JPH11352375A - Device for supporting optical parts - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent optical parts from being deformed or damaged by supporting the optical parts in a non-contact state. SOLUTION: This optical parts supporting device is constituted of a supporting member 10 supporting a lens 1 from the below, an air path 12 having plural air blowing off nozzles 13 at positions opposed to the lower surface 3 of the lens 1 in the member 10 and formed in the member 10 and an air supply source 20 supplying a fluid having a specified pressure to the air path 12. By supplying air from the supply source 20 to the path 12 at the specified pressure to discharge air from the nozzles 13, the lens 1 is supported in a floating state on the member 10 by the pressure of the discharged air. Thus, the lens or the like is supported in a non-contact state and there is no fear that the lens or the like is deformed or damaged.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for supporting an optical component such as an optical lens in a non-contact state.

[0002]

2. Description of the Related Art Since the surface shape of an optical component, for example, an optical lens greatly affects the performance of the component, it is necessary to accurately measure the surface shape. For this reason, measurement of the surface shape of the lens and the like have been conventionally performed using a three-dimensional shape measuring device or the like. However, when such shape measurement is performed, it is necessary to fix and support an optical component.

[0003]

Conventionally, when supporting the optical component, the optical component is directly mounted and supported on a support for supporting the optical component. There has been a problem that the optical component is deformed or damaged.

SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide an optical component supporting apparatus capable of supporting an optical component in a non-contact manner and preventing the optical component from being deformed or damaged.

[0005]

In order to achieve the above object, an optical component supporting apparatus according to the present invention comprises a support member for supporting an optical component from below, and a position of the support member opposed to a lower surface of the optical component. A fluid passage formed in the support member having a plurality of fluid ejection ports, and a fluid supply source for supplying a fluid of a predetermined pressure to the fluid passage. Then, the fluid is supplied from the fluid supply source to the fluid passage at a predetermined pressure and is discharged from the fluid ejection port, and the optical component is supported on the support member in a floating state by the pressure of the discharged fluid.
Thereby, the optical component can be supported in a non-contact state, and there is no possibility that the optical component is deformed or damaged.

It is preferable that a support surface having substantially the same shape as that of the lower surface of the optical component and having a shape in which concavities and convexities are reversed is formed on the upper surface of the support member, and a fluid ejection port is provided on the support surface.
Thus, the optical component placed on the support surface can be stably supported while slightly floating from the support surface due to the fluid pressure discharged from the fluid outlet.

Further, the support member is constituted by a plurality of divided support members for supporting the optical component from below at a plurality of locations on the lower surface of the optical component, and a fluid passage having a fluid ejection port is formed in each of the divided support members. Is also good. Also in this case, the optical component can be supported in a slightly floating state, that is, in a non-contact state by the fluid pressure discharged from the fluid ejection port.

A guide surface having a shape slightly larger than the side surface shape of the optical component and having a shape in which the unevenness is reversed is formed surrounding the upper surface of the support member. The guide surface is connected to a fluid passage and fluid is directed toward the side surface of the optical component. It is preferable to form a second fluid ejection port to be ejected. With this configuration, the second
The optical component can be fixedly held in the space surrounded by the guide surface by the fluid pressure discharged from the fluid ejection port.

An optical component supporting apparatus according to the present invention comprises a supporting member having a lower surface with a supporting surface having substantially the same shape as the upper surface of the optical component and having irregularities reversed, and a plurality of suction ports formed on the supporting surface. It is also possible to comprise a fluid passage formed in the supporting member and a negative pressure supply source for applying a predetermined negative pressure to the fluid passage. In the case of this device, the suction is applied from the negative pressure supply source to the fluid passage and acts on the fluid ejection port, and the optical component is sucked in a state in which the optical component is suspended slightly away from the support surface, It can be supported in a non-contact state.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. Lens 1 (optical component) by the optical component support device according to the first embodiment of the present invention
FIG. 1 shows a state in which the supporting member 10 is supported by a supporting member 10 and an air supply source 20 (fluid supply source).
It is composed of Note that the support member 10 and the lens 1 supported by the support member 10 are taken out and shown in an enlarged scale in FIG. 2, and the description will be made with reference to FIGS.

