JPH113800A - Manufacture of accelerating tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To place disks in a furnace by easily combining them. SOLUTION: In a manufacturing method for an accelerating tube, wherein an accelerating tube body is made by bonding many pieces of disk 9 with a cell to make electron passage 7 at an axial position ad an independent high-frequency electric field in it, many pieces of disk 9 are inserted through a highly accurate die pole 19 made of silver, the outer diameter of which is almost equal to that of the electron passage 7 of the disk 9. Thereby, the disks 9 are aligned with high precision, the die pole 19 is placed together with the disks 9 in a vacuum furnace 18, and is heated in the vacuum furnace 18 so as to produce an accelerating tube body by subjecting to diffusion welding between each of the disks 9.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an acceleration tube, and more particularly, to a method for manufacturing an acceleration tube in which disks can be easily combined and put into a furnace. It is.

[0002]

2. Description of the Related Art Accelerators are used to accelerate charged particles such as electrons to a speed close to the speed of light, and to use them for research and investigation of various physical phenomena and for other purposes.

[0003] Of the above accelerators, a linear accelerator is, as shown in FIG. 2, an electron gun 2 for emitting electrons 1, a straight tubular vacuum duct 3 connected to the electron gun 2, and an intermediate portion of the vacuum duct 3. And a high-frequency power supply 5 via a waveguide 4.
As shown in FIGS. 3 and 4, the acceleration tube 6 is configured to increase the speed of the electrons 1 by a high-frequency current sent from the device.

[0004] Then, the electrons 1 emitted from the electron gun 2 are
Enters the vacuum duct 3, and is accelerated by a high-frequency current sent from the high-frequency power source 5 via the waveguide 4 in a portion of the acceleration tube 6 provided between the vacuum ducts 3 on the way. ing.

As shown in FIG. 5, the accelerating tube 6 has a larger diameter than the electron path 7 for passing the electron 1 and the electron path 7 for generating an independent high-frequency electric field inside the accelerating tube 6, as shown in FIG. As shown in FIG. 3, a large number (about 150 to 200) of copper disks 9 formed with cells 8 are joined in the axial direction to form an accelerating tube main body 10, and an accelerating tube main body 10 is formed. 1
End member 12 having a waveguide entrance 11 at each end of
And an end member 14 having a waveguide outlet 13.

The accelerating tube main body 10 must be formed by combining a large number of disks 9 in order to form a large number of cells 8 therein, and the error in the assembly of the disks 9 is 5 μm or less. However, conventionally, as shown in FIG. 6, a copper disk 9 is precisely arranged in a horizontal direction on a V-block 17 made of lizard stone having a small thermal expansion as shown in FIG. After being aligned and restrained by a restraint (not shown), the V-block 17 is vertically placed in a vertical vacuum furnace 18 as shown in FIG. It is manufactured by diffusion bonding between the plates 9.

[0007]

However, the above-mentioned conventional method for manufacturing an acceleration tube has the following problems.

[0010] That is, since the V-block 17 made of midge stone is a heavy material, it is not easy to handle the V-block 17 in which the disks 9 are arranged vertically in the vertical vacuum furnace 18.

Further, the work of arranging the copper disks 9 in the horizontal direction on the V-block 17 made of lizard stone is also unstable and poor in workability.

An object of the present invention is to provide a method of manufacturing an acceleration tube that can be easily assembled into a furnace by combining disks in view of the above-mentioned circumstances.

[0011]

SUMMARY OF THE INVENTION The present invention is directed to an axial position,
In a method for manufacturing an acceleration tube, a large number of disks 9 each having an electron passage 7 and a cell 8 for creating an independent high-frequency electric field are joined to form an acceleration tube main body 10. A large number of disks 9 are passed through a high-precision mold rod 19 having an outer diameter substantially equal to the electron path 7 of the above, so that the disks 9 are aligned with high accuracy, and the mold rods 19 are placed together with the disk 9 in a vacuum furnace. The method according to the present invention is directed to a method of manufacturing an acceleration tube, wherein each of the disks 9 is diffused and bonded to each other to manufacture an acceleration tube main body 10 by placing the disk in a vacuum furnace 18 and heating in a vacuum furnace 18.

