JPS4821314B1 - - Google Patents

Info

Publication number
JPS4821314B1
JPS4821314B1 JP42071479A JP7147967A JPS4821314B1 JP S4821314 B1 JPS4821314 B1 JP S4821314B1 JP 42071479 A JP42071479 A JP 42071479A JP 7147967 A JP7147967 A JP 7147967A JP S4821314 B1 JPS4821314 B1 JP S4821314B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP42071479A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4821314B1 publication Critical patent/JPS4821314B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/466—Static spectrometers using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP42071479A 1962-11-28 1967-11-08 Pending JPS4821314B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR916836A FR1352167A (fr) 1962-11-28 1962-11-28 Nouveau dispositif de microanalyse par émission ionique secondaire

Publications (1)

Publication Number Publication Date
JPS4821314B1 true JPS4821314B1 (de) 1973-06-27

Family

ID=8791691

Family Applications (2)

Application Number Title Priority Date Filing Date
JP38063524A Pending JPS5211599B1 (de) 1962-11-28 1963-11-28
JP42071479A Pending JPS4821314B1 (de) 1962-11-28 1967-11-08

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP38063524A Pending JPS5211599B1 (de) 1962-11-28 1963-11-28

Country Status (5)

Country Link
US (1) US3585383A (de)
JP (2) JPS5211599B1 (de)
DE (1) DE1498646B2 (de)
FR (1) FR1352167A (de)
GB (1) GB1078823A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531771U (de) * 1978-08-21 1980-02-29
JPS58116270A (ja) * 1981-12-30 1983-07-11 Nissan Motor Co Ltd 車体シ−ル構造
JPS59110473U (ja) * 1983-01-18 1984-07-25 トヨタ自動車株式会社 鋼板合わせ面の水入り防止構造
JPH0224681B2 (de) * 1983-09-22 1990-05-30 Iseki Agricult Mach

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1439064A (fr) * 1965-02-09 1966-05-20 Centre Nat Rech Scient Perfectionnements aux analyseurs ioniques
US3445650A (en) * 1965-10-11 1969-05-20 Applied Res Lab Double focussing mass spectrometer including a wedge-shaped magnetic sector field
GB1171700A (en) * 1967-10-31 1969-11-26 Atomic Energy Authority Uk Improvements in or relating to Ion Beam Intensity Measuring Apparatus and Methods
US3558879A (en) * 1968-03-12 1971-01-26 Atomic Energy Commission Electrostatic deflector for selectively and adjustably bending a charged particle beam
FR2087652A5 (de) * 1970-05-27 1971-12-31 Onera (Off Nat Aerospatiale)
JPS5015594A (de) * 1973-06-08 1975-02-19
US4296323A (en) * 1980-03-10 1981-10-20 The Perkin-Elmer Corporation Secondary emission mass spectrometer mechanism to be used with other instrumentation
FR2575597B1 (fr) * 1984-12-28 1987-03-20 Onera (Off Nat Aerospatiale) Appareil pour la micro-analyse ionique a tres haute resolution d'un echantillon solide
GB8725459D0 (en) * 1987-10-30 1987-12-02 Nat Research Dev Corpn Generating particle beams
JPH08236067A (ja) * 1994-12-28 1996-09-13 Ebara Corp 磁場型質量分析器
GB0624677D0 (en) * 2006-12-11 2007-01-17 Shimadzu Corp A co-axial time-of-flight mass spectrometer
DE102009044989A1 (de) 2009-09-24 2011-03-31 Funnemann, Dietmar, Dr. Bildgebender Energiefilter für elektrisch geladene Teilchen sowie Spektroskop mit einem solchen
EP3203493B1 (de) * 2016-02-02 2018-10-03 FEI Company Ladungsträger-mikroskop mit astigmatismuskompensation und energieauswahl

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3126477A (en) * 1964-03-24 Multiple dispersion mass spectrometer
US2976413A (en) * 1956-06-25 1961-03-21 Cons Electrodynamics Corp Mass spectrometer
US2947868A (en) * 1959-07-27 1960-08-02 Geophysics Corp Of America Mass spectrometer
US3061720A (en) * 1960-02-29 1962-10-30 Ewald Heinz Spectrograph
US3174034A (en) * 1961-07-03 1965-03-16 Max Planck Gesellschaft Mass spectrometer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531771U (de) * 1978-08-21 1980-02-29
JPS58116270A (ja) * 1981-12-30 1983-07-11 Nissan Motor Co Ltd 車体シ−ル構造
JPS59110473U (ja) * 1983-01-18 1984-07-25 トヨタ自動車株式会社 鋼板合わせ面の水入り防止構造
JPH0224681B2 (de) * 1983-09-22 1990-05-30 Iseki Agricult Mach

Also Published As

Publication number Publication date
US3585383A (en) 1971-06-15
DE1498646A1 (de) 1968-12-12
DE1498646B2 (de) 1971-12-16
GB1078823A (en) 1967-08-09
JPS5211599B1 (de) 1977-03-31
FR1352167A (fr) 1964-02-14

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