JPH1184354A - Production of liquid crystal display element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a process for producing a liquid crystal display element capable of uniformly and surely superposing a pair of plastic film substrates on each other. SOLUTION: Respective stages 101, 102 on which a pair of the substrates 20, 30 are respectively placed are respectively bored with vent holes 103, 104 for pressure reduction. At the time of placing a pair of the substrates 20, 30 on the respectively corresponding stages 101, 102, a sheet-like elastic body 105 and a metallic sheet 106 are arranged between the substrate 20 and the stage 101 on which the substrate 20 is placed with respect to the one substrate 20 of a pair of the substrates 20, 30.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a liquid crystal display device in which a pair of substrates using a plastic film are laminated to produce a substrate for a liquid crystal display device.

[0002]

2. Description of the Related Art In recent years, as a display serving as a man-machine interface in a portable device such as a PDA (Personal Digital Assistant), a mobile phone, etc., a liquid crystal display device using a polymer film having a thin, lightweight, unbreakable characteristic as a substrate. Is attracting attention.

That is, a liquid crystal display device using a plastic film as a substrate has a substrate thickness of 0.1 mm or less as compared with a conventional liquid crystal display device using a glass substrate.
It has the characteristic of being thin, 0.3 mm, light and soft, so that it does not break.

FIG. 7 is a schematic plan view showing an example of this type of liquid crystal display device (liquid crystal display device), and FIG. 8 is a sectional view taken along line AA of FIG.

Referring to FIGS. 7 and 8, a stripe-shaped ITO electrode (wiring pattern) 22 formed at a predetermined interval is formed on the surface of a first polymer film substrate 21.
And an alignment film 23 are formed. On the back surface of the first polymer film substrate 21, a polarizing plate 24 and a reflecting plate 25 are sequentially formed. On the surface of the second polymer film substrate 31 are formed stripe-shaped ITO electrodes (wiring patterns) 32 formed at regular intervals and an alignment film 33. A polarizing plate 34 is formed on the back surface of the.

Here, the first polymer film substrate 2
The first polymer film substrate 31 is made of, for example, polycarbonate (PC), polyether sulfone (PE).
S) or a material such as polysulfone (PS) with a thickness of, for example, 0.1 to 0.2 mm.

On the surface of the first polymer film substrate 21, a gap material (spacer) 26 is disposed. On the surface of the second polymer film substrate 31 (on the surface of the alignment film 33), A sealing material 35 is provided.

[0008] Here, the first polymer film substrate 21 and the ITO formed on the substrate 21 are formed.
Electrode 22, alignment film 23, gap material 26, polarizing plate 24,
The reflection plate 25 is generally referred to as a lower substrate 20, and
A second polymer film substrate 31 and this substrate 3
The ITO electrode 32, the alignment film 33, the sealing material 35, and the polarizing plate 34 formed on the substrate 1 are collectively referred to as an upper substrate 30.

In the examples shown in FIGS. 7 and 8, the lower substrate 20 and the upper substrate 30 are connected in such a manner that the wiring pattern of the ITO electrode 22 and the wiring pattern of the ITO electrode 32 are orthogonal to each other. A part of the electrode 22 and a part of the ITO electrode 32 are positioned so as to face each other (to face each other) so as to be exposed, and they are overlapped and pressed together to form a liquid crystal display element substrate. That is, the lower substrate 2
0 and the upper substrate 30 are mutually gap material (spacer) 2
6, and the lower substrate 20 and the upper substrate 30 are exposed in such a manner that a part of the ITO electrode 22 and a part of the ITO electrode 32 are exposed.
The periphery of each of the lower substrate 20 and the upper substrate 30 is sealed (sealed) by a seal material 35 except for the liquid crystal injection part 40, thereby producing a liquid crystal display element substrate.

A process for manufacturing a liquid crystal display device using such a plastic film substrate is performed as follows. That is, first, the transparent electrodes (ITO electrodes) 22 and 32
Are formed on a pair of substrates 20 and 30 on which the alignment films 23 and 33 are arranged in a predetermined direction, and a spacer for keeping the substrate interval at a predetermined value is formed on one of the substrates 20. 26, and a seal material 35 is printed on the other substrate 30. Thereafter, the respective substrates 20, 30 are fixed on the corresponding stages (the respective substrates 20, 30 are fixed on the respective stages having ventilation holes by reducing the pressure through the ventilation holes. , Substrates 20, 3
0 are superimposed while pressing.

Thereafter, the sealing material 26 is cured and bonded by heat treatment or ultraviolet irradiation to form a cell.
(The substrates superimposed while being pressurized as described above are further pressurized by an air bag or the like, and then heated by an oven or the like to cure the sealing material.) The liquid crystal is injected from the injection hole 40 (that is, the liquid crystal material is injected from the injection hole 40 into the gap separated by the gap material 26 between the lower substrate 20 and the upper substrate 30), and then the injection hole 40 is sealed. A liquid crystal display element can be obtained by sealing with a stopper.

In this case, the sealing material 35 is mainly made of a thermosetting epoxy resin, and is printed by coating with a dispenser or screen printing. The height of the printed seal material 35 is about 20 μm to 50 μm. However, when the substrates 20 and 30 are overlapped by pressing each other, they are crushed to a value close to the diameter of the spacer 26. In addition, a spherical spacer having a diameter of 5 to 10 μm made of silicon oxide or resin is often used as the spacer 26.

