JP2883838B2 - Degassing liquid transfer device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention removes gas such as air from a cleaning liquid used for ultrasonic cleaning, a liquid used for medical cleaning, etc., and enhances the cleaning effect.
It is intended to prevent the occurrence of bacteria.

[0002]

2. Description of the Related Art Conventionally, cleaning liquids used for ultrasonic cleaning and cleaning liquids used for medical purposes remove gas such as air from the liquid, and the ultrasonic waves are not attenuated by the gas, so that the cleaning effect is high. It is known that the effect of preventing the generation of bacteria due to the absence or reduction of oxygen or preventing the generation of rust in washing metals and the like is known.

[0003] Conventionally, the cleaning liquid used for such a purpose has been degassed by various methods. However, when transferring the degassed liquid from the degassing tank to the target part, if air is mixed in the transfer pump if this is performed by the transfer pump, the air is removed from the degassed liquid with great effort. It has the disadvantage that it is mixed again and the degassing effect is reduced.

In the case of transferring the degassed liquid while preventing the air from being mixed into the degassed liquid, conventionally,
A device for degassing is placed at the top, an ultrasonic cleaning tank using this degassed liquid is placed at the bottom,
The degassing liquid is gently transferred.

[0005]

However, the transfer of the degassed liquid due to such a head is a great limitation in the design of the apparatus, and the degassed liquid cannot be transferred quickly at a high speed. It has the disadvantage of making the above efficiency inefficient.

In order to solve the above-mentioned problems, the present invention makes it possible to quickly transfer a degassed liquid to a target portion by using a transfer pump. This also prevents air from being mixed into the degassed liquid.

[0007]

According to the present invention, in order to solve the above-mentioned problems, a transfer pump for transferring liquid is disposed in a liquid flow pipe, and an inflow opening / closing valve is provided on a liquid inflow side of the transfer pump. An outflow on-off valve is arranged on the liquid discharge side of the transfer pump, a liquid reservoir is connected to a flow pipe between the outflow on-off valve and the inflow on-off valve, and a vacuum pump is connected to this reservoir. In this case, the pressure in the storage section can be reduced, and one or both of the inflow opening / closing valve and the outflow opening / closing valve are connected to a liquid tank which is an ultrasonic cleaning tank containing the liquid.

According to a second aspect of the present invention, a transfer pump for transferring a liquid is disposed in a liquid flowing pipe, an inflow opening / closing valve is disposed on a liquid inflow side of the transfer pump, and a liquid discharge side of the transfer pump is disposed on a liquid discharge side of the transfer pump. An outflow on-off valve is arranged, a liquid reservoir is connected to a flow pipe between the outflow on-off valve and the inflow on-off valve, one end of a communication pipe is connected to this storage section, and the other end of the communication pipe is transferred. Connected to the flow pipe between the pump and the outflow opening / closing valve, the liquid in the storage section can be circulated by the transfer pump, and a vacuum pump is connected to this storage section to enable pressure reduction in the storage section and to open and close the storage section. One or both of the valve and the outflow on-off valve are connected to a liquid tank containing a liquid.

According to a third aspect of the present invention, a first opening / closing valve is provided at a lower end of a storage section to which a vacuum pump is connected, and one end of a flow pipe communicated through the first opening / closing valve is connected to an inflow opening / closing valve. In addition to being connectable to the liquid tank, a transfer pump can be connected to the liquid tank at a position via the inflow opening / closing valve, and the liquid tank can be connected via the outflow opening / closing valve in the liquid outflow direction of the transfer pump. connect the communicating pipe to the top and communicates with the reservoir to flow tube spacing pump and the outflow-off valve as well as, the reservoir provided with a second on-off valve in the communicating pipe and the second on-off valve
The outside air introduction valve is formed in the communication pipe by being disposed above the storage section between the sections .

[0010] The storage section may be formed in a flow pipe.

The liquid tank may be an ultrasonic cleaning tank.

The liquid tank may be a storage tank for a non-degas liquid.

The liquid tank connected to the inflow opening / closing valve and the liquid tank connected to the outflow opening / closing valve may be the same tank.

Further, the liquid tank connected to the inflow opening / closing valve and the liquid tank connected to the outflow opening / closing valve may be separate tanks.

[0015]

Since the present invention is constructed as described above, the first invention for degassing a liquid that has not been degassed will be described first. First, both ends of the flow pipe are connected to a liquid tank which is an ultrasonic cleaning tank .

