JPH11347909A - Slurry collecting device for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simply and certainly prevent a slurry or washing liquid from splashing. SOLUTION: At the bottom of a retrieving pipe 46, a coupling pipe 48 is installed slidably in the vertical direction. When a slurry or washing liquid retrieved by an oil pan 36 is to be collected to a slurry tank 34 or a washing liquid tank 29, the coupling pipe 48 is slided downward and the retrieving pipe 46 is coupled with the tank 34 or 29. Thereby the slurry or washing liquid can be prevented from splashing certainly.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw slurry collecting apparatus, and more particularly to a wire saw slurry collecting apparatus for cutting brittle materials such as silicon, glass and ceramics.

[0002]

2. Description of the Related Art A wire saw presses a workpiece while supplying a slurry containing abrasive grains to a high-speed running wire row, so that the workpiece is formed on a wafer by a lapping action of the abrasive grains contained in the slurry. It is a device for cutting. In this wire saw, the slurry supplied to the wire row during cutting is collected by an oil pan installed below the wire row, and returned to the slurry tank via a recovery pipe. Then, the returned slurry is returned to the processing again and recycled.

By the way, when the cutting of the workpiece is completed,
The supply of the slurry is stopped, and a cleaning liquid for cleaning the cut workpiece is supplied to the wire row. This cleaning liquid is recovered by an oil pan, as in the case of the slurry, and is returned to the cleaning liquid tank via a recovery pipe for circulating use. Therefore, the recovery pipe is switched and connected between the slurry tank and the cleaning liquid tank. For this reason, between the lower end of the recovery pipe and the tank,
A slight gap is formed, and there is a possibility that the slurry or the cleaning liquid may be scattered from the gap.

Therefore, in a conventional wire saw, a tape or the like is wound around a gap between the inlet of the slurry tank and the outlet of the recovery pipe to close the gap.

[0005]

However, the work of winding the tape has a drawback that the workability is poor because the winding position is a narrow place below the oil pan. In addition, this method has a drawback that the peeling and winding of the tape must be repeated every time the discharge destination of the collection pipe is switched.

SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and has as its object to provide a wire saw slurry collection device that can easily and surely prevent scattering of slurry or cleaning liquid.

[0007]

SUMMARY OF THE INVENTION In order to achieve the above-mentioned object, the present invention provides a workpiece which is formed by winding a traveling wire around a plurality of grooved rollers and supplying a slurry containing abrasive grains to a wire row formed by the winding. By pressing the workpiece, a wire saw that cuts the workpiece into a number of wafers, an oil pan that collects the slurry or cleaning liquid supplied to the wire row below the wire row, and the collected slurry or cleaning liquid is A recovery pipe that flows into a tank below the oil pan, and is slidably provided at a lower end of the recovery pipe,
A connection pipe that connects the collection pipe and the tank when slid downward, and separates from the tank inlet when slid upward.

According to another aspect of the present invention, a workpiece is pressed against a wire row formed by winding a running wire around a plurality of grooved rollers while supplying slurry containing abrasive grains. Thus, in a wire saw that cuts the workpiece into a number of wafers, an oil pan that collects the slurry or cleaning liquid supplied to the wire row below the wire row, and the collected slurry or cleaning liquid below the oil pan. A collection pipe flowing into the tank and a pair of half-cylinder members are formed so as to be openable and closable, and are released from the lower end of the collection pipe by opening the pair of half-cylinder members, thereby closing the pair of half-cylinder members. A connection pipe attached to a lower end of the recovery pipe.

According to the present invention, when the slurry or cleaning liquid collected in the oil pan is poured into the tank, the collection pipe and the tank are connected by the connecting pipe. Thereby, the slurry or the cleaning liquid can be reliably poured into the tank without being scattered. Therefore, it is not necessary to separately perform the cleaning operation of the scattered slurry or cleaning liquid. Also, the present invention
Because of the simple structure, the connection between the collection pipe and the tank can be easily performed, and the work efficiency can be improved. Therefore, it is possible to smoothly switch the discharge destination of the collection pipe and draw out the tank.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a wire saw slurry recovery apparatus according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a configuration diagram of an embodiment of a wire saw to which a slurry collection device according to the present invention is applied.