In the liquid crystal display device thus manufactured,
Striped ITO electrode 22 and striped ITO
The intersection with the electrode 32 (the intersection of the wiring pattern) can function as one dot on the liquid crystal display screen. That is, by applying a predetermined drive signal to each of the exposed portions of the ITO electrode 22 and the ITO electrode 32,
By changing the alignment state of the liquid crystal at the intersection of the TO electrode 22 and the ITO electrode 32, predetermined characters and figures can be displayed on this screen when viewed from the upper substrate 30 side.

In other words, in the configuration examples shown in FIGS. 7 and 8, the portion of the ITO electrode 22 exposed on the lower substrate 20 and the portion of the ITO electrode 32 exposed on the upper substrate 30 are different from each other. Function as an external lead-out wiring electrode (lower electrode lead-out part) 42 and an external lead-out wiring electrode (upper electrode lead-out part) 43, respectively. Normally, drive signals from the drive circuit device are applied to these parts, respectively. By giving, display can be performed.

In the configuration examples shown in FIGS. 7 and 8, wiring electrodes (electrode extraction portions) 42 and 43 for external extraction are provided on the lower substrate 20 and the upper substrate 30, respectively.
Although both-side electrode extraction type is used, both of the external extraction wiring electrodes (electrode extraction portions) 42 and 43 are
A configuration provided on only one of the lower substrate 20 and the upper substrate 30 may be employed (that is, a so-called one-side electrode extraction type may be employed).

FIG. 9 is a schematic plan view showing an example of a liquid crystal display element (liquid crystal display device) of a one-sided electrode taking-out type, and FIG. 10 is a sectional view taken along line BB in FIG. In the case of a one-sided electrode extraction type as shown in FIG. 9, for example, the wiring pattern of the striped ITO electrode 22 on the lower substrate 20 is changed to the striped ITO electrode on the upper substrate 30 immediately before the sealing material 35, for example. The ITO electrode 2 on the lower substrate 20 is bent at a right angle so as to be parallel to the wiring pattern of the electrode 32.
2 through the upper and lower conductive portions (through holes) 29 formed in the sealing material 35.
0 (see FIG. 10) and exposed on the upper substrate 30 together with the wiring pattern of the ITO electrode 32, and can be configured as an external lead-out wiring electrode (electrode extraction portion) 42. That is, on the upper substrate 30, the external lead-out wiring electrodes (electrode take-out portions) 42, 4
3 can be provided.

[0017]

[0007] Regardless of the type of taking out both electrodes as shown in Figs. 7 and 8, or the type of taking out one electrode as shown in Figs.
Conventionally, the lower substrate 20 and the upper substrate 30 are positioned so as to face each other, and they are overlapped and pressure-bonded by a method as shown in FIG. That is, as shown in FIG. 11A, the lower substrate 20 and the upper substrate 30 are respectively placed on a stage (for example, a metal stage) 10.
1 and 102 (the lower substrate 20 and the upper substrate 30 are respectively fixed to the stages 101 and 102 through ventilation holes 103 and 104 formed in the stages 101 and 102, respectively).
Then, as shown in FIG. 11B, the stages 101 and 102 are overlapped with each other and pressure-bonded (thermo-compression bonding).

By the way, as a plastic film substrate, generally, a gas barrier layer and a hard coat layer are formed on at least one surface with a base film of polycarbonate, polyether sulfone, polyarylate, polyethylene terephthalate, etc., and indium oxide is formed. A transparent conductive film such as that formed on one surface is used. It is known that such a film substrate is deformed (curled) due to the stress of the formed film because it is thin. The amount of curl varies depending on the material properties and thickness of the formed film, temperature, humidity, and the like, but curling of the film substrate is inevitable at present. Further, when a hole is provided in the film substrate, the curl becomes particularly large around the hole.

As described above, when the film substrates are used as the substrates 20 and 30, the film substrates are soft and curled.
The fixing of 0 and 30 tends to be insufficient, and when the substrate 20 and the substrate 30 are overlapped, a positional shift (a positional shift between the opposed electrode patterns 22 and 32 of the liquid crystal display element or the like) may occur. .

Further, when a glass substrate is used as the substrate, even when the smoothness of the stages 101 and 102 is somewhat poor, the substrate is hard, so that the load at the time of superposition is dispersed and supported over almost the entire surface of the substrate. When a film substrate is used as the substrate, even if there is fine unevenness or undulation of the stage of about several tens of μm, the film is not excessively crushed. Since the substrate is flattened along the surface shape of the stages 101 and 102, the load applied during the superimposition becomes non-uniform in the plane, and the degree of crushing of the sealing material 35 becomes non-uniform in the plane. In some cases, a problem such as excessive crushing of the sealing material 35 depending on the location may occur. FIG. 12 shows this state. In the example of FIG.
Since the parallelism between the members 02 is not ensured, the sealing material 35a at one end is excessively crushed as compared with the sealing material 35b at the other end at the time of overlapping. As described above, conventionally, the smoothness of the surfaces of the stages 101 and 102 and the stages 101 and 102 to which the respective substrates are fixed are described.
There were strict requirements for the parallelism between each other.

