JPH0942599A - Carrying device for degassed liquid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent generation of mixing of air in degassed liquid in the case of transferring the liquid by a transfer pump by performing degassing by the transfer pump to be used for carrying the degassed liquid in a vacuum circuit. SOLUTION: An opening valve 12 for outflow is closed first, and an opening valve 7 for inflow is released to actuate a transfer pump 11, the liquid before being degassed is charged to a storage part 1 through the inflow opening valve 7 by suction force of it. It is stored in order, and when it is detected that stored quantity of it reaches a specified value by a float 6, the transfer pump 11 is stopped, and the inflow opening valve 7 is closed to actuate a vacuum pump 3. When vacuum degree in the storage part 1 reaches a specified value, the vacuum pump 3 is stopped, and it is left for a specified time. By this leaving, gas in the liquid is sucked into a vacuum zone in the storage part 1, when degassing is completed. In addition, liquid in a communication tube 6 and the transfer pump 11 communicated with the storage part 1 is also degassed simultaneously, thereby that in which gas exists only in an extremely small quantity can be provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention improves the cleaning effect by removing gas such as air mixed in from a cleaning liquid used for ultrasonic cleaning, a liquid used for medical cleaning liquid, etc.
It is intended to prevent the generation of bacteria.

[0002]

2. Description of the Related Art Conventionally, a cleaning liquid used for ultrasonic cleaning, a cleaning liquid used for medical purposes, etc., has a high cleaning effect because gas such as air is removed from the liquid and ultrasonic waves are not attenuated by this gas. It is known that effects such as aging, prevention of generation of bacteria due to absence or decrease of oxygen, and prevention of rust in cleaning metal or the like are produced.

The cleaning liquid conventionally used for such purpose has been degassed by various methods. However, when this degassed liquid is transferred from the degassing tank to the target part, if this is done with the transfer pump, air will be mixed in the transfer pump, so air will be added to the degassed liquid. It has a drawback that it is mixed again and the degassing effect is reduced.

Conventionally, when the degassed liquid is transferred while preventing the air from being mixed into the degassed liquid,
An apparatus for degassing is placed above, an ultrasonic cleaning tank using this degassing liquid is placed below, and due to the drop,
The degassed liquid is slowly transferred.

[0005]

However, the transfer of the degassed liquid due to such a drop is a great constraint on the design of the apparatus, and the degassed liquid cannot be transferred rapidly at a high speed, which is a work task. It has the drawback of making the above inefficient.

In order to solve the above-mentioned problems, the present invention enables a degassed liquid to be quickly transferred to a target portion by using a transfer pump, and when the degassed liquid is transferred by the transfer pump. Also, it is intended to prevent air from being mixed in the degassed liquid.

[0007]

According to the present invention, in order to solve the above problems, a transfer pump for transferring liquid is arranged in a liquid flow pipe, and an inflow opening / closing valve is provided on a liquid inflow side of the transfer pump. An outlet on-off valve is disposed on the liquid discharge side of the transfer pump, a liquid reservoir is connected to the flow pipe between the outlet on-off valve and the inflow on-off valve, and a vacuum pump is connected to this reservoir. In addition, it is possible to reduce the pressure in the storage portion, and at least one of the inflow opening / closing valve and the outflow opening / closing valve is connected to a liquid tank containing a liquid.

According to a second aspect of the invention, a transfer pump for transferring the liquid is arranged in the liquid flow pipe, an inflow opening / closing valve is arranged on the liquid inflow side of the transfer pump, and a liquid discharge side of the transfer pump. An outflow on-off valve is arranged, a liquid storage part is connected to the flow pipe between the outflow on-off valve and the inflow on-off valve, one end of the communication pipe is connected to this storage part, and the other end of the communication pipe is transferred. Connected to the flow pipe between the pump and the outflow opening / closing valve, the transfer pump can circulate the liquid in the reservoir, and the vacuum pump can be connected to this reservoir to reduce the pressure in the reservoir and open / close the inflow. One or both of the valve and the outflow opening / closing valve are connected to a liquid tank containing a liquid.

