JPH1176904A - Rotary type substrate treating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rotary type substrate treating device which is excellent in the maintenance characteristic of a juncture between the suction path and air suction pipeline in the revolving shaft of a motor. SOLUTION: A substrate holding part is mounted at the front end of the revolving shaft 2 extending in a perpendicular direction. The suction port of the substrate holding part and a suction path 3 penetrating the revolving shaft 2 are communicated. A connecting member 14 is mounted at the bottom end 2a of the revolving shaft 2. The suction path 3 of the revolving shaft 2 is connected via a communicating space 22 in the connecting member 14 to the air suction pipeline 25. A magnetic fluid seal 17 is held at the seal holding member 15 of the connecting member 14. This magnetic fluid seal 17 is inserted to the circumference of the revolving shaft 2 to hermetically seal the communicating space 22 on the outlet side of the suction path 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary substrate processing apparatus for performing a predetermined processing on a substrate while rotating the substrate while sucking and holding the substrate.

[0002]

2. Description of the Related Art A rotary substrate processing apparatus is used to apply a coating liquid such as a photoresist liquid to a substrate such as a semiconductor wafer, a glass substrate for a liquid crystal display, a glass substrate for a photomask, and a glass substrate for an optical disk. I have.

FIG. 3 is a schematic sectional view showing an example of a conventional rotary type substrate processing apparatus. 3, the rotary substrate processing apparatus includes a substrate holding unit 4 that holds a substrate W in a horizontal posture. The substrate holding unit 4 is attached to the tip of the rotating shaft 2 of the motor 1 and is driven to rotate around a vertical axis.

Around the substrate W held by the substrate holding section 4, a cup 6 for preventing the processing liquid from scattering is arranged.

[0005] The motor 1 is fixed to a base member 8 by a motor holding member 7 so that the rotating shaft 2 is oriented vertically. The motor holding member 7 includes a holding flange 7 a for holding the upper surface of the motor 1 and a fixing member 7 b for fixing the holding flange 7 a to the base member 8.

[0006] The substrate holding section 4 comprises a vacuum chuck for sucking and holding the back surface of the substrate W. A suction port 5 is formed at the center of the substrate holding unit 4, and the suction port 5 is connected to the motor 1.
Is connected to a suction path 3 formed in the rotary shaft 2. The suction passage 3 of the rotating shaft 2 is connected to an intake pipe 33 via a connecting member 30.
It is connected to the. Further, the intake pipe 33 is connected to a vacuum suction facility in the factory.

The connecting member 30 is an annular communication space 3 for connecting the end of the suction passage 3 of the rotary shaft 2 to the end of the intake pipe 33.
The contact-type seal member 31 composed of an oil seal is disposed on both upper and lower sides of the communication space 32. The sealing member 31 keeps the communication space 32 of the connecting member 30 airtight.

By sucking air through the suction port 5, the suction passage 3 of the rotating shaft 2 and the suction pipe 33, the back surface of the substrate W is suction-held on the upper surface of the substrate holding unit 4.

[0009]

However, in the above-mentioned conventional rotary type substrate processing apparatus, the contact type sealing member 31 is used.
Is used to maintain the airtightness of the communication space 32 of the connecting member 30. The rotating shaft 2 of the motor 1 performs high speed rotation operation several hundred to several thousand times per minute. For this reason, in the contact-type seal member 31, the portion in contact with the rotating shaft 2 rotating at a high speed is greatly worn.

When the airtightness of the seal member 31 decreases due to wear, the holding force of the substrate W by the substrate holding portion 4 decreases. In particular, in recent years, the substrate W has become larger and heavier. For this reason, a decrease in the holding power of the substrate W tends to cause an accident of detachment of the substrate W from the substrate holding unit 4. A large-sized substrate is expensive, and when an accident of detaching the substrate W occurs, the damage is increased. For this reason, it is necessary to periodically exchange the seal member 31 to maintain the airtightness, and the maintenance work is complicated.

