JPH1143312A - Ozone generator - Google Patents

Ozone generator

Info

Publication number
JPH1143312A
JPH1143312A JP20106297A JP20106297A JPH1143312A JP H1143312 A JPH1143312 A JP H1143312A JP 20106297 A JP20106297 A JP 20106297A JP 20106297 A JP20106297 A JP 20106297A JP H1143312 A JPH1143312 A JP H1143312A
Authority
JP
Japan
Prior art keywords
discharge tube
discharge
ground electrode
ozone
inner periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20106297A
Other languages
Japanese (ja)
Inventor
Toshiharu Sato
利晴 佐藤
Masayuki Toda
雅之 戸田
Tomofumi Miyashita
朋史 宮下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Original Assignee
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Corp, Meidensha Electric Manufacturing Co Ltd filed Critical Meidensha Corp
Priority to JP20106297A priority Critical patent/JPH1143312A/en
Publication of JPH1143312A publication Critical patent/JPH1143312A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide an ozone generator capable of compensating corrosion of high pressure electrodes due to ozone and inexpensively and readily producing and making installation space small. SOLUTION: One ends of a discharge tube 12 having closed one end and a discharge tube 13 having opened both end are engaged into stepped parts 11a of a ring-like connecting tool 11 having stepped parts 11a on both sides to form a discharge tube component 14 having closed one end and the discharge tube component 14 is supported through a spacer to the internal circumference of the grounding electrode 2 and raw material gas is made to flow into discharge space between the discharge tubes 12 and 13 and grounding electrode 2 to produce ozone.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、オゾン発生装置
に関するものである。
TECHNICAL FIELD The present invention relates to an ozone generator.

【0002】[0002]

【従来の技術】図11は従来のオゾン発生装置の縦断正
面図を示し、1は円筒状の容器、2は一対の隔壁(又は
スペーサ)3を介して容器1の内周に設けられたステン
レス管からなる接地電極、4は一端閉塞のガラス管から
なる放電管であり、その内周には高圧電極5が設けられ
ている。放電管4は接地電極2の内周にスペーサ6を介
して支持されている。7は高圧交流電源であり、導体8
及びブラシ付導体9を介して高圧電極5と接続されてい
る。
2. Description of the Related Art FIG. 11 is a longitudinal sectional front view of a conventional ozone generator, 1 is a cylindrical container, 2 is a stainless steel provided on the inner periphery of the container 1 via a pair of partition walls (or spacers) 3. A ground electrode 4 formed of a tube is a discharge tube formed of a glass tube whose one end is closed, and a high-voltage electrode 5 is provided on the inner periphery thereof. The discharge tube 4 is supported on the inner periphery of the ground electrode 2 via a spacer 6. Reference numeral 7 denotes a high-voltage AC power supply,
And the high voltage electrode 5 via a brushed conductor 9.

【0003】上記構成において、高圧電極5に高圧交流
を印加するとともに、接地電極2を接地し、放電管4と
接地電極2の間の放電空間に矢印で示すように無声放電
を発生させ、この放電空間に乾燥空気、酸素ガスなどの
オゾン生成原料ガスO2を図の左側から通し、オゾンO3
を生成させて右側から導出している。又、隔壁3間にお
いて容器1の内外に冷却水を通流させている。
In the above configuration, a high-voltage alternating current is applied to the high-voltage electrode 5, the ground electrode 2 is grounded, and a silent discharge is generated in a discharge space between the discharge tube 4 and the ground electrode 2 as shown by an arrow. An ozone generating raw material gas O 2 such as dry air or oxygen gas is passed through the discharge space from the left side of the drawing to obtain ozone O 3.
Is generated and derived from the right side. Further, cooling water flows between the partition walls 3 inside and outside the container 1.

