JP2001349521A - Combustion type detoxifying apparatus and method for operating the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for operating a combustion type detoxifying apparatus which reduces fuel consumption while surely performing a treatment for detoxifying noxious substances. SOLUTION: In performing detoxification treatment of the noxious substances with the combustion type detoxifying apparatus having a main burner and a pilot burner, the pilot burner is kept fired and fuel supply to the main burner is controlled by external signals.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a combustion type abatement apparatus and an operation method thereof, and more particularly, to a toxic gas, a corrosive gas, and a flammable gas contained in exhaust gas discharged from a semiconductor or LCD manufacturing apparatus. The present invention relates to a combustion type abatement apparatus for removing a harmful gas such as a combustible gas or an incombustible gas which affects the global environment by detoxifying it by combustion or thermal decomposition, and a method of operating the same.

[0002]

2. Description of the Related Art Exhaust gas emitted from semiconductor manufacturing processes such as semiconductor manufacturing equipment and LCD manufacturing equipment includes:
Because it contains harmful components such as toxic gas, corrosive gas, flammable gas, and incombustible gas that has a negative impact on the global environment,
It is necessary to discharge the exhaust gas after performing the detoxification (detoxification) treatment of these harmful components. As one of the devices for removing such exhaust gas, a combustion type removing device is known.

In this combustion type abatement apparatus, various harmful components contained in exhaust gas introduced into a combustion cylinder are combusted by a flame of a main burner in the combustion cylinder or thermally decomposed to remove the harmful components. For example, Japanese Patent Application Laid-Open
Various shapes are disclosed in, for example, 110926.

[0004]

The above combustion type abatement apparatus supplies fuel to the main burner and waits in a combustion state even when the abatement processing of exhaust gas or the like is not performed. The consumption of fuel is large, which is one of the causes of increasing the running cost of the detoxification treatment, and sometimes affects the production cost of semiconductors and the like.

Accordingly, an object of the present invention is to provide a combustion type abatement apparatus capable of saving fuel while reliably performing abatement processing of harmful components and an operation method thereof.

[0006]

In order to achieve the above object, a combustion type abatement apparatus according to the present invention comprises a main body for forming a flame for detoxifying a harmful component in a gas to be treated by burning or thermally decomposing the harmful component. In a combustion abatement apparatus having a burner and a pilot burner that ignites the main burner,
A control means for controlling the supply of fuel to the main burner by an external signal is provided, and the operation method is a method for burning or thermally decomposing harmful components in the gas to be treated to render the flame harmless. A method of operating a combustion abatement apparatus having a main burner forming a main burner and a pilot burner for igniting the main burner, wherein the pilot burner is always ignited, and a fuel supply to the main burner is supplied by an external signal, for example, The control is performed by a signal from a gas detector that detects a harmful component in the gas to be processed, a signal from a harmful component supply unit, a signal from a gas leak detector, and the like.

As a specific structure of the combustion type abatement apparatus used, it is preferable that the flow direction of the gas to be treated and the flame direction of the main burner intersect at a right angle or an angle close to a right angle. Further, the amount of fuel supplied to the main burner can be adjusted in accordance with the composition of the gas to be treated, and the use of a cooling medium / cleaning medium of a combustion exhaust gas cooling / cleaning means provided at a subsequent stage of the combustion abatement apparatus is also possible. The amount can also be adjusted according to the amount of fuel supplied to the main burner.

[0008]

1 to 4 are schematic system diagrams each showing an embodiment of an apparatus configuration to which the present invention is applied. First, a first embodiment shown in FIG.
An example of a mode suitable for a case where the generation source 101 of the gas to be processed flowing into the fuel cell 00 is not specified, or a case where a large number of generation sources 101 are provided. In such a case, the pipe 102 from the source 101 to the combustion type abatement apparatus 100
Is provided with a gas detector 103 for detecting harmful components. When the gas detector 103 detects that harmful components are contained in the gas to be processed flowing through the pipe 102, the harmful component detection signal 104 is removed by the combustion type removal. The signal is transmitted to the gas supply control means 105 attached to the harm device 100, and the gas supply control means 105
However, based on the reception of the harmful component detection signal 104 as an external signal, an operation such as opening a fuel supply valve of the main burner is performed to start supplying fuel to the main burner.

When fuel is supplied to the main burner, the main burner is ignited by the flame of the pilot burner which is always ignited, and the main burner is brought into a combustion state to burn harmful components contained in the gas to be treated. And / or a decomposition process is performed.

