JPS4845302A - - Google Patents

Info

Publication number
JPS4845302A
JPS4845302A JP8001071A JP8001071A JPS4845302A JP S4845302 A JPS4845302 A JP S4845302A JP 8001071 A JP8001071 A JP 8001071A JP 8001071 A JP8001071 A JP 8001071A JP S4845302 A JPS4845302 A JP S4845302A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8001071A
Other languages
Japanese (ja)
Other versions
JPS5139121B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8001071A priority Critical patent/JPS5139121B2/ja
Priority to US00294797A priority patent/US3843394A/en
Priority to DE2249825A priority patent/DE2249825A1/de
Publication of JPS4845302A publication Critical patent/JPS4845302A/ja
Publication of JPS5139121B2 publication Critical patent/JPS5139121B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP8001071A 1971-10-11 1971-10-11 Expired JPS5139121B2 (enrdf_load_stackoverflow)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP8001071A JPS5139121B2 (enrdf_load_stackoverflow) 1971-10-11 1971-10-11
US00294797A US3843394A (en) 1971-10-11 1972-10-04 Photosensitive member
DE2249825A DE2249825A1 (de) 1971-10-11 1972-10-11 Fotoempfindliches element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8001071A JPS5139121B2 (enrdf_load_stackoverflow) 1971-10-11 1971-10-11

Publications (2)

Publication Number Publication Date
JPS4845302A true JPS4845302A (enrdf_load_stackoverflow) 1973-06-28
JPS5139121B2 JPS5139121B2 (enrdf_load_stackoverflow) 1976-10-26

Family

ID=13706341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8001071A Expired JPS5139121B2 (enrdf_load_stackoverflow) 1971-10-11 1971-10-11

Country Status (1)

Country Link
JP (1) JPS5139121B2 (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4865928A (enrdf_load_stackoverflow) * 1971-12-08 1973-09-10
JPS4865927A (enrdf_load_stackoverflow) * 1971-12-08 1973-09-10
JPS5028327A (enrdf_load_stackoverflow) * 1973-07-12 1975-03-22
JPS51136287A (en) * 1975-05-21 1976-11-25 Nippon Telegr & Teleph Corp <Ntt> Photo mask using non-crystalline carchognide glass thin film
JPS51136286A (en) * 1975-05-21 1976-11-25 Nippon Telegr & Teleph Corp <Ntt> Ion implantation using noncrystalline carchogenide thin film as mask
JPS51136288A (en) * 1975-05-21 1976-11-25 Nippon Telegr & Teleph Corp <Ntt> Photo etching using non-crystalline carchogenide glass thin film
JPS52111381A (en) * 1976-03-15 1977-09-19 Nippon Telegr & Teleph Corp <Ntt> Photo-sensitive material for forming pattern having photo-sensitive ca lcogenide layer and the pattern forming method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4865928A (enrdf_load_stackoverflow) * 1971-12-08 1973-09-10
JPS4865927A (enrdf_load_stackoverflow) * 1971-12-08 1973-09-10
JPS5028327A (enrdf_load_stackoverflow) * 1973-07-12 1975-03-22
JPS51136287A (en) * 1975-05-21 1976-11-25 Nippon Telegr & Teleph Corp <Ntt> Photo mask using non-crystalline carchognide glass thin film
JPS51136286A (en) * 1975-05-21 1976-11-25 Nippon Telegr & Teleph Corp <Ntt> Ion implantation using noncrystalline carchogenide thin film as mask
JPS51136288A (en) * 1975-05-21 1976-11-25 Nippon Telegr & Teleph Corp <Ntt> Photo etching using non-crystalline carchogenide glass thin film
JPS52111381A (en) * 1976-03-15 1977-09-19 Nippon Telegr & Teleph Corp <Ntt> Photo-sensitive material for forming pattern having photo-sensitive ca lcogenide layer and the pattern forming method

Also Published As

Publication number Publication date
JPS5139121B2 (enrdf_load_stackoverflow) 1976-10-26

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