However, as will be described later, this ultrasonic wave
The liquid tanks, which are cleaning tanks, need not be the same, and may be connected to separate tanks. The operation of the present invention will be described in a state where both ends of the flow pipe are connected to one degassing tank.

In a state where both ends of the flow pipe are connected to the one liquid tank, the outflow on-off valve is closed, the inflow open / close valve is opened, and the transfer pump is operated. By opening the inflow opening / closing valve, the liquid in the liquid tank is introduced into the reservoir by the suction force of the transfer pump into the flow pipe.

This liquid is filled into the storage section via the inflow opening / closing valve. Then, the transfer pump is stopped, the inflow opening / closing valve is closed, and the vacuum pump is operated in a state in which the accumulated amount is sequentially accumulated in the inside and when it is detected that the filling amount has reached a predetermined level by an appropriate sensor such as a float.

When the degree of vacuum in the storage section reaches a predetermined value due to the operation of the vacuum pump continuing for a certain time, the vacuum pump is stopped and left for a certain time. By this standing, the gas in the liquid is sucked into the vacuum area in the storage section, and the deaeration is completed. Further, the liquid in the flow pipe and the transfer pump communicating with the storage section is also degassed at the same time, so that no or very little gas exists in the transfer pump.

After the completion of the deaeration, the air vent valve is opened, air is introduced into the storage section, and the outflow on-off valve is opened. When the transfer pump is operated in this state, the transfer pump causes the degassed liquid in the storage section to flow into the liquid tank from the outflow opening / closing valve via the flow pipe.

This transfer pump is connected to the storage part in the flow of the degassed liquid. If the communication between the air and the transfer pump is cut off by leaving the degassed liquid in the storage part, No outside gas flows into the transfer pump.
The degassed liquid in the reservoir does not flow into the transfer pump, and the degassed liquid can be reliably flowed into the liquid tank via the outflow on-off valve It is what becomes.

In the above operation, the liquid is introduced into the storage section by operating the transfer pump. However, it is also possible to introduce the liquid into the storage section without operating the transfer pump. In this method, if the inside of the reservoir is depressurized by a vacuum pump and the inflow opening / closing valve is opened, the liquid can be introduced into the reservoir by a pressure difference. In order to deaerate the liquid, it may be left in this introduced state for a certain period of time, or good deaeration is possible by operating the vacuum pump to further reduce the pressure.

Further, as in the second invention, one end of the communication pipe is connected to the storage part, and the other end of the communication pipe is connected to the flow pipe between the transfer pump and the outflow opening / closing valve. If the liquid in the storage section can be circulated, the liquid can be circulated in the vacuum area of the storage section a plurality of times in the form of a shower, and the degree of deaeration can be improved.

In a third aspect of the present invention, the outflow on-off valve is closed, the inflow on-off valve and the second on-off valve are opened in a state where both ends of the flow pipe are connected to one liquid tank, The first on-off valve and the air release valve are closed. When the transfer pump is operated in this state, the liquid tank connected to the flow pipe opens the inflow opening / closing valve, so that the liquid degassed in the liquid tank by the suction force of the transfer pump in the flow pipe, Alternatively, a liquid that has not been degassed is introduced into the storage unit.

This liquid is filled into the reservoir via the inflow on-off valve, the transfer pump, and the second on-off valve. In this case the first
Since the on-off valve is closed, the degassed liquid or the non-degassed liquid in the liquid tank flows into the reservoir. Then, the transfer pump is stopped, the inflow opening / closing valve is closed, and the vacuum pump is operated in a state in which the accumulated amount is sequentially accumulated in the inside and when it is detected that the filling amount has reached a predetermined level by an appropriate sensor such as a float.

By the operation of the vacuum pump, the inside of the storage section is brought into a vacuum state, and the inside of the transfer pump is also evacuated because it is connected to the vacuum pump via a liquid. When the degree of vacuum in the storage unit reaches a predetermined value due to the operation of the vacuum pump continuing for a certain period of time, the vacuum pump is stopped, and the transfer pump is opened in a state where the first opening and closing valve and the second opening and closing valve are opened. Activate

The operation of the transfer pump can be performed in a state where a predetermined sensor detects that the inside of the storage section has reached a certain degree of reduced pressure. Then, by the operation of the transfer pump, the liquid in the storage section flows into the storage section via the first opening / closing valve, the transfer pump, and the second opening / closing valve, and circulates. The liquid is in good contact with the vacuum zone formed at the top, and the gas in the liquid is removed to form a degassed liquid.