On the upper surface of the supporting member 10, a supporting surface 1 having substantially the same shape as the lower surface 3 of the lens 1 and having a shape in which the unevenness is reversed.
1 is formed. Since the lens 1 of this example is a convex lens and the lower surface 3 has a convex spherical shape, a concave spherical supporting surface 11 corresponding to the convex spherical shape below the lens is formed on the upper surface of the support member 10. A large number of air passages 12 (fluid passages) penetrating vertically are formed in the support member 10.
The upper end opens into the support surface 11 to form an air jet 13 (fluid jet). Although shown in a plan view, the air passages 12 are formed in a two-dimensional array that uniformly covers the support surface 11.

An air supply cover 25 is attached so as to cover all the air inlets 14 located at the lower ends of the air passages 12, and the internal space of the cover 25 is connected to the air supply source 20. Air having a predetermined pressure is supplied from the air supply source 20 to the internal space of the air supply cover 25, and the air is ejected from the air ejection port 13 through each air passage 12.

In this manner, the pressure of the air jetted from the air jet port 13 acts on the lower surface 3 of the lens 1 placed on the support surface 11, and the lens 1 is held while slightly lifted from the support surface 11. Is done. That is, the lens 1 is supported by the support surface 11 in a non-contact state, and the lens 1 is
There is no danger of being deformed or damaged by contact with the substrate. In this manner, the shape of the upper surface 2 of the lens 1 is measured using a three-dimensional measuring device or the like in a state where the lens 1 is supported in a non-contact manner.

FIG. 3 shows a state in which the lens 1 is supported by the support member 30 according to the second embodiment of the present invention. On the upper surface of the support member 30, a support surface 31 having substantially the same shape as the lower surface 3 of the lens 1 and having a shape in which the unevenness is reversed is formed. Further, a cylindrical guide portion 35 surrounding the support surface 31 is formed, and an inner peripheral surface of the guide portion 35 forms a guide surface 35 a surrounding the outer peripheral side surface 4 of the lens 1.
The support member 30 has a number of first air passages 3 penetrating vertically.
2 are formed, and the upper end thereof opens to the support surface 31 to form a first air ejection port 33. Further, the guide unit 3
5 are formed with a large number of second air passages 36 penetrating in a horizontal direction and a radial direction.
The second air outlet 37 is formed by opening to 5a.

The air supply covers all the first air inlets 34 located at the lower end of the first air passage 32 and all the second air inlets 38 located at the outer peripheral end of the second air passage 36. A cover (not shown) is attached, and air of a predetermined pressure is supplied from an air supply source (not shown) to the internal space of the cover, and the air is supplied from the air outlets 33 and 37 through the respective air passages 32 and 36. It is gushing.

In this manner, the pressure of the air jetted from the first air jet port 33 acts on the lower surface 3 of the lens 1 placed on the support surface 31, and the lens 1 is slightly lifted from the support surface 31. Is held. Further, the lens 1 is fixedly held in the space surrounded by the guide surface 35a by the pressure of the air jetted from the second air jet port 37 to the lens side surface 4. Thus, the lens 1 is supported on the support surface 31 in a non-contact state.

FIG. 4 shows a state in which the lens 1 is supported by the support member 40 according to the third embodiment of the present invention. The support member 40 includes a plurality of divided support members 41 disposed at a position facing the lower surface 3 of the lens 1 and a plurality of divided guide members 45 disposed at a position surrounding the outer peripheral side surface 4 of the lens 1. Be composed. A large number of first air passages 42 penetrating vertically are formed in the divided support member 41, and the upper end thereof is opened at a position facing the lower surface 3 of the lens 1 to form a first air ejection port 43. I have. The divided guide member 45 has a large number of second
An air passage 46 is formed, and an inner peripheral end thereof is opened at a position facing the outer peripheral side surface 4 of the lens 1 to form a second air outlet 47.

