JPH11332959A - Ozone water preparing device - Google Patents

Ozone water preparing device

Info

Publication number
JPH11332959A
JPH11332959A JP14730898A JP14730898A JPH11332959A JP H11332959 A JPH11332959 A JP H11332959A JP 14730898 A JP14730898 A JP 14730898A JP 14730898 A JP14730898 A JP 14730898A JP H11332959 A JPH11332959 A JP H11332959A
Authority
JP
Japan
Prior art keywords
ozone
ozone water
tank
water
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14730898A
Other languages
Japanese (ja)
Other versions
JP4207245B2 (en
Inventor
Tetsuya Isayama
哲也 伊佐山
Kenji Tanitsu
健司 谷津
Katsuharu Yamamoto
克治 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP14730898A priority Critical patent/JP4207245B2/en
Publication of JPH11332959A publication Critical patent/JPH11332959A/en
Application granted granted Critical
Publication of JP4207245B2 publication Critical patent/JP4207245B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a device for preparing an ozone water of a stabilized ozone density. SOLUTION: In this ozone water preparing device for dissolving ozone gas in raw material water, then pressurizing it in a pressure dissolving tank 4a and raising the ozone density, by generating the eddy current of the ozone water inside the pressure dissolving tank 4a, when the air bubbles of excessive gas are gathered to the center of an eddy, since they float and are discharged from a valve 13, cavitation is prevented and the ozone density of the ozone water is stabilized. In the case of installing the pressure dissolving tank 4b further in the poststage of the pressure dissolving tank 4a, generating the eddy current inside the pressure dissolving tank 4b of the poststage and discharging the excessive gas, since ozone is retained not only in the pressure dissolving tank 4a of a preceding stage but also in the pressure dissolving tank 4b of the poststage, ozone retained time is increased as a result and the ozone density of the ozone water is raised. Since the excessive gas is discharged by the valve 13 of the pressure dissolving tank 4b of the poststage, the cavitation is prevented and the ozone density of the ozone water is stabilized.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、オゾン水製造装置
に関する。
[0001] The present invention relates to an ozone water producing apparatus.

【0002】[0002]

【従来の技術】オゾン水を製造する際、オゾンを原料水
に溶解させるだけであった。
2. Description of the Related Art When producing ozone water, ozone was merely dissolved in raw water.

【0003】図4は従来のオゾン水製造装置のブロック
図である。
FIG. 4 is a block diagram of a conventional ozone water producing apparatus.

【0004】オゾンガス発生ユニット1で発生したオゾ
ンガスを、配管(破線で示す)2で供給される原料水
(あるいは後述するオゾン水循環用配管10で循環され
るオゾン水)とをミキシングポンプを有するオゾン溶解
機構3で原料水に溶解させ、加圧溶解槽4とタンク5と
の間のバルブ6を絞ることにより加圧溶解槽7のオゾン
水を加圧してオゾン濃度を高め、タンク5に貯蔵してい
た。オゾン水を使用する場合は配管(破線で示す)8を
介して外部に送られる。
The ozone gas generated in the ozone gas generation unit 1 is dissolved in ozone having a mixing pump by mixing raw water (or ozone water circulated in an ozone water circulation pipe 10 described later) supplied through a pipe (indicated by a broken line) 2. The ozone water in the pressurized dissolution tank 7 is pressurized by squeezing the valve 6 between the pressurized dissolution tank 4 and the tank 5 to increase the ozone concentration, and stored in the tank 5. Was. When ozone water is used, it is sent to the outside via a pipe (indicated by a broken line) 8.