As described above, when performing the harmful component abatement process using the combustion type abatement apparatus 100 having the main burner and the pilot burner for igniting the main burner, the pilot burner is always ignited. The supply of fuel to the main burner is controlled by an external signal transmitted when a harmful component is present in the gas to be treated, and the supply of fuel to the main burner when the harmful component is not contained in the gas to be treated. By stopping or reducing the fuel consumption, the fuel consumption can be reduced.

When the fuel supply to the main burner is stopped or reduced, the combustion type abatement system 100
Since the amount of combustion exhaust gas generated in the combustion abatement apparatus 100 decreases, the flow rate of cooling air or cleaning water used in the combustion exhaust gas cooling / cleaning means 106 such as a cooling cylinder or a scrubber provided at the subsequent stage of the combustion abatement apparatus 100 is reduced. By reducing, the power cost of a blower or a pump for sucking or pumping these can also be reduced.

The second embodiment shown in FIG. 2 is a case where the source of the gas to be treated is an apparatus using a gas containing harmful components as a source gas, such as a semiconductor manufacturing apparatus 110 or an LCD manufacturing apparatus. In this case, a supply valve 113 provided in a pipe 112 between the cylinder cabinet 111 for supplying a source gas to the semiconductor manufacturing apparatus 110 and the semiconductor manufacturing apparatus 110
Can be used as an external signal.

That is, when the supply valve 113 serving as harmful component supply means is opened and supply of the source gas containing harmful components from the cylinder cabinet 111 to the semiconductor manufacturing apparatus 110 is started, the valve opening signal 114 of the supply valve 113 is burned. The gas may be received by the gas supply control means 105 of the abatement system 100, and the fuel supply to the main burner may be started.

In the third embodiment shown in FIG. 3, instead of the supply valve 113 of the second embodiment, a flow signal 116 from a flow controller (mass flow controller) 115 provided in a pipe 112 is controlled by gas supply control. An example in which the means 105 is used as an external signal is shown. In this case, the flow signal 116
The amount of fuel supply can be adjusted by controlling the flow rate of the harmful component obtained from the above, and the size of the flame of the main burner can also be adjusted. Further, the valve opening signal 114 of the supply valve 113 and the flow rate signal 116 of the mass flow controller 115 are used as external signals, and the fuel supply to the main burner is started when the gas supply control means 105 receives one of them. You can keep it.

In the fourth embodiment shown in FIG. 4, the source of the gas to be treated is a housing (cylinder cabinet) 111 containing a container filled with harmful gas or the like. This shows a case where the exhaust gas is sucked into the combustion type abatement apparatus 100 through the exhaust gas. In this case, the leak detection signal 119 from the gas leak detector 118 provided in the cylinder cabinet 111 can be used as an external signal of the gas supply control means 105.

Further, in the second to fourth embodiments, the supply of fuel to the main burner is controlled by a gas supply signal (valve opening signal 114, flow rate signal 116) from a plurality of cylinder cabinets 111 or a gas leak signal 119. In this case, the fuel consumption can be further reduced by adjusting the fuel supply amount to the main burner according to the type of the harmful component of the container installed in the cylinder cabinet 111. For example, when a non-flammable gas such as C ₂ F ₆ is decomposed as a harmful component, the normal fuel supply amount is used. When the harmful component is a flammable gas such as SiH ₄ , the fuel supply amount is reduced. However, if a leak detection signal is received from a cylinder cabinet containing a SiH ₄ container,
The fuel supply amount can be reduced.

Further, even when the gas to be processed contains hydrogen, which is a combustible gas, the amount of fuel supplied to the main burner can be reduced. Further, also in the first embodiment, if a gas detector capable of analyzing various gases is installed as the gas detector 103, the composition of the gas to be treated is analyzed by the gas detector 103 to adjust the fuel supply to the main burner. can do.

At the same time as the supply of the fuel is stopped or reduced, the supply of the fuel-combustible gas or other auxiliary gas can be stopped or reduced by the gas supply control means 105. In addition, when there is a possibility that the combustion abatement efficiency may decrease due to a decrease in the temperature of the combustion cylinder,
Fuel is supplied to the main burner at appropriate time intervals or in accordance with the temperature of the combustion cylinder, and the main burner is burned to maintain the combustion cylinder at a predetermined temperature or higher.