Furthermore, since the in-plane unevenness of the load at the time of superposition due to the unevenness and undulation of the stages 101 and 102 is absorbed by the deformation of the film substrate, there is also a problem that the substrate is damaged such as scratches and dents. Was.

As described above, when a film substrate is used for the substrates 20 and 30, the pair of substrates 20 and 30 are accurately stacked so that the positions of the electrode patterns 22 and 32 facing each other of the liquid crystal display element do not shift. Can be matched.

That is, even in the case of a curled film substrate, the stages 101, 10
2 and can be overlapped so that the substrates 20 and 30 do not shift from each other.

In order to solve such a problem, for example, as shown in FIG.
Between the film substrate 20 and the film substrates 20 and 30
It is conceivable that interposed portions 05 and 115 can absorb the in-plane variation of the load at the time of superposition. Here, as the elastic bodies 105 and 115, an elastic material such as a rubber sheet, paper, or a nonwoven fabric can be used.

However, such an elastic body 105,
Even if the film substrate 115 is interposed,
The film substrates 20 and 30 are easily fixed, and the film substrates 20 and 30 are likely to be charged, and the adhesion and friction of dust due to static electricity are large, causing problems such as scratching the film substrates 20 and 30.

According to the present invention, in the step of superimposing a pair of plastic film substrates, the plastic film substrate can be securely fixed on the stage, and the superposition of the plastic film substrate and the sealing material during the superposition can be prevented. It is an object of the present invention to provide a method for manufacturing a liquid crystal display element in which a pair of plastic film substrates can be effectively and surely overlapped by effectively preventing the occurrence of the problem.

[0027]

In order to achieve the above object, the invention according to claim 1 is directed to a method of manufacturing a liquid crystal display element in which a pair of substrates using a plastic film are laminated to produce a liquid crystal display element substrate. In the method, each stage on which each of the pair of substrates is mounted is provided with a ventilation hole for reduced-pressure suction, and when fixing each of the pair of substrates on the corresponding stage, a pair of substrates is used. For at least one of the substrates, between the substrate and a stage on which the substrate is mounted, a sheet-like elastic body having an air hole, and a metal plate having an air hole, Is fixed on the stage via the elastic body and the metal plate by suction under reduced pressure through the air holes provided in the stage, the elastic body and the metal plate, and then fixed on each stage. Each group And it is characterized in that are opposed to each other, and pressed together overlapped, made as a substrate for a liquid crystal display device.

According to a second aspect of the present invention, there is provided a method of manufacturing a liquid crystal display element in which a pair of substrates using a plastic film are laminated to produce a substrate for a liquid crystal display element, wherein each of the pair of substrates is mounted. Each stage is provided with a ventilation hole for reduced pressure suction, and when fixing each of the pair of substrates on the corresponding stage, at least one of the pair of substrates is provided with the substrate. A sheet-like elastic body made of a porous material having a porosity of 30% or more and a metal plate having air holes are arranged between the substrate and a stage on which the substrate is mounted. ,
By vacuum suction through the air hole provided in the stage, the elastic body of the porous material, and the air hole provided in the metal plate, it is fixed on the stage through the elastic body and the metal plate, Thereafter, the respective substrates fixed on the respective stages are opposed to each other, overlapped and pressed, and manufactured as a liquid crystal display element substrate.

According to a third aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the first or second aspect.
The sheet-like elastic body is subjected to an antistatic treatment.

According to a fourth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the first or second aspect.
It is characterized in that the metal plate and the stage are electrically kept at the same electric potential.

According to a fifth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the first or second aspect.
When a hole is provided in a predetermined position of the substrate, the substrate is placed on the metal plate so that the hole of the substrate is not positioned at the position of the ventilation hole of the metal plate. .

According to a sixth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the first or second aspect.
The stage and the ventilation hole drilled in the metal plate,
The pitch is provided at equal intervals of 10 mm or less, and the air holes formed in the metal plate have a diameter of 1 mm or less.

According to a seventh aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the first or second aspect, wherein
When each of the pair of substrates is fixed on the corresponding stage, and the respective substrates on the stage are overlapped, the position of the ventilation hole on one stage side and the position of the ventilation hole on the other stage side are different. It is characterized by being shifted from each other.

The invention according to claim 8 is a method for manufacturing a liquid crystal display device according to claim 1 or 2,
The thickness of the metal plate is in a range of 50 μm to 200 μm.

[0035]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a view showing a first configuration example of a device for manufacturing a liquid crystal display element according to the present invention.

Referring to FIG. 1, a pair of substrates 20, 30 is provided.
Are mounted on stages (for example, metal stages) 101 and 102 on which pressure reduction vent holes 10 are placed.
3, 104 are respectively formed. Further, in the example of FIG. 1, when each of the pair of substrates 20 and 30 is mounted on the corresponding stage 101 and 102, respectively,
For one of the substrates 0 and 30, the substrate 2
0 and the stage 101 on which the substrate 20 is placed,
A sheet-like elastic body 105 and a metal plate 106 are arranged.