According to a third aspect of the present invention, a first opening / closing valve is provided at a lower end of a storage section connected to a vacuum pump, and one end of a flow pipe communicating with the first opening / closing valve is connected via an inflow opening / closing valve. In addition to being connectable to the liquid tank, a transfer pump can be connected to the flow pipe located at a position through the inflow opening / closing valve, and the liquid tank can be connected in the liquid outflow direction of the transfer pump via the outflow opening / closing valve. In addition, a communication pipe communicating with the upper part of the degassing tank is connected to the flow pipe between the pump and the outflow opening / closing valve, and a second opening / closing valve is provided in this communication pipe, and a desorption is performed between the second opening / closing valve and the deaeration tank. The outside air introduction valve is formed in the communication pipe by being arranged above the air tank.

Further, the storage part may be formed in a tank shape.

Further, the storage part may be formed in the distribution pipe.

The liquid tank may be an ultrasonic cleaning tank.

The liquid tank may be a storage tank for the degassed liquid.

Further, the liquid tank may be a storage tank for the non-degassed liquid.

The liquid tank connected to the inflow opening / closing valve and the liquid tank connected to the outflow opening / closing valve may be the same tank.

The liquid tank connected to the inflow opening / closing valve and the liquid tank connected to the outflow opening / closing valve may be separate tanks.

[0017]

Since the present invention is configured as described above, first, the first invention for degassing a liquid that has not been degassed will be described. First, both ends of the flow pipe are connected to the liquid tank.

However, as will be described later, the liquid tanks do not necessarily have to be the same, and may be connected to separate tanks. The operation of this case will be described in the state where both ends of the flow pipe are connected to one degassing tank.

When both ends of the flow pipe are connected to this one liquid tank, the outflow opening / closing valve is closed, the inflow opening / closing valve is opened, and the transfer pump is operated. Since the inflow opening / closing valve is opened, the liquid in the liquid tank is introduced into the reservoir by the suction force of the transfer pump into the flow pipe.

The liquid is filled in the reservoir through the inflow opening / closing valve. The transfer pump is stopped, the inflow opening / closing valve is closed, and the vacuum pump is operated in a state in which it is sequentially accumulated inside and the appropriate sensor such as a float detects that the filling amount reaches a certain level.

When the vacuum degree in the storage portion reaches a predetermined value by continuing the operation of the vacuum pump for a certain period of time, the vacuum pump is stopped and left for a certain period of time. By this leaving, the gas in the liquid is sucked into the vacuum region in the storage part, and degassing is completed. Further, the liquid in the flow pipe and the transfer pump, which communicates with the storage section, is also degassed at the same time, and the gas is not present or is extremely small in the transfer pump.

After the deaeration is completed, the air vent valve is opened, air is introduced into the reservoir, and the outflow opening / closing valve is opened. When the transfer pump is operated in this state, the transfer pump causes the degassed liquid in the reservoir to flow into the liquid tank from the outflow opening / closing valve via the flow pipe.

The transfer pump is connected to the storage portion in the flow of the degassed liquid. However, if the degassed liquid remains in the storage portion to interrupt the communication between the air and the transfer pump, External gas does not flow into the transfer pump.
Then, the degassed liquid in the storage section does not flow into the transfer pump, and it is possible to reliably flow the degassed liquid into the liquid tank through the outflow opening / closing valve. It will be.

Further, in the above operation, the liquid is introduced into the reservoir by operating the transfer pump, but it is also possible to introduce the liquid into the reservoir without operating the transfer pump. In this method, after decompressing the inside of the reservoir with a vacuum pump and then opening the inflow opening / closing valve, the liquid can be introduced into the reservoir due to the pressure difference. In order to degas the liquid, the liquid may be left standing for a certain period of time in this introduction state, or if the vacuum pump is operated to further reduce the pressure, good degassing becomes possible.

Further, as in the second invention, by connecting one end of the communication pipe to the storage part and connecting the other end of the communication pipe to the flow pipe between the transfer pump and the outlet opening / closing valve, the transfer pump If the liquid in the reservoir can be circulated, the liquid can be made into a shower shape and circulated in the vacuum region of the reservoir a plurality of times, and the degree of deaeration can be improved.

In the third aspect of the invention, the outflow on-off valve is closed and the inflow on-off valve and the second on-off valve are opened in a state where both ends of the flow pipe are connected to one liquid tank. The first on-off valve and the air vent valve are closed. When the transfer pump is operated in this state, the liquid tank connected to the flow pipe opens the inflow opening / closing valve, so the liquid degassed in the liquid tank by the suction force of the transfer pump into the flow pipe, Alternatively, the liquid that has not been degassed is introduced into the reservoir.