As described above, in the combustion type abatement apparatus 100 having the main burner and the pilot burner, the fuel supply to the main burner is controlled by the external signal,
By setting the main burner to a predetermined combustion state when the harmful component to be burned and / or thermally decomposed flows into the combustion type abatement apparatus 100, the harmful component can be reliably removed, In addition, when there is no inflow of harmful components, by stopping or reducing the fuel supply to the main burner, it is possible to significantly reduce the fuel consumption.

The fuel supply to the main burner by the gas supply control means 105 is controlled by providing a fuel supply pipe, such as an electromagnetic valve or a flow rate control valve, in a fuel supply pipe for supplying fuel to the main burner. Opening and closing can be performed. Also, the source of the external signal can be arbitrarily selected according to the state of the source of the gas to be treated to be processed by the combustion type abatement apparatus, and a plurality of external signals can be used in combination. . For example, the start of fuel supply
The supply valve and the mass flow controller on the harmful component generation side are performed by an external signal such as a gas leak detector, and the stop or reduction of the fuel supply is performed by combining a gas detector and a timer provided immediately before the combustion type abatement apparatus. It can be carried out. In addition, as an external signal, a signal indicating that no harmful component was flowing into the combustion type abatement apparatus was transmitted, and when this signal was received, the fuel supply was stopped and another harmful component inflow signal was received. At this time, or when these signals are interrupted, the fuel supply may be started.

Although various structures can be adopted as the specific structure of the combustion type abatement apparatus, it is preferable to use a combustion type abatement apparatus having the structure shown in FIGS. This combustion type abatement apparatus burns and / or decomposes and burns harmful components by directly introducing a gas to be treated into a high-temperature flame, and as shown in a vertical sectional view of FIG. ) Is closed by the lid 1, and the other end (lower end) opening is communicated with the inside of the cooling cylinder 2, and the combustion cylinder 3 is attached to the lid 1, and the gas to be treated (for example, semiconductor manufacturing) Equipment and LCD
A gas introduction nozzle 4 for introducing the exhaust gas discharged from the manufacturing apparatus of the above, a main burner 5 for forming a flame for burning and / or thermally decomposing the gas to be treated in the combustion tube 3, and the lid A pilot burner 6 attached to the center of the body 1 and igniting the main burner 5 is provided.

As shown in a partial sectional plan view of FIG. 6 and a longitudinal sectional view of FIG. 7, the main burner 5 is an annular body having an inner peripheral surface formed in a V-shaped peripheral groove. A fuel gas ejection nozzle 51 is opened on one surface forming a V-shaped circumferential groove, and a fuel-supporting gas ejection nozzle 52 for fuel combustion is opened on the other surface, and the nozzle axes of both ejection nozzles 51, 52 are: They are directed toward the center of the burner 5 and intersect in the combustion tube 3. Further, the diameter and the number of the two ejection nozzles 51 and 52 are not particularly limited, and may be determined according to the amount of heat required for the combustion of the gas to be treated. 72 at equal intervals of 5 degrees in the circumferential direction
A hole is formed. Further, the ejection nozzles 51 and 52
The annular spaces 53 and 54 formed in the burner 5 communicate with each other. A fuel gas supply pipe 55 communicates with the annular space 53, and a fuel combustion supporting gas supply pipe 56 communicates with the annular space 54.

As the fuel gas supplied from the fuel gas supply pipe 55, a hydrocarbon gas such as LPG or hydrogen gas is used, and the fuel supporting property supplied from the fuel combustion supporting gas supply pipe 56 is used. As the gas, any of air, a mixed gas of air and oxygen gas, or oxygen gas is used. The fuel gas ejected from the fuel gas ejection nozzle 51 and the combustion supporting gas ejected from the fuel combustion supporting gas ejection nozzle 52 intersect while diffusing toward the radial center of the combustion tube 3. Mixing more efficiently,
Ignition is carried out by the pilot flame of the pilot burner 6 in a constantly ignited state, and a flat high-temperature flame crossing the inside of the combustion tube 3 in the radial direction is formed. By forming such a flat flame, the flow direction of the gas to be treated intersects the flame direction of the main burner 5 at a right angle, and the gas to be treated always crosses the flame. Can be subjected to combustion and / or pyrolysis.

