4869485 A JPS4869485 A JP S4869485A JP 10487971 A JP10487971 A JP 10487971A JP 10487971 A JP10487971 A JP 10487971A JP S4869485 A JPS4869485 A JP S4869485A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10487971A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10487971A priority Critical patent/JPS4869485A/ja
Publication of JPS4869485A publication Critical patent/JPS4869485A/ja
Pending legal-status Critical Current

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  • Element Separation (AREA)
JP10487971A 1971-12-22 1971-12-22 Pending JPS4869485A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10487971A JPS4869485A (ja) 1971-12-22 1971-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10487971A JPS4869485A (ja) 1971-12-22 1971-12-22

Publications (1)

Publication Number Publication Date
JPS4869485A true JPS4869485A (ja) 1973-09-20

Family

ID=14392470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10487971A Pending JPS4869485A (ja) 1971-12-22 1971-12-22

Country Status (1)

Country Link
JP (1) JPS4869485A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221781A (en) * 1975-08-12 1977-02-18 Nec Corp Semiconductor unit producing system
JPS57133645A (en) * 1981-02-12 1982-08-18 Fujitsu Ltd Semiconductor integrated circuit device and manufacture thereof
JPS589337A (ja) * 1982-06-25 1983-01-19 Hitachi Ltd 半導体装置の製造方法
JPS58162041A (ja) * 1982-03-19 1983-09-26 Matsushita Electronics Corp 薄膜形成方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221781A (en) * 1975-08-12 1977-02-18 Nec Corp Semiconductor unit producing system
JPS57133645A (en) * 1981-02-12 1982-08-18 Fujitsu Ltd Semiconductor integrated circuit device and manufacture thereof
JPH0217937B2 (ja) * 1981-02-12 1990-04-24 Fujitsu Ltd
JPS58162041A (ja) * 1982-03-19 1983-09-26 Matsushita Electronics Corp 薄膜形成方法
JPS589337A (ja) * 1982-06-25 1983-01-19 Hitachi Ltd 半導体装置の製造方法

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