After performing this circulation for a predetermined time, the operation of the transfer pump is automatically stopped by a timer or the like. Then, the air vent valve is opened, air is introduced into the reservoir, the second on-off valve is closed, and the outflow on-off valve is opened. When the transfer pump is operated in this state, the transfer pump causes the degassed liquid in the storage section to flow into the liquid tank from the outflow opening / closing valve via the flow pipe.

This transfer pump is connected to the reservoir via the first on-off valve in the flow of the degassed liquid, but by closing the second on-off valve, the transfer pump communicates with the atmosphere. Instead, it is placed inside a vacuum. Therefore, even when the transfer pump is operated, no external gas flows into the transfer pump. The degassed gas in the storage part does not flow into the transfer pump, and the degassed liquid can be reliably flowed into the liquid tank via the outflow opening / closing valve. It is what becomes.

Further, in order to deaerate the liquid, the outflow on-off valve is closed, the inflow on-off valve and the second on-off valve are opened, and the first on-off valve and the air vent valve are closed in the same manner as described above. When the pump is operated, the liquid is introduced into the reservoir through the flow pipe. The liquid can be degassed by the same operation as described above.

[0031]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIG. 1. (1) is a storage section in which liquid flow pipes (6) are arranged vertically to communicate with each other and connected to a lower end thereof. A transfer pump (11) for transferring liquid is disposed in the pipe (6). This transfer pump
The above-mentioned reservoir (1) is arranged on the liquid inflow side of (11), and an inflow opening / closing valve is connected to a flow pipe (6) connected to the upper end of the reservoir (1).
(7) is arranged.

Further, an outflow opening / closing valve (12) is arranged on the liquid outflow side of the transfer pump (11), and a liquid reservoir (1) is provided between the outflow opening / closing valve (12) and the inflow opening / closing valve (7). ) Are connected as described above. In addition, a vacuum pump (3) is connected to the storage section (1) via a connecting pipe (5) connected to a flow pipe (6), so that the pressure in the storage section (1) can be reduced. Also, connecting pipe
In (5), a check valve (2) is arranged between the storage part (1) and the vacuum pump (3). The connecting pipe (5) has a storage part (1) at a position separate from the vacuum pump (3) and the check valve (2).
An outside air introduction valve (15) for introducing outside air as necessary is arranged in a portion directly communicating with the outside air.

A liquid tank (8), which is an ultrasonic cleaning tank, is connected to a flow pipe (6) on the side of the inflow opening / closing valve (7) via a filter (10). A liquid tank (8) containing liquid is also connected to a flow pipe (6) of the outflow on-off valve (12). This liquid tank
(8) is a flow pipe (6) on the inflow opening / closing valve (7) side, and an outflow opening / closing valve.
(12) is connected to the flow pipe (6), but in a different embodiment, a liquid tank connected to the flow pipe (6) on the side of the inflow opening / closing valve (7).
(8) and the liquid tank (8) connected to the flow pipe (6) on the outflow on-off valve (12) side may be separate. Ultra this case, the liquid tank connected to the inlet on-off valve (7) side flow pipe (6) (8) performs only the supply of liquid, connected to the flow pipe outlet on-off valve (12) side (6) The liquid tank (8), which is a sonic cleaning tank, is used as a storage section for the liquid that has been degassed.

In the embodiment shown in FIG.
(6) is connected above and below the storage part (1), but in another different embodiment, as shown in FIG. 2, the flow pipe (6) on the inflow opening / closing valve (7) side also has the outflow opening / closing valve ( The distribution pipe (6) on the 12) side is also a storage section
Connect to the lower end of (1). This configuration has an advantage that the piping can be simplified as compared with the above embodiment.

Further, in the above two embodiments, the storage part (1) for storing the liquid is formed in a tank shape, but in another different embodiment, as shown in FIG. It is also possible to use the storage section (1) or a flow pipe (6) having a larger diameter as the storage section (1).

In order to perform degassing from the liquid in the above-described configuration, in any of the above embodiments, the outflow on-off valve (12) is first closed and the inflow on-off valve (7) is opened. I do.
When the transfer pump (11) is operated in this state, the flow pipe
Since the liquid tank (8) connected to (6) opens the inflow opening / closing valve (7), the liquid tank (8) is sucked into the flow pipe (6) by the suction force of the transfer pump (11). Reservoir (1) for liquid that has not been degassed
To be introduced.