In this embodiment, the inner peripheral surface of the main burner 5 is formed in a V-shaped peripheral groove, and the fuel gas ejection nozzle 51 is formed.
And the fuel-combustion gas ejecting nozzle 52 for fuel combustion are provided so that their respective nozzle axes intersect with each other. However, the inner peripheral surface is formed to be flat, and the fuel gas ejection nozzle 51 and the fuel-combustion gas The ejection nozzle 52 may be provided in parallel with the burner center direction, or may be a curved surface that is convex outward. In this way, by providing the fuel gas and the fuel-combustion supporting gas so as to be ejected from different nozzles, even when the oxygen concentration in the supporting gas is high when a high calorie is to be obtained. It is safe without flashback. There is no limitation on the number of main burners 5 to be used, but it is preferable to provide two or more main burners 5 in order to improve combustion efficiency.

It is sufficient that the number of nozzles 4 for introducing the gas to be treated is at least one.
Are provided. Further, the processing gas introduction nozzle 4 is
As shown in the vertical sectional view of FIG. 8, its axis is slightly inclined with respect to the axis of the combustion tube 3 so that the flow direction of the gas to be treated and the flame direction of the main burner 5 intersect at a right angle. You may. In FIG. 8, the same components as those of the combustion type abatement apparatus shown in FIG. 5 are denoted by the same reference numerals.

The pilot burner 6 includes, for example,
A mixed gas of LPG (fuel gas) and air (combustible gas) is supplied, and is always kept in a combustion state. The pilot burner 6 is set so that the tip of the pilot flame reaches the installation level position of the main burner 5.

The combustion cylinder 3 has three peripheral wall members 31 and 3 disposed from one end to the other end (from the upstream side to the downstream side).
2, 33, and between the peripheral wall bodies 31, 32 and between the peripheral wall bodies 32, 33
It is formed by main burners 5, 5 sandwiched between them.

The peripheral wall members 32 and 33 downstream of the main burner 5 on the upstream side are coaxial double walls made of a porous material, for example, a sintered metal, through which the supporting gas for oxidizing the gas to be processed passes. The wall structure is provided on the outer wall 35 so as to supply the oxidizing gas to the space 36 between the double walls in order to eject the oxidizing gas to be treated into the combustion cylinder 3 through the inner wall 34. Is connected to the oxidation supporting gas supply pipe 37. As described above, by forming the inner walls 34 of the peripheral wall bodies 32 and 33 from a porous material, combustion of SiH ₄ or C ₂ F ₆
The gas to be treated, which becomes the oxidizing gas for decomposition and combustion, is oxidized and blows out through the inner wall 34 to prevent, for example, SiO ₂ powder generated by combustion of SiH _{4 from} adhering to the inner wall 34.

If the temperature of the inner wall 31 becomes higher than the heat resistant temperature of the porous material used for the inner wall 34 due to the combustion of the main burner 5, the inner wall 34 is provided with a heat resistant material such as a ceramic foam. Heat insulator 7 made of porous material
May be incorporated. Either air, a mixed gas of air and oxygen gas, or oxygen gas is used as the oxidizing combustion supporting gas.

The peripheral wall 31 between the lid 1 and the upstream main burner 5 closest to the lid 1 has a combustion tube 3
Since the gas to be treated introduced into the inside is disposed at a position before touching the flame of the main burner 5, for example, SiO ₂
Less powder growth and less powder adhesion to inner wall surface.
For this reason, the peripheral wall body 31 can be configured to have a structure in which the above-mentioned oxidizing combustion supporting gas is not supplied into the combustion tube 3. That is, as shown in FIG. 5, the inner wall 34a may have a double wall structure made of a normal metal or a single wall structure.

If, for example, oxygen gas is contained in the gas to be treated, for example, SiH ₄ contained in the gas to be treated, for example, is burned in the gas introducing nozzle 4 to be treated.
SiO ₂ powder adheres and grows on the tip of the nozzle 4. In such a case, the inner wall 34a is made of a porous material such as a sintered metal, and an inert gas is supplied between the double walls 36a. The ejection may prevent the SiO ₂ powder from adhering to the tip of the nozzle 4.