As shown in FIG. 1, a wire 14 wound on a wire reel 12 passes through a wire running path formed by guide rollers 16, 16,.
A, 18B, 18C, and a horizontal wire row 2
0 is formed. The wire 14 forming the wire row 20 is
The wire is wound around a wire reel (not shown) through a wire running path on the other side formed symmetrically with respect to the wire row 20.

A wire guide device 22, a dancer roller 24, and a wire cleaning device 26 are provided on each of the wire running paths formed on both sides of the wire row 20 (only one side is shown). The wire 14 is guided from the wire reel 12 at a constant pitch. Also,
The dancer roller 24 applies a certain tension to the wire 14 on which a weight (not shown) having a predetermined weight is erected, and the wire cleaning device 26 injects the cleaning liquid supplied from the cleaning liquid tank 29 to the wire 14. Then, the slurry attached to the wire 14 is removed from the wire 14.

The pair of wire reels 12 and one of the three grooved rollers 18C are connected to motors (not shown) that can rotate forward and reverse, respectively.
4 reciprocates between the wire reels 12 at high speed by driving this motor. A work feed table 28 that moves vertically with respect to the wire row 20 is installed above the wire row 20. The work feed table 28 is provided with a tilting device 30, and the ingot 32 is held below the tilting device 30, and is set at an arbitrary tilt angle.

In the wire saw 10 configured as described above, the cutting of the ingot 32 is performed by lowering the work feed table 28 toward the wire row 20 and pressing the ingot 32 against the wire row 24 running at high speed. . At this time, a slurry is supplied to the wire row 24 from a slurry tank 34 through a nozzle (not shown), and the ingot 32 is cut into wafers by a lapping action of abrasive grains contained in the slurry.

The slurry used for processing the ingot 32 is collected by a slurry recovery device 42 described later.
4 and recycled while supplying the shortage. At this time, the temperature of the slurry is increased by absorbing heat generated during processing, and the recovered slurry is cooled to a constant temperature by the heat exchanger 38. When the cutting of the ingot 32 is completed, the supply of the slurry is stopped, and the wire row 20 is cut.
The cleaning liquid tank 2 is provided by a cleaning liquid supply means (not shown).
9 cleaning liquids are supplied. Thereby, the cut ingot 32 is washed. The cleaning liquid supplied to the wire row 20 is returned to the cleaning liquid tank 29 by a later-described slurry recovery device 42 in the same manner as the slurry, and is circulated and supplied.

The ingot 32 is cut in the housing 40 as shown by a two-dot broken line in FIG. 1 to prevent the supplied slurry from scattering around. next,
The first embodiment of the slurry collection device 42 of the present invention will be described in detail. FIG. 2 is a longitudinal sectional view of the slurry collection device 42 according to the first embodiment. FIG. 3 is a perspective view showing the structure of the connecting pipe 48.

As shown in these figures, the slurry collecting device 42 includes an oil pan 36, a collecting pipe 46, and a connecting pipe 4.
8. The oil pan 36 is installed below the three grooved rollers 18A, 18B, 18C as shown in FIG. 1, and is formed in a rectangular shape according to the bottom shape of the housing 40. A funnel-shaped slurry receiver 44 is formed in the oil pan 36, and a discharge port 50 is provided at the center of the slurry receiver 44.

The recovery pipe 46 is rotatably connected at its upper end to a discharge port 50 of the oil pan 36, and rotates so that the discharge destination is changed to the slurry tank 34 and the washing liquid tank 2.
9 can be switched. In addition, a pair of pins 52
(Only one side is shown). The connection pipe 48 is slidably attached to a lower end of the collection pipe 46. A pair of inverted L-shaped guide holes 54 are formed in the peripheral surface of the connecting pipe 48.
(Only one side is shown), and the pair of pins 52 are located in the guide holes 54.

The operation of the first embodiment of the slurry recovery apparatus according to the present invention configured as described above is as follows. First, the slurry or the cleaning liquid supplied to the wire row 20 falls along the wire 14 and the grooved rollers 18A to 18C and is collected by the oil pan 36. Then, the liquid is sent to the recovery pipe 46 from the outlet 50 of the oil pan 36.

When recovering the slurry, the recovery pipe 46 is arranged as shown by the solid line in FIG. 2 and the connecting pipe 48 is slid downward. As a result, the oil pan 36 is reliably connected to the slurry tank 34 by the recovery pipe 46 and the connecting pipe 48, so that the slurry recovered by the oil pan 36 can be reliably poured into the slurry tank 34 without being scattered. it can.