Also in this support member 40, all the first air inlets 44 located at the lower end of the first air passage 42,
An air supply cover (not shown) is attached so as to cover all the second air inflow ports 48 located at the outer peripheral end of the second air passage 46, and a predetermined air supply source (not shown) is provided in an inner space of the cover. Is supplied from the air outlets 43 and 47 through the respective air passages 42 and 46.

In this manner, the pressure of the air jetted from the first air jet port 43 acts on the lower surface 3 of the lens 1 placed thereon, and the lens 1 is slightly lifted from the upper surface of the divided support member 41. Is held. Further, the lens 1 is surrounded and held by the divided guide member 45 by the pressure of the air jetted from the second air jet port 47 to the lens side surface 4. Thereby, the lens 1 is supported in a non-contact state.

The divided support member 41 may be formed of a concentric ring, or may be formed of a cylindrical guide member instead of the divided guide member 45.

FIG. 5 shows a state in which the lens 1 is supported by the support member 50 according to the fourth embodiment of the present invention. The support member 50 is a ring-shaped support member 51 disposed at a position facing the outer peripheral portion of the lower surface 3 and the outer peripheral side surface 4 of the lens 1, and is disposed at a position facing the outer peripheral portion of the upper surface 2 of the lens 1. And a ring-shaped pressing member 55. Note that the support member 51 and the pressing member 55 may have a divided configuration.

The support member 51 has a first air passage 52 having an air ejection port penetrating vertically and facing the outer peripheral portion of the lens lower surface 3 and penetrating in the horizontal and radial directions to face the lens outer peripheral side surface 4. Air passage 5 having an air jet port
3 are formed. On the other hand, a third air passage 56 is formed in the pressing member 55 and has an air ejection port penetrating vertically and facing the outer peripheral portion of the lens upper surface 2.

The first to third air passages 52, 53, 5
Air having a predetermined pressure is supplied to an air supply source 6 from the air supply source (not shown), whereby the lens 1 is supported in a non-contact state with any of the support member 51 and the pressing member 55. In addition,
In this device, since the pressing member 55 applies a pressing force from above, the lens 1 is fixed and held more stably.

FIG. 6 shows a state in which the lens 1 (optical component) is supported by the support member 60 according to the fifth embodiment of the present invention. On the lower surface of the support member 60, a support surface 61 having substantially the same shape as the upper surface 2 of the lens 1 and having a shape in which the unevenness is reversed is formed. A large number of air passages 62 penetrating vertically are formed in the support member 60, and the lower end thereof is
1 to form a suction port 63.

An air suction cover (not shown) covers all the air suction ports 64 located at the upper ends of these air passages 62.
Is attached, and the inner space of the cover is connected to a negative pressure supply source (not shown). The negative pressure supply source makes the internal space of the air suction cover a negative pressure, and this negative pressure acts on the air suction port 63 through each air passage 62. As a result, the lens 1 is supported by the support member 60 by the negative pressure from the air suction port 63.
Supported in a suspended state.

In the above example, air at a predetermined pressure is supplied, but other gas or liquid may be used instead of air (air).

[0027]

As described above, according to the present invention,
A support member that supports the optical component from below, a fluid passage formed in the support member having a plurality of fluid ejection ports at a position facing the lower surface of the optical component in the support member, and a predetermined pressure applied to the fluid passage. An optical component support device is constituted by a fluid supply source for supplying a fluid, a fluid is supplied from the fluid supply source to the fluid passage at a predetermined pressure, and the fluid is discharged from a fluid ejection port, and the optical component is supported by the pressure of the discharged fluid. Since the optical component is supported in a floating state on the member, the optical component can be supported in a non-contact state, and there is no possibility that the optical component is deformed or damaged.

It is preferable to form a support surface having substantially the same shape as the lower surface shape of the optical component on the upper surface of the support member and having a shape in which concavities and convexities are reversed, and to provide a fluid ejection port on the support surface.
Thus, the optical component placed on the support surface can be stably supported while slightly floating from the support surface due to the fluid pressure discharged from the fluid outlet.