The other end of the combustion tube 3 is connected to an upper opening of a bottomed cylindrical cooling chamber 21 of the cooling tube 2. This cooling cylinder 2
Has the cooling chamber 21, a cooling gas introduction pipe 22 connected to a peripheral wall of the cooling chamber 21, and a treated gas (combustion exhaust gas) discharge pipe 23 connected to a peripheral wall facing the introduction pipe 22; The discharge pipe 23 is connected to a scrubber (not shown) for performing, for example, a cleaning treatment of the combustion exhaust gas. The combustion cylinder 3 is provided so that its axial direction is orthogonal to the direction of the cooling gas flow of the cooling cylinder 2.

The to-be-processed gas introduced into the combustion cylinder 3 is directed toward the cooling cylinder 2 through the combustion cylinder 3 by a suction action of a blower (not shown) connected to the treated gas discharge pipe 23. The harmful components in the gas to be treated are burned and / or thermally decomposed by passing through the planar high-temperature flame of the main burner 5 during that time. Is cooled by being joined with the cooling air that is the cooling medium that has flowed into the processing gas discharge pipe 23 together with the cooling air.

As described above, by using the combustion type abatement apparatus provided with the main burner 5 for forming a planar high-temperature flame traversing the inside of the combustion tube 3 in the radial direction, the flow direction of the gas to be treated and the main burner 5 intersects at a right angle or an angle close to a right angle, and the gas to be treated always crosses the flame. Therefore, even if the temperature in the combustion tube 3 is low immediately after the main burner 5 is ignited, the harmful components are removed. Combustion and / or pyrolysis can be reliably performed.

[0035]

EXAMPLE A combustion type abatement apparatus having the structure shown in FIGS. 5 to 7 was installed as shown in FIG. The main burner of the combustion type abatement apparatus is made of stainless steel having an outer diameter of 350 mm, an inner diameter of 155 mm, and a thickness of 16 mm, and has a donut shape.
The hole diameter of the fuel gas ejection nozzle of the burner is 1.6 mm,
The diameter of the fuel-supporting gas ejection nozzle 52 for fuel combustion is 2.2 mm,
The number of holes is 72 each. The angle of the V-shaped groove on both gas ejection surfaces is 40 degrees, and the nozzle axes of both ejection nozzles are each inclined at 5 degrees with respect to the horizontal plane so as to intersect within the combustion cylinder.

The peripheral wall on the downstream side of the main burner on the upstream side has a double wall structure using a stainless steel sintered metal having an outer diameter of 200 mm and a thickness of 3 mm for the inner wall and a stainless steel having an outer diameter of 267.4 mm for the outer wall. And the length of each peripheral wall is 84 m
m. Further, a ceramic foam (manufactured by Bridgestone Corporation) having an outer diameter of 200 mm and an inner diameter of 150 mm was incorporated as a heat insulator inside the sintered metal inner wall. The peripheral wall located upstream of the main burner on the upstream side has an outer diameter of 26 mm.
It is a double wall structure using 7.4 mm and 216.3 mm stainless steel for the outer and inner walls, respectively. The cooling chamber of the cooling cylinder has an outer diameter of 267.4 mm, an inner diameter of 260.6 mm,
The height of the cooling gas introduction pipe and the processed gas discharge pipe are 170 mm, and the outer diameter is 114.3 mm and the inner diameter is 110.1 mm.
Pilot burners include Naigai's PP-2-
L was used. The target gas introduction nozzle has an outer diameter of 42.7.
4 mm were installed. One of them was connected to the semiconductor manufacturing apparatus, and the other three were closed.

The pilot burner was supplied with 3 L / m of LP gas.
In, a mixed gas of 62.5 L / min of air was supplied and ignited by an attached spark rod to form a pilot flame. In addition, the cooling air is supplied to the cooling cylinder at 1000 L / m.
Supplied in. The harmful component silane was set to be supplied from the cylinder cabinet to the semiconductor manufacturing apparatus at 4 L / min. In addition, a pipe for supplying nitrogen for dilution is connected to a pipe to the combustion type abatement apparatus so that 96
L / min. The main burner is provided with 10 L / min of LP gas as fuel, 133 L / min of air as a combustion supporting gas for fuel combustion, and oxygen 1 L / min.
It was set to supply a mixed gas of 4 L / min.
Further, between the two double walls of the abatement cylinder, air as a combustion supporting gas for preventing powder adhesion and oxidizing the gas to be treated is supplied with 300 g of air.
L / min.

