JPS48102582A - - Google Patents
Info
- Publication number
- JPS48102582A JPS48102582A JP3367372A JP3367372A JPS48102582A JP S48102582 A JPS48102582 A JP S48102582A JP 3367372 A JP3367372 A JP 3367372A JP 3367372 A JP3367372 A JP 3367372A JP S48102582 A JPS48102582 A JP S48102582A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3367372A JPS5120266B2 (ja) | 1972-04-03 | 1972-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3367372A JPS5120266B2 (ja) | 1972-04-03 | 1972-04-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS48102582A true JPS48102582A (ja) | 1973-12-22 |
| JPS5120266B2 JPS5120266B2 (ja) | 1976-06-23 |
Family
ID=12392959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3367372A Expired JPS5120266B2 (ja) | 1972-04-03 | 1972-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5120266B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5243385A (en) * | 1975-10-01 | 1977-04-05 | Hitachi Ltd | Process for production of semiconductor integrated circuit |
| JPS6113641A (ja) * | 1984-06-25 | 1986-01-21 | インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン | 半導体基板における分離パタ−ンの形成方法 |
-
1972
- 1972-04-03 JP JP3367372A patent/JPS5120266B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5243385A (en) * | 1975-10-01 | 1977-04-05 | Hitachi Ltd | Process for production of semiconductor integrated circuit |
| JPS6113641A (ja) * | 1984-06-25 | 1986-01-21 | インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン | 半導体基板における分離パタ−ンの形成方法 |
| JPH0586660B2 (ja) * | 1984-06-25 | 1993-12-13 | Ibm |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5120266B2 (ja) | 1976-06-23 |