Here, each of the substrates 20 and 30 has, for example, the same configuration as described above. That is, as a substrate for a liquid crystal display element, when a substrate of a two-sided electrode extraction type as shown in FIGS. 7 and 8 or a one-sided electrode extraction type as shown in FIGS. As described with reference to FIG.
As the first polymer film substrate 21, and
A substrate provided with an ITO electrode 22, an alignment film 23, a gap material 26, a polarizing plate 24, and a reflecting plate 25 formed on the substrate 21 is used. As the substrate 30, a second polymer film substrate 31, A substrate having an ITO electrode 32, an alignment film 33, a sealing material 35, and a polarizing plate 34 formed on the substrate 31 can be used.

The sheet-like elastic body 105 can be made of a resilient material such as a rubber sheet, paper, or a nonwoven fabric. The sheet-like elastic body 105 has a ventilation hole 107 for suction under reduced pressure. What is provided is used, and a metal plate 106 provided with a ventilation hole 108 for reduced pressure suction is also used. And the substrate 20
Between the elastic body 105 and the metal plate 10
6, the ventilation holes 103 of the stage 101, the ventilation holes 107 of the elastic body 105, and the ventilation holes 10 of the metal plate 106
8 are aligned with each other.

As described above, in FIG. 1, with respect to the substrate 20, the stage 101, the elastic body 105, the metal plate 1
06 is fixed on the stage 101 through the elastic body 105 and the metal plate 106 by suction under reduced pressure through the ventilation holes 103, 107 and 108 provided in
The substrate 30 is placed directly on the stage 102, and is suctioned under reduced pressure through a ventilation hole 104 provided in the stage 102, so that the substrate 30 is moved to the stage 102.
Fix directly on top. Thus, each stage 101, 1
After the substrates 20 and 30 are fixed on the
The substrates 20 and 30 fixed on the substrates 01 and 102 are opposed to each other, overlapped at a predetermined interval, and compression-bonded (thermo-compression-bonded) to produce a liquid crystal display element substrate.

FIG. 2 is a view showing a second configuration example of the apparatus for manufacturing a liquid crystal display element according to the present invention. In the second configuration example, when each of the pair of substrates 20, 30 is placed on the corresponding stage 101, 102, the other substrate 30 of the pair of substrates 20, 30 is A sheet-like elastic body 115 and a metal plate 116 are arranged between the stage 102 on which the substrate 30 is mounted.

Here, a sheet-like elastic body 115 having a vent hole 117 for vacuum suction is used, and a metal plate 116 is also provided in the metal plate 116.
8 is used. When the elastic body 115 and the metal plate 116 are arranged between the substrate 30 and the stage 102,
4. The positions of the ventilation holes 117 of the elastic body 115 and the ventilation holes 118 of the metal plate 116 are aligned with each other.

As described above, in FIG. 2, with respect to the substrate 30, the stage 102, the elastic body 115, the metal plate 1
16 is fixed on the stage 102 via the elastic body 115 and the metal plate 116 by suction under reduced pressure through the ventilation holes 104, 117, 118 provided in the
The substrate 20 is placed directly on the stage 101, and is suctioned under reduced pressure through a ventilation hole 103 provided in the stage 101, whereby the substrate 20 is moved to the stage 101.
Fix directly on top. Thus, each stage 101, 1
After the substrates 20 and 30 are fixed on the
The substrates 20 and 30 fixed on the substrates 01 and 102 are opposed to each other, overlapped at a predetermined interval, and compression-bonded (thermo-compression-bonded) to produce a liquid crystal display element substrate.

FIG. 3 is a view showing a third configuration example of the apparatus for manufacturing a liquid crystal display element according to the present invention. In the third configuration example, when each of the pair of substrates 20 and 30 is mounted on the corresponding stage 101 or 102, one of the substrates 20 and 30 A sheet-like elastic body 105 and a metal plate 106 are arranged between the substrate 20 and the stage 101 on which the substrate 20 is mounted.
Regarding 0, a sheet-like elastic body 115 and a metal plate 116 are arranged between the substrate 30 and the stage 102 on which the substrate 30 is mounted.

Here, the sheet-like elastic members 105 and 115 are used.
An elastic material such as a rubber sheet, paper, or a non-woven fabric can be used as the material, and a sheet-like elastic body 105 having a ventilation hole 107 for suction under reduced pressure is used. As the metal plate 106, a metal plate provided with a vent hole 108 for suction under reduced pressure is used. The elastic body 10 is provided between the substrate 20 and the stage 101.
5, when placing the metal plate 106, the ventilation hole 103 of the stage 101, the ventilation hole 107 of the elastic body 105, the metal plate 10
The positions of the ventilation holes 108 are aligned with each other.

The sheet-like elastic member 115 is also provided with a reduced-pressure suction vent hole 117, and the metal plate 116 is also provided with a reduced-pressure suction vent hole 11.
8 is used. When the elastic body 115 and the metal plate 116 are arranged between the substrate 30 and the stage 102,
4. The positions of the ventilation holes 117 of the elastic body 115 and the ventilation holes 118 of the metal plate 116 are aligned with each other.

