JPH11350125A5 - - Google Patents

Info

Publication number
JPH11350125A5
JPH11350125A5 JP1998164024A JP16402498A JPH11350125A5 JP H11350125 A5 JPH11350125 A5 JP H11350125A5 JP 1998164024 A JP1998164024 A JP 1998164024A JP 16402498 A JP16402498 A JP 16402498A JP H11350125 A5 JPH11350125 A5 JP H11350125A5
Authority
JP
Japan
Prior art keywords
cooling water
water channel
sputtering
target
copper plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998164024A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11350125A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10164024A priority Critical patent/JPH11350125A/ja
Priority claimed from JP10164024A external-priority patent/JPH11350125A/ja
Publication of JPH11350125A publication Critical patent/JPH11350125A/ja
Publication of JPH11350125A5 publication Critical patent/JPH11350125A5/ja
Pending legal-status Critical Current

Links

JP10164024A 1998-06-12 1998-06-12 スパッタリング装置 Pending JPH11350125A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10164024A JPH11350125A (ja) 1998-06-12 1998-06-12 スパッタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10164024A JPH11350125A (ja) 1998-06-12 1998-06-12 スパッタリング装置

Publications (2)

Publication Number Publication Date
JPH11350125A JPH11350125A (ja) 1999-12-21
JPH11350125A5 true JPH11350125A5 (cg-RX-API-DMAC7.html) 2005-08-25

Family

ID=15785354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10164024A Pending JPH11350125A (ja) 1998-06-12 1998-06-12 スパッタリング装置

Country Status (1)

Country Link
JP (1) JPH11350125A (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5057650B2 (ja) * 2002-10-24 2012-10-24 ハネウエル・インターナシヨナル・インコーポレーテツド 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法
EP2746424B1 (de) * 2012-12-21 2018-10-17 Oerlikon Surface Solutions AG, Pfäffikon Verdampfungsquelle
CN104992935B (zh) * 2015-06-25 2018-03-02 许继集团有限公司 一种电力电子功率元件用水冷散热器
CN105336716B (zh) * 2015-09-30 2018-03-02 许继集团有限公司 一种换流阀阀组模块及使用该阀组模块的换流阀阀塔
KR102263414B1 (ko) * 2020-02-19 2021-06-10 주식회사 엘에이티 스퍼터 전극체

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