In the contact-type seal member 31, particles are easily generated from the contact portion with the rotating shaft 2. The generated particles may float in the atmosphere, adhere to the surface of the substrate W, and contaminate the substrate W. For this reason,
As shown in FIG. 3, it is necessary to provide the exhaust device 10 on the base member 8 and remove the floating particles by suctioning from the exhaust port 10 a, which disadvantageously complicates the structure of the rotary substrate processing apparatus. there were.

An object of the present invention is to provide a rotary substrate processing apparatus which is excellent in maintainability of a connection portion between a suction path and a suction pipe in a rotary shaft of a motor.

[0013]

Means for Solving the Problems and Effects of the Invention A rotary substrate processing apparatus according to a first aspect of the present invention has a motor provided with a rotary shaft having a suction path vertically disposed and penetrating from an upper end to a lower end. A suction port attached to the upper end of the rotating shaft, having a suction port communicating with the suction path, and having a substrate holding portion for sucking and holding the substrate; and a suction port disposed below the lower end portion of the rotating shaft. An intake pipe that guides air to the outside from the lower end of the passage, a connecting member having a communication space in which an intake port of the intake pipe is connected and a lower end of the rotating shaft is loosely fitted, and a communication space of the connecting member is formed And a magnetic fluid seal provided in a gap between the inner peripheral surface and the outer peripheral surface at the lower end of the rotating shaft.

In the rotary substrate processing apparatus according to the first aspect of the present invention, the suction path of the rotating shaft rotating at high speed and the suction pipe are connected by a connecting member, and the connection between the suction path and the suction port of the suction pipe is established. Hermeticity is maintained by the magnetic fluid seal. The magnetic fluid seal is a non-contact type seal member, and there is no portion worn by contact with the rotating shaft. Therefore, it is not necessary to periodically replace the seal member, and the maintainability of the rotary substrate processing apparatus is improved. In addition, the magnetic fluid seal does not generate dust due to contact with the rotating shaft. As a result, the substrate is prevented from being contaminated by dust generated from the magnetic fluid seal.

Further, by arranging the connecting member at the lower end of the rotating shaft, the configuration around the rotating shaft from the upper end surface of the motor to the substrate holding portion is simplified.

A rotary substrate processing apparatus according to a second aspect of the present invention
In the configuration of the rotary substrate processing apparatus according to the first invention,
The motor further includes a flat base member that partitions the atmosphere up and down, and the motor is fixed to the base member such that the lower end of the rotating shaft is located in the atmosphere below the base member.

In this case, the atmosphere in the rotary substrate processing apparatus is vertically divided by the base member, and the substrate holding portion is disposed in the atmosphere above the base member, and the atmosphere is located below the base member. Is provided with a connecting member and a magnetic fluid seal. Therefore, it is possible to prevent the solvent floating around the substrate holding portion from acting on the magnetic fluid of the magnetic fluid seal and deteriorating the magnetic fluid seal.

According to a third aspect of the present invention, there is provided a rotary substrate processing apparatus.
In the configuration of the rotary substrate processing apparatus according to the first or second invention, the connecting member has an annular concave portion surrounding the lower end of the rotary shaft and holding a magnetic fluid seal, and is provided on the lower end surface of the motor. It includes a seal holding member to be attached, and a connecting member connected to a lower end of the seal holding member and having a space for communicating the suction port of the intake pipe with the suction path of the rotating shaft.

In this case, the seal holding member holding the magnetic fluid seal is attached to the lower end surface of the motor, and after the state of attachment of the magnetic fluid seal is adjusted, the connection member is attached to the seal holding member to thereby attract the rotating shaft of the motor. The road and the intake port of the intake pipe are communicated. This makes it possible to easily adjust the mounting position of the magnetic fluid seal.

[0020]

1 is a schematic sectional view of a rotary substrate processing apparatus according to an embodiment of the present invention, and FIG. 2 is a partially enlarged sectional view of the rotary substrate processing apparatus of FIG.

1 and 2, the rotary substrate processing apparatus includes a substrate holding section 4 for holding a substrate W in a horizontal position. The substrate holding unit 4 is attached to the tip of the rotating shaft 2 of the motor 1 and is driven to rotate around a vertical axis. Around the substrate W held by the substrate holding unit 4, a cup 6 for preventing the treatment liquid from scattering is arranged.