In this case, the mold rod 19 may be made of a material (for example, silver) which has a large difference between the material of the disk 9 and the coefficient of thermal expansion and can withstand high temperatures.

When the disks 9 placed together with the mold rods 19 in the vacuum furnace 18 are diffusion bonded at a temperature of 900 ° C. to form the accelerating tube main body 10, the difference in the coefficient of thermal expansion between copper and silver is obtained. Since the disk 9 and the mold rod 19 are peeled off,
The mold rod 19 is removed from the acceleration tube main body 10.

As described above, in the present invention, since the disk 9 is passed through the mold rod 19, the disk 9 is centered. Therefore, the disk 9 can be easily centered. And the mold rod 19 is lightweight, so that the mold rod 1
It is possible to facilitate handling when the disk 9 is put into the vacuum furnace 18 together with the disk 9.

[0015]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic perspective side view for explaining a method according to an embodiment of the present invention.

Since the configuration of the linear accelerator and the configuration of the acceleration tube are the same as those in FIGS. 2 to 5, the same parts are denoted by the same reference numerals and description thereof will be omitted.

According to the present invention, a large number of disks 9 are passed through a high-precision mold rod 19 having an outer diameter substantially equal to that of the electron passage 7 formed in the disk 9, so that the disk 9 can be accurately aligned with the core. Then, the mold rod 19 is restrained by a restraint (not shown), and the disc 9 is vertically inserted into the vertical vacuum furnace 18 together with the disc 9.
By heating at a temperature of 00 ° C., diffusion disks are bonded to each other between the discs 9 to manufacture the accelerator tube main body 10.

At this time, the mold rod 19 is made of a material having a larger coefficient of thermal expansion than copper constituting the disk 9 and capable of withstanding a high temperature of about 900 ° C. One such material is silver.

When the disks 9 placed together with the mold rods 19 in the vacuum furnace 18 are diffusion bonded at a temperature of 900 ° C. to form the accelerating tube main body 10, the difference in the coefficient of thermal expansion between copper and silver causes Since the disk 9 and the mold rod 19 are peeled off,
Using a manipulator (not shown) or the like,
From the mold bar 19.

As described above, according to the present invention, the disk 9 is centered by passing the disk 9 through the mold rod 19, so that the disk 9 can be easily aligned. Since the mold rod 19 is lightweight, the handling when the disk 9 is put into the vacuum furnace 18 together with the mold rod 19 can be facilitated.

It should be noted that the present invention is not limited only to the above-described embodiment, and it goes without saying that various changes can be made without departing from the spirit of the present invention.

[0023]

As described above, according to the method for manufacturing an acceleration tube of the present invention, an excellent effect that a disk can be easily combined and put into a furnace can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic perspective side view illustrating a method according to an example of an embodiment of the present invention.

FIG. 2 is a schematic plan view of a linear accelerator.

FIG. 3 is a side sectional view of an acceleration tube.

4 is a view taken in the direction of arrows IV-IV in FIG. 3;

FIG. 5 is a side view of a disk constituting the accelerator tube main body.

FIG. 6 is a front view of a V block for arranging disks with high accuracy.

FIG. 7 is a schematic perspective side view illustrating a conventional method.

[Explanation of symbols]

 7 electron passage 8 cell 9 disk 10 accelerator tube body 18 vacuum furnace 19 type rod

Claims (2)

[Claims] 1. An accelerating tube main body comprising: a plurality of disks (9) each having an electron passage (7) at an axial center thereof and a cell (8) for generating an independent high-frequency electric field therein; The method for manufacturing an acceleration tube according to (10), wherein the disk (9)
A large number of disks (9) are passed through a high-precision mold rod (19) having an outer diameter substantially equal to that of the electronic path (7), so that the discs (9) are aligned with high precision. The disk (9) is put into the vacuum furnace (18) together with the disk (9), and heated in the vacuum furnace (18) to diffuse and bond between the disks (9) to produce the accelerator tube body (10). A method for manufacturing an acceleration tube. 2. The method according to claim 1, wherein the mold rod (19) is made of a material having a large difference in thermal expansion coefficient from that of the copper disk (9) and capable of withstanding high temperatures.