JPH1151370A - Monitor window device of combustion removal apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent powder from adhering to a monitor window, and arbitrarily remove such powder during operation without interrupting an apparatus. SOLUTION: A transparent window member 12 is provided on an outer end of a cylindrical body 11 mounted over a coupling inlet provided in a combustion chamber of a combustion type harm removal apparatus. There are further provided a shutter 13 for covering the coupling inlet 2 freely to open and close, a first nozzle 14 for injecting a fluid toward an internal surface of the window member, and a second nozzle 15 for injecting a fulid toward the internal surface of the window member.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a monitoring window device for a combustion type abatement apparatus, and more particularly, to a method for burning or decomposing harmful components, such as toxic gas, flammable gas, and corrosive gas, contained in the gas. The present invention relates to a structure of a monitoring window for monitoring a state in a combustion chamber of a combustion-type abatement apparatus that is rendered harmless.

[0002]

2. Description of the Related Art As an apparatus for performing a detoxification process of a gas containing a flammable or combustible harmful component discharged from an apparatus for manufacturing a semiconductor or an LCD, or the like. There has been known a combustion type abatement apparatus in which a harmful component-containing gas is ejected from a combustion burner into a combustion chamber and burned, and the harmful component is removed by combustion or thermal decomposition.

[0003] In the above combustion type abatement apparatus, a monitoring window is provided on the side wall of the combustion chamber so that the combustion state in the combustion chamber can be visually checked. However, powder generated by combustion of harmful components and the like adheres to the inner surface of the window. However, the window is covered with this powder, and it becomes increasingly difficult to confirm the operation status. For this reason, it is necessary to remove the powder adhering to the inner surface of the window, but in order to remove the powder from the inner surface of the window, it is necessary to stop the apparatus and suspend the detoxification process, and the operation is troublesome. Met.

Therefore, the present invention prevents the powder (combustion product) from adhering to the monitoring window, and also removes the adhering powder arbitrarily during operation without stopping the apparatus. The purpose is to provide a monitoring window device for harmful devices.

[0005]

In order to achieve the above object, a monitoring window device of a combustion type abatement apparatus according to the present invention uses a combustion burner to burn a combustion gas such as an exhaust gas containing a harmful component or a combustion supporting gas. A monitoring window device for monitoring a state in a combustion chamber of a combustion type abatement apparatus that performs abatement processing by ejecting and burning in a chamber, and a tubular main body attached to a connection port provided in the combustion chamber. A window member made of a transparent material is provided at an outer end portion of the portion, and a shutter that covers the connection port so as to be openable and closable, and a first nozzle that ejects fluid toward the inner surface of the window member, A second nozzle for ejecting a fluid toward the connection port.

Further, the present invention is characterized in that the cylindrical main body is provided with a discharge portion for discharging the fluid ejected from the nozzle and the combustion products removed by the ejection of the fluid, the first portion. The nozzle is configured to continuously spray water to the inner surface of the window member, and the second nozzle is formed so as to be capable of adjusting a fluid spraying direction.

[0007]

FIG. 1 shows a first embodiment of a monitoring window device according to the present invention.
It is sectional drawing which shows a form example. This monitoring window device is attached to a connection port 2 provided in a peripheral wall 1 of a combustion chamber of a combustion type abatement apparatus, and is a tubular main body fixed to the peripheral wall 1 of the combustion chamber via a fixing member 3. Part 11, a window member 12 made of a transparent material provided at the outer end of the cylindrical main body part 11, a shutter 13 for opening and closing the connection port 2, and a fluid flowing toward the inner surface of the window member 12. Nozzle 14 for injecting
A second nozzle 15 for ejecting a fluid toward the connection port 2 and the shutter 13; and a discharge unit 16 for discharging the ejected fluid and powder (combustion products) removed by the fluid. ing.

The cylindrical main body 11 can be formed in an arbitrary shape such as a rectangular cylindrical shape or a cylindrical shape, and is formed in such a size that the inside of the combustion chamber can be easily monitored visually. In consideration of discharge when liquid such as water is ejected from the first and second nozzles 14 and 15, a downward gradient toward the discharge unit 16 is provided.

The window member 12 is made of heat-resistant glass or the like, and is provided between an attachment frame 12a provided at the outer end of the cylindrical main body 11 and a pressing edge 12b screwed to the attachment frame 12a. It is embedded. The shutter 13 is
The opening and closing of the connection port 2 is performed by rotating a rotating shaft 13a by an operation knob or lever (not shown) provided outside the cylindrical main body 11, and the shutter 13 is not operated except when monitoring the inside of the combustion chamber. By closing, it is possible to prevent the inflow of combustion gas and combustion products into the cylindrical main body 11.