With the combustion type abatement apparatus in a standby state in which only the pilot burner was burning, the semiconductor manufacturing apparatus was operated, the supply valve was opened, and the supply of silane from the cylinder cabinet to the semiconductor manufacturing apparatus was started. At the same time, the gas supply control means is activated by the supply valve opening signal,
The supply of the fuel, the combustion supporting gas for fuel combustion, the nitrogen for dilution, and the combustion supporting gas for oxidizing the gas to be treated and oxidizing the powder to be treated was started, and the cooling air was supplied at 19000 L / min.
Was increased. At this time, the silane concentration in the gas discharged from the combustion type abatement apparatus was measured with a gas detector (TG4000-TA, manufactured by Bionics Instruments).
Was less than.

[0039]

As described above, according to the present invention,
Fuel can be saved while harmless components are reliably removed, and the amount of combustion exhaust gas can be reduced, so that the burden on the environment can be reduced.

[Brief description of the drawings]

FIG. 1 is a schematic system diagram showing a first embodiment of the present invention.

FIG. 2 is a schematic system diagram showing a second embodiment of the present invention.

FIG. 3 is a schematic system diagram showing a third embodiment of the present invention.

FIG. 4 is a schematic system diagram showing a fourth embodiment of the present invention.

FIG. 5 is a longitudinal sectional view showing a preferred structural example of a combustion type abatement apparatus.

FIG. 6 is a partially sectional plan view showing an example of a main burner.

FIG. 7 is a longitudinal sectional view of a main burner.

FIG. 8 is a longitudinal sectional view showing another example of the shape of the combustion type abatement apparatus.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 3 ... Combustion cylinder, 4 ... Gas inlet nozzle for treatment, 5 ... Main burner, 6 ... Pilot burner, 100 ... Combustion type abatement apparatus, 101 ... Source of gas to be treated, 103 ... Gas detector, 104 ... Harmful component Detection signal, 105: gas supply control means, 106: combustion exhaust gas cooling / cleaning means, 110: semiconductor manufacturing apparatus, 111: cylinder cabinet, 11
3: supply valve, 114: valve open signal, 115: mass flow controller, 116: flow rate signal, 118: gas leak detector, 119: leak detection signal

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Shuyasu Tomita 1-16-7 Nishi-Shimbashi, Minato-ku, Tokyo Inside Nippon Sanso Corporation (72) Inventor Akiko Nakashima 1-16-7, Nishi-Shimbashi, Minato-ku, Tokyo Japan Within Oxygen Co., Ltd. (72) Inventor Daiki 1-16-7 Nishi-Shimbashi, Minato-ku, Tokyo N-Oxygen Co., Ltd. F-term (reference) 3K062 AA24 BA01 CA00 DA21 DB13 3K078 CA08

Claims (8)

[Claims] 1. A combustion abatement system comprising: a main burner for forming a flame for detoxifying a harmful component in a gas to be treated by burning or pyrolyzing the same; and a pilot burner for igniting the main burner. A combustion type abatement apparatus comprising a control means for controlling a fuel supply to a main burner by an external signal. 2. A method for operating a combustion abatement apparatus comprising: a main burner for forming a flame for detoxifying a harmful component in a gas to be treated by burning or pyrolyzing it; and a pilot burner for igniting the main burner. Wherein the pilot burner is always ignited and fuel supply to the main burner is controlled by an external signal. 3. The method according to claim 2, wherein the external signal is a signal from a gas detector that detects a harmful component in the gas to be treated. 4. The gas to be treated is exhaust gas from equipment using a gas containing a harmful component, and the external signal is:
The method according to claim 2, wherein the signal is from a harmful component supply unit that supplies a harmful component to the device. 5. The gas to be treated is exhaust gas from a housing containing a harmful gas filling container and the like, and the control means detects a gas leak from a gas leak detector that detects gas leakage into the housing. 3. The method for operating a combustion type abatement apparatus according to claim 2, wherein the method is a signal. 6. The operation of the combustion type abatement apparatus according to claim 2, wherein a flow direction of the gas to be treated and a flame direction of the main burner intersect at a right angle or an angle close to a right angle. Method. 7. A method for operating a combustion type abatement apparatus according to claim 2, wherein the amount of fuel supplied to the main burner is adjusted according to the composition of the gas to be treated. 8. The method according to claim 1, wherein the amount of the cooling medium / washing medium used in the combustion exhaust gas cooling / washing means provided at the subsequent stage of the combustion abatement apparatus is adjusted in accordance with the amount of fuel supplied to the main burner. The method for operating a combustion type abatement apparatus according to claim 2.