The motor 1 is fixed to a base member 8 by a motor holding member 7. The motor holding member 7 includes a holding flange 7 a for holding the upper surface of the motor 1 and a motor 1.
And a cylindrical fixing member 7b for surrounding the outer periphery of the main body and fixing the holding flange 7a to the base member 8. The base member 8 is formed in a flat plate shape that vertically separates the atmosphere in the rotary substrate processing apparatus. The main body of the motor 1 is isolated from the atmosphere above the base member 8 by the base member 8 and the motor holding member 7.

The substrate holding section 4 comprises a vacuum chuck for sucking and holding the back surface of the substrate W. This substrate holding unit 4
The vacuum suction path from the suction port 5 of the substrate holding unit 4, the suction path 3 penetrating the rotary shaft 2 of the motor 1, and the suction pipe 25
And is connected to a vacuum suction facility (not shown) installed in the factory. Further, the suction passage 3 of the rotating shaft 2 and the intake pipe 25 are connected via the connecting member 14.

As shown in FIG. 2, the connecting member 14 includes a seal holding member 15 connected to the lower end surface of the motor 1 and a connecting member 21 connected to the seal holding member 15.

The seal holding member 15 has a cylindrical recess 15.
The magnetic fluid seal 17 into which the lower end portion 2a of the rotating shaft 2 of the motor 1 is inserted is held at a, and is fixed to the lower end surface of the motor 1 by screws 16. The magnetic fluid seal 17 includes a plurality of annular magnetic pole pieces 18 having an inner diameter slightly larger than the outer diameter of the lower end 2 a of the rotating shaft 2, and a plurality of annular permanent magnets 19 inserted between the magnetic pole pieces 18. , Lower end 2 of rotating shaft 2
a magnetic fluid 2 injected into the gap between the surface of
0. The magnetic fluid 20 is composed of a colloidal solution in which ferromagnetic solid fine particles are dispersed at a high density in a liquid.

In the magnetic fluid seal 17, a permanent magnet 19 forms a magnetic field between the pole piece 18 and the rotating shaft 2 made of a magnetic material. The magnetic fluid holds the magnetic fluid 20 in the gap between the pole piece 18 and the rotating shaft 2. Therefore, even when the rotating shaft 2 rotates at a high speed, the magnetic fluid 20 stops in the gap between the pole piece 18 and the rotating shaft 2, and seals the gap between the rotating shaft 2 and the pole piece 18.

The connecting member 21 has a space that forms a communication space 22 for receiving the lower end 2 a of the rotating shaft 2.
4 secures it to the seal holding member 15. Further, an O-ring 23 is mounted on a joint surface between the seal holding member 15 and the connection member 21. Thereby, the airtightness between the communication space 22 and the outside is maintained. Further, an intake pipe 25 is connected to the communication space 22 in the connection member 21. With such a structure, the suction passage 3 of the rotating shaft 2 of the motor 1 and the suction port of the suction pipe 25 are air-tightly communicated via the communication space 22.

In the rotary substrate processing apparatus having the above structure, when the substrate W is placed on the substrate holder 4, the suction port 5 of the substrate holder 4, the suction path 3 of the rotating shaft 2, the connecting member 14
Then, the air is suctioned toward the vacuum suction power facility through the communication space 22 and the suction pipe line 25. As a result, the back surface of the substrate W is suctioned and held by the substrate holding unit 4 in vacuum. At this time, the magnetic fluid seal 17 of the connecting member 14 prevents the outside air from entering the communication space 22 along the lower end 2a of the rotating shaft 2 and lowering the degree of vacuum.

As described above, in the rotary substrate processing apparatus of the present invention, the suction path 3 in the rotary shaft 2 and the intake pipe 25 are connected via the connecting member 14 at the lower end surface of the motor 1. . For this reason, the suction passage 3 in the rotating shaft 2 is formed to penetrate the rotating shaft 2 in a straight line, thereby facilitating the processing of the suction passage 3.

