JPS4855670A - - Google Patents

Info

Publication number
JPS4855670A
JPS4855670A JP47110167A JP11016772A JPS4855670A JP S4855670 A JPS4855670 A JP S4855670A JP 47110167 A JP47110167 A JP 47110167A JP 11016772 A JP11016772 A JP 11016772A JP S4855670 A JPS4855670 A JP S4855670A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47110167A
Other languages
Japanese (ja)
Other versions
JPS5216467B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4855670A publication Critical patent/JPS4855670A/ja
Publication of JPS5216467B2 publication Critical patent/JPS5216467B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP47110167A 1971-11-04 1972-11-02 Expired JPS5216467B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19578471A 1971-11-04 1971-11-04

Publications (2)

Publication Number Publication Date
JPS4855670A true JPS4855670A (enrdf_load_stackoverflow) 1973-08-04
JPS5216467B2 JPS5216467B2 (enrdf_load_stackoverflow) 1977-05-10

Family

ID=22722795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47110167A Expired JPS5216467B2 (enrdf_load_stackoverflow) 1971-11-04 1972-11-02

Country Status (12)

Country Link
US (1) US3756847A (enrdf_load_stackoverflow)
JP (1) JPS5216467B2 (enrdf_load_stackoverflow)
AU (1) AU464727B2 (enrdf_load_stackoverflow)
BE (1) BE790940A (enrdf_load_stackoverflow)
CA (1) CA975628A (enrdf_load_stackoverflow)
CH (1) CH590935A5 (enrdf_load_stackoverflow)
DE (1) DE2252484A1 (enrdf_load_stackoverflow)
FR (1) FR2156413B1 (enrdf_load_stackoverflow)
GB (1) GB1392865A (enrdf_load_stackoverflow)
IT (1) IT975345B (enrdf_load_stackoverflow)
NL (1) NL7214898A (enrdf_load_stackoverflow)
SE (1) SE379059B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5181791A (ja) * 1975-01-13 1976-07-17 Osaka Koon Denki Kk Ionkapureeteinguhoho

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3889019A (en) * 1969-03-13 1975-06-10 United Aircraft Corp Vapor randomization in vacuum deposition of coatings
JPS5137667B2 (enrdf_load_stackoverflow) * 1971-11-13 1976-10-16
US4021277A (en) * 1972-12-07 1977-05-03 Sprague Electric Company Method of forming thin film resistor
US4416912A (en) * 1979-10-13 1983-11-22 The Gillette Company Formation of coatings on cutting edges
US4617192A (en) * 1982-12-21 1986-10-14 At&T Bell Laboratories Process for making optical INP devices
US4472453A (en) * 1983-07-01 1984-09-18 Rca Corporation Process for radiation free electron beam deposition
JPS60251273A (ja) * 1984-05-28 1985-12-11 Mitsubishi Heavy Ind Ltd 真空蒸発装置の蒸発量制御方法
US4842710A (en) * 1987-03-23 1989-06-27 Siemens Aktiengesellschaft Method of making mixed nitride films with at least two metals
US5514229A (en) * 1993-11-24 1996-05-07 Ramot-University Authority For Applied Research And Industrial Development Ltd., Tel Aviv University Method of producing transparent and other electrically conductive materials
US7250196B1 (en) 1999-10-26 2007-07-31 Basic Resources, Inc. System and method for plasma plating
US6503379B1 (en) * 2000-05-22 2003-01-07 Basic Research, Inc. Mobile plating system and method
US6521104B1 (en) * 2000-05-22 2003-02-18 Basic Resources, Inc. Configurable vacuum system and method
US20030180450A1 (en) * 2002-03-22 2003-09-25 Kidd Jerry D. System and method for preventing breaker failure
US20050126497A1 (en) * 2003-09-30 2005-06-16 Kidd Jerry D. Platform assembly and method
US20080057195A1 (en) * 2006-08-31 2008-03-06 United Technologies Corporation Non-line of sight coating technique

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5181791A (ja) * 1975-01-13 1976-07-17 Osaka Koon Denki Kk Ionkapureeteinguhoho

Also Published As

Publication number Publication date
FR2156413A1 (enrdf_load_stackoverflow) 1973-05-25
AU464727B2 (en) 1975-09-04
DE2252484A1 (de) 1973-05-10
BE790940A (fr) 1973-03-01
JPS5216467B2 (enrdf_load_stackoverflow) 1977-05-10
US3756847A (en) 1973-09-04
CH590935A5 (enrdf_load_stackoverflow) 1977-08-31
SE379059B (enrdf_load_stackoverflow) 1975-09-22
IT975345B (it) 1974-07-20
FR2156413B1 (enrdf_load_stackoverflow) 1976-05-21
GB1392865A (en) 1975-05-07
CA975628A (en) 1975-10-07
NL7214898A (enrdf_load_stackoverflow) 1973-05-08
AU4778272A (en) 1974-04-26

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