JPS4830180B1 - - Google Patents

Info

Publication number
JPS4830180B1
JPS4830180B1 JP45008394A JP839470A JPS4830180B1 JP S4830180 B1 JPS4830180 B1 JP S4830180B1 JP 45008394 A JP45008394 A JP 45008394A JP 839470 A JP839470 A JP 839470A JP S4830180 B1 JPS4830180 B1 JP S4830180B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45008394A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4830180B1 publication Critical patent/JPS4830180B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
JP45008394A 1969-02-01 1970-01-31 Pending JPS4830180B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB585569 1969-02-01

Publications (1)

Publication Number Publication Date
JPS4830180B1 true JPS4830180B1 (ja) 1973-09-18

Family

ID=9803896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45008394A Pending JPS4830180B1 (ja) 1969-02-01 1970-01-31

Country Status (5)

Country Link
US (1) US3694652A (ja)
JP (1) JPS4830180B1 (ja)
DE (1) DE2004256C3 (ja)
GB (1) GB1304344A (ja)
NL (1) NL7001404A (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3961190A (en) * 1975-03-06 1976-06-01 International Business Machines Corporation Voltage contrast detector for a scanning electron beam instrument
AU521225B2 (en) * 1977-04-19 1982-03-25 Delalande S.A. Alkylenedioxy phenyl derivatives
KR850001390B1 (ko) * 1980-07-31 1985-09-24 니혼 덴시 가부시끼 가이샤 2차 전자 검출장치
DE3576213D1 (de) * 1984-09-18 1990-04-05 Integrated Circuit Testing Gegenfeld-spektrometer fuer die elektronenstrahl-messtechnik.
US4748324A (en) * 1985-05-31 1988-05-31 Siemens Aktiengesellschaft Electrostatic opposing field spectrometer for electron beam test methods
GB2215907B (en) * 1987-07-14 1992-04-15 Jeol Ltd Apparatus using a charged-particle beam
US4829243A (en) * 1988-02-19 1989-05-09 Microelectronics And Computer Technology Corporation Electron beam testing of electronic components
US4943769A (en) * 1989-03-21 1990-07-24 International Business Machines Corporation Apparatus and method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
GB2229854B (en) * 1989-03-28 1993-10-27 Robinson Vivian N E Backscattered electron detector
JP4176159B2 (ja) * 1997-12-08 2008-11-05 エフ イー アイ カンパニ 改善された２次電子検出のための磁界を用いた環境制御型ｓｅｍ
DE19802848B4 (de) 1998-01-26 2012-02-02 Display Products Group,Inc. Verfahren und Vorrichtung zum Testen eines Substrats
US8633439B2 (en) * 2011-07-01 2014-01-21 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2418228A (en) * 1943-10-08 1947-04-01 Rca Corp Electronic microanalyzer
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope
US3445708A (en) * 1967-02-06 1969-05-20 Gen Electric Electron diffraction unit

Also Published As

Publication number Publication date
US3694652A (en) 1972-09-26
GB1304344A (ja) 1973-01-24
DE2004256A1 (de) 1970-08-06
NL7001404A (ja) 1970-08-04
DE2004256C3 (de) 1973-10-18
DE2004256B2 (de) 1973-03-29

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