This liquid is filled into the storage section (1) via the inflow opening / closing valve (7). Then, the transfer pump is accumulated in the inside sequentially, and when it is detected that the filling amount has reached a certain level by an appropriate sensor such as the float (16), the transfer pump
(11) is stopped, the inflow on-off valve (7) is closed, and the vacuum pump (3) is operated.

When the operation of the vacuum pump (3) continues for a certain period of time and the degree of vacuum in the storage part (1) reaches a predetermined value, the vacuum pump (3) is stopped and left for a certain period of time. . By this standing, the gas in the liquid is sucked into the vacuum area in the storage section, and the deaeration is completed. A flow pipe (6) and a transfer pump (11) communicating with the storage section (1).
The liquid inside is also degassed at the same time, and there is no gas or very little gas in the transfer pump (11).

After completion of the deaeration, the outside air introduction valve (15) is opened, air is introduced into the storage section (1), and the outflow on-off valve (12) is opened. When the transfer pump (11) is operated in this state, the transfer pump (11) sends the degassed liquid in the storage section (1) from the outflow opening / closing valve (12) through the flow pipe (6) to the ultrasonic pump.
It is made to flow into a liquid tank (8) which is a wave washing tank .

The transfer pump (11) is connected to the storage section (1) in the flow of the degassed liquid.
Air and transfer pump by leaving degassed liquid
If the communication of (11) is cut off, no external gas flows into the transfer pump (11). The degassed gas in the storage part (1) does not flow into the transfer pump (11), and the liquid kept in a degassed state flows out of the transfer pump (11).
Through (12), it is possible to flow into the liquid tank (8).

In the above operation, the liquid is introduced into the storage section (1) by operating the transfer pump (11). However, the liquid is introduced into the storage section (1) without operating the transfer pump (11). It is also possible. In this method, after the pressure in the reservoir (1) is reduced by a vacuum pump (3), an inflow opening / closing valve is provided.
If (7) is opened, the liquid can be introduced into the storage part (1) by the pressure difference. In order to degas the liquid, it may be left in this introduced state for a certain period of time, or a vacuum pump.
If (3) is operated to further reduce the pressure, good deaeration becomes possible.

In each of the above embodiments, the deaeration was performed without circulating the liquid. However, in other different embodiments, the deaeration was performed while circulating the liquid to achieve efficient deaeration. Is made possible. This method comprises the steps of:
A vacuum pump (3) is connected to the upper end via a check valve (2), and a first on-off valve (4) is provided at the lower end as shown in FIG.
Is provided. Then, one end of the flow pipe (6) communicating with the storage part (1) via the first on-off valve (4) is connected to the inflow on-off valve.
The liquid tank (8) is connected via (7). A filter (10) is arranged between the liquid tank (8) and the inflow opening / closing valve (7). The liquid tank (8) may be an ultrasonic cleaning tank. When the liquid tank (8) is an ultrasonic tank as described above, by storing the degassed liquid in the ultrasonic tank, the ultrasonic vibration is not attenuated by the gas, so that the cleaning effect can be enhanced.

A transfer pump (11) is connected to the liquid tank (8) and a flow pipe (6) at a position via an inflow opening / closing valve (7). The configuration of the transfer pump (11) is not particularly limited as long as it is suitable for flowing the liquid, and any one can be used.

A liquid tank (8) is connected to the transfer pump (11) in the liquid outflow direction via an outflow opening / closing valve (12).
A liquid tank connected to the liquid tank (8) and the inflow opening / closing valve (7).
(8) may be the same tank, or a liquid tank (8) connected to the inflow on-off valve (7) and a liquid tank (8) connected to the outflow on-off valve (12).
May be separate tanks. If you want a separate tank,
The liquid tank (8) connected to the outflow on-off valve (12) is a tank using a degassed liquid such as an ultrasonic cleaning tank or a medical cleaning tank. Further, the liquid tank (8) connected to the inflow opening / closing valve (7) may be used as a tank for supplying a non-degas liquid, or the degas liquid may be stored and transferred to another target device via a transfer pump (11). The degassing liquid may be supplied without mixing.

The transfer pump (11) and the outflow on-off valve (1)
The communication pipe (13) communicating with the upper part of the storage part (1) is connected to the flow pipe (6) at the interval of 2). A second on-off valve (14) is arranged in the communication pipe (13) and the second on-off valve
The outside air introduction valve (15) is formed in the communication pipe (13) between the storage part (1) and the storage part (1) and disposed above the storage part (1).

In the above configuration, first,
To degas a liquid that has not been degassed, or to transfer a degassed liquid from a liquid tank (8) containing degassed liquid, first, both ends of the flow pipe (6) must be connected. Liquid tank
Connect to (8).