This liquid is filled in the reservoir through the inflow opening / closing valve, the transfer pump, and the second opening / closing valve. In this case the first
Since the on-off valve is closed, the degassed liquid or the non-degassed liquid in the liquid tank flows into the reservoir. The transfer pump is stopped, the inflow opening / closing valve is closed, and the vacuum pump is operated in a state in which it is sequentially accumulated inside and the appropriate sensor such as a float detects that the filling amount reaches a certain level.

By the operation of this vacuum pump, the inside of the storage portion is brought into a vacuum state and the inside of the transfer pump is also degassed because it is connected to the vacuum pump through the liquid. Then, when the vacuum degree in the storage portion reaches a predetermined value by continuing the operation of the vacuum pump for a certain period of time, the vacuum pump is stopped and the transfer pump is opened with the first opening / closing valve and the second opening / closing valve opened. Operate.

The operation of the transfer pump can be performed in a state where the inside of the reservoir reaches a certain degree of reduced pressure, which is detected by an appropriate sensor. Then, by the operation of the transfer pump, the liquid in the storage section flows into the storage section through the first opening / closing valve, the transfer pump, and the second opening / closing valve, and circulates. The liquid is in good contact with the vacuum region formed in the upper part, and the gas in the liquid is removed to form a degassed liquid.

After this circulation is performed for a certain period of time, the operation of the transfer pump is automatically stopped by a timer or the like. Then, the air vent valve is opened, air is introduced into the reservoir, the second opening / closing valve is closed, and the outflow opening / closing valve is opened. When the transfer pump is operated in this state, the transfer pump causes the degassed liquid in the reservoir to flow into the liquid tank from the outflow opening / closing valve via the flow pipe.

This transfer pump is connected to the reservoir via the first opening / closing valve in the flow of the degassed liquid, but is in communication with the atmosphere by closing the second opening / closing valve. Instead, it is placed inside a vacuum. Therefore, even if the transfer pump is operated, external gas does not flow into the transfer pump. The degassed gas in the reservoir does not flow into the transfer pump, and the degassed liquid can be reliably flowed into the liquid tank through the outflow opening / closing valve. It will be.

To degas the liquid, the outflow on-off valve is closed, the inflow on-off valve and the second on-off valve are opened, and the first on-off valve and the air bleeding valve are closed as described above. When the pump is operated, the liquid is introduced into the reservoir via the flow pipe. Then, the liquid can be degassed by the same action as described above.

[0033]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. 1. (1) is a storage part, and liquid circulation pipes (6) are vertically arranged to communicate with each other, and a circulation pipe connected to a lower end thereof is used. A transfer pump (11) for transferring liquid is arranged in the pipe (6). This transfer pump
The storage part (1) is arranged on the liquid inflow side of (11), and an inflow opening / closing valve is installed in the flow pipe (6) connected to the upper end of the storage part (1).
(7) is arranged.

Further, an outflow opening / closing valve (12) is arranged on the liquid outflow side of the transfer pump (11), and a liquid reservoir (1) is provided between the outflow opening / closing valve (12) and the inflow opening / closing valve (7). ) Are connected as described above. Further, a vacuum pump (3) is connected to the storage part (1) through a connecting pipe (5) connected to the flow pipe (6) to enable depressurization in the storage part (1). Also, connecting pipe
In (5), a check valve (2) is arranged between the reservoir (1) and the vacuum pump (3). Further, the connecting pipe (5) is provided at a position separate from the vacuum pump (3) and the check valve (2) in the reservoir (1).
An outside air introduction valve (15) for introducing outside air is arranged in a portion directly communicating with the outside air.

Further, the liquid tank (8) is connected to the flow pipe (6) on the side of the inflow opening / closing valve (7) through the filter (10). A liquid tank (8) containing a liquid is also connected to the flow pipe (6) of the outflow opening / closing valve (12). This liquid tank (8) is an inflow / open valve
The distribution pipe (6) on the (7) side and the distribution pipe (6) of the outflow opening / closing valve (12)
, But in different embodiments, the inflow on-off valve
Liquid tank (8) connected to flow pipe (6) on (7) side, and outlet opening / closing valve
The liquid tank (8) connected to the flow pipe (6) on the (12) side may be separate. In this case, the liquid tank (8) connected to the flow pipe (6) on the inflow on-off valve (7) side only supplies the liquid, and the liquid tank connected to the flow pipe (6) on the outflow on-off valve (12) side. The tank (8) is
Used as a container for liquid that has been degassed.

