JPH11326418A - Electromagnetic radiation measuring device, and measuring system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To secure high sensitivity and isolation ranging over a wide frequency band. SOLUTION: A lines of antenna substrates 1 arranged with B pieces of microloop antennas 2 are arranged in parallel to the X-axis, B lines of control GND substrates 4 formed with control patterns 5 and GND patterns 6 are arranged in parallel to the Y-axis, and A×B pieces of the microloop antenna 2 are arranged in the XY-face to from a latice shape. One end of a loop of the microloop antenna 2 is soldered to an anode of a PIN diode 3, and the other end of the loop is soldered to the control pattern 5 on the control GND substrate 4. A cathode of the PIN diode 3 is connected to a strip line 9 of an inner layer of the antenna substrate 1 via a through hole 8. No dielectric exists thereby between the microloop antennas 2, a conductor width of the loop in the Z-direction is made small, and the respective microloop antennas are shilded.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electromagnetic radiation measuring apparatus for measuring electromagnetic radiation mainly emitted from electronic equipment and the like, and a measuring system using the same, in particular, having high performance and abundant functions. It is configured as follows.

[0002]

2. Description of the Related Art Conventionally, as an electromagnetic radiation measuring device for measuring electromagnetic radiation radiated from an electronic device or the like, those described in, for example, JP-A-9-127166 and JP-A-9-127167 are known. This device is 1000 to 2
It is composed of a multilayer substrate on which about 000 small loop antennas are formed. This minute loop antenna is formed by a surface layer pattern of a multilayer substrate and through holes, and each minute loop antenna constitutes a minute measurement unit (measurement cell).
Switching is performed by a PIN diode provided on the multilayer substrate in order to extract a detection result in each measurement cell.

[0003] This type of electromagnetic radiation measuring apparatus generally has two
A surface of about 00 to 400 mm square is set as a measurement range, the device to be measured is placed on the measurement surface, the position and the radiation level of electromagnetic radiation from the device to be measured are detected, and the result is displayed or stored.

In this type of electromagnetic radiation measuring apparatus, the loop length and detection sensitivity (antenna factor) of a small loop antenna
Are substantially proportional to each other, and when the loop length is increased, the detection sensitivity is improved. However, when the loop length is increased, the loop inductance is increased, so that the sensitivity in a high frequency region (for example, 1000 MHz or more) tends to be deteriorated. In addition, the physical area of the small loop antenna is increased, and the positional resolution of detection is reduced. descend. Further, since the detection sensitivity of the small loop antenna is substantially proportional to the frequency at a frequency of 1000 MHz or less, if the position resolution is increased, that is, if the loop length is reduced (for example, 5 mm or less), particularly at a low frequency (100 MHz or less). Practical detection sensitivity cannot be obtained. Therefore, in general, the loop length of the small loop antenna is determined by a compromise between sensitivity, frequency characteristics, and position resolution. Generally, loop length and position resolution are 6-7 mm
The frequency range in which practical sensitivity is obtained is about 10 to 1000 MHz.

In this type of electromagnetic radiation measuring apparatus, since the minute loop antenna is formed on the same multilayer substrate, the space between the minute loop antennas is filled with a dielectric material constituting the multilayer substrate. And the parasitic stray capacitance increases. The parasitic stray capacitance component on the substrate causes deterioration of isolation between adjacent measurement minute units (measurement cells), particularly at a high frequency.

Further, since this kind of electromagnetic radiation measuring apparatus generally has only one measuring surface, it measures the surface of the device to be measured (generally, a circuit board), and then measures the back surface. As described above, the measurement of the front surface and the back surface of the device to be measured is performed separately.

Although this type of electromagnetic radiation measuring apparatus can detect and display the two-dimensional position distribution of the electromagnetic radiation on the horizontal plane, it cannot detect the position of the wave source of the electromagnetic radiation in the height direction.

[0008] This type of electromagnetic radiation measuring apparatus has 30
Since the measurement system composed of a strip line having a length of about 0 to 500 mm is switched by the PIN diode, the transmission system has a large loss particularly at a high frequency due to the OFF capacitance of the diode.

[0009]

The conventional electromagnetic radiation measuring apparatus has a wide frequency band (for example, 10 to 3000M).
(About Hz), there is a problem that high sensitivity and good isolation cannot be ensured.

Further, if the loop length of the small loop antenna is made small (for example, 5 mm or less) in order to enhance the position resolution, there is a problem that practical detection sensitivity cannot be obtained particularly at a low frequency (100 MHz or less).

Another problem is that the isolation between adjacent measuring cells deteriorates particularly at high frequencies.

Another problem is that the front and back surfaces of the device to be measured cannot be measured simultaneously. Another problem is that the position of the wave source of the electromagnetic radiation in the height direction cannot be detected. There is also a problem that high performance cannot be ensured at a specific frequency.

There is also a problem that the transmission system has a large loss particularly at high frequencies.

Further, since there is no means for correcting the variation in the detection sensitivity of the entire antenna section, there is a problem that high measurement accuracy cannot be secured.