With both ends of the flow pipe (6) connected to the liquid tank (8), the outflow on-off valve (12) is closed and the inflow on-off valve is closed.
(7) and the second on-off valve (14) are opened, and the first on-off valve (4) and the outside air introduction valve (15) are closed. When the transfer pump (11) is operated in this state, the liquid tank (8) connected to the flow pipe (6) opens the inflow opening / closing valve (7), so that the inside of the flow pipe (6) is opened. Liquid tank with suction force of transfer pump (11)
The degassed liquid or liquid not degassed in (8) is introduced into the storage section (1).

This liquid is supplied to an inflow opening / closing valve (7), a transfer pump
(11) The reservoir (1) is filled through the second on-off valve (14). In this case, since the first on-off valve (4) is closed, the degassed liquid or the non-degassed liquid flows into the storage part (1). Then, it is accumulated in the inside sequentially and floated
When it is sensed by (16) that the filling amount has reached a certain level, the transfer pump (11) is stopped, the inflow opening / closing valve (7) is closed, and the vacuum pump (3) is operated.

By the operation of the vacuum pump (3),
The inside of the storage unit (1) is evacuated and the transfer pump
Since the inside of (11) is also connected to the vacuum pump (3), it is degassed. When the operation of the vacuum pump (3) continues for a certain period of time, the storage unit (1)
When the degree of vacuum in the inside reaches the predetermined value, the vacuum pump (3) is stopped, and the first on-off valve (4) and the second on-off valve (14)
The transfer pump (11) is operated in a state where is opened.

The operation of the transfer pump (11)
(1) The fact that the inside of the chamber has reached a certain degree of reduced pressure can be performed in a state where it is detected by an appropriate sensor. By the operation of the transfer pump (11), the liquid in the storage section (1) passes through the first opening / closing valve (4), the transfer pump (11), and the second opening / closing valve (14). From the upper end into a mist or shower, and circulates.
The liquid is in good contact with the vacuum zone (17) formed above the reservoir (1), and the gas in the liquid is removed to form a degassed liquid.

After the circulation has been performed for a predetermined time, the operation of the transfer pump (11) is automatically stopped by a timer or the like. Then, the outside air introduction valve (15) is opened, air is introduced into the storage part (1), the second on-off valve (14) is closed, and the outflow on-off valve (12) is opened. When the transfer pump (11) is operated in this state, the transfer pump (11) transfers the degassed liquid in the storage section (1) from the outflow opening / closing valve (12) through the flow pipe (6) to the liquid tank.
(8).

The transfer pump (11) is connected to the storage section (1) via the first on-off valve (4) in the flow of the degassed liquid, but the second on-off valve (14). By closing
It is not in communication with the atmosphere and is located inside a vacuum. Therefore, even if the transfer pump (11) is operated, no external gas flows into the transfer pump (11).
Then, the degassed gas in the storage unit (1) is transferred to a transfer pump.
In (11), the air does not flow in, and the liquid kept in a degassed state can be flowed into the liquid tank (8) via the outflow opening / closing valve (12). .

In order to deaerate the liquid, the outflow on-off valve (12) is closed, the inflow on-off valve (7) and the second on-off valve (14) are opened and the first When the transfer pump (11) is operated with the valve (4) and the outside air introduction valve (15) closed, the liquid is introduced into the reservoir (1) through the flow pipe (6). The liquid can be degassed by the same operation as described above.

In the above embodiment, when the liquid in the storage section (1) is degassed, the first on-off valve (4) and the second on-off valve (14) are opened and the transfer pump ( 11) Storage unit (1)
By circulating the liquid inside, the liquid was brought into contact with the vacuum area (17) generated by the operation of the vacuum pump (3) in the storage part (1) to degas the liquid. As described above, according to the method of the above-described embodiment, it is possible to perform the degassing of the gas with high efficiency, but it is not always necessary to perform the degassing only.

If the purpose is to save energy, the vacuum pump (3) is operated, and after the vacuum zone (17) is formed above the storage part (1), the transfer pump (11) is operated. Instead, the gas naturally flows out of the liquid in the storage section (1) to the vacuum area (17) even when the liquid is left for a certain period of time. In this method, although the degree of degassing is slightly reduced and the time required for degassing is much longer than in the case of circulation, the method does not require the operation of the transfer pump (11), and the energy-saving liquid is used. Can be degassed.