【0005】ところでタンク5にはタンク5内のオゾン
ガスがたまることを防止するためにオゾンキラー9で無
害化された後大気開放される。このため、タンク5内に
貯蔵されたオゾン水からは徐々にオゾンガスが抜けてオ
ゾン濃度が低下するので、タンク5内のオゾン水の一部
をオゾン水循環用配管10でオゾン溶解機構3に戻して
オゾンを付加して濃度を高めて再度タンク5に貯蔵する
循環系によって濃度を一定に保っていた。循環系の圧力
はバルブ6の開閉度で調整される。
Incidentally, the tank 5 is made harmless by an ozone killer 9 in order to prevent the ozone gas in the tank 5 from accumulating, and is then opened to the atmosphere. For this reason, the ozone gas is gradually released from the ozone water stored in the tank 5 and the ozone concentration is reduced. Therefore, a part of the ozone water in the tank 5 is returned to the ozone dissolving mechanism 3 through the ozone water circulation pipe 10. The concentration was kept constant by a circulation system in which the concentration was increased by adding ozone and stored in the tank 5 again. The pressure of the circulation system is adjusted by the degree of opening and closing of the valve 6.

【0006】[0006]

【発明が解決しようとする課題】しかしながら従来のオ
ゾン水製造装置は、オゾン水を循環させる際にオゾン水
に溶けきらなかったオゾンの余剰ガスが、配管やオゾン
水を貯蔵するタンク等で大気開放下において大きな気泡
となり、オゾン水中の微細なオゾンを系外に持ち去って
しまい、オゾン水のオゾン濃度を低下させる要因となっ
ていた。また、大きな気泡がキャビテーションを起こ
し、オゾン水濃度が安定しないという問題があった。
However, in the conventional apparatus for producing ozone water, the excess gas of ozone, which has not been completely dissolved in the ozone water when circulating the ozone water, is released to the atmosphere by piping or a tank for storing the ozone water. Underneath, large bubbles are formed, and fine ozone in the ozone water is taken out of the system, which is a factor of lowering the ozone concentration of the ozone water. In addition, there is a problem that large bubbles cause cavitation and the concentration of ozone water is not stable.

【0007】そこで、本発明の目的は、上記課題を解決
し、オゾン濃度の安定したオゾン水製造装置を提供する
ことにある。
Accordingly, an object of the present invention is to solve the above problems and to provide an ozone water producing apparatus having a stable ozone concentration.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に本発明は、オゾンガスを原料水に溶解させた後、加圧
溶解槽で加圧してオゾン濃度を高めるオゾン水製造装置
において、加圧溶解槽内でオゾン水の渦流が発生するよ
うにオゾン水入口とオゾン水出口とを設けると共にオゾ
ン水中の余剰ガスを抜く余剰ガス抜き機構を加圧溶解槽
の上部に設けたものである。
In order to achieve the above object, the present invention relates to an ozone water producing apparatus for increasing the ozone concentration by dissolving ozone gas in raw water and pressurizing it in a pressurized dissolution tank. An ozone water inlet and an ozone water outlet are provided so as to generate a swirling flow of ozone water in the dissolution tank, and an excess gas release mechanism for removing excess gas in the ozone water is provided at the upper part of the pressurized dissolution tank.

【0009】また、本発明は、オゾンガスを原料水に溶
解させた後、加圧溶解槽で加圧してオゾン濃度を高める
オゾン水製造装置において、加圧溶解槽の後段にさらに
加圧溶解槽を設け、後段の加圧溶解槽内でオゾン水の渦
流が発生するようにオゾン水入口とオゾン水出口とを設
けると共にオゾン水中の余剰ガスを抜く余剰ガス抜き機
構を後段の加圧溶解槽の上部に設けたものである。
Further, the present invention provides an ozone water producing apparatus for increasing the ozone concentration by dissolving ozone gas in raw water and then pressurizing the ozone gas in a pressurized dissolving tank, further comprising a pressurizing dissolving tank after the pressurizing dissolving tank. An ozone water inlet and an ozone water outlet are provided so that vortex flow of ozone water is generated in the latter pressure dissolution tank, and an excess gas release mechanism for removing excess gas in the ozone water is provided at the upper part of the latter pressure dissolution tank. It is provided in.

【0010】本発明によれば、加圧溶解槽内でオゾン水
の渦流を発生させることにより、余剰ガスの気泡が渦の
中央に集まると共に浮上し、余剰ガス抜き機構から排出
されるので、キャビテーションが防止されオゾン水のオ
ゾン濃度が安定する。
According to the present invention, the vortex of the ozone water is generated in the pressurized dissolution tank, so that the bubbles of the surplus gas gather and float at the center of the vortex and are discharged from the surplus gas venting mechanism. Is prevented, and the ozone concentration of the ozone water is stabilized.