【0004】ところで、放電管4の一本当たりのオゾン
発生量は決まっているので、必要な発生量を得るために
は図12(a),(b)に示すように容器1内に放電管
4を複数並列に配置しているが、大容量のオゾン発生装
置となると、複数並列に配置した接地電極1を直列に接
続し、一つの接地電極2としている。この場合に二つの
方法があり、一つは図13に示すように長さが長い接地
電極2内にその両端から一対の放電管4をその閉塞端を
対向するように挿入配置し、接地電極2と各放電管4と
の間の放電空間に接地電極2の一端から原料ガスを流入
し、他端からオゾンを流出させるようにしたものであ
り、これを直列型と呼んでいる。もう一つは、図14に
示すように二つの接地電極2を配管10を介して連結す
るとともに、配管10にオゾン流出口10aを設け、原
料ガスを矢印で示すように各接地電極2の反接続側端部
から流入させ、オゾン流出口10aからオゾンを取り出
すものであり、これを対向形と呼んでいる。
Since the amount of ozone generated per discharge tube 4 is determined, the required amount of generated ozone can be obtained by placing the discharge tube 4 in the vessel 1 as shown in FIGS. 12 (a) and 12 (b). 4 are arranged in parallel, but in the case of a large-capacity ozone generator, a plurality of ground electrodes 1 arranged in parallel are connected in series to form one ground electrode 2. In this case, there are two methods. One is to insert and dispose a pair of discharge tubes 4 from both ends of the ground electrode 2 with their closed ends facing each other as shown in FIG. The source gas flows into the discharge space between the discharge tube 2 and each discharge tube 4 from one end of the ground electrode 2 and ozone flows out from the other end. This is called a series type. The other is that the two ground electrodes 2 are connected via a pipe 10 as shown in FIG. 14, and an ozone outlet 10a is provided in the pipe 10 so that the raw material gas is supplied to each ground electrode 2 as shown by an arrow. The ozone flows out from the end on the connection side and ozone is taken out from the ozone outlet 10a, which is called a facing type.

【0005】しかしながら、対向形では中央部に配管1
0を必要とするために設置スペースが大きくなり、また
両側から原料ガスを流入するため、双方から流入される
原料ガスの量がアンバランスになり、オゾン発生効率も
低下した。従って、大容量化する場合には図10に示す
ように長さの長い接地電極2を用いるようにしている。
[0005] However, in the opposed type, the pipe 1 is located at the center.
Since 0 is required, the installation space becomes large, and since the raw material gas flows from both sides, the amount of the raw material gas flowing from both sides becomes unbalanced, and the ozone generation efficiency also decreases. Therefore, when increasing the capacity, the ground electrode 2 having a long length is used as shown in FIG.

【0006】[0006]

【発明が解決しようとする課題】ところで、図13に示
す構造のオゾン発生装置の場合、オゾン流出側の放電管
4の内周に設けられた高圧電極5がオゾンにより腐食す
るという課題があった。即ち、高圧電極5は放電管4の
内周にアルミニウムを溶射して形成しているが、この膜
状の高圧電極5がオゾンと接触すると、腐食により膜は
がれなどが生じ、この問題はオゾン濃度が高濃度化する
ほど深刻になってくる。この問題の解決策として、アル
ミニウムより耐久性が高いステンレスのスパッタリング
により高圧電極5を形成することも考えられるが、高価
になるという課題があった。又、放電管4の長さを長く
し、一本当たりの有効放電面積を増すということも考え
られたが、放電管4は一般にガラスからなり、長い放電
管4は製作上困難であり、大量生産が困難であり、大量
生産が不可能であった。又、一端閉塞の放電管4を対向
配置するので、有効放電面積以外の不要のスペースを要
するという課題もあった。
However, in the case of the ozone generator having the structure shown in FIG. 13, there is a problem that the high-voltage electrode 5 provided on the inner periphery of the discharge tube 4 on the ozone outflow side is corroded by ozone. . That is, the high-voltage electrode 5 is formed by spraying aluminum on the inner periphery of the discharge tube 4. When the high-voltage electrode 5 in the form of a film comes into contact with ozone, the film is peeled off due to corrosion. Becomes more serious as the concentration increases. As a solution to this problem, it is conceivable to form the high-voltage electrode 5 by sputtering stainless steel having higher durability than aluminum, but there is a problem that it becomes expensive. It has also been considered that the length of the discharge tube 4 is increased to increase the effective discharge area per one discharge tube. However, the discharge tube 4 is generally made of glass, and the long discharge tube 4 is difficult to manufacture. Production was difficult and mass production was not possible. In addition, since the discharge tube 4 which is closed at one end is disposed to face, there is a problem that an unnecessary space other than the effective discharge area is required.

【0007】この発明は上記のような課題を解決するた
めに成されたものであり、高圧電極のオゾンによる放電
面積の減少を補うことができるとともに、安価で製作容
易であり、不要スペースも小さくすることができるオゾ
ン発生装置を得ることを目的とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and can compensate for a decrease in the discharge area of a high-voltage electrode due to ozone, and is inexpensive, easy to manufacture, and requires little space. It is an object of the present invention to obtain an ozone generator capable of performing the following.