When recovering the cleaning liquid, the recovery pipe 46 is arranged as shown by a two-dot chain line in FIG. 2 and the connecting pipe 48 is slid downward. Thereby, the cleaning liquid collected in the oil pan 36 can be poured into the cleaning liquid tank 29 without being scattered. Further, when the discharge destination of the collection pipe 46 is switched or when the slurry tank 34 or the cleaning liquid tank 29 is drawn out, the connecting pipe 48 is slid upward to be locked. Thereby, the switching operation of the discharge destination of the collection pipe 46, the slurry tank 34 and the cleaning liquid tank 2 are performed.
9 can be smoothly performed.

Next, a second embodiment of the slurry recovery apparatus according to the present invention will be described in detail. FIG. 4 is a perspective view of the connecting pipe 56 according to the second embodiment. As shown in the figure, the connecting pipe 56 is composed of a half-cylinder member 56A and a half-cylinder member 56B.
B opens and closes. Then, the half-cylinder member 56A and the half-cylinder member 56
When B is closed, a cylinder circumscribing the recovery pipe 46 is formed,
When opened, it is configured to be removable from the collection pipe 46. A flange 60 is attached to one end of the outer peripheral surface of each of the half-cylinder member 56A and the half-cylinder member 56B, so that the connecting pipe 56 can be stably mounted on the slurry tank 34.

First, when recovering the slurry, the connecting pipe 5
6 with the half-cylinder member 56 placed on the slurry tank 34.
A and the semi-cylindrical member 56B are closed to circumscribe the recovery pipe 46, thereby connecting the recovery pipe 46 and the slurry tank 34. Further, when switching the discharge destination of the recovery pipe 46 and when pulling out the slurry tank 34 and the cleaning liquid tank 29, the half-tube member 56A and the half-tube member 56B are opened, and the connection pipe 56 is removed. Thus, similarly to the first embodiment, the oil pan 36 and the slurry tank 34 can be easily and reliably connected via the recovery pipe 46 and the connection pipe 56.

[0024]

As described above, according to the present invention,
The collection pipe and the slurry tank can be easily connected by the connection pipe, and the scattering of the slurry can be reliably prevented.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of a wire saw to which a slurry recovery device according to the present invention is applied.

FIG. 2 is a side cross-sectional view showing the configuration of the slurry recovery device according to the first embodiment.

FIG. 3 is a perspective view showing the structure of the connecting pipe of FIG. 2;

FIG. 4 is a perspective view of a connecting pipe according to a second embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 12 ... Wire reel 14 ... Wire 18A-18C ... Grooved roller 20 ... Wire row 29 ... Cleaning liquid tank 32 ... Ingot 34 ... Slurry tank 36 ... Oil pan 46 ... Recovery pipe 48 ... Connecting pipe (1st Embodiment) 56 ... Connecting pipe (second embodiment)

Claims (3)

[Claims] 1. A workpiece is pressed against a number of wafers by supplying a slurry containing abrasive grains to a wire row formed by winding a running wire around a plurality of grooved rollers. In a cutting wire saw, an oil pan for collecting a slurry or cleaning liquid supplied to the wire row below the wire row, a recovery pipe for flowing the recovered slurry or cleaning liquid into a tank below the oil pan, A connection pipe slidably provided at the lower end, connecting the recovery pipe and the tank when slid downward, and separating from the tank inlet when slid upward. Collection device. 2. The apparatus according to claim 1, wherein said connecting pipe and said collecting pipe are provided with locking means for locking said collecting pipe while sliding said pipe upward. . 3. A workpiece is pressed against a large number of wafers by supplying a slurry containing abrasive grains to a wire row formed by winding a traveling wire around a plurality of grooved rollers. In a wire saw to be cut, an oil pan for collecting a slurry or cleaning liquid supplied to the wire row below the wire row, a recovery pipe for flowing the collected slurry or cleaning liquid to a tank below the oil pan, a pair of half cylinders The members are formed so as to be freely openable and closable, are detached from the lower end of the recovery pipe by opening the pair of half cylinder members, and are attached to the lower end of the recovery pipe by closing the pair of half cylinder members. A slurry collection device for a wire saw, comprising: a connecting pipe;