Further, in the embodiment shown in FIG. 1, the flow pipe is used.
Although (6) is connected to the upper and lower sides of the storage part (1), in another different embodiment, as shown in FIG. 2, the flow pipe (6) on the inflow on-off valve (7) side is also connected to the outflow on-off valve ( The distribution pipe (6) on the 12) side is also a storage part
Connect to the lower end of (1). This structure has an advantage that the piping can be simplified as compared with the above-mentioned embodiment.

Further, in the above two embodiments, the storage portion (1) for storing the liquid is formed in the shape of a tank, but in another different embodiment, the flow pipe (6) itself is formed as shown in FIG. It is also possible to use it as the storage part (1) or to use a distribution pipe (6) having a larger diameter as the storage part (1).

In order to perform deaeration from the liquid in the above-described structure, in any of the above-mentioned embodiments, first, the outflow opening / closing valve (12) is closed and the inflow opening / closing valve (7) is opened. To do.
When the transfer pump (11) is operated in this state, the flow pipe
Since the liquid tank (8) connected to (6) opens the inflow on-off valve (7), the suction force of the transfer pump (11) causes the liquid tank (8) to flow into the flow pipe (6). Storage of liquid that has not been degassed (1)
To be introduced.

This liquid is filled in the reservoir (1) through the inflow opening / closing valve (7). Then, the transfer pump is stored in the inside sequentially, and when it is detected that the filling amount reaches a certain level by an appropriate sensor such as the float (16),
(11) is stopped, the inflow opening / closing valve (7) is closed, and the vacuum pump (3) is operated.

When the vacuum degree in the storage part (1) reaches a predetermined value by continuing the operation of the vacuum pump (3) for a certain period of time, the vacuum pump (3) is stopped and left for a certain period of time. . By this leaving, the gas in the liquid is sucked into the vacuum region in the storage part, and degassing is completed. Also, a flow pipe (6) and a transfer pump (11) communicating with the storage section (1).
The liquid inside is also degassed at the same time, and there is no or very little gas inside the transfer pump (11).

After this deaeration is completed, the outside air introduction valve (15) is opened to introduce air into the storage portion (1) and the outflow opening / closing valve (12) is opened. When the transfer pump (11) is operated in this state, the transfer pump (11) causes the degassed liquid in the storage part (1) to flow from the outflow opening / closing valve (12) through the flow pipe (6) to the liquid tank.
(8) Flow into the inside.

The transfer pump (11) is connected to the reservoir (1) in the flow of the degassed liquid, but the reservoir (1)
By leaving the degassed liquid in the air and transfer pump
If the communication of (11) is cut off, external gas will not flow into the transfer pump (11). The degassed gas in the storage section (1) does not flow into the transfer pump (11), and the degassed liquid is surely kept in the discharged on-off valve.
It is possible to make it flow into the liquid tank (8) via (12).

Further, in the above operation, the liquid is introduced into the storage part (1) by operating the transfer pump (11), but the liquid is introduced into the storage part (1) without operating the transfer pump (11). It is also possible to do so. In this method, after depressurizing the inside of the reservoir (1) with the vacuum pump (3), the inflow on-off valve
By opening (7), it becomes possible to introduce the liquid into the reservoir (1) due to the pressure difference. To degas the liquid, you may leave it in this state for a certain period of time or use a vacuum pump.
Good degassing is possible by activating (3) and further reducing the pressure.

Further, in each of the above embodiments, degassing was performed without circulating the liquid, but in other different embodiments, degassing was performed while circulating the liquid, and efficient degassing was performed. Is possible. This method uses the storage part (1)
The vacuum pump (3) is connected to the upper end via the check valve (2), and the first opening / closing valve is connected to the lower end as shown in FIG.
(4) is provided. Then, one end of the flow pipe (6) communicating with the storage part (1) via the first on-off valve (4) is connected to the liquid tank (8) via the inflow on-off valve (7). A filter (10) is arranged in the space between the liquid tank (8) and the inflow opening / closing valve (7). The liquid tank (8) may be an ultrasonic cleaning tank. When the liquid tank (8) is an ultrasonic tank as described above, by storing the degassed liquid in the ultrasonic tank, the ultrasonic vibration is not attenuated by the gas, so that the cleaning effect can be enhanced.

