JPS4851691A - - Google Patents

Info

Publication number
JPS4851691A
JPS4851691A JP47105174A JP10517472A JPS4851691A JP S4851691 A JPS4851691 A JP S4851691A JP 47105174 A JP47105174 A JP 47105174A JP 10517472 A JP10517472 A JP 10517472A JP S4851691 A JPS4851691 A JP S4851691A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47105174A
Other versions
JPS5514376B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4851691A publication Critical patent/JPS4851691A/ja
Publication of JPS5514376B2 publication Critical patent/JPS5514376B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke

Landscapes

  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP10517472A 1971-10-21 1972-10-20 Expired JPS5514376B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19137371A 1971-10-21 1971-10-21

Publications (2)

Publication Number Publication Date
JPS4851691A true JPS4851691A (ja) 1973-07-20
JPS5514376B2 JPS5514376B2 (ja) 1980-04-16

Family

ID=22705225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10517472A Expired JPS5514376B2 (ja) 1971-10-21 1972-10-20

Country Status (5)

Country Link
US (1) US3754830A (ja)
JP (1) JPS5514376B2 (ja)
CA (1) CA977990A (ja)
DE (1) DE2244696C2 (ja)
GB (1) GB1410999A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61102853U (ja) * 1984-12-08 1986-06-30
US6730644B1 (en) * 1999-04-20 2004-05-04 Kanto Kagaku Kabushiki Kaisha Cleaning solution for substrates of electronic materials
JP2015141074A (ja) * 2014-01-28 2015-08-03 九州エレクトロン株式会社 微粒子検出装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4490042A (en) * 1981-06-04 1984-12-25 Wyatt Philip J Method for determining the properties of wine
GB2141224B (en) * 1983-04-29 1986-09-10 English Clays Lovering Pochin Monitoring deflocculated particles in suspension
US4949950A (en) * 1989-02-14 1990-08-21 Xerox Corporation Electrostatic sheet transport
DE3914711C1 (ja) * 1989-05-04 1990-10-31 Deutsche Forschungsanstalt Fuer Luft- Und Raumfahrt Ev, 5300 Bonn, De
DE3933681A1 (de) * 1989-10-09 1991-04-18 Battelle Institut E V Geraet zur messung des anteils an asbeststaub in luft
US5701176A (en) * 1995-07-28 1997-12-23 Precision Detectors, Inc. High temperature light scattering measurement device comprising a rigid extension tube
CN1944048A (zh) * 2005-09-21 2007-04-11 海德堡印刷机械股份公司 用于输送页张的方法和用于执行该方法的装置
KR102652507B1 (ko) * 2015-02-09 2024-03-28 세키스이가가쿠 고교가부시키가이샤 반도체 칩의 제조 방법
WO2017188205A1 (ja) * 2016-04-28 2017-11-02 リンテック株式会社 保護膜形成用フィルム及び保護膜形成用複合シート
WO2018203282A1 (en) * 2017-05-05 2018-11-08 3M Innovative Properties Company Scatterometry system and method of using the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61102853U (ja) * 1984-12-08 1986-06-30
JPH0325171Y2 (ja) * 1984-12-08 1991-05-31
US6730644B1 (en) * 1999-04-20 2004-05-04 Kanto Kagaku Kabushiki Kaisha Cleaning solution for substrates of electronic materials
JP2015141074A (ja) * 2014-01-28 2015-08-03 九州エレクトロン株式会社 微粒子検出装置

Also Published As

Publication number Publication date
CA977990A (en) 1975-11-18
GB1410999A (en) 1975-10-22
DE2244696C2 (de) 1982-06-24
DE2244696A1 (de) 1973-04-26
JPS5514376B2 (ja) 1980-04-16
US3754830A (en) 1973-08-28

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