【0011】また、加圧溶解槽の後段にさらに加圧溶解
槽を設け、後段の加圧溶解槽内で渦流を発生させて余剰
ガスを抜く場合には、前段の加圧溶解槽でオゾンが滞留
する時間が増加するのでオゾン水のオゾン濃度が高くな
り、後段の加圧溶解槽で余剰ガスが抜かれるのでオゾン
水のオゾン濃度が高くなると共に安定する。
[0011] Further, a pressure dissolution tank is further provided at the subsequent stage of the pressure dissolution tank, and when a vortex is generated in the subsequent pressure dissolution tank to extract excess gas, ozone is generated in the former pressure dissolution tank. Since the residence time increases, the ozone concentration of the ozone water increases, and the excess gas is removed in the subsequent pressure dissolution tank, so that the ozone concentration of the ozone water increases and stabilizes.

【0012】[0012]

【発明の実施の形態】以下、本発明の実施の形態を添付
図面に基づいて詳述する。
Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

【0013】図1は本発明のオゾン水製造装置の一実施
の形態を示すブロック図である。図2(a)は図1に示
したオゾン水製造装置に用いられる加圧溶解槽の平面図
であり、図2(b)は図2(a)の側面断面図である。
尚、従来例と同様の部材には共通の符号を用いた。
FIG. 1 is a block diagram showing an embodiment of an ozone water producing apparatus according to the present invention. FIG. 2A is a plan view of a pressurized dissolution tank used in the ozone water producing apparatus shown in FIG. 1, and FIG. 2B is a side sectional view of FIG. 2A.
The same members as those in the conventional example are denoted by the same reference numerals.

【0014】図1に示す1はオゾンガスを発生するオゾ
ンガス発生ユニットである。3はオゾンガスと、配管
(破線で示す)2で供給される原料水(あるいはオゾン
水循環用配管10で循環されるオゾン水)とをミキシン
グポンプで混合してオゾンガスを原料水に溶解させるオ
ゾン溶解機構である。
FIG. 1 shows an ozone gas generation unit 1 for generating ozone gas. Reference numeral 3 denotes an ozone dissolving mechanism for mixing ozone gas and raw water (or ozone water circulated through the ozone water circulation pipe 10) supplied through a pipe (shown by a broken line) 2 with a mixing pump to dissolve ozone gas into the raw water. It is.

【0015】4はオゾン溶解機構3からのオゾン水に圧
力を加えると共にオゾンの滞留時間を長くすることによ
りオゾン濃度を高める加圧溶解槽である。この加圧溶解
槽4は、円筒状の密閉容器と、密閉容器の上側面に円周
の接線に沿って配置されたオゾン水入口11と、密閉容
器の下側面に円周の接線に沿って配置されたオゾン水出
口12とを有している。オゾン水入口11とオゾン水出
口12とは、渦流を効率的に発生させるべく密閉容器の
側壁に接すると共に同一方向になるように設けるのが好
ましい(図2(a)、(b))。加圧溶解槽の上部中央
には余剰ガス抜き機構としてのバルブ(あるいはベン
ト)13が設けられている。
Reference numeral 4 denotes a pressure dissolving tank for increasing the ozone concentration by applying pressure to the ozone water from the ozone dissolving mechanism 3 and increasing the residence time of ozone. This pressurized dissolution tank 4 has a cylindrical closed container, an ozone water inlet 11 disposed on the upper surface of the closed container along a circumferential tangent, and a circumferential tangent on the lower surface of the closed container. And an ozone water outlet 12 arranged. The ozone water inlet 11 and the ozone water outlet 12 are preferably provided so as to be in contact with the side wall of the closed container and in the same direction in order to efficiently generate a vortex (FIGS. 2A and 2B). A valve (or vent) 13 is provided at the upper center of the pressurized dissolution tank as an excess gas releasing mechanism.