【0008】[0008]

【課題を解決するための手段】この発明の請求項1に係
るオゾン発生装置は、リング状で両側に段部を有する接
続具の段部に各放電管の内周を嵌合して一端閉塞の放電
管構成物を形成し、各放電管と接地電極の間の放電空間
に原料ガスを通流してオゾン発生させるものである。
According to a first aspect of the present invention, there is provided an ozone generating apparatus, wherein the inner periphery of each discharge tube is fitted to the step of a connector having a ring shape and having steps on both sides so as to be closed at one end. Is formed, and a raw material gas is caused to flow through a discharge space between each discharge tube and a ground electrode to generate ozone.

【0009】請求項2に係るオゾン発生装置は、リング
状で両側に段部を有する接続具の段部に各放電管の内周
を嵌合して一端閉塞の放電管構成物を形成し、接続具の
外周を接地電極と嵌合するとともに、接続具の段部と外
周の間にガス通流部を設け、放電管と接地電極の間の放
電空間に原料ガスを通流してオゾンを発生させるもので
ある。
According to a second aspect of the present invention, there is provided an ozone generating apparatus, wherein the inner periphery of each discharge tube is fitted to a step of a ring-shaped connector having steps on both sides to form a discharge tube component having one end closed. The outer periphery of the connector is fitted with the ground electrode, and a gas flow section is provided between the step and the outer periphery of the connector, and the source gas flows into the discharge space between the discharge tube and the ground electrode to generate ozone. It is to let.

【0010】請求項3に係るオゾン発生装置は、リング
状の接続具に各放電管の外周を嵌合して一端閉塞の放電
管構成物を形成し、各放電管と接地電極の間の放電空間
に原料ガスを通流してオゾンを発生させるものである。
According to a third aspect of the present invention, in the ozone generator, the outer circumference of each discharge tube is fitted to a ring-shaped connecting member to form a discharge tube component having one end closed, and the discharge between each discharge tube and the ground electrode is formed. The material gas flows through the space to generate ozone.

【0011】請求項4に係るオゾン発生装置は、リング
状の接続具に各放電管の外周を嵌合して一端閉塞の放電
管構成物を形成し接続具の外周を接地電極と嵌合すると
ともに、ガスの通流部を有し、放電管と接地電極の間の
放電空間に原料ガスを通流してオゾンを発生させるよう
にしたものである。
In the ozone generator according to a fourth aspect of the present invention, the outer periphery of each discharge tube is fitted to a ring-shaped connecting member to form a discharge tube component which is closed at one end, and the outer periphery of the connecting device is fitted to a ground electrode. In addition, a gas flow portion is provided, and the raw material gas flows through a discharge space between the discharge tube and the ground electrode to generate ozone.

【0012】請求項5に係るオゾン発生装置は、各放電
管の高圧電極間を両端に拡開した一対の板ばね部を有す
る導体を介して連結したものである。
According to a fifth aspect of the present invention, in the ozone generator, the high-voltage electrodes of the respective discharge tubes are connected via a conductor having a pair of leaf spring portions which are expanded at both ends.

【0013】請求項6に係るオゾン発生装置は、各放電
管の高圧電極間を両端にブラシ部を有する導体を介して
連結したものである。
According to a sixth aspect of the present invention, in the ozone generator, the high voltage electrodes of the respective discharge tubes are connected via conductors having brush portions at both ends.

【0014】[0014]

【発明の実施の形態】BEST MODE FOR CARRYING OUT THE INVENTION

実施形態1 以下、この発明の実施の形態を図面とともに説明する。
図1は実施形態1によるオゾン発生装置の要部縦断面
図、図2(a),(b)は同じく接続具の側面図及び正
面図を示す。11はリング状の接続具であり、両側には
放電管12,13の内周と嵌合する段部11aを有す
る。放電管12は一端閉塞、放電管13は両端開放であ
り、いずれも内周に高圧電極5が形成されている。そし
て、放電管12の反閉塞端側を一方の段部11aに嵌合
するとともに、放電管13の一端を他方の段部11aに
嵌合し、一端閉塞の放電管構成物14を形成する。接続
具11の外周は放電管12,13の外周と同径となって
おり、放電管構成物14はスペーサ6を介して接地電極
2の内周に支持されている。
Embodiment 1 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a longitudinal sectional view of a main part of an ozone generator according to Embodiment 1, and FIGS. 2A and 2B are a side view and a front view of a connector. Reference numeral 11 denotes a ring-shaped connecting tool, which has stepped portions 11a on both sides to be fitted to the inner circumferences of the discharge tubes 12, 13. The discharge tube 12 is closed at one end and the discharge tube 13 is open at both ends, and the high-voltage electrode 5 is formed on the inner periphery of each of them. Then, the non-closed end side of the discharge tube 12 is fitted to the one step portion 11a, and one end of the discharge tube 13 is fitted to the other step portion 11a to form the discharge tube component 14 which is closed at one end. The outer circumference of the connector 11 has the same diameter as the outer circumferences of the discharge tubes 12 and 13, and the discharge tube component 14 is supported on the inner circumference of the ground electrode 2 via the spacer 6.