As described above, in FIG. 1, with respect to the substrate 20, the stage 101, the elastic body 105, the metal plate 1
06 is fixed on the stage 101 through the elastic body 105 and the metal plate 106 by suction under reduced pressure through the ventilation holes 103, 107 and 108 provided in
Regarding the substrate 30, the stage 102, the elastic body 115, the ventilation holes 104 formed in the metal plate 116,
It is fixed on the stage 102 through the elastic body 115 and the metal plate 116 by suction under reduced pressure through 117 and 118. After the substrates 20 and 30 are fixed on the stages 101 and 102 in this manner, the stages 101 and
The substrates 20 and 30 fixed on the substrate 102 are opposed to each other, and are stacked at a predetermined interval and crimped (thermocompression).
Then, it can be manufactured as a substrate for a liquid crystal display element.

In the manufacturing method shown in FIG. 1, FIG. 2 or FIG. 3, the stages 101 and 102 on which the pair of substrates 20 and 30 are respectively mounted are provided with the ventilation holes 103 and 1 for decompression.
04 are respectively formed, and a pair of substrates 20 and 30 are provided.
Are fixed on the corresponding stages 101 and 102, at least one of the pair of substrates 20 and 30 is provided with a ventilation hole between the substrate and the stage on which the substrate is mounted. A sheet-like elastic body having
A metal plate having an air hole is disposed, and the substrate is suctioned under reduced pressure through an air hole provided in the stage, the elastic body, and the metal plate, so that the substrate is placed on the stage through the elastic body and the metal plate. The substrates 20 and 30 are curled plastic film substrates because the substrates 20 and 30 are fixed, and the substrates fixed on the stages are then opposed to each other, overlapped and pressed together to produce a substrate for a liquid crystal display element. Can be fixed on the stage without fail.Furthermore, the in-plane unevenness of the load at the time of superposition due to minute unevenness and undulation of the stage can be absorbed by the sheet-like elastic body. Is applied uniformly in the plane, and for example, the degree of crushing of the sealing material 35 can be uniformed in the plane.

FIG. 4 shows this state. Even when the parallelism between the stages 101 and 102 is not ensured, the sealing material can be fixed on the stage via an elastic body or a metal plate. Can be uniformed.
In addition, the in-plane unevenness of the load due to the deformation of the film substrate can be absorbed, the damage to the plastic film substrate can be reduced, and the pair of substrates can be evenly overlapped without displacement. Further, even when a sheet-like elastic body is interposed, the metal plate is disposed immediately below the plastic film substrate, so that adhesion of dust due to electrification of the substrate and damage to the substrate due to friction can be reduced.

As described above, when the film substrates are used as the substrates 20 and 30, the pair of substrates 20 and 30 are accurately stacked so that the positions of the electrode patterns 22 and 32 facing each other of the liquid crystal display element do not shift. Can be matched.

That is, even in the case of a curled film substrate, the stages 101, 10
2 and can be overlapped so that the substrates 20 and 30 do not shift from each other.

In each of the configuration examples shown in FIGS. 1, 2, and 3,
For the sheet-like elastic members 105 and 115, a resilient material such as a rubber sheet, paper, or a non-woven fabric can be used. Instead of this, a porous material having a porosity of 30% or more is also used. You can also.

By using a porous material having a porosity of 30% or more, preferably 50% or more for the sheet-like elastic bodies 105 and 115, it is not necessary to provide ventilation holes in the elastic bodies 105 and 115. That is, it suffices to prepare a porous sheet of a predetermined size, and the porous sheet can have the same function as the case where the air holes are provided. As described above, when a porous sheet having a high porosity is used as the elastic bodies 105 and 115, the elastic bodies 105 and 115 do not need to be provided with ventilation holes, and the substrates 20 and 30 can be securely fixed to the stages 101 and 102. Can be performed.

In each of the configuration examples shown in FIGS. 1, 2 and 3, the sheet-like elastic bodies 105 and 115 may be subjected to an antistatic treatment. By using the sheet-like elastic bodies 105 and 115 to which antistatic treatment is applied, it is possible to prevent the film substrates 20 and 30 from being charged and to release the static electricity, thereby preventing dust from adhering. It is possible to further suppress the defect rate during processing.

In each of the configuration examples shown in FIGS. 1, 2 and 3, the metal plates 106 and / or 116 having ventilation holes are provided.
And the two stages 101 and 102 can be electrically at the same potential. By maintaining the metal plate having the ventilation holes and the stage at the same electrical potential, damage to the substrates 20 and 30 due to a spark discharge due to a potential difference between the substrates 20 and 30 at the time of superposition, and failure due to movement of the spacer 26 are prevented. Can be eliminated.

When a substrate for a liquid crystal display element is manufactured, it is often performed to divide the liquid crystal cell into a liquid crystal cell having a predetermined size, and at the same time, to separate a portion of the counter substrate facing a lead electrode for driving liquid crystal. In this case, when the substrate is a glass substrate, generally, a pair of substrates are superimposed and then a shallow cut line is inserted and cut along the line. On the other hand, in the case of a film substrate, a hole is provided in advance at a position corresponding to the extraction electrode portion when the substrates are overlaid on the substrate facing the substrate having the extraction electrode for driving the liquid crystal. This is because, since the film substrate is thin and soft, it is difficult to separate only one of the substrates so that the extraction electrode portion comes out after being overlapped like a glass substrate.