【0016】加圧溶解槽4のオゾン水出口12はバルブ
6及び配管を介してタンク5に接続されている。タンク
5の上部にはガス抜き管14が設けられ加圧溶解槽4の
バルブ13に接続された配管15と共にオゾンキラー9
に接続されている。
The ozone water outlet 12 of the pressurized dissolution tank 4 is connected to the tank 5 via a valve 6 and a pipe. A gas vent pipe 14 is provided at the upper part of the tank 5 and an ozone killer 9 is connected together with a pipe 15 connected to a valve 13 of the pressurized melting tank 4.
It is connected to the.

【0017】タンク5の側面とオゾン溶解機構3との間
にはオゾン水循環用配管10が設けられている。
An ozone water circulation pipe 10 is provided between the side surface of the tank 5 and the ozone dissolving mechanism 3.

【0018】このようなオゾン水製造装置が作動する
と、オゾンガス発生ユニット1で発生したオゾンガス
が、オゾン溶解機構3で原料水(或いはオゾン水)に溶
解されて加圧溶解槽4に送られる。加圧溶解槽4では、
オゾン溶解機構3及びバルブ6との間で加圧されると共
にオゾン水の渦流が発生する。加圧溶解槽4で発生した
余剰ガスの気泡は渦の中央に集まると共に浮上し、バル
ブ13から余剰ガスのみ排出され、キャビテーションが
防止される。バブル13から排出された余剰ガスはオゾ
ンキラー9で無害化された後排気される。
When such an ozone water producing apparatus is operated, the ozone gas generated by the ozone gas generation unit 1 is dissolved in raw water (or ozone water) by the ozone dissolution mechanism 3 and sent to the pressure dissolution tank 4. In the pressure dissolution tank 4,
While being pressurized between the ozone dissolution mechanism 3 and the valve 6, a vortex of ozone water is generated. Bubbles of excess gas generated in the pressurized dissolution tank 4 gather at the center of the vortex and float, and only the excess gas is discharged from the valve 13 to prevent cavitation. Excess gas discharged from the bubble 13 is rendered harmless by the ozone killer 9 and then exhausted.

【0019】加圧溶解槽4で余剰ガスが抜かれたオゾン
水はタンク5に貯蔵される。タンク5内に貯蔵されたオ
ゾン水からは徐々にオゾンガスが抜けてオゾン濃度が低
下するが、タンク5内のオゾン水の一部がオゾン水循環
用配管10でオゾン溶解機構3に循環され不足分のオゾ
ンガスをオゾン水に溶解させることにより補充される。
循環系の圧力は加圧溶解槽3及びバルブ6の開閉で調整
される。従って本装置によればオゾン濃度の安定したオ
ゾン水を得ることができる。
The ozone water from which excess gas has been removed in the pressure dissolution tank 4 is stored in a tank 5. The ozone gas gradually escapes from the ozone water stored in the tank 5 to lower the ozone concentration. However, a part of the ozone water in the tank 5 is circulated to the ozone dissolving mechanism 3 through the ozone water circulation pipe 10 and the shortage of the ozone water is reduced. It is supplemented by dissolving ozone gas in ozone water.
The pressure of the circulation system is adjusted by opening and closing the pressure dissolution tank 3 and the valve 6. Therefore, according to the present apparatus, ozone water having a stable ozone concentration can be obtained.

【0020】図3は本発明のオゾン水製造装置の他の実
施の形態を示すブロック図である。
FIG. 3 is a block diagram showing another embodiment of the ozone water producing apparatus of the present invention.

【0021】図1に示した実施の形態との相違点は、オ
ゾン溶解機構3と加圧溶解槽4との間に、余剰ガス抜き
機構付きの加圧溶解槽を設けた点である。
The difference from the embodiment shown in FIG. 1 is that a pressurized dissolution tank with an excess gas venting mechanism is provided between the ozone dissolution mechanism 3 and the pressure dissolution tank 4.