【0015】ところで、放電管12,13は別体である
ので、それぞれの内周に設けられた高圧電極5も別体と
なり、これらを高圧電源7と接続しなければならない。
そこで、図3に示すように両端に拡開した一対の板ばね
部15aを有する導体15を用意し、この導体15を放
電管12,13内に挿入し、板ばね部15aを各高圧電
極5とばね圧により接触させる。なお、拡開した一対の
板ばね部15aの先端間の距離は放電管12,13の内
径より大きくなっている。又、原料ガス流入側の放電管
13の高圧電極5は導体8及びブラシ付導体9を介して
高圧電源7と接続する。これにより、各高圧電極5は高
圧電源7と接続される。
By the way, since the discharge tubes 12 and 13 are separate bodies, the high voltage electrodes 5 provided on the respective inner circumferences are also separate bodies and must be connected to the high voltage power supply 7.
Therefore, as shown in FIG. 3, a conductor 15 having a pair of leaf spring portions 15a expanded at both ends is prepared, and this conductor 15 is inserted into the discharge tubes 12 and 13, and the leaf spring portion 15a is And contact by spring pressure. The distance between the distal ends of the pair of expanded leaf spring portions 15a is larger than the inner diameters of the discharge tubes 12 and 13. The high-voltage electrode 5 of the discharge tube 13 on the source gas inflow side is connected to the high-voltage power supply 7 via the conductor 8 and the brushed conductor 9. Thereby, each high-voltage electrode 5 is connected to the high-voltage power supply 7.

【0016】上記構成において、接地電極2と放電管1
2,13との間の放電空間に矢印で示すように原料ガス
が送入され、矢印で示すようにオゾンが生成されて送出
される。接続具11はガスの通流の妨げとならない。
In the above configuration, the ground electrode 2 and the discharge tube 1
The raw material gas is fed into the discharge space between the discharge space 2 and 13 as indicated by an arrow, and ozone is generated and transmitted as indicated by an arrow. The connector 11 does not hinder the flow of gas.

【0017】実施形態1においては、複数の放電管1
2,13を接続具11により接続しており、放電面積を
増すことにより高圧電極5のオゾンによる腐食を補うこ
とができる。又、ステンレスのスパッタリングを必要と
しないために安価になり、また一本の放電管の長さを長
くする必要がないので製作容易であり、さらに放電管1
2,13は閉塞端の対向配置としないので放電以外の不
要スペースを小さくすることができる。又、両端に板ば
ね部15aを有する導体15により各高圧電極5間を接
続しているので、電気的接続が容易となり、部分放電や
集中放電がなく、安定したオゾン生成を行うことができ
る。
In the first embodiment, a plurality of discharge tubes 1
2 and 13 are connected by the connector 11, and corrosion of the high voltage electrode 5 due to ozone can be compensated by increasing the discharge area. In addition, stainless steel sputtering is not required, so that the cost is low, and it is not necessary to lengthen one discharge tube, so that it is easy to manufacture.
Since the closed ends 2 and 13 are not arranged opposite to each other, unnecessary space other than discharge can be reduced. Further, since the high voltage electrodes 5 are connected to each other by the conductors 15 having the leaf spring portions 15a at both ends, electrical connection is facilitated, and stable ozone generation can be performed without partial discharge or concentrated discharge.

【0018】実施形態2 図4は実施形態2によるオゾン発生装置の要部縦断面
図、図5(a),(b)は同じく接続具の側面図及び正
面図であり、16はリング状の接続具であり、両側に放
電管12,13の内周と嵌合する段部16aを有してお
り、この段部16aに放電管12,13の一端を嵌合し
て一端閉塞の放電管構成物17を形成する。接続具16
の外周は接地電極2の内周と嵌合し、また外周側からの
切り込みにより複数のガス通流部16bが形成される。
又、各高圧電極5間は両端に一対の板ばね部15aを有
する導体15により電気的に接続される。
Embodiment 2 FIG. 4 is a longitudinal sectional view of a main part of an ozone generator according to Embodiment 2, and FIGS. 5 (a) and 5 (b) are a side view and a front view of the connecting device, and 16 is a ring-shaped member. Discharge tube having a stepped portion 16a on both sides fitted to the inner circumferences of discharge tubes 12, 13 and fitted with one end of discharge tubes 12, 13 to this stepped portion 16a. Form component 17. Connector 16
Is fitted with the inner periphery of the ground electrode 2, and a plurality of gas flow portions 16b are formed by cutting from the outer periphery.
The high voltage electrodes 5 are electrically connected to each other by a conductor 15 having a pair of leaf spring portions 15a at both ends.