As described above, in each of the configuration examples shown in FIGS. 1, 2 and 3, when the substrates 20 and 30 are provided with holes at predetermined positions (for example, an extraction electrode for driving a liquid crystal). In the case where holes are provided in a position opposed to the electrode portion of the substrate facing the substrate having the holes, the holes of the substrates 20 and 30 are provided with the ventilation holes 10 of the metal plates 106 and 116.
Substrate 2 so as not to be positioned at positions 8 and 118
It is necessary to attach 0, 30 to the metal plates 108, 109.

FIG. 5 is a view showing this state. A film substrate having holes 50 provided in advance at predetermined positions, for example, 20
When the substrate 20 is fixed on the stage 101, the ventilation hole 108 of the metal plate 106 is not positioned at a position corresponding to the hole 20.
01 can be securely fixed.

In each of the configuration examples shown in FIGS. 1, 2 and 3, the metal plates 106 and 116 have a thickness of 50 μm to 200 μm. The thickness of the metal plate having the ventilation holes is 50 μm to 200 μm, preferably about 100 μm.
When a load is applied at the time of superposition, the metal plate gently bends, uniformizing the load distribution in the substrate surface, and the fine unevenness of the stage due to deformation of the sheet-like elastic body. Can absorb deflection. Thereby, the film substrates 20 and 30 can be superposed uniformly without any displacement. However, metal plate 1
As 06 and 116, a metal plate having a hardness that does not cause permanent deformation due to the load at the time of superposition is desirable. The metal plates 106 and 116 are desirably made of a material having good surface smoothness. For example, a stainless steel plate or an aluminum plate can be used. By using a thin metal plate having a good surface property, the surface smoothness of a member directly below the substrate can be easily improved.

In each of the configuration examples shown in FIGS. 1, 2 and 3, the air holes 10 formed in the stages 101 and 102, the elastic bodies 105 and 115, and the metal plates 106 and 116 are formed.
3, 104, 107, 108, 117 and 118 are provided at equal intervals with a pitch P of, for example, 10 mm or less. The diameter of the ventilation holes 108, 118 formed in the metal plates 106, 116 is, for example, 1 mm or less.

The stages 101 and 102, the elastic body 105,
115 and ventilation holes 103, 104, 107, 108, 117, 118 formed in the metal plates 106, 116.
The substrates 20 and 30 are securely placed on the stage 10 by being provided at equal intervals at a pitch P of 10 mm or less and by making the size of the ventilation holes of the metal plates 106 and 116 1 mm or less.
1, 102 and the curl of the substrates 20, 30 can be minimized, the displacement can be prevented extremely effectively, and uniform superposition can be performed.

In each of the configuration examples shown in FIGS. 1, 2 and 3, a pair of substrates 20 and 30 are connected to respective stages 101 and 1 respectively.
02 and fixed on the stage 101, the stage 101
Of the side ventilation holes 103, 107, 108 and the stage 1
The stages 101 and 102 are preferably overlapped (the substrates 20 and 30 are overlapped) such that the positions of the vent holes 104, 117 and 118 on the 02 side are shifted from each other.

FIG. 6 is a view showing this state. A pair of film substrates 20 and 30 are mounted on respective stages 101 and 102.
And the substrates 20, 3 on the stages 101, 102
When the zeros are overlapped, the positions of the vent holes 103, 107, and 108 on one stage 101 side and the positions of the vent holes 104, 117, and 118 on the other stage 102 side are shifted from each other. Each ventilation hole 103, 10
When the vacuum suction is performed through 7, 108, 104, 117 and 118, the unevenness of the pitch of the curls of the substrates 20 and 30 can be shifted from each other, and it is possible to reduce the occurrence of a positional shift at the time of superposition.

[0063]

Example 1 In Example 1, a substrate for a liquid crystal display element was manufactured according to the configuration example of FIG. Specifically, the film substrates 20 and 30 have a thickness of 1 based on a polycarbonate film.
One having a size of 30 μm was prepared. Further, the sheet-like elastic body 1
05, size (area) 350mm × 350mm
Then, a commercially available silicon rubber sheet having a thickness of 500 μm was used, and holes having a diameter of 2 mm were opened in the sheet-like elastic body 105 at an equal interval at a pitch of 10 mm using a punch.
A vent 107 was formed. As the metal plate 106, a stainless steel plate having a thickness of 100 μm was used, and a ventilation hole 108 having a diameter of 1 mm was etched on the metal plate 106 at the same position and at the same pitch as the sheet-like elastic body 105. Provided.

On one fixed stage 101, an elastic body 105 and a metal plate 106 are sequentially arranged, and the metal plate 106 and the stage 101 are fixed by aluminum tape at the end of the metal plate which does not hinder the superposition. And were electrically kept at the same potential. Next, one film substrate 20 on which a silk ball AW-II (diameter: 7.4 μm) manufactured by Catalyst Chemicals Co., Ltd. was sprayed as a spacer by a wet spraying device was fixed to a fixed stage 101 on which an elastic body 105 and a metal plate 106 were arranged. It was fixed on the fixed stage 101 by placing it on top and reducing the pressure through the ventilation holes 103, 107, and 108.