An object of the present invention is to provide an electromagnetic radiation measuring apparatus and a measuring system which have a high performance over a wide frequency band and have a wide range of functions. And

[0016]

SUMMARY OF THE INVENTION Therefore, in an electromagnetic radiation measuring apparatus according to the present invention, a plurality of first substrates having surfaces orthogonal to the plane and arranged in parallel on the same plane, a first substrate and a grid are provided. A plurality of second substrates having a surface orthogonal to the plane and arranged in parallel so as to form a shape, and a plurality of minute loop antennas and each of the minute loop antennas being selectively provided on each of the first substrates. A plurality of semiconductor elements connected to the transmission line and a strip line as a transmission line, a GND pattern and a control signal pattern provided on each of the second substrates, and a portion where the first substrate and the second substrate intersect. The micro loop antenna is connected to the control signal pattern.

A first measuring section having a plurality of first minute loop antennas and a means for selecting the first minute loop antenna; and a means for selecting a plurality of second minute loop antennas and the second minute loop antenna. A second measuring unit provided with the first measuring unit, the loop length of the first minute loop antenna and the loop length of the second minute loop antenna are set to different values, and the measurable frequency range of the first measuring unit and the second measurement The settable frequency range is set differently.

A first measuring unit having a plurality of first minute loop antennas and a means for selecting the first minute loop antenna; and a means for selecting a plurality of second minute loop antennas and the second minute loop antenna. And a housing having an opening / closing structure for accommodating the first measurement unit and the second measurement unit, with the first measurement unit facing the body of the housing and the measurement surface facing the lid. The second measuring unit is stored in the lid of the housing with the measurement surface facing the main body, the device to be measured is arranged between the main unit and the lid, and the electromagnetic radiation from the device to be measured is stored. Is measured.

Also, a plurality of minute loop antennas, a PIN diode for connecting the first end of the minute loop antenna to the transmission line, a first capacitor for grounding the second end of the minute loop antenna to GND at high frequency, and a minute loop antenna A second capacitor disposed between the first end and the second end or between the first end and the GND, and the resonance frequency of the parallel circuit formed by the minute loop antenna and the second capacitor is set to the measurement frequency. The value of the second capacitor is set to be equal to

Further, one measurement system is constituted by a transmission line to which a plurality of minute loop antennas are selectively connected, and signals from the plurality of measurement systems are selected and transmitted to the next stage. When one end of the PIN diode is connected to the end of the transmission line, the other end of the PIN diode is connected in common and connected to the next stage, and the reactance element is connected in parallel to both ends of the PIN diode, and the PIN diode is in the OFF state. The parallel resonance frequency of the parallel circuit of the PIN diode and the reactance element is set in a measurable frequency range.

Also, a plurality of micro loop antennas and a first loop connecting a first end of the micro loop antenna to a first transmission line.
A PIN diode, a second PIN diode connecting the second end of the minute loop antenna to the second transmission line, a third PIN diode connecting the second end to GND, and a second PIN diode connecting the midpoint of the minute loop antenna to GND. When a 4 PIN diode is provided and a low frequency range is measured, the first PIN diode and the third PIN diode are turned on, the second PIN diode and the fourth PIN diode are turned off, and when a high frequency range is measured,
A first PIN diode, a second PIN diode and a fourth PIN diode;
Turn on the PIN diode and turn on the third PIN diode.
It is configured to be set to FF.

Each measurement cell is provided with a first minute loop antenna and a second minute loop antenna having a loop length set shorter than the loop length of the first minute loop antenna.
A first end of the minute loop antenna is connected to a first transmission line via a first PIN diode, and a first end of the second minute loop antenna is connected to a second transmission line via a second PIN diode. When the antenna and the second end of the second minute loop antenna are connected and grounded at a high frequency via a capacitor to measure a low frequency range, the first PI
Turn on the N diode and turn off the second PIN diode
When measuring a high frequency range, the second PIN
The diode is turned on and the first PIN diode is set off.

In addition, a GND pattern is formed on the outer periphery of the measurement cell on the measurement surface of the multi-layer substrate on which a large number of measurement cells each having a small loop antenna are formed, and a GND pattern is formed on the back surface of the multi-layer substrate. GND
A large number of through holes for connecting the pattern and the GND pattern on the back surface are arranged.

Further, a plurality of minute loop antennas, a mixer element for connecting the first end of the minute loop antenna to the transmission line, and means for applying a local oscillation signal input from the outside to the minute loop antenna are provided. A high frequency signal and a local oscillation signal received by the loop antenna are mixed by a mixer element, converted to a low intermediate frequency, and output via a transmission line.

In the measurement system of the present invention, the electromagnetic radiation measuring device measures the electromagnetic radiation of the device to be measured from different directions or in different frequency ranges, and outputs two types of measurement signals to the first output signal and the first output signal. Two level measurement devices that output the second output signal and obtain the electromagnetic radiation level from each measurement signal output from the electromagnetic radiation measurement device, and the selection or measurement frequency of a measurement cell from which the measurement signal is read from the electromagnetic radiation measurement device A control device for controlling and processing the level information obtained by the level measurement device is provided so that measurement from different directions with respect to the electromagnetic radiation of the device under test or measurement in different frequency ranges is performed simultaneously. I have.

Further, a storage means for storing the measurement result of the electromagnetic radiation level from the reference device to be measured is provided, and the measurement result of the reference device to be measured is compared with the measurement result of another device to be measured. Thus, it is configured to detect a failure of another device to be measured.