【0019】上記構成において、原料ガスは接地電極2
と放電管12,13との間の放電空間及び接続具16の
ガス通流部16bを通り、オゾンが生成されて流出す
る。ガス通流部16bにはオゾンも通る。
In the above configuration, the source gas is the ground electrode 2
Ozone is generated and flows out through the discharge space between the discharge tubes 12 and 13 and the gas flow portion 16b of the connector 16. Ozone also passes through the gas flow section 16b.

【0020】実施形態2においても実施形態1と同様の
効果を有し、また接続具16はスペーサの役もするので
スペーサ6を削減または不要とすることができる。
The second embodiment has the same effect as the first embodiment, and the connecting member 16 also serves as a spacer, so that the spacer 6 can be reduced or eliminated.

【0021】実施形態3 図6は実施形態3によるオゾン発生装置の要部縦断面
図、図7は同じく接続具の側面図及び正面図を示し、1
8は放電管12,13の外周と嵌合するリング状の接続
具であり、この接続具18に放電管12,13の一端を
嵌合して一端閉塞の放電管構成物19を形成する。接続
具18の外周は放電空間の半分程度まで突出する。その
他の構成及び効果は実施形態1と同様である。なお、接
続具18は単に円筒状に形成すればよいので、製作が容
易である。
Embodiment 3 FIG. 6 is a longitudinal sectional view of a main part of an ozone generator according to Embodiment 3, and FIG.
Reference numeral 8 denotes a ring-shaped connecting tool fitted to the outer circumferences of the discharge tubes 12 and 13. One end of the discharge tubes 12 and 13 is fitted to the connecting tool 18 to form a discharge tube component 19 having one end closed. The outer periphery of the connector 18 projects to about half of the discharge space. Other configurations and effects are the same as those of the first embodiment. In addition, since the connection tool 18 may be simply formed in a cylindrical shape, manufacture is easy.

【0022】実施形態4 図8は実施形態4によるオゾン発生装置の縦断面図、図
9(a),(b)は同じく接続具の側面図及び正面図を
示し、20は放電管12,13の外周と嵌合するリング
状の接続具であり、この接続具20に放電管12,13
の一端を嵌合し、一端閉塞の放電管構成物21を形成す
る。接続具20の外周は接地電極2の内周と嵌合し、ま
た外周側からの切り込みにより複数のガス通流部20a
が形成される。その他の構成は上記各実施形態と同様で
ある。
Embodiment 4 FIG. 8 is a longitudinal sectional view of an ozone generator according to Embodiment 4, FIGS. 9 (a) and 9 (b) show side and front views of the same connector, and 20 is discharge tubes 12 and 13. Is a ring-shaped connecting tool which is fitted to the outer periphery of the discharge tubes 12 and 13.
Are fitted to each other to form a discharge tube component 21 with one end closed. The outer periphery of the connector 20 is fitted with the inner periphery of the ground electrode 2, and a plurality of gas flow portions 20 a
Is formed. Other configurations are the same as those of the above embodiments.

【0023】上記構成において、ガス通流部20aには
原料ガス及びオゾンが通流される。効果は実施形態2と
同様であり、さらに接続具20は段部を設ける必要がな
いので製作が容易となる。
In the above configuration, the source gas and ozone are passed through the gas flow section 20a. The effect is the same as that of the second embodiment, and the connector 20 does not need to be provided with a step, so that the manufacture is easy.

【0024】実施形態5 図10は実施形態5によるオゾン発生装置における両端
にブラシ部22aを有する導体22の概略正面図を示
し、図3に示した導体15に代わって導体22を用いる
こともできる。この場合、各ブラシ部22aが各高圧電
極5と圧力をもって接触し、各高圧電極5間を電気的に
接続する。原料ガス流入側の高圧電極5はブラシ付導体
9等を介して高圧電源7と接続されるので、すべての高
圧電極5が高圧電源7と接続されることになる。従っ
て、各高圧電極5間の電気的接続が容易となり、部分放
電や集中放電がなくなり、安定したオゾン生成を行うこ
とができる。
Fifth Embodiment FIG. 10 is a schematic front view of a conductor 22 having brush portions 22a at both ends in an ozone generator according to a fifth embodiment. The conductor 22 can be used instead of the conductor 15 shown in FIG. . In this case, each brush portion 22a contacts each high voltage electrode 5 with pressure, and electrically connects each high voltage electrode 5. Since the high-voltage electrodes 5 on the source gas inflow side are connected to the high-voltage power supply 7 through the conductors 9 with brushes, all the high-voltage electrodes 5 are connected to the high-voltage power supply 7. Accordingly, electrical connection between the high-voltage electrodes 5 is facilitated, partial discharge and concentrated discharge are eliminated, and stable ozone generation can be performed.