Further, a transfer pump (11) is connected to the flow pipe (6) at a position via the inflow opening / closing valve (7) with the liquid tank (8). The transfer pump (11) is not particularly limited in structure as long as it is suitable for circulating a liquid, and any pump can be used.

Further, the liquid tank (8) is connected in the liquid outflow direction of the transfer pump (11) through an outflow opening / closing valve (12).
Liquid tank connected to this liquid tank (8) and the inflow opening / closing valve (7)
(8) may be the same tank, or the liquid tank (8) connected to the inflow opening / closing valve (7) and the liquid tank (8) connected to the outflow opening / closing valve (12)
May be a separate tank. When using a separate tank,
The liquid tank (8) connected to the outflow opening / closing valve (12) is a tank that uses a degassed liquid, such as an ultrasonic cleaning tank or a medical cleaning tank. Further, the liquid tank (8) connected to the inflow opening / closing valve (7) is used as a tank for supplying non-degassed liquid, or the degassed liquid is stored and the gas is supplied to another target device through the transfer pump (11). The degassed liquid may be supplied without being mixed.

Further, the transfer pump (11) and the outflow opening / closing valve (1)
The communication pipe (13) communicating with the upper part of the storage part (1) is connected to the flow pipe (6) at the interval of 2). Then, the second opening / closing valve (14) is arranged in the communication pipe (13) and
The outside air introduction valve (15) is formed in the communication pipe (13) between the storage unit (14) and the storage unit (1) above the storage unit (1).

In the structure constructed as described above, first,
In order to degas a liquid that has not been degassed or to transfer the degassed liquid from the liquid tank (8) containing the degassed liquid, first, both ends of the flow pipe (6) are Liquid tank
Connect to (8).

With both ends of the flow pipe (6) connected to the liquid tank (8), the outflow on-off valve (12) is closed to close the inflow on-off valve.
(7) and the second opening / closing valve (14) are opened, and the first opening / closing valve (4) and the outside air introduction valve (15) are closed. When the transfer pump (11) is operated in this state, the liquid tank (8) connected to the distribution pipe (6) opens the inflow opening / closing valve (7), and thus the inside of the distribution pipe (6) To the liquid tank by the suction force of the transfer pump (11)
The degassed liquid of (8) or the non-degassed liquid is introduced into the reservoir (1).

This liquid is supplied by an inflow opening / closing valve (7) and a transfer pump.
(11) and the second opening / closing valve (14) is used to fill the storage part (1). In this case, since the first opening / closing valve (4) is closed, the degassed liquid or the non-degassed liquid flows into the storage part (1). Then, it is sequentially accumulated inside and floats
When it is detected that the filling amount reaches a certain level by (16), the transfer pump (11) is stopped, the inflow opening / closing valve (7) is closed, and the vacuum pump (3) is operated.

By the operation of this vacuum pump (3),
The inside of the storage part (1) becomes a vacuum state and the transfer pump
The inside of (11) is also degassed because it is connected to the vacuum pump (3). The operation of the vacuum pump (3) continues for a certain period of time, so that the reservoir (1)
When the degree of vacuum inside reaches the planned value, the vacuum pump (3) is stopped and the first opening / closing valve (4) and the second opening / closing valve (14)
The transfer pump (11) is operated with the valve open.

The operation of this transfer pump (11)
It is possible to perform that the inside of (1) has reached a certain degree of reduced pressure while being detected by an appropriate sensor. Then, by the operation of the transfer pump (11), the liquid in the storage part (1) is stored in the storage part (1) via the first opening / closing valve (4), the transfer pump (11) and the second opening / closing valve (14). Since it flows into the mist or shower from the upper end into the circulation, it will circulate.
The liquid is in good contact with the vacuum area (17) formed in the upper part of the reservoir (1) inside, and the gas in the liquid is removed to form a degassed liquid.

After this circulation is performed for a certain period of time, the operation of the transfer pump (11) is automatically stopped by a timer or the like. Then, the outside air introduction valve (15) is opened, air is introduced into the storage part (1), the second opening / closing valve (14) is closed, and the outflow opening / closing valve (12) is opened. Transfer pump (11) in this state
When the pump is activated, the transfer pump (11) causes the degassed liquid in the reservoir (1) to flow from the outflow opening / closing valve (12) into the liquid tank (8) through the flow pipe (6).