On the other hand, for the other film substrate 30 on which the sealing material 35 is printed by the screen printing method,
This is placed directly on the metal fixed stage 102,
The pressure is reduced through the ventilation holes 104 formed in the fixed stage 102, and the other film substrate 30 is
Fixed directly on top.

Thereafter, the fixed stages 101 and 102 are set so that the substrates 20 and 30 face each other, and the alignment marks provided on the respective substrates 20 and 30 are confirmed with a CCD camera and a CRT monitor. After the positioning, the substrates 20 and 30 were overlapped while applying a load to the fixed stages 101 and 102.

As a result of such superposition, almost no displacement between the film substrates 20 and 30 before and after superposition was observed. In addition, the sealing material 35 in the substrate surface was also crushed uniformly.

Example 2 In Example 2, the film substrate 20 on which the spacers were arranged was used.
A film substrate provided with holes in advance was used. When the film substrate 20 is fixed to the fixed stage 101, the position of the ventilation hole 108 of the metal plate 106 is
The holes in the film substrate 20 were not positioned.
Except for this, the substrates 20, 3 are completely the same as in the first embodiment.
0 was fixed and superposition was performed.

As a result, there was no problem in fixing the film substrate 20 provided with the holes, and no displacement between the film substrates 20 and 30 was observed.

COMPARATIVE EXAMPLE In the comparative example, the same apparatus and the same fixed stage as those in the first embodiment were used.
And the fixed stage 1 directly without using the metal plate 106.
01 and fixed. In this case, a positional shift occurred between the film substrates 20 and 30 before and after the application of the overlapping load. The magnitude of this displacement is 50 to 100 at the maximum.
μm. Further, the sealing material 35 may be partially over-crushed in the planes of the film substrates 20 and 30,
There was poor adhesion that could be seen due to a 0 curl. In fact,
When a liquid crystal display element was manufactured using this substrate and a voltage was applied, abnormal lighting such as lack of display and deformation was observed in a part of the pixel.

[0071]

As described above, according to the first aspect of the present invention, each stage on which each of the pair of substrates is mounted is provided with a reduced-pressure suction vent. When fixing each of the pair of substrates on the corresponding stage, for at least one of the pair of substrates, between the substrate and the stage on which the substrate is mounted,
A sheet-like elastic body having ventilation holes and a metal plate having ventilation holes are arranged, and the substrate is suctioned under reduced pressure through the ventilation holes provided in the stage, the elastic body, and the metal plate, whereby the elasticity is improved. Fixed on the stage through the body and metal plate,
After that, the substrates fixed on each stage are opposed to each other, overlapped and pressed together, and manufactured as a substrate for a liquid crystal display element. Can be fixed on top,
Furthermore, the in-plane unevenness of the load at the time of superposition due to fine irregularities and undulations of the stage can be absorbed by the sheet-like elastic body, and the manner of applying the load at the time of superposition becomes uniform in the plane, for example, The degree of crushing of the sealing material 35 can be made uniform within the plane. Further, even when a sheet-like elastic body is interposed, the metal plate is disposed immediately below the plastic film substrate, so that adhesion of dust due to electrification of the substrate and damage to the substrate due to friction can be reduced.

According to the second aspect of the present invention, by using a porous sheet having a porosity of 30% or more, preferably 50% or more for the sheet-like elastic body, the elastic body has a vent hole. The substrate can be securely fixed to the stage without providing the substrate.

According to the third aspect of the present invention, by using a sheet-like elastic body which has been subjected to an antistatic treatment, the film substrate is prevented from being charged and has a function of releasing static electricity. Thus, the adhesion of dust can be suppressed, and the defect rate during processing can be reduced.

According to the fourth aspect of the present invention, the metal plate having the ventilation holes and the stage are electrically maintained at the same electric potential, so that the electric potential difference between the substrates at the time of superposition causes the discharge of the substrate by the spark discharge. Damage and defects due to spacer movement can be eliminated.

According to the fifth aspect of the present invention, when a film substrate provided with a hole at a predetermined position is fixed on a stage, a ventilation hole of a metal plate is provided at a position corresponding to the hole. Since the positioning is not performed, the substrate provided with the holes can be reliably fixed on the stage.

According to the sixth aspect of the present invention, the stage for fixing the film substrate, the sheet-like elastic body, and the ventilation holes of the metal plate are provided at equal intervals at a pitch of 10 mm or less, and By setting the size of the vent hole of 1 mm or less, the substrate can be securely fixed to the stage, the curl of the substrate can be minimized, the displacement can be prevented extremely effectively, and uniform overlapping can be performed. Can be.

According to the seventh aspect of the present invention, when a pair of film substrates is fixed to each stage and the respective substrates on the stage are superimposed, the position of the vent hole on one stage side and the position of the other side are different. By shifting the positions of the vent holes on the stage side from each other, the unevenness of the curl pitch of the substrates can be shifted when suction is performed under reduced pressure through each vent hole, and the position at the time of overlapping It is possible to make the displacement hard to occur.

Further, according to the invention of claim 8, by selecting a metal plate having a ventilation hole having a thickness of 50 μm to 200 μm, preferably about 100 μm,
When a load is applied at the time of superposition, the metal plate bends gently, the load distribution in the substrate surface is made uniform, and fine irregularities and deflection of the stage can be absorbed by deformation of the sheet-like elastic body. Accordingly, the film substrates can be uniformly overlapped without any displacement.