【0025】なお、上記各実施形態においては、接続具
11,16,18,20を1個用いて二つの放電管1
2,13を連結したが、2個以上の接続具11,16,
18,20を用いて三つ以上の放電管12,13(ただ
し、放電管12は一つだけである。)を連結してもよ
く、この場合にはさらに効果を高めることができる。
又、接地電極2や放電管12,13の寸法公差により各
接続具11,16,18,20の内径、外径も若干変え
る必要があるが、弾性があり、耐オゾン性に優れたフッ
素樹脂等を用いることにより上記のような寸法公差に対
応することができる。
In each of the above-described embodiments, two discharge tubes 1 are connected by using one connection tool 11, 16, 18, and 20.
2 and 13 were connected, but two or more connectors 11, 16,
Three or more discharge tubes 12, 13 (however, only one discharge tube 12) may be connected by using 18, 20. In this case, the effect can be further enhanced.
In addition, it is necessary to slightly change the inner diameter and the outer diameter of each of the connecting tools 11, 16, 18, and 20 depending on the dimensional tolerance of the ground electrode 2 and the discharge tubes 12 and 13. However, the fluorine resin having elasticity and excellent ozone resistance is required. By using the above, it is possible to cope with the dimensional tolerance as described above.

【0026】[0026]

【発明の効果】以上のようにこの発明の請求項1によれ
ば、複数の放電管を接続具により接続しており、放電面
積の増大により高圧電極のオゾンによる腐食を補うこと
ができる。しかも、ステンレスのスパッタリングを必要
としないので安価となり、一本の放電管の長さを長くす
る必要がないので製作容易となる。又、放電管の閉塞端
の対向配置としないので、スペースを小さくすることが
できる。
As described above, according to the first aspect of the present invention, a plurality of discharge tubes are connected by the connector, and the corrosion of the high-voltage electrode due to ozone can be compensated for by increasing the discharge area. In addition, since stainless steel is not required for sputtering, it is inexpensive, and it is not necessary to lengthen one discharge tube, so that it is easy to manufacture. In addition, since the closed end of the discharge tube is not arranged to face the space, the space can be reduced.

【0027】又、請求項2によれば、請求項1と同様の
効果を有し、また接続具は接地電極の内周と嵌合するの
でスペーサの役目もし、スペーサを削減または不要とす
ることができる。
According to the second aspect, the same effects as those of the first aspect are obtained, and since the connecting tool is fitted to the inner periphery of the ground electrode, it also serves as a spacer, so that the spacer is reduced or eliminated. Can be.

【0028】請求項3においても請求項1と同様の効果
を有し、また段部を設けないので製作が容易となる。
The third aspect has the same effect as that of the first aspect, and since no step is provided, the manufacture becomes easy.

【0029】請求項4によれば、請求項2と同様の効果
を有し、また接続具は段部がないので製作を容易とする
ことができる。
According to the fourth aspect, the same effects as those of the second aspect are obtained, and since the connecting tool has no stepped portion, it can be easily manufactured.

【0030】請求項5,6によれば、両端に拡開した板
ばね部あるいはブラシ部を有する導体を介して各高圧電
極間を連結したので、この接続が確実容易となり、安定
したオゾン生成を行うことができる。
According to the fifth and sixth aspects, since the high voltage electrodes are connected via the conductor having the leaf spring portions or the brush portions expanded at both ends, this connection is easily and reliably performed, and stable ozone generation is achieved. It can be carried out.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の実施形態1によるオゾン発生装置の
要部縦断面図である。
FIG. 1 is a vertical sectional view of a main part of an ozone generator according to Embodiment 1 of the present invention.

【図2】実施形態1による接続具の側面図及び正面図で
ある。
2A and 2B are a side view and a front view of the connecting device according to the first embodiment.

【図3】実施形態1による両端に板ばね部を有する導体
の正面図及び平面図である。
3A and 3B are a front view and a plan view of a conductor having a leaf spring portion at both ends according to the first embodiment.

【図4】実施形態2によるオゾン発生装置の要部縦断面
図である。
FIG. 4 is a vertical sectional view of a main part of an ozone generator according to a second embodiment.