This transfer pump (11) is connected to the reservoir (1) through the first opening / closing valve (4) in the flow of the degassed liquid, but the second opening / closing valve (14) By closing
It is not in communication with the atmosphere, and is placed inside a vacuum. Therefore, even if the transfer pump (11) is operated, external gas does not flow into the transfer pump (11).
Then, the degassed gas in the storage part (1) is transferred to the transfer pump.
It is possible to make sure that the degassed liquid is surely flown into the liquid tank (8) through the outflow opening / closing valve (12) without inflowing air at (11). .

To degas the liquid, the outflow opening / closing valve (12) is closed, the inflow opening / closing valve (7) and the second opening / closing valve (14) are opened, and the first opening / closing operation is performed as described above. When the transfer pump (11) is operated with the valve (4) and the outside air introduction valve (15) closed, the liquid is introduced into the reservoir (1) through the flow pipe (6). Then, the liquid can be degassed by the same action as described above.

Further, in the above embodiment, when the liquid in the reservoir (1) is degassed, the first opening / closing valve (4) and the second opening / closing valve (14) are opened and the transfer pump ( 11) Storage part (1)
By circulating the liquid inside, the liquid was deaerated by bringing the liquid into contact with the vacuum region (17) generated by the operation of the vacuum pump (3) in the storage part (1). As described above, according to the method of the above-described embodiment, it is possible to degas the gas with high efficiency, but this is not always necessary when the purpose is only degassing.

For the purpose of energy saving, the vacuum pump (3) is operated, and after the vacuum region (17) is formed on the upper part of the storage part (1), the transfer pump (11) is operated. Alternatively, even if it is left as it is for a certain period of time, the gas naturally flows out from the liquid in the storage part (1) to the vacuum region (17). Although this method has a point that the degree of degassing is slightly lower than that in the case where it is circulated and that it requires a long time for degassing, it does not operate the transfer pump (11) and it saves the liquid by energy saving. It is possible to degas.

In the above embodiment, one liquid tank is used.
Although both ends of the flow pipe (6) are connected to (8), in another different embodiment, the side of the flow pipe (6) connected to the inflow opening / closing valve (7) is not degassed. Connect to a tank containing liquid,
Separate liquid tank connected to the outlet opening / closing valve (12) of the flow pipe (6)
An ultrasonic cleaning device or the like may be connected to (8), which can be arbitrarily adjusted according to the usage form of the present invention.

[0059]

The present invention is configured as described above, and the transfer pump used for transferring the degassed liquid is arranged in the vacuum circuit to perform degassing. No air will flow into the degassed degassed liquid.

Therefore, a large amount of degassed liquid can be transferred to any place in a short time. In addition, when transferring the degassed liquid, the design of the device is not restricted by natural fall, etc., so that it is possible to freely design in the manufacture of ultrasonic cleaning devices, etc., and it is a small and inexpensive device. In addition, the degassed liquid can be used with high efficiency.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a first embodiment.

FIG. 2 is a schematic view showing an embodiment in which a distribution pipe is provided below a storage section.

FIG. 3 is a schematic view showing an embodiment in which a distribution pipe is used as a storage section.

FIG. 4 is a schematic view of an embodiment in which degassing is performed while circulating a liquid.

[Explanation of symbols]

 1 Reservoir 2 Check valve 3 Vacuum pump 4 First on-off valve 6 Distribution pipe 7 Inflow on-off valve 8 Liquid tank 11 Transfer pump 12 Outflow on-off valve 13 Communication pipe 14 Second on-off valve 15 Outside air introduction valve

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[Procedure amendment]

[Submission date] January 19, 1996

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0018

[Correction method] Change

[Correction contents]

However, as will be described later, the liquid tanks do not necessarily have to be the same, and may be connected to separate tanks. In a work of the present, in one degassing vessel, it is described At a state in which both ends are connected in the distribution pipe.

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0044

[Correction method] Change

[Correction contents]

Further, in each of the above embodiments, degassing was performed without circulating the liquid, but in other different embodiments, degassing was performed while circulating the liquid, and efficient degassing was performed. Is possible. This method uses the storage part (1)
As is shown in Fig 4 with connecting the vacuum pump (3) through a check valve (2) to the upper end portion, the first on-off valve at the lower end (4)
Is provided. Then, one end of the flow pipe (6) communicating with the storage part (1) through the first on-off valve (4) is connected to the inflow on-off valve.
Connect to the liquid tank (8) via (7). A filter (10) is arranged in the space between the liquid tank (8) and the inflow opening / closing valve (7). The liquid tank (8) may be an ultrasonic cleaning tank. When the liquid tank (8) is an ultrasonic tank as described above, by storing the degassed liquid in the ultrasonic tank, the ultrasonic vibration is not attenuated by the gas, so that the cleaning effect can be enhanced.