A recognition means for recognizing a frequency and a three-dimensional position of a source of electromagnetic radiation from a measurement result of an electromagnetic radiation level of a device to be measured as a reference; Storage means for storing the dimensional position as reference information is provided, and the reference information is compared with a result obtained by measuring another device to be measured, and a failure portion of the other device to be measured is estimated. .

For this reason, this electromagnetic radiation measuring apparatus can ensure good isolation between the measuring cells and can improve the positional resolution. Also, by using a resonance circuit,
Measurement can be performed over a wide frequency range, high performance can be ensured at a specific frequency, and transmission system loss can be reduced.

Further, the measurement system of the present invention enables simultaneous measurement of the front surface and the back surface of the device to be measured, and can determine the position of the wave source of electromagnetic radiation in the height direction.

[0030]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention is an electromagnetic radiation measuring device for measuring a near electromagnetic field radiated from an electronic device, wherein the electromagnetic radiation measuring device is arranged in parallel on the same plane. A plurality of first substrates having a surface orthogonal to the plane, and arranged in parallel to form a lattice with the first substrate;
A plurality of second substrates having a surface orthogonal to the plane; a plurality of minute loop antennas on each of the first substrates;
A plurality of semiconductor elements for selectively connecting each of the micro loop antennas to the transmission line, a strip line as the transmission line, a GND pattern and a control signal pattern on each of the second substrates, The small loop antenna is connected to the control signal pattern at the point where the second substrate and the second substrate intersect, and high isolation can be secured at a high measurement frequency.

According to a second aspect of the present invention, a plurality of third substrates on which a GND pattern is formed are provided, and each of the third substrates is arranged in parallel between the first substrates in the arrangement of the first substrates. The GND pattern of each substrate is connected at the intersection of the third substrate and the second substrate, and particularly high isolation can be secured.

According to a third aspect of the present invention, a PIN diode is used as the semiconductor element, one end of the PIN diode is connected to the first end of the minute loop antenna, and the other end of the PIN diode is connected to the strip line. The second end of the loop antenna is connected to a control signal pattern, and the PIN diode is turned on or off by a bias voltage applied to the control signal pattern and the strip line, so that high isolation is ensured at a high measurement frequency. it can.

According to a fourth aspect of the present invention, a transistor is used as the semiconductor element, the base of the transistor is connected to the first end of the minute loop antenna, the collector of the transistor is connected to the strip line, and the emitter of the transistor is connected to GND. A second end of the small loop antenna is connected to a control signal pattern, and the transistor is turned on or off by a bias voltage applied to the control signal pattern and the strip line. High sensitivity can be secured.

According to a fifth aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field radiated from an electronic device, comprising: a plurality of first minute loop antennas; and means for selecting the first minute loop antenna. And a second measuring unit including a plurality of second minute loop antennas and a means for selecting the second minute loop antenna, wherein a loop length of the first minute loop antenna and a second minute loop antenna are provided. The loop length of the loop antenna is set to a different value, and the measurable frequency range of the first measurement unit and the measurable frequency range of the second measurement unit are set to be different. In each of the above cases, a measuring unit having the optimum performance can be used properly, so that a wide range of measuring frequencies can be handled.

According to a sixth aspect of the present invention, the first measuring section is formed on a first multilayer board, the second measuring section is formed on a second multilayer board, and the first multilayer board and the second multilayer board are formed. Are fixed to face each other such that the respective measurement surfaces face in opposite directions, the first measurement unit is used upward when using the first measurement unit, and the second measurement unit is used when using the second measurement unit. (2) The measurement unit is used with the measurement unit facing upward, and the occupied area of the measurement unit can be reduced, so that it is possible to cope with a small and wide band measurement frequency.

According to a seventh aspect of the present invention, the first measuring section is constituted by a plurality of layers on one side of the multilayer board, and the second measuring section is constituted by a plurality of layers on the other side of the multilayer board. When using the measurement unit, the first measurement unit is used facing upward, and when using the second measurement unit, the second measurement unit is used facing upward. Since the size can be reduced and two measurement units can be configured with one multilayer substrate, it is possible to cope with a wide range of measurement frequencies with a simple configuration.

According to an eighth aspect of the present invention, the first measuring section and the second measuring section are formed on the same multilayer substrate, and an output terminal of the first measuring section and an output terminal of the second measuring section are provided. Are separately provided, and the measurement can be performed at the same time using two measurement units.

According to a ninth aspect of the present invention, the first measuring section and the second measuring section are formed on the same multilayer substrate, and one of the output of the first measuring section and the output of the second measuring section is provided. A high-frequency SW for selecting one is provided on this multilayer substrate, and a selected output of the high-frequency SW is connected to an output terminal. The output terminal can be shared by the two measurement units, so that it is economical and Compatible with a wide range of measurement frequencies.

According to a tenth aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field radiated from an electronic device, comprising: a plurality of first minute loop antennas; and means for selecting the first minute loop antenna. A first measuring unit having a first measuring unit, a second measuring unit having a plurality of second minute loop antennas, and a unit for selecting the second minute loop antenna; and a first measuring unit having the first measuring unit and the second measuring unit. A housing with an opening and closing structure is provided,
The first measuring unit is stored in the main body of the housing with the measuring surface facing the lid, the second measuring unit is stored in the lid of the housing with the measuring surface facing the main body, and the main unit and the lid are Place the device under test between
Since the electromagnetic radiation from the device to be measured is measured, and the electromagnetic radiation from the front surface or the back surface of the device to be measured can be measured at the same time, high-speed measurement is possible.