【図5】実施形態2による接続具の側面図及び正面図で
ある。
5A and 5B are a side view and a front view of a connection device according to a second embodiment.

【図6】実施形態3によるオゾン発生装置の要部縦断面
図である。
FIG. 6 is a vertical sectional view of a main part of an ozone generator according to a third embodiment.

【図7】実施形態3による接続具の側面図及び正面図で
ある。
FIG. 7 is a side view and a front view of a connection tool according to a third embodiment.

【図8】実施形態4によるオゾン発生装置の要部縦断面
図である。
FIG. 8 is a longitudinal sectional view of a main part of an ozone generator according to a fourth embodiment.

【図9】実施形態4による接続具の側面図及び正面図で
ある。
FIG. 9 is a side view and a front view of a connection tool according to a fourth embodiment.

【図10】実施形態5による両端にブラシ部を有する導
体の概略正面図である。
FIG. 10 is a schematic front view of a conductor having brush portions at both ends according to a fifth embodiment.

【図11】従来装置の縦断面図である。FIG. 11 is a longitudinal sectional view of a conventional device.

【図12】従来の複数の放電管を用いたオゾン発生装置
の側面図及び正面図である。
FIG. 12 is a side view and a front view of a conventional ozone generator using a plurality of discharge tubes.

【図13】従来の放電管を直列配置した場合のオゾン発
生装置の要部縦断面図である。
FIG. 13 is a vertical sectional view of a main part of an ozone generator when conventional discharge tubes are arranged in series.

【図14】従来の放電管を直列配置した場合のオゾン発
生装置の要部縦断面図である。
FIG. 14 is a longitudinal sectional view of a main part of an ozone generator when conventional discharge tubes are arranged in series.

【符号の説明】[Explanation of symbols]

1…容器 2…接地電極 5…高圧電極 6…スペーサ 7…高圧電源 8,15,22…導体 9…ブラシ付導体 11,16,18,20…接続具 11a,l1b…段部 12,13…放電管 14,17,19,21…放電管構成物 15a…板ばね部 16b,20a…ガス通流部 22a…ブラシ部 DESCRIPTION OF SYMBOLS 1 ... Container 2 ... Ground electrode 5 ... High voltage electrode 6 ... Spacer 7 ... High voltage power supply 8, 15, 22 ... Conductor 9 ... Conductor with brush 11, 16, 18, 20 ... Connection tool 11a, 11b ... Step part 12, 13 ... Discharge tubes 14, 17, 19, 21: Discharge tube components 15a: Plate spring portions 16b, 20a: Gas flow portions 22a: Brush portions