Further, the rotating shaft 2 is provided by the magnetic fluid seal 17.
The airtightness of the communication space 22 connecting the suction passage 3 and the intake pipe 25 is maintained. The magnetic fluid seal 17 has no portion that is worn by contact with the rotating shaft 2. For this reason,
The airtightness does not deteriorate due to wear, and maintenance work such as replacement of the magnetic fluid seal 17 becomes unnecessary.

The magnetic fluid seal 17 does not generate dust. For this reason, contamination of the substrate W held by the substrate holding unit 4 with the dust generated from the magnetic fluid seal 17 is prevented. Therefore, it is not necessary to provide the exhaust device 10 as shown in FIG. 3 on the base member 8 in order to remove dust from the magnetic fluid seal.

Further, the connecting member 14 includes a seal holding member 15 and a connecting member 21. For this reason,
First, the seal holding member 15 is attached to the lower end surface of the motor 1, and the gap between the magnetic pole piece 18 of the magnetic fluid seal 17 and the lower end 2 a of the rotating shaft 2 of the motor 1 is adjusted to be uniform.
Thereafter, the magnetic fluid 20 is injected into the gap. Thereafter, the connection member 21 can be fixed. For this reason,
Adjustment work between the magnetic fluid seal 17 and the rotating shaft 2 of the motor 1 is facilitated, and assembly work is simplified.

Further, the connecting member 14 is arranged below the base member 8. The motor 1 is isolated from the atmosphere on the base member 8 by the motor holding member 7. For this reason, the solvent leaking to the vicinity of the cup 6 is
7 is prevented from being adversely affected.

FIG. 2 shows the structure of the magnetic fluid seal in principle, and the shapes and numbers of the magnetic pole pieces 18, the permanent magnets 19 and the like are appropriately selected according to airtight conditions and the like. When the rotating shaft 2 is not made of a magnetic material, a hollow shaft member made of a magnetic material may be attached to the rotating shaft 2 and a magnetic fluid seal may be attached around the hollow shaft member.

The present invention also relates to a rotary coating device, a rotary cleaning device, and a rotary coating device having a substrate holding section 4 for sucking and holding a substrate W.
The present invention can be applied to a rotary substrate processing apparatus such as a rotary developing apparatus.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of a rotary substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is an enlarged sectional view of a main part of the rotary substrate processing apparatus of FIG.

FIG. 3 is a schematic sectional view of a conventional rotary substrate processing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Motor 2 Rotating shaft 3 Suction path 4 Substrate holding part 5 Suction port 7 Motor holding member 8 Base member 14 Connecting member 15 Seal holding member 17 Magnetic fluid seal 18 Magnetic pole piece 19 Permanent magnet 20 Magnetic fluid 21 Connecting member 22 Communication space 25 Suction Pipeline

Claims (3)

[Claims] 1. A motor having a rotating shaft provided in a vertical direction and having a suction path penetrating from an upper end to a lower end, and a suction port attached to an upper end of the rotating shaft and communicating with the suction path. And a substrate holding unit that sucks and holds the substrate, and has an intake port arranged below a lower end of the rotating shaft,
A suction pipe that guides air to the outside from a lower end of the suction path; a connection member having a communication space to which the suction port of the suction pipe is connected and a lower end of the rotating shaft to be loosely fitted; A rotary substrate processing apparatus, comprising: a magnetic fluid seal provided in a gap between an inner peripheral surface of the member forming the communication space and an outer peripheral surface of a lower end of the rotating shaft. 2. A motor according to claim 1, further comprising a flat base member for vertically partitioning the atmosphere, wherein said motor is fixed to said base member such that said lower end of said rotary shaft is located in an atmosphere below said base member. The rotary substrate processing apparatus according to claim 1, wherein: 3. The motor according to claim 3, wherein the connecting member has an annular recess surrounding the lower end of the rotating shaft and holding the magnetic fluid seal, and a seal holding member attached to a lower end surface of the motor; 2. A connection member connected to a lower end of a holding member and having a space for communicating the suction port of the suction pipe with the suction path of the rotary shaft.
Or the rotary substrate processing apparatus according to 2.