According to an eleventh aspect of the present invention, the loop length of the first minute loop antenna and the loop length of the second minute loop antenna are set to different values, so that the measurable frequency range of the first 2 The frequency range that can be measured by the measurement unit is set differently, and simultaneously measures the electromagnetic radiation from the front or back surface of the device under test, and optimizes the performance at both low and high frequencies. Since the measurement units can be properly used, it is possible to cope with a wide range of measurement frequencies.

According to a twelfth aspect of the present invention, as means for selecting the minute loop antenna of the first measuring section and the second measuring section, a PIN diode for SW is provided between the minute loop antenna and the transmission line. When the measurable frequency range of the first measuring unit is higher than the measurable frequency range of the second measuring unit, the OFF capacitance of the PIN diode of the first measuring unit is set to be smaller than the OFF capacitance of the PIN diode of the second measuring unit. Since the sensitivity is set low, high sensitivity can be ensured at a high frequency, and a wide measurement frequency can be supported.

According to a thirteenth aspect of the present invention, as means for selecting the minute loop antenna of the first measuring unit and the second measuring unit, a PIN diode for SW is provided between the minute loop antenna and the transmission line. When the measurable frequency range of the first measuring unit is higher than the measurable frequency range of the second measuring unit, a reactance element is connected in parallel to both ends of the PIN diode of the first measuring unit, When the PIN diode is OFF, the parallel resonance frequency of the parallel circuit of the PIN diode and the reactance element is set so as to be within the measurable frequency range of the first measurement unit, and high sensitivity is secured at a high frequency. Can,
Compatible with a wide range of measurement frequencies.

According to a fourteenth aspect of the present invention, a circuit in which a coil and a DC element capacitor are connected in series is used as the reactance element, so that high sensitivity can be secured at a high frequency, and a wide measurement frequency can be obtained. Can respond.

According to a fifteenth aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a limited frequency range radiated from an electronic device. A PIN diode having one end connected to the transmission line and a second end of the minute loop antenna having G
A first capacitor connected to the ND at high frequency and a second capacitor disposed between the first end and the second end or between the first end and the GND of the minute loop antenna; The value of the second capacitor is set so that the resonance frequency of the parallel circuit composed of the above and the measurement frequency is equal, and high sensitivity can be secured in a specific frequency range.

According to a sixteenth aspect of the present invention, the second capacitor is constituted by a distributed constant circuit composed of a conductor pattern formed on a multilayer substrate, and ensures high sensitivity in a specific frequency range. Can be.

According to a seventeenth aspect of the present invention, a second PIN diode is inserted in series with the second capacitor, and the second PIN diode is turned off when the minute loop antenna is not selected. High isolation performance can be ensured in the frequency range of

According to an eighteenth aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a limited frequency range radiated from an electronic device, comprising a plurality of small loop antennas and a small loop antenna. A first variable capacitance diode having one end connected to the transmission line;
A first capacitor whose end is grounded to a high frequency to GND, and between the first end and the second end of the small loop antenna or between the first end and G
A second variable capacitance diode disposed between the first and second variable capacitance diodes connected to the selected small loop antenna, and the reverse bias voltage of the first variable capacitance diode and the second variable capacitance diode connected to the selected small loop antenna. Are set lower than the reverse bias voltage of the first variable capacitance diode and the second variable capacitance diode connected to the first variable capacitance diode, and can change a specific frequency range having high sensitivity.

According to a nineteenth aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a limited frequency range radiated from an electronic device, wherein a plurality of minute loop antennas are selectively connected. One measurement system is composed of transmission lines, and one end of a PIN diode is connected to the transmission line end of each measurement system to select signals from a plurality of measurement systems and transmit the signals to the next stage. The common end is connected to the next stage, the reactance element is connected in parallel to both ends of the PIN diode, and the parallel resonance frequency of the parallel circuit of the PIN diode and the reactance element when the PIN diode is OFF is measured. The frequency is set in a possible frequency range, and high sensitivity can be ensured in a specific frequency range.

According to a twentieth aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, comprising: a plurality of minute loop antennas;
A first PIN diode connecting the first end of the small loop antenna to the first transmission line; a second PIN diode connecting the second end of the small loop antenna to the second transmission line; and a third PIN connecting the second end to GND. A diode and a fourth PIN diode that connects the midpoint of the minute loop antenna to GND are provided, and when measuring a low frequency range, the first PIN diode and the third PIN diode are turned ON, and the second PIN diode and the fourth PIN diode are turned OFF. When measuring a high frequency range,
A first PIN diode, a second PIN diode and a fourth PIN diode;
Turn on the PIN diode and turn on the third PIN diode.
The FF is set so that it can correspond to a wide frequency range. When measuring a high frequency range, the position resolution can be doubled.