The first nozzle 14 sprays a fluid for preventing powder, which is a combustion product, from adhering to the inner surface of the window member 12 or for removing powder adhering to the window member 12. The second nozzle 15 sprays a fluid for removing powder attached to the connection port 2 and the shutter 13. As a fluid ejected from these nozzles, a gas such as air or nitrogen or a liquid such as water can be used.
It is preferable to continuously jet a liquid such as water, which has a large effect of preventing powder from adhering. Also, the second nozzle 15
Since the powder adhering to the inner peripheral portion of the connection port when the shutter 13 is opened is removed, it is preferable to intermittently inject a gas such as nitrogen or air which does not affect combustion during operation of the apparatus. Further, the ejection amount and ejection force (fluid supply pressure) of the fluid from each nozzle can be arbitrarily set within a range that does not adversely affect combustion.

Furthermore, the first nozzle 14 does not require a very strong jetting force when continuously jetting a fluid, especially water, so that the first nozzle 14 is of a fixed type using a nozzle that jets a fluid over a wide area. can do. On the other hand, the second nozzle 15 needs a certain amount of ejection force to remove the adhered powder, so that it is preferable that the second nozzle 15 ejects the fluid with a strong ejection force in a linear manner. The nozzle can be moved in the axial direction so that fluid can be ejected to the
In addition, it is preferable that the movable type be rotatable.
That is, as shown in FIG. 1, the nozzle shaft 15a of the second nozzle 15 is held by the spherical bearing member 17 so as to be movable in the axial direction, and the spherical bearing member 17 is held by the packing 18 so as to be rotatable. By providing an angle to the nozzle tip 15b, the direction of fluid ejection can be freely adjusted.

FIG. 2 shows an example in which the connecting port 2 is provided with a powder adhesion preventing structure. In this powder adhesion preventing structure, the connection port 2 is formed in a double pipe structure by an inner cylinder 21 made of a porous material and an outer cylinder 22 covering the outer periphery of the inner cylinder 21. During this time, the pressure fluid is supplied from the pressure fluid introduction pipe 23, and the pressure fluid is ejected from the fine through hole of the inner cylinder 21 to the inner circumference of the connection port 2, thereby preventing powder from adhering to the inner circumference of the inner cylinder. It is formed so that.

As the porous material, a porous material having fine air holes (pores) made of a ceramic sintered body, sintered metal or the like uniformly and having a function of transmitting an appropriate amount of the pressure fluid is used. The material is not particularly limited as long as the heat resistance, the strength, and the connectivity at both ends are satisfied, and the pore size and the mesh size are not particularly limited. As the pressure fluid, any fluid can be used as long as it does not adversely affect combustion. However, in order to reliably prevent powder from adhering to the connection port 2, it is necessary to constantly eject the fluid during the combustion operation. For this reason, it is preferable to use a gas such as nitrogen or air. However, the pressure fluid is ejected from the inner cylinder 21 only when the fluid is ejected from the second nozzle 15 to remove the powder at the connection port 2. It may be. The amount and pressure of the pressure fluid to be introduced may be determined in consideration of the permeability of the inner tube 21. An appropriate amount of fluid is ejected from the entire wall surface of the inner tube 21 to prevent powder from adhering to the inner surface of the inner tube. It should just be possible.

As shown in FIG. 3, the peripheral wall 1 of the combustion chamber is formed in a double-wall structure comprising an inner wall 24 made of a porous material similar to the above and an outer wall 25 covering the outer periphery of the inner wall 24. Connects the cylindrical body 26 forming the connection port 2 to the inner wall 24.
Inner wall 2 of the combustion chamber peripheral wall 1
The pressure fluid supplied between the outer wall 4 and the outer wall 25 may be ejected from the porous material cylindrical body 26.

In the embodiment shown in FIGS. 2 and 3, except for the connection port portion of the monitoring window device, it can be formed in the same manner as in the first embodiment. The same components are denoted by the same reference numerals, and detailed description is omitted.

[0016]

【Example】

Example 1 Length 300 made of stainless steel having an outer diameter of 216.3 mm
A monitoring window device having a structure shown in FIG. A diffusion burn type main burner of an exhaust gas introduction type was mounted on an upper portion of the combustion chamber, and a pilot burner for igniting the main burner was mounted on a side wall of the combustion chamber. After propane gas and air were supplied to the main burner to ignite, nitrogen gas containing 3% silane was introduced at 150 liters / min into the exhaust gas introduction nozzle of the main burner, and the main burner was operated for a total of 100 hours.

During operation, water was continuously injected from the fixed first nozzle 14 of the monitoring window device to the inner surface of the window member 12 at 500 cc / min. When the shutter 13 is opened approximately every 5 hours to observe the inside of the combustion chamber, the movable second nozzle 15
Compressed air at a pressure of 4 kgf / cm ² was injected into the connection port where the powder was deposited. As a result, the powder of silicon oxide (SiO ₂ ), which is a combustion product, does not adhere to the inner surface of the window member 12, and the powder that adheres to the connection port 2 can also be removed. Could be observed in a good state.

Comparative Example 1 The same combustion treatment as in Example 1 was performed, except that the shutter 13 was opened and the injection of water from the first nozzle 14 was stopped. As a result, after 8 hours, the window member 12
A large amount of powder adheres and accumulates on the inner surface of the
Observation inside the combustion chamber became impossible.