In the above embodiment, one liquid tank is used.
Although both ends of the flow pipe (6) are connected to (8), in another different embodiment, the side of the flow pipe (6) connected to the inflow on-off valve (7) is not degassed. Connect to the tank containing the liquid,
Separate liquid tank connected to the outflow on-off valve (12) of the flow pipe (6)
An ultrasonic cleaning device or the like may be connected to (8), which can be arbitrarily adjusted according to the use mode of the present invention.

[0057]

According to the present invention, the transfer pump used for transferring the degassed liquid is disposed in a vacuum circuit to perform degassing. Air does not flow into the degassed degassed liquid.

Therefore, the degassed liquid is transferred to an ultrasonic cleaning tank.
It is possible to transfer a large amount to an arbitrary place such as in a short time. In addition, since the design of the device is not restricted by natural fall when transferring the degassed liquid, free design is possible in the manufacture of the ultrasonic cleaning device, etc., and the device is small and inexpensive. Can be obtained, and the degassed liquid can be used with high efficiency.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a first embodiment.

FIG. 2 is a schematic view showing an embodiment in which a flow pipe is provided below a storage unit.

FIG. 3 is a schematic view showing an embodiment in which a distribution pipe is used as a storage unit.

FIG. 4 is a schematic view of an embodiment in which degassing is performed while circulating a liquid.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Storage part 3 Vacuum pump 4 First on-off valve 6 Flow pipe 7 Inflow on-off valve 8 Liquid tank 11 Transfer pump 12 Outflow on-off valve 13 Communication pipe 14 Second on-off valve 15 Outside air introduction valve

Claims (8)

(57) [Claims] 1. A transfer pump for transferring a liquid is arranged in a liquid flow pipe, an inflow opening / closing valve is arranged on a liquid inflow side of the transfer pump, and an outflow opening / closing valve is arranged on a liquid discharge side of the transfer pump. A liquid reservoir is connected to a flow pipe between the outflow on-off valve and the inflow on-off valve, and a vacuum pump is connected to the reservoir to enable decompression of the inside of the reservoir, and an inflow on-off valve or an outflow on-off valve A degassing liquid transfer device, wherein one or both of the two are connected to a liquid tank which is an ultrasonic cleaning tank containing the liquid. 2. A transfer pump for transferring a liquid is arranged in a liquid flow pipe, an inflow opening / closing valve is arranged on a liquid inflow side of the transfer pump, and an outflow opening / closing valve is arranged on a liquid discharge side of the transfer pump. Connecting a liquid reservoir to a flow pipe between the outflow on-off valve and the inflow on-off valve, connecting one end of a communication pipe to the storage section, and connecting the other end of the communication pipe to a transfer pump and an outflow on-off valve. Connected to a circulation pipe between the storage tank and the transfer pump so that the liquid in the storage section can be circulated, and a vacuum pump is connected to the storage section so that the pressure in the storage section can be reduced. An apparatus for transferring a degassed liquid, wherein one or both of them are connected to a liquid tank containing a liquid. 3. A first opening / closing valve is provided at a lower end of a storage section to which a vacuum pump is connected, and one end of a flow pipe communicated through the first opening / closing valve can be connected to a liquid tank via an inflow opening / closing valve. At the same time, a transfer pump is connected to the circulation pipe at the position via the inflow opening / closing valve, and the liquid tank can be connected to the liquid tank via the outflow opening / closing valve in the liquid outflow direction of the transfer pump. connect the communicating pipe to the top and communicates with the reservoir to flow tube spacing of the valve, placing the second on-off valve is provided on the communicating pipe to the remote upper by reservoir between the reservoir the second on-off valve A degassing liquid transfer device, wherein the outside air introduction valve is formed in the communication pipe. 4. The storage part is formed in a distribution pipe.
4. The device for transferring degassed liquid according to claim 1, 2 or 3. 5. The liquid tank is an ultrasonic cleaning tank.
4. The apparatus for transferring a degassed liquid according to claim 2, wherein 6. The liquid tank is a storage tank for a non-degas liquid.
4. A device for transferring a degassed liquid according to claim 2, wherein
Place. 7. A liquid tank connected to an inflow on-off valve and an outflow on-off valve.
Wherein the liquid tanks connected to each other are the same tank.
1, 2, 3, 5 or 6 degassing liquid transfer devices. 8. A liquid tank connected to an inflow on-off valve and an outflow on-off valve.
Wherein the liquid tank connected to the tank is a separate tank.
Item 6. The apparatus for transferring a degassed liquid according to any one of Items 1, 2, 3, 5, and 6.