According to a twenty-first aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, wherein each measuring cell includes a first minute loop antenna and a second minute loop. An antenna and a third minute loop antenna are provided, the loop surface of the first minute loop antenna is arranged on a diagonal line of the measurement cell, and the second minute loop antenna and the third minute loop antenna are arranged near the first minute loop antenna. At the same time, the loop lengths of the second minute loop antenna and the third minute loop antenna are set shorter than the loop length of the first minute loop antenna, and the first minute loop antenna is connected to the first transmission line via the first PIN diode. Then, the second minute loop antenna is connected to the second transmission line via the second PIN diode, and the third minute loop antenna is connected to the third PIN diode. Eau connected to the third transmission line through, when measuring low frequency range, the first 1PIN diode is turned ON first 2PIN diode and the 3PI
When the N diode is turned off and a high frequency range is measured, the second PIN diode and the third PIN diode are set to ON and the first PIN diode is set to OFF, so that a wide frequency range can be supported. When measuring a high frequency range, the position resolution can be doubled.

According to a twenty-second aspect of the present invention, in the measurement cell, the second minute loop antenna and the third minute loop antenna are arranged on both sides of the first minute loop antenna so as to sandwich the first minute loop antenna. Therefore, it is possible to cope with a wide frequency range, and when measuring a high frequency range, the position resolution can be doubled. In addition, since the first micro loop antenna operates as a shield element, a high isolation can be obtained. Can be secured.

According to a twenty-third aspect of the present invention, the loop surface of the first minute loop antenna and the loop surfaces of the second minute loop antenna and the third minute loop antenna are arranged to be perpendicular to each other in the measurement cell. Therefore, it is possible to cope with a wide frequency range, and high isolation can be secured.

According to a twenty-fourth aspect of the present invention, in each of the first minute loop antenna, the second minute loop antenna, and the third minute loop antenna, one loop pattern parallel to the multilayer substrate surface and one loop pattern perpendicular to the multilayer substrate surface are provided. The loop pattern of the first minute loop antenna and the loop patterns of the second minute loop antenna and the third minute loop antenna are arranged on different layers, and the loop surface of the first minute loop antenna is The two micro loop antennas and the loop surface of the third micro loop antenna are arranged so as to intersect perpendicularly with each other, and can cope with a wide frequency range and reduce the measurement cell size.
Position resolution can be improved.

According to a twenty-fifth aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, wherein each measuring cell includes a first small loop antenna and a loop length. A second minute loop antenna set shorter than the loop length of the first minute loop antenna;
A first end of the first micro loop antenna is connected to a first transmission line via a first PIN diode, and a first end of the second micro loop antenna is connected to a second transmission line via a second PIN diode. When connecting the second ends of the minute loop antenna and the second minute loop antenna, grounding them at high frequency via a capacitor, and measuring a low frequency range, the first
Turn on the PIN diode and turn on the second PIN diode.
When measuring the high frequency range with FF, the second P
Turn on the IN diode and turn on the first PIN diode.
F, which can correspond to a wide frequency range.
The bias supply circuit for turning off N and OFF can be configured simply.

According to a twenty-sixth aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, wherein the horizontal minute loop antenna is arranged on a measurement side surface of a multilayer substrate. A first PIN diode connecting the first end of the horizontal minute loop antenna to the first transmission line; a through hole connecting the second end of the horizontal minute loop antenna to the back surface of the multilayer substrate; And a second connecting the middle point of the horizontal minute loop antenna to the second transmission line.
By providing a PIN diode and applying different bias voltages to the first transmission line and the second transmission line,
When a low frequency range is measured, the first PIN diode is turned on and the second PIN diode is turned off. When a high frequency range is measured, the second PIN diode is turned on and the first PIN diode is set off. It can support a wide frequency range and can reduce the measurement cell size, so that the position resolution can be improved and the bias supply circuit for turning on and off each PIN diode is simple. Can be

According to a twenty-seventh aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, wherein a multi-layer substrate having a large number of measuring cells each having a small loop antenna is formed. A GND pattern is formed on the outer periphery of the measurement cell on the measurement surface, and a GND pattern is formed on the back surface of the multilayer substrate.
Since a large number of through holes for connecting the ND pattern and the GND pattern on the back surface are arranged, high isolation can be ensured.

According to a twenty-eighth aspect of the present invention, when the measurement cell includes a plurality of minute loop antennas having parallel loop surfaces, a GND pattern extending in parallel between the loop surfaces is formed. A large number of through-holes connecting the GND pattern and the GND pattern on the back surface are arranged, and can support a wide frequency range.
High isolation can be ensured.

According to a twenty-ninth aspect of the present invention, the first transmission line and the second transmission line are configured as strip lines formed in an inner layer of a multilayer substrate, and the first transmission line and the second transmission line are formed as strip lines. The strip line and the strip line are arranged in different layers, and the isolation between the low-frequency measurement system and the high-frequency measurement system can be improved.

According to a thirty-fifth aspect of the present invention, the strip line of the first transmission line and the strip line of the second transmission line are arranged so as to intersect at a right angle. The isolation between the measuring system and the measuring system can be improved.

According to a thirty-first aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, wherein a plurality of small loop antennas are selectively connected. In order to configure one measurement system and select signals from multiple measurement systems and transmit them to the next stage, connect an amplification circuit and a circuit that selects the measurement system to the transmission line end of each measurement system, The amplifier circuit is operated only when the measurement system is in the selected state, and high isolation can be secured in a high measurement frequency range.