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 容器内に支持されるとともに、接地され
た管状の接地電極と、放電管と接続具からなり、接地電
極の内周にスペーサを介して支持された一端閉塞の放電
管構成物と、放電管の内周に設けられ、高圧電源と接続
された高圧電極を備え、接続具はリング状で両側に放電
管の内周と嵌合する段部を有し、この接続具を介して複
数の放電管を連結し、放電管と接地電極の間の放電空間
に原料ガスを通流してオゾンを発生させるようにしたこ
とを特徴とするオゾン発生装置。
1. A discharge tube structure comprising a tubular ground electrode supported in a container and grounded, a discharge tube and a connector, and one end of which is supported on the inner periphery of the ground electrode via a spacer. And a high-voltage electrode provided on the inner periphery of the discharge tube and connected to a high-voltage power supply, and the connector has a ring-like shape and has a step portion fitted on both sides to the inner periphery of the discharge tube. An ozone generating apparatus, wherein a plurality of discharge tubes are connected to each other to generate ozone by flowing a source gas into a discharge space between the discharge tubes and a ground electrode.
【請求項2】 容器内に支持されるとともに、接地され
た管状の接地電極と、放電管と接続具からなり、接地電
極の内周に設けられた一端閉塞の放電管構成物と、放電
管の内周に設けられ、高圧電源と接続された高圧電極を
備え、接続具はリング状で両側に放電管の内周と嵌合す
る段部を有し、この接続具をを介して複数の放電管を連
結し、かつ接続具は接地電極の内周と嵌合するととも
に、段部と外周との間にガスの通流部を有し、放電管と
接地電極の間の放電空間に原料ガスを通流してオゾンを
発生させるようにしたことを特徴とするオゾン発生装
置。
2. A discharge tube comprising a tubular ground electrode supported in a container and grounded, comprising a discharge tube and a connector, and provided at one end of the ground electrode and closed at one end; A high-voltage electrode connected to a high-voltage power supply is provided on the inner periphery of the discharge tube, and the connector has a ring-shaped stepped portion on both sides to be fitted to the inner periphery of the discharge tube. The discharge tube is connected and the connector is fitted to the inner periphery of the ground electrode, and has a gas flow portion between the step and the outer periphery. An ozone generator characterized in that ozone is generated by flowing gas.
【請求項3】 容器内に支持されるとともに、接地され
た管状の接地電極と、放電管と接続具からなり、接地電
極の内周にスペーサを介して支持された一端閉塞の放電
管構成物と、放電管の内周に設けられ、高圧電源と接続
された高圧電極を備え、接続具は放電管の外周と嵌合す
るリング状であり、この接続具を介して複数の放電管を
連結し、放電管と接地電極の間の放電空間に原料ガスを
通流してオゾンを発生させるようにしたことを特徴とす
るオゾン発生装置。
3. A discharge tube structure comprising a tubular ground electrode supported in a container and grounded, a discharge tube and a connector, and one end of which is supported on the inner periphery of the ground electrode via a spacer. And a high-voltage electrode provided on the inner periphery of the discharge tube and connected to a high-voltage power supply, and the connector has a ring shape that fits with the outer periphery of the discharge tube, and connects a plurality of discharge tubes via the connector. An ozone generator characterized in that ozone is generated by flowing a source gas into a discharge space between a discharge tube and a ground electrode.
【請求項4】 容器内に支持されるとともに、接地され
た管状の接地電極と、放電管と接続具からなり、接地電
極の内周に設けられた一端閉塞の放電管構成物と、放電
管の内周に設けられ、高圧電源と接続された高圧電極を
備え、接続具は放電管の外周と嵌合するリング状であ
り、この接続具を介して複数の放電管を連結し、かつ接
続具は接地電極の内周と嵌合するとともに、ガス通流部
を有し、放電管と接地電極の間の放電空間に原料ガスを
通流してオゾンを発生させるようにしたことを特徴とす
るオゾン発生装置。
4. A discharge tube comprising a tubular ground electrode supported in a container and grounded, comprising a discharge tube and a connector, and having a one-end closed discharge tube provided on the inner periphery of the ground electrode. A high-voltage electrode connected to a high-voltage power supply and connected to the outer periphery of the discharge tube in a ring shape. The plurality of discharge tubes are connected and connected via the connection device. The tool is fitted with the inner periphery of the ground electrode, has a gas flow portion, and flows the raw material gas into the discharge space between the discharge tube and the ground electrode to generate ozone. Ozone generator.
【請求項5】 一つの放電管の内周に形成された高圧電
極と高圧電源とをブラシ付導体を介して連結するととも
に、各放電管の高圧電極間を両端に拡開した一対の板ば
ね部を有する導体を介して連結したことを特徴とする請
求項1〜4のいずれかに記載のオゾン発生装置。
5. A pair of leaf springs, wherein a high voltage electrode formed on the inner periphery of one discharge tube and a high voltage power source are connected via a brushed conductor, and the high voltage electrodes of each discharge tube are expanded at both ends. The ozone generator according to any one of claims 1 to 4, wherein the ozone generator is connected via a conductor having a portion.
【請求項6】 一つの放電管の内周に形成された高圧電
極と高圧電源とをブラシ付導体を介して連結するととも
に、各放電管の高圧電極間を両端にブラシ部を有する導
体を介して連結したことを特徴とする請求項1〜4のい
ずれかに記載のオゾン発生装置。
6. A high-voltage electrode formed on the inner periphery of one discharge tube and a high-voltage power supply are connected via a brushed conductor, and the high-voltage electrodes of each discharge tube are connected via a conductor having brush portions at both ends. The ozone generator according to any one of claims 1 to 4, wherein the ozone generator is connected to the ozone generator.
JP20106297A 1997-07-28 1997-07-28 Ozone generator Pending JPH1143312A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20106297A JPH1143312A (en) 1997-07-28 1997-07-28 Ozone generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20106297A JPH1143312A (en) 1997-07-28 1997-07-28 Ozone generator

Publications (1)

Publication Number Publication Date
JPH1143312A true JPH1143312A (en) 1999-02-16

Family

ID=16434758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20106297A Pending JPH1143312A (en) 1997-07-28 1997-07-28 Ozone generator

Country Status (1)

Country Link
JP (1) JPH1143312A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210117813A (en) * 2020-03-20 2021-09-29 주식회사 아인스 Discharge tube and method for manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210117813A (en) * 2020-03-20 2021-09-29 주식회사 아인스 Discharge tube and method for manufacturing the same

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