JPS4842352B1 - - Google Patents
Info
- Publication number
- JPS4842352B1 JPS4842352B1 JP5145770A JP5145770A JPS4842352B1 JP S4842352 B1 JPS4842352 B1 JP S4842352B1 JP 5145770 A JP5145770 A JP 5145770A JP 5145770 A JP5145770 A JP 5145770A JP S4842352 B1 JPS4842352 B1 JP S4842352B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE840469A SE335294B (it) | 1969-06-13 | 1969-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4842352B1 true JPS4842352B1 (it) | 1973-12-12 |
Family
ID=20273982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5145770A Pending JPS4842352B1 (it) | 1969-06-13 | 1970-06-13 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS4842352B1 (it) |
| CH (1) | CH537986A (it) |
| DE (1) | DE2029020B2 (it) |
| FR (1) | FR2052571A5 (it) |
| GB (1) | GB1317052A (it) |
| SE (1) | SE335294B (it) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3783821A (en) * | 1971-03-02 | 1974-01-08 | K Willmott | Planetary workholders |
| GB2010676B (en) * | 1977-12-27 | 1982-05-19 | Alza Corp | Diffusional drug delivery device with block copolymer as drug carrier |
| US4276855A (en) * | 1979-05-02 | 1981-07-07 | Optical Coating Laboratory, Inc. | Coating apparatus |
| DE102010032591A1 (de) | 2010-07-23 | 2012-01-26 | Leybold Optics Gmbh | Vorrichtung und Verfahren zur Vakuumbeschichtung |
-
1969
- 1969-06-13 SE SE840469A patent/SE335294B/xx unknown
-
1970
- 1970-06-11 GB GB2834570A patent/GB1317052A/en not_active Expired
- 1970-06-12 DE DE19702029020 patent/DE2029020B2/de active Pending
- 1970-06-13 JP JP5145770A patent/JPS4842352B1/ja active Pending
- 1970-06-15 CH CH901070A patent/CH537986A/de not_active IP Right Cessation
- 1970-06-15 FR FR7021878A patent/FR2052571A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1317052A (en) | 1973-05-16 |
| SE335294B (it) | 1971-05-17 |
| DE2029020B2 (de) | 1973-03-29 |
| DE2029020A1 (de) | 1971-01-07 |
| FR2052571A5 (it) | 1971-04-09 |
| CH537986A (de) | 1973-06-15 |