According to a thirty-second aspect of the present invention, the frequency characteristic of the gain of the amplifying circuit and the frequency characteristic of the measuring system in which the amplifying circuit is inserted are adjusted so as to have the opposite characteristics, and transmitted to the next stage. In this case, the frequency characteristics of the signal are flattened, and flat frequency characteristics and high isolation can be secured in the measurement frequency range.

According to a thirty-third aspect of the present invention, there is provided an electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a limited frequency range radiated from an electronic device, comprising: a plurality of minute loop antennas; A mixer element having one end connected to a transmission line and means for applying a local oscillation signal input from the outside to a minute loop antenna are provided, and a high-frequency signal and a local oscillation signal received by the minute loop antenna are mixed with the mixer element. , Converted to a low intermediate frequency and output via a transmission line, so that high sensitivity and high isolation can be secured in a specific frequency range.

According to a thirty-fourth aspect of the present invention, as means for applying the local oscillation signal to the minute loop antenna, a second transmission line is connected to a second end of the minute loop antenna, and the second transmission line is connected to the second end of the minute loop antenna. A parallel resonance circuit including a capacitor and a coil is provided between the power supply and the ground, the resonance frequency of the parallel resonance circuit is set to the frequency of the local oscillation signal, and a local oscillation signal input from the outside is applied to the second transmission line. Thus, a local oscillation signal can be applied efficiently, and high sensitivity and high isolation can be ensured in a specific frequency range.

According to a thirty-fifth aspect of the present invention, as means for applying the local oscillation signal to the minute loop antenna, a second loop antenna is arranged near the minute loop antenna and externally input to the second loop antenna. The small loop antenna and the second loop antenna are mutually inductively coupled by applying a local oscillation signal, and high sensitivity and high isolation can be ensured in a specific frequency range with a small number of circuit elements. it can.

According to a thirty-sixth aspect of the present invention, the point on the transmission line to which the first end of the minute loop antenna is connected via a mixer element and the first end of the minute loop antenna of the adjacent measurement cell are the mixer element. A series resonance circuit of a coil and a capacitor is inserted between a point on the transmission line connected through the, and the resonance frequency of the series resonance circuit is set to an intermediate frequency for transmission on the transmission line. High sensitivity and high isolation can be ensured in the frequency range of

According to a thirty-seventh aspect of the present invention, the point on the second transmission line to which the second end of the small loop antenna is connected,
A series resonance circuit of a coil and a capacitor is inserted between a point on the second transmission line to which the second end of the small loop antenna of the adjacent measurement cell is connected, and the resonance frequency of the series resonance circuit is changed to the second transmission line. This is set to the local oscillation frequency for transmission above, and high sensitivity and high isolation can be secured in a specific frequency range.

According to a thirty-eighth aspect of the present invention, a diode is used as the mixer element. Since a direct current bias is not applied to this diode, current consumption is kept low, and a high isolator in a specific frequency range is achieved. Ration can be secured.

According to a thirty-ninth aspect of the present invention, a transistor is used as the mixer element, a base or an emitter of the transistor is connected to a minute loop antenna, a collector of the transistor is connected to a transmission line, and a DC bias is applied to the transistor. As a result, particularly high sensitivity can be ensured in a specific frequency range.

An invention according to claim 40 is a measurement system for measuring electromagnetic radiation from a device to be measured by using an electromagnetic radiation measuring device having a large number of measuring cells, wherein the electromagnetic radiation measuring device comprises: Electromagnetic radiation from different directions
Alternatively, two level measuring devices that measure in different frequency ranges, output two types of measurement signals as a first output signal and a second output signal, and determine an electromagnetic radiation level from each measurement signal output from the electromagnetic radiation measuring device And a control device that controls the selection or measurement frequency of a measurement cell from which a measurement signal is read from the electromagnetic radiation measurement device and performs processing of the level information obtained by the level measurement device, so that different directions of the measured device with respect to the electromagnetic radiation are provided. Or measurements in different frequency ranges at the same time,
Since it is possible to simultaneously measure electromagnetic radiation in different measurement units or measurement frequency ranges, high-speed measurement is possible.

The invention according to claim 41 is provided with display means for displaying the position distribution of the electromagnetic radiation level, and displays the position distribution of the electromagnetic radiation level obtained from the first output signal and the second output signal on the display means. This is displayed so as to be superimposed, and can be visually observed while comparing electromagnetic radiation in different measurement units or measurement frequency ranges.

The invention according to claim 42 is provided with display means for displaying the frequency spectrum of the electromagnetic radiation level, and the display means displays the frequency spectrum of the electromagnetic radiation level obtained from the first output signal and the second output signal. It is displayed in a linked manner, and can display a frequency spectrum in a wide frequency range.

According to a forty-third aspect of the present invention, in the electromagnetic radiation measuring device, the electromagnetic radiation of the device to be measured is measured by two measuring units arranged so as to sandwich the device to be measured, and each measuring unit The measured measurement signal is output as a first output signal and a second output signal, and the control device calculates the difference between the electromagnetic radiation levels of the measurement cells at the positions opposed to each other by the two level measurement devices. Calculates and estimates the position in the height direction of the electromagnetic radiation source inside the device under test based on it, and estimates the position in the height direction of the radiation source existing inside the device under test can do.