The support member is constituted by a plurality of divided support members for supporting the optical component from below at a plurality of locations on the lower surface of the optical component, and a fluid passage having a fluid ejection port is formed in each of the divided support members. Is also good. Also in this case, the optical component can be supported in a slightly floating state, that is, in a non-contact state by the fluid pressure discharged from the fluid ejection port.

A guide surface having a shape slightly larger than the side surface shape of the optical component and in which the irregularities are reversed is formed surrounding the upper surface of the support member, and the guide surface is connected to a fluid passage and a fluid flows toward the side surface of the optical component. It is preferable to form a second fluid ejection port to be ejected. With this configuration, the second
The optical component can be fixedly held in the space surrounded by the guide surface by the fluid pressure discharged from the fluid ejection port.

An optical component supporting apparatus according to the present invention comprises a supporting member having a lower surface with a supporting surface having substantially the same shape as the upper surface of the optical component and having irregularities reversed, and a plurality of suction ports formed on the supporting surface. It is also possible to comprise a fluid passage formed in the supporting member and a negative pressure supply source for applying a predetermined negative pressure to the fluid passage. In the case of this device, the suction is applied to the fluid passage from the negative pressure supply source and acts on the fluid ejection port, thereby sucking the optical component in a state in which the optical component is suspended slightly away from the support surface, It can be supported in a non-contact state.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an optical component support device according to a first embodiment of the present invention.

FIG. 2 is a sectional view of a support member constituting the device according to the first embodiment.

FIG. 3 is a cross-sectional view of a support member according to a second embodiment of the present invention.

FIG. 4 is a sectional view of a support member according to a third embodiment of the present invention.

FIG. 5 is a sectional view of a support member according to a fourth embodiment of the present invention.

FIG. 6 is a sectional view of a support member according to a fifth embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Lens 2 Lens upper surface 3 Lens lower surface 4 Lens outer peripheral side surface 10 Support member 11 Support surface 12 Air passage 13 Air ejection port 20 Air supply source

Claims (5)

[Claims] A support member for supporting the optical component from below, a fluid passage formed in the support member having a plurality of fluid ejection ports at a position of the support member facing a lower surface of the optical component, A fluid supply source for supplying a fluid of a predetermined pressure to these fluid passages, the fluid supply source being supplied to the fluid passage and being discharged from the fluid ejection port by the pressure of the fluid, and floated on the support member. An optical component support device configured to support the optical component. 2. A support surface having substantially the same shape as a lower surface shape of the optical component and having a shape in which concavities and convexities are reversed is formed on an upper surface of the support member, and the fluid ejection port is provided on the support surface. 2. The optical component supporting apparatus according to claim 1, wherein the optical component mounted on a surface is supported in a state of being slightly floated from the support surface by a fluid pressure discharged from the fluid ejection port. . 3. The fluid passage having a plurality of divided support members for supporting the optical component from below at a plurality of locations on the lower surface of the optical component, and each of the divided support members having the fluid ejection port. The optical component supporting device according to claim 1, wherein the optical component supporting device is formed. 4. A guide surface having a shape slightly larger than a side surface shape of the optical component and having a shape in which concavities and convexities are reversed is formed surrounding the upper surface of the support member, and the guide surface is connected to the fluid passage and the optical component has A second fluid ejection port for ejecting a fluid toward a side surface is formed, and the optical component is fixedly held in a space surrounded by the guide surface by a fluid pressure ejected from the second fluid ejection port. The optical component supporting device according to any one of claims 1 to 3, wherein: 5. A support member having a lower surface with a support surface having substantially the same shape as the upper surface shape of the optical component and the shape of the concave and convex reversed, and the support member having a plurality of suction ports on the support surface. A fluid passage formed, and a negative pressure supply source for applying a predetermined negative pressure to these fluid passages. The suction force applied to the fluid passage from the negative pressure supply source and acting on the fluid ejection port causes An optical component supporting device configured to suction-support the optical component in a state slightly away from a supporting surface.