[Procedure 3]

[Document name to be amended] Statement

[Correction item name] 0053

[Correction method] Change

[Correction contents]

[0053] After the the circulation Tsu fixed time line, automatically stops the operation of the transfer pump (11) by a timer or the like. Then, the outside air introduction valve (15) is opened, air is introduced into the storage part (1), the second opening / closing valve (14) is closed, and the outflow opening / closing valve (12) is opened. When the transfer pump (11) is operated in this state, the transfer pump (11) causes the degassed liquid in the reservoir (1) to flow from the outflow opening / closing valve (12) to the liquid tank via the flow pipe (6).
(8) Flow into the inside.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] Explanation of sign

[Correction method] Change

[Correction contents]

[Explanation of Codes] 1 Reservoir 3 Vacuum pump 4 First opening / closing valve 6 Distribution pipe 7 Inflow opening / closing valve 8 Liquid tank 11 Transfer pump 12 Outflow opening / closing valve 13 Communication pipe 14 Second opening / closing valve 15 Outside air introduction valve

Claims (10)

[Claims] 1. A transfer pump for transferring a liquid is arranged in a liquid flow pipe, an inflow opening / closing valve is arranged on a liquid inflow side of the transfer pump, and an outflow opening / closing valve is arranged on a liquid discharge side of the transfer pump. , A liquid storage part is connected to the flow pipe between the outflow on-off valve and the inflow on-off valve, and a vacuum pump is connected to this storage part to enable decompression in the storage part, and the inflow on-off valve or the outflow on-off valve. One or both of these are connected to a liquid tank containing a liquid, and a degassed liquid transfer device. 2. A transfer pump for transferring a liquid is arranged in a liquid flow pipe, an inflow opening / closing valve is arranged on a liquid inflow side of the transfer pump, and an outflow opening / closing valve is arranged on a liquid discharge side of the transfer pump. , A liquid storage part is connected to the flow pipe between the outflow on-off valve and the inflow on-off valve, one end of the communication pipe is connected to this storage part, and the other end of the communication pipe is connected to the transfer pump and the outflow on-off valve. It is connected to a flow pipe between the two, and a transfer pump can circulate the liquid in the storage part, and a vacuum pump is connected to this storage part to reduce the pressure in the storage part and A degassed liquid transfer device, characterized in that either one or both is connected to a liquid tank containing a liquid. 3. A first opening / closing valve is provided at a lower end of a storage part connected to a vacuum pump, and one end of a flow pipe communicating with the first opening / closing valve can be connected to a liquid tank via an inflow opening / closing valve. At the same time, a transfer pump is connected to this liquid tank at the position of the flow pipe through the inflow / outflow valve, and the liquid tank can be connected in the liquid outflow direction of this transfer pump via the outflow on / off valve and the pump and the outflow / outflow switch are connected. A communication pipe that communicates with the upper part of the degassing tank is connected to the flow pipe at the valve interval, and a second opening / closing valve is provided in this communication pipe, and between the second opening / closing valve and the degassing tank above the degassing tank. A degassed liquid transfer device, characterized in that the outside air introduction valve is formed in a communication pipe. 4. The degassed liquid transfer device according to claim 1, wherein the storage part is formed in a tank shape. 5. The degassed liquid transfer device according to claim 1, 2 or 3, wherein the storage portion is formed in the flow pipe. 6. The degassed liquid transfer device according to claim 1, 2 or 3, wherein the liquid tank is an ultrasonic cleaning tank. 7. The degassed liquid transfer device according to claim 1, 2 or 3, wherein the liquid tank is a storage tank for the degassed liquid. 8. The degassed liquid transfer device according to claim 1, 2 or 3, wherein the liquid tank is a storage tank for the non-degassed liquid. 9. The degassed liquid according to claim 1, wherein the liquid tank connected to the inflow opening / closing valve and the liquid tank connected to the outflow opening / closing valve are the same tank. Transfer device. 10. The degassing method according to claim 1, wherein the liquid tank connected to the inflow opening / closing valve and the liquid tank connected to the outflow opening / closing valve are separate tanks. Liquid transfer device.