【0022】この装置の場合には、後段の加圧溶解槽4
bだけでなく、前段の加圧溶解槽4aでオゾン滞留時間
を長くすることができるのでオゾン水のオゾン濃度が高
くなり、後段の加圧溶解槽4bのバルブ13で余剰ガス
が抜かれるのでオゾン水のオゾン濃度が安定する。
In the case of this apparatus, the pressure dissolving tank 4
b), the ozone retention time can be extended in the first-stage pressurizing and dissolving tank 4a, so that the ozone concentration of ozone water increases, and the excess gas is removed by the valve 13 in the second-stage pressurizing and dissolving tank 4b. The ozone concentration in water stabilizes.

【0023】[0023]

【発明の効果】以上要するに本発明によれば、次のよう
な優れた効果を発揮する。
In summary, according to the present invention, the following excellent effects are exhibited.

【0024】加圧溶解層のオゾン水入口とオゾン水出口
との間でオゾン水の渦流を発生させると共に、オゾン水
中の余剰ガスを抜く余剰ガス抜き機構を加圧溶解槽の上
部に設けることにより、オゾン濃度の安定したオゾン水
製造装置の提供を実現することができる。
A swirling flow of the ozone water is generated between the ozone water inlet and the ozone water outlet of the pressurized dissolving layer, and a surplus gas releasing mechanism for discharging the surplus gas in the ozone water is provided at the upper part of the pressurizing dissolving tank. In addition, it is possible to provide an ozone water producing apparatus having a stable ozone concentration.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のオゾン水製造装置の一実施の形態を示
すブロック図である。
FIG. 1 is a block diagram showing an embodiment of an ozone water producing apparatus according to the present invention.

【図2】(a)は図1に示したオゾン水製造装置に用い
られる加圧溶解槽の平面図であり、(b)は(a)の側
面断面図である。
2A is a plan view of a pressurized dissolving tank used in the ozone water producing apparatus shown in FIG. 1, and FIG. 2B is a side sectional view of FIG.

【図3】本発明のオゾン水製造装置の他の実施の形態を
示すブロック図である。
FIG. 3 is a block diagram showing another embodiment of the ozone water producing apparatus of the present invention.

【図4】従来のオゾン水製造装置のブロック図である。FIG. 4 is a block diagram of a conventional ozone water producing apparatus.

【符号の説明】[Explanation of symbols]

2 オゾンガス発生ユニット 3 オゾン溶解機構 4、4a、4b 加圧溶解槽 5 タンク 13 余剰ガス抜き機構(バルブ或いはベント) 2 Ozone gas generation unit 3 Ozone dissolution mechanism 4, 4a, 4b Pressure dissolution tank 5 Tank 13 Excess gas release mechanism (valve or vent)

───────────────────────────────────────────────────── フロントページの続き (72)発明者 山本 克治 東京都江東区豊洲三丁目1番15号 石川島 播磨重工業株式会社東二テクニカルセンタ ー内 ──────────────────────────────────────────────────の Continued on the front page (72) Katsuharu Yamamoto, Inventor Katsuharu Yamamoto 3-1-1-15 Toyosu, Koto-ku, Tokyo Ishikawajima Harima Heavy Industries Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 オゾンガスを原料水に溶解させた後、加
圧溶解槽で加圧してオゾン濃度を高めるオゾン水製造装
置において、上記加圧溶解槽内でオゾン水の渦流が発生
するようにオゾン水入口とオゾン水出口とを設けると共
にオゾン水中の余剰ガスを抜く余剰ガス抜き機構を上記
加圧溶解槽の上部に設けたことを特徴とするオゾン水製
造装置。
1. An ozone water producing apparatus for dissolving ozone gas in raw water and increasing the concentration of ozone by pressurizing in a pressurized dissolving tank so as to generate ozone water vortex in the pressurized dissolving tank. An ozone water production apparatus comprising: a water inlet and an ozone water outlet; and an excess gas release mechanism for removing excess gas in the ozone water is provided above the pressurized dissolution tank.
【請求項2】 オゾンガスを原料水に溶解させた後、加
圧溶解槽で加圧してオゾン濃度を高めるオゾン水製造装
置において、上記加圧溶解槽の後段にさらに加圧溶解槽
を設け、後段の加圧溶解槽内でオゾン水の渦流が発生す
るようにオゾン水入口とオゾン水出口とを設けると共に
オゾン水中の余剰ガスを抜く余剰ガス抜き機構を後段の
加圧溶解槽の上部に設けたことを特徴とするオゾン水製
造装置。
2. An ozone water producing apparatus for increasing ozone concentration by dissolving ozone gas in raw water and then pressurizing the ozone gas in a pressurized dissolution tank, further comprising a pressurized dissolution tank after the pressurized dissolution tank. An ozone water inlet and an ozone water outlet are provided so that a vortex flow of ozone water is generated in the pressurized dissolution tank, and an excess gas release mechanism for removing excess gas in the ozone water is provided at the upper part of the latter pressure dissolution tank. An ozone water producing apparatus, characterized in that:
JP14730898A 1998-05-28 1998-05-28 Ozone water production equipment Expired - Fee Related JP4207245B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14730898A JP4207245B2 (en) 1998-05-28 1998-05-28 Ozone water production equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14730898A JP4207245B2 (en) 1998-05-28 1998-05-28 Ozone water production equipment