According to a forty-fourth aspect of the present invention, the electromagnetic radiation measuring apparatus is provided with a readable and writable storage means, and when the electromagnetic radiation measuring apparatus is inspected, the inspection result of the antenna factor is written in the storage means, and the electromagnetic wave of the equipment to be measured is written. At the time of measurement of the radiation, the inspection result stored in the storage means is transmitted to the control device, and the control device corrects the measurement result at the time of measurement based on the inspection result. High measurement accuracy can be obtained by suppressing the dispersion of the measurement results during the measurement.

According to a forty-fifth aspect of the present invention, there is provided a measuring system for measuring electromagnetic radiation from a device to be measured by using the electromagnetic radiation measuring device according to the eighteenth aspect, wherein the electromagnetic radiation is output from the electromagnetic radiation measuring device. A level measuring device that calculates the electromagnetic radiation level from the measurement signal, a control device that controls the selection of the measurement cell from which the measurement signal is read from the electromagnetic radiation measurement device and the measurement frequency, and a small loop antenna in which the electromagnetic radiation measurement device is selected. Connecting a first variable capacitance diode and a second
Control voltage generating means for controlling a reverse bias voltage of the variable capacitance diode, wherein the control voltage generating means fluctuates the reverse bias voltage in conjunction with a measurement frequency controlled by the control device. High sensitivity can be ensured by matching the measurement frequency of the measurement device with the resonance frequency of the minute loop antenna.

The invention according to claim 46 is a measuring system for measuring electromagnetic radiation from a device to be measured by using the electromagnetic radiation measuring device according to any one of claims 33 to 39, wherein the system is configured to output an output from the electromagnetic radiation measuring device. A level measuring device for obtaining an electromagnetic radiation level from the measured signal of the intermediate frequency, and a control device for controlling a measurement cell selection and a measuring frequency from which the measurement signal is read from the electromagnetic radiation measuring device, and the level measuring device is built-in. Output the local oscillation output of the local oscillator to the electromagnetic radiation measuring device, and the electromagnetic radiation measuring device generates the intermediate frequency measurement signal using the local oscillation signal input from the level measuring device. Since an existing level measuring device can be effectively used without adding an oscillation signal generating device, a simple system configuration can be realized.

The invention according to claim 47 is provided with a storage means for storing the measurement result of the electromagnetic radiation level from the device to be measured as a reference, and stores the measurement result of the device to be measured as a reference and other devices to be measured. A failure of another device to be measured is detected by comparing the measured result with the measured result, and the failure can be detected in a non-contact manner.

The invention according to claim 48 is a recognition means for recognizing a frequency and a three-dimensional position of a source of electromagnetic radiation from a measurement result of an electromagnetic radiation level of a device to be measured as a reference,
Storage means for storing the frequency and three-dimensional position of the recognized source of electromagnetic radiation as reference information, comparing the reference information with the result of measurement of another device to be measured, It is intended to estimate the failure site of
A failure site can be estimated without contact.

Hereinafter, an embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG.

(First Embodiment) As shown in FIG. 1, the electromagnetic radiation measuring apparatus of the first embodiment is configured by combining an upright antenna substrate 1 and a control GND substrate 4 in a grid pattern. . On one surface of the antenna substrate 1, a plurality of micro loop antennas 2, a PIN diode 3, and a narrow GND pattern 10 are formed.
In (c)), a GND pattern 10 having a small width connected to the GND pattern 10 by a through hole is formed. In addition, a control pattern 5 and a wide GND pattern 6 are formed on the control GND substrate 4, and the back surface thereof (FIG. 1).
In (b)), a wide GND pattern 6 is formed.

The antenna board 1 and the control GND board 4
It is composed of a general-purpose glass epoxy substrate having a thickness of about 0.8 to 1.6 mm and a height in the Z direction of about 5 to 10 mm.
mm. The antenna board 1 is arranged in a plurality of rows (row A) parallel to the X direction, the control GND board 4 is arranged in a plurality of rows (row B) parallel to the Y direction, and the notch portions are combined to form a grid-like antenna section. Is configured. FIG. 1 shows one antenna board 1 and two control GND boards 4 in an enlarged manner for convenience of explanation. A plurality (B) of minute loop antennas 2 formed of a copper foil pattern are arranged on the antenna substrate 1. FIG. 1 shows two micro loop antennas 2 in an enlarged manner for convenience of explanation. Therefore, (A × B) minute loop antennas 2 are XY
They are arranged in a grid on the surface.

Generally, A and B are set to about 20 to 50. The loop length L of the small loop antenna 2 is set to, for example, about 3.0 mm. On the control GND substrate 4, a control pattern 5 and a GND pattern 6 are formed by a copper foil pattern. One end of the loop of the small loop antenna 2 is soldered to the anode of the PIN diode 3 mounted on the antenna substrate 1, and the other end of the loop is soldered to the connection 7 of the control pattern 5 on the control GND substrate 4. .
The cathode of the PIN diode 3 is a through hole 8
Is connected to a strip line 9 formed in an inner layer of the antenna substrate 1.

GN formed on both sides of control GND substrate 4
D pattern 6 and G formed on both sides of antenna substrate 1
The ND pattern 10 is connected to the patterns on both sides by through holes, and the GND pattern 10 on the antenna substrate 1 is soldered to the GND pattern 6 on the control GND substrate 4 at the connection portion 11.