[Brief description of the drawings]

FIG. 1 is a diagram showing a first configuration example of an apparatus for manufacturing a liquid crystal display element according to the present invention.

FIG. 2 is a diagram showing a second configuration example of the apparatus for manufacturing a liquid crystal display element according to the present invention.

FIG. 3 is a view showing a third configuration example of the apparatus for manufacturing a liquid crystal display element according to the present invention.

FIG. 4 is a view showing a state of manufacturing a substrate according to the present invention.

FIG. 5 is a view showing a state in which a film substrate provided with holes in advance is fixed on a stage.

FIG. 6 is a diagram showing the position of a vent on one stage and the position of a vent on the other stage.

FIG. 7 is a schematic plan view illustrating an example of a liquid crystal display device (liquid crystal display device).

FIG. 8 is a sectional view taken along line AA of FIG. 7;

FIG. 9 is a schematic plan view showing another example of the liquid crystal display device (liquid crystal display device).

FIG. 10 is a sectional view taken along line BB of FIG. 9;

FIG. 11 is a diagram illustrating an example of a conventional method for manufacturing a liquid crystal display element.

FIG. 12 is a view for explaining non-uniformity of collapse of a sealing material according to a conventional method of manufacturing a liquid crystal display element.

FIG. 13 is a view showing a configuration in which an elastic body is directly interposed between a fixed stage and a film substrate.

[Explanation of symbols]

Reference Signs List 20 lower substrate 30 upper substrate 21 first polymer film substrate 31 second polymer film substrate 22, 32 ITO electrode 23, 33 alignment film 24, 34 polarizing plate 25 reflector 26 sealing material 35 gap material 42 wiring for external drawing electrode
(Lower electrode extraction part) 43 Wiring electrode for external extraction
(Upper electrode extraction section) 101, 102 Stage 105, 115 Elastic body 106, 116 Metal plate 103, 107, 108 Vent 104, 117, 118 Vent

Claims (8)

[Claims] In a method for manufacturing a liquid crystal display element in which a pair of substrates using a plastic film are laminated to produce a substrate for a liquid crystal display element, each stage on which each of the pair of substrates is mounted has a reduced pressure suction. Ventilation holes are provided, and when each of the pair of substrates is fixed on the corresponding stage, at least one of the pair of substrates is placed with the substrate and the substrate. Between the stage, a sheet-like elastic body having ventilation holes,
A metal plate having an air hole is disposed, and the substrate is suctioned under reduced pressure through an air hole provided in the stage, the elastic body, and the metal plate, so that the substrate is placed on the stage through the elastic body and the metal plate. A method of manufacturing a liquid crystal display element, comprising fixing the substrates, and then fixing the substrates fixed on the respective stages to each other, superimposing and pressing each other, and manufacturing the substrates as liquid crystal display element substrates. 2. A method for manufacturing a liquid crystal display element in which a pair of substrates using a plastic film are stacked to produce a substrate for a liquid crystal display element, wherein each stage on which each of the pair of substrates is mounted has a reduced pressure suction. Ventilation holes are provided, and when each of the pair of substrates is fixed on the corresponding stage, at least one of the pair of substrates is placed with the substrate and the substrate. A sheet-like elastic body made of a porous material having a porosity of 30% or more and a metal plate having ventilation holes are arranged between the stage and a metal plate having ventilation holes. It is fixed on the stage through the elastic body and the metal plate by suction under reduced pressure through the pores, the elastic body of the porous material, and the ventilation hole provided in the metal plate. fixed A method for manufacturing a liquid crystal display element, wherein each substrate is opposed to each other, overlapped and pressed, and manufactured as a substrate for a liquid crystal display element. 3. The method for manufacturing a liquid crystal display device according to claim 1, wherein the sheet-like elastic body includes:
A method for producing a liquid crystal display element, which has been subjected to an antistatic treatment. 4. The method for manufacturing a liquid crystal display device according to claim 1, wherein the metal plate and the stage are electrically maintained at the same potential. . 5. The method for manufacturing a liquid crystal display device according to claim 1, wherein when a hole is provided in a predetermined position of the substrate, the position of the ventilation hole of the metal plate is set to the position of the air hole. A method for manufacturing a liquid crystal display element, comprising mounting a substrate on a metal plate such that holes in the substrate are not positioned. 6. The method for manufacturing a liquid crystal display device according to claim 1, wherein the air holes formed in the stage and the metal plate are provided at equal pitches with a pitch of 10 mm or less, The method of manufacturing a liquid crystal display element, wherein the diameter of the air hole formed in the metal plate is 1 mm or less. 7. The method for manufacturing a liquid crystal display element according to claim 1, wherein each of the pair of substrates is fixed on a corresponding stage, and when each substrate on the stage is overlapped, A position of the vent hole on the stage side and a position of the vent hole on the other stage side are shifted from each other. 8. The method for manufacturing a liquid crystal display device according to claim 1, wherein said metal plate has a thickness of 50 μm.
A method for manufacturing a liquid crystal display device, wherein the thickness is in the range of m to 200 μm.