JPS48102653A - - Google Patents

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Publication number
JPS48102653A
JPS48102653A JP3518472A JP3518472A JPS48102653A JP S48102653 A JPS48102653 A JP S48102653A JP 3518472 A JP3518472 A JP 3518472A JP 3518472 A JP3518472 A JP 3518472A JP S48102653 A JPS48102653 A JP S48102653A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3518472A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3518472A priority Critical patent/JPS48102653A/ja
Publication of JPS48102653A publication Critical patent/JPS48102653A/ja
Pending legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP3518472A 1972-04-10 1972-04-10 Pending JPS48102653A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3518472A JPS48102653A (zh) 1972-04-10 1972-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3518472A JPS48102653A (zh) 1972-04-10 1972-04-10

Publications (1)

Publication Number Publication Date
JPS48102653A true JPS48102653A (zh) 1973-12-24

Family

ID=12434746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3518472A Pending JPS48102653A (zh) 1972-04-10 1972-04-10

Country Status (1)

Country Link
JP (1) JPS48102653A (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61176839A (ja) * 1985-01-31 1986-08-08 Kanebo Ltd 透明または半透明の板状体の欠点検査装置
JPS61176838A (ja) * 1985-01-31 1986-08-08 Kanebo Ltd 透明または半透明の板状体の欠点検査方法
JPS61181948A (ja) * 1985-02-06 1986-08-14 Kanebo Ltd 透明または半透明の板状体の欠点検査方法
JP2009168507A (ja) * 2008-01-11 2009-07-30 Nsk Ltd 透明基板のエッジ位置検出方法及びエッジ位置検出装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61176839A (ja) * 1985-01-31 1986-08-08 Kanebo Ltd 透明または半透明の板状体の欠点検査装置
JPS61176838A (ja) * 1985-01-31 1986-08-08 Kanebo Ltd 透明または半透明の板状体の欠点検査方法
JPH0511573B2 (zh) * 1985-01-31 1993-02-15 Kanebo Ltd
JPH0511574B2 (zh) * 1985-01-31 1993-02-15 Kanebo Ltd
JPS61181948A (ja) * 1985-02-06 1986-08-14 Kanebo Ltd 透明または半透明の板状体の欠点検査方法
JP2009168507A (ja) * 2008-01-11 2009-07-30 Nsk Ltd 透明基板のエッジ位置検出方法及びエッジ位置検出装置

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