Publications (2)

Publication Number Publication Date
JPH11332959A true JPH11332959A (en) 1999-12-07
JP4207245B2 JP4207245B2 (en) 2009-01-14

Family

ID=15427267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14730898A Expired - Fee Related JP4207245B2 (en) 1998-05-28 1998-05-28 Ozone water production equipment

Country Status (1)

Country Link
JP (1) JP4207245B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009056442A (en) * 2007-09-03 2009-03-19 Sharp Corp Ozone water production apparatus
JP2015157284A (en) * 2009-10-05 2015-09-03 株式会社キッツ Water treatment device for sterilization purification

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100931007B1 (en) * 2009-04-08 2009-12-11 방병훈 System of manufacturing an ozonic water

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009056442A (en) * 2007-09-03 2009-03-19 Sharp Corp Ozone water production apparatus
JP2015157284A (en) * 2009-10-05 2015-09-03 株式会社キッツ Water treatment device for sterilization purification

Also Published As

Publication number Publication date
JP4207245B2 (en) 2009-01-14

Similar Documents

Publication Publication Date Title
US3794169A (en) Apparatus for dissociating collected solids from a filtration membrane
JP2007167856A (en) Air diffusion device
JP2010155192A (en) Gas-liquid separator and gas dissolving vessel equipped therewith
JPH11207162A (en) Pressure type oxygen dissolving method
JP2004033889A (en) Air diffusion method and air diffusion system
JPH11332959A (en) Ozone water preparing device
JP3728959B2 (en) Method for producing gas dissolved water
JP3197640B2 (en) Bubble generator
JP4714597B2 (en) Deaerator
JP2005000882A (en) Apparatus for generating micro bubble
JP4514285B2 (en) PH neutralization treatment equipment for alkaline waste liquid
JP7377689B2 (en) Diffusers, radioactive gas processing equipment, radioactive material processing systems, and nuclear reactor equipment
JPH02245286A (en) Floatation equipment for suspended matter in water
JPH1015580A (en) Float type water area purifying apparatus
CN212369942U (en) Carbonization generating device
JPS5839840Y2 (en) Aeration device
JP3403598B2 (en) Pump well with sewage purification function
JPH10165792A (en) Gas-liquid mixing device and waste water purifying device using the same
JP2003049608A (en) Make-up water supply device
JPH0942599A (en) Carrying device for degassed liquid
JPH0721173U (en) Water deaerator
JPH04100527A (en) Apparatus for generating minute air bubbles
JP3029131U (en) Semiconductor cleaning equipment
JP2003251346A (en) Water treatment device by membrane filtration and operation method therefor
JPH0713710Y2 (en) Micro bubble generator

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050112

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080630

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080708

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080905

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080930

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20081013

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111031

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121031

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131031

Year of fee payment: 5

LAPS Cancellation because of no payment of annual fees