Comparative Example 2 The same combustion process as in Comparative Example 1 was performed for 8 hours except that the shutter 13 was opened only when observing the inside of the combustion chamber. As a result, the amount of powder adhering to the window member 12 was smaller than that in Comparative Example 1, but it became white, and the powder accumulated on the inner periphery of the connection port 2 made it difficult to observe the inside of the combustion chamber. Was.

Comparative Example 3 The same combustion treatment as in Comparative Example 2 was performed for 8 hours except that water was continuously injected from the first nozzle 14 to the window member 12 at 500 cc / min. As a result, the adhesion of the powder to the window member 12 could be completely prevented, but the powder deposited on the inner periphery of the connection port 2 made it difficult to observe the inside of the combustion chamber.

Example 2 A combustion treatment was performed using a combustion type abatement apparatus having the structure shown in FIG. The combustion chamber 51 of this combustion type abatement apparatus has an outer diameter of 15 mm.
The combustion chamber 51 has a double wall structure in which an inner wall 24 formed of a stainless steel sintered metal having a thickness of 0 mm and a thickness of 3 mm and an outer wall 25 formed of a stainless steel having an outer diameter of 216.3 mm are coaxially arranged. A main burner 52 having a five-tube structure is provided at the center of the upper part of the inner wall, and the inner and outer walls 24,
25, the pilot burner 53 and the flame detector 5
4 are provided. Further, a temperature detector 55 penetrating through the outer wall 25 and having a tip contacting the inner wall 24 is provided, and a gas introducing pipe 56 for introducing a pressure fluid and a baffle plate 56 a are provided between the inner wall 24 and the outer wall 25. .
Further, a spray nozzle 57 for removing powder is provided above the combustion chamber 51, and a spray nozzle 58 for jetting combustion gas cooling water is provided below the combustion chamber 51. At the bottom of the combustion type abatement apparatus, an exhaust pipe 59 connected to an exhaust treatment device and an air introduction pipe 60 for balancing pressure are provided.
And are connected. On the side wall of the above combustion type abatement system,
The monitoring window device was attached as shown in FIG. In addition, the discharge destination of the discharge part 16 was connected to the bottom of the combustion type abatement apparatus.

4 kgf / c between the inner and outer walls 24 and 25
Compressed air pressurized to m ² was supplied at 165 liters per minute, and combustion treatment was performed in the same manner as in Example 1. As a result, the powder was not attached to the window member 12 due to the action of the water spray from the first nozzle 14, and the powder was slightly attached to the inner peripheral surface of the cylindrical body 26 of the connection port 2. Was able to be completely removed by injecting compressed air. Therefore, it was possible to observe the combustion chamber during operation in a favorable state.

[0023]

As described above, according to the monitoring window apparatus of the combustion type abatement apparatus of the present invention, not only can the inside of the combustion chamber during operation be observed in a good condition, but also the monitoring window section can adhere to the monitoring window. Since it is not necessary to stop the apparatus in order to remove the generated powder, the combustion detoxification processing can be performed efficiently.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a first embodiment of a monitoring window device of the present invention.

FIG. 2 is a sectional view showing a second embodiment of the monitoring window device.

FIG. 3 is a sectional view showing a third embodiment of the monitoring window device.

FIG. 4 is a sectional view of a combustion type abatement apparatus to which the monitoring window device of the present invention is attached.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Peripheral wall of combustion chamber, 2 ... Connection port, 11 ... Cylindrical main body part, 12
... Window member, 13 ... Shutter, 14 ... First nozzle, 15
... second nozzle, 16 ... discharge section, 17 ... spherical bearing member, 2
DESCRIPTION OF SYMBOLS 1 ... Inner cylinder made of porous material, 22 ... Outer cylinder, 23 ... Pressure fluid introduction pipe, 24 ... Inner wall made of porous material, 26 ... Cylindrical body

 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Maya Maya 1-16-7 Nishi-Shimbashi, Minato-ku, Tokyo Inside Nippon Sanso Corporation

Claims (4)

[Claims] 1. A combustion type abatement system which performs abatement by injecting a combustion gas such as an exhaust gas containing a harmful component or a combustion supporting gas from a combustion burner into a combustion chamber and burning it. A monitoring window device for monitoring, wherein a window member made of a transparent material is provided at an outer end of a cylindrical main body attached to a connection port provided in the combustion chamber, and the connection is provided to the cylindrical main body. A shutter that covers the mouth so that it can be opened and closed,
A first nozzle for injecting a fluid toward the inner surface of the window member,
A second nozzle for injecting a fluid toward the connection port; and a monitoring window device for the combustion type abatement apparatus. 2. The apparatus according to claim 1, wherein the cylindrical main body has a discharge portion for discharging the fluid ejected from the nozzle and a combustion product removed by the ejection of the fluid. Monitoring window equipment for combustion type abatement equipment. 3. The first nozzle according to claim 1, wherein the first nozzle continuously sprays water on an inner surface of the window member.
The monitoring window device of the combustion type abatement apparatus according to the above. 4. The monitoring window device for a combustion type abatement apparatus according to claim 1, wherein the second nozzle is formed so as to be capable of adjusting a fluid jetting direction.