The GND pattern 6 of the control GND substrate 4
Is a small loop antenna 2 adjacent on the antenna substrate 1
And GND on the antenna substrate 1
The pattern 10 defines the sensing area of the small loop antenna 2.

In the electromagnetic radiation measuring apparatus thus configured, the small loop antenna 2 operates as a loop antenna that generates an induced voltage by a magnetic field in the Y direction. An H voltage (for example, 12
V) is applied and the L voltage (for example, 5 V) is biased on the strip line 9, the PIN diode 3 is forward-biased and turned ON, and the induced signal is passed through the PIN diode 3 to the strip line. 9 is transmitted. This state is a state where the minute loop antenna 2 is selected.

On the contrary, when the voltage of the control pattern 5 is GND (0
When controlled to V), the PIN diode 3 is reverse-biased and turned off, and the micro loop antenna 2 is not selected. Thus, B control patterns 5
And the A strip lines 9 are controlled by the bias voltage, and only one of the (A × B) micro loop antennas 2 is set to the selected state at the same time.

In the electromagnetic radiation measuring apparatus of this embodiment, Z
Since the minute loop antenna 2 is formed on the surface of the substrate arranged perpendicular to the direction, no dielectric exists between the minute loop antenna formed on the adjacent antenna substrate 1 (a space exists). .

In the conventional electromagnetic radiation measuring device, since the minute loop antenna is formed by the surface layer pattern and the through hole inside the multilayer substrate, the multilayer substrate is formed between the minute loop antenna and the adjacent minute loop antenna. When the loop length is reduced to about 4.0 mm, the parasitic stray capacitance increases, and the isolation between adjacent minute loop antennas at a high frequency (1000 MHz or more) is deteriorated. However, in the device of this embodiment, since there is no dielectric between the minute loop antennas, the isolation between the minute loop antennas formed on the adjacent antenna substrate 1 does not deteriorate.

The GND pattern 6 is provided between adjacent small loop antennas formed on the same antenna substrate 1.
And shields the antenna from the adjacent minute loop antenna 2.

Therefore, in this device, high isolation can be ensured even at a high measurement frequency.

In this apparatus, since the conductor in the Z direction of the loop is formed by the substrate surface pattern, the conductor width can be selected to be small (for example, about 0.1 mm).
This is convenient for reducing the loop length.

In the conventional electromagnetic radiation measuring apparatus, it is necessary to set the thickness of the multi-layer substrate to be thick (about 4 to 5 mm), which tends to be heavy and costly. Since the mechanical strength can be maintained by the combination of grids, a general-purpose plate thickness (0.8 to 1.6 m
m) can be used. Further, since the entire antenna portion is not filled with the dielectric, the weight can be reduced.

The configuration of the small loop antenna is not limited to the above description. Even if another configuration is adopted, the same effect can be obtained as long as it is formed on the surface of the antenna substrate 1. Further, the connection method between the substrates is not limited to the above description, and similar effects can be obtained with other connection methods. Means for connecting the small loop antenna to the strip line is not limited to the above description, and similar effects can be obtained by using other means (for example, a transistor or an FET). The configuration and shape of the control pattern and the GND pattern are not limited to the above description, and similar effects can be obtained with other structures and shapes.

(Second Embodiment) An electromagnetic radiation measuring apparatus according to a second embodiment has an antenna substrate 1 as shown in FIG.
A GND substrate 12 is arranged between the antenna substrate 1 and the adjacent antenna substrate 1 to shield a small loop antenna formed on the adjacent antenna substrate 1. This GND substrate 12
Has a GND pattern 13 on both sides. Other configurations are the same as those of the first embodiment (FIG. 1).

In FIG. 2, the GND substrate 12 has a plurality of rows (A + 1 row) parallel to the X direction so as to sandwich the antenna substrate 1.
Are arranged. Like the antenna substrate 1, the GND substrate 12 is a general-purpose glass epoxy substrate having a thickness of about 0.8 to 1.6 mm and a height in the Z direction of about 5 to 10 mm.
mm. On the GND substrate 12, a GND pattern 13 is formed by a copper foil pattern. GND pattern
The connection 13 is soldered to the GND pattern 6 on the control GND board 4 at the connection section 14.

In this electromagnetic radiation measuring apparatus, the four directions of the minute loop antenna 2 are reliably shielded by the GND pattern, and a high isolation from the adjacent minute loop antenna 2 is ensured even at a high measurement frequency.

(Third Embodiment) In the electromagnetic radiation measuring apparatus according to the third embodiment, a switching operation of a small loop antenna is performed using a transistor. In this device, as shown in FIG. 3, a surface-mounted high-frequency transistor 15 is mounted on an antenna substrate 1, and one end of a loop of a minute loop antenna 2 is soldered to a base of the transistor 15. . The collector of the transistor 15 is connected to the strip line 9 formed in the inner layer of the antenna substrate 1 through the through hole 8, and the emitter of the transistor 15 is soldered to the GND pattern 10. Other configurations are the same as those of the first embodiment (FIG. 1).

In this electromagnetic radiation measuring apparatus, when the small loop antenna 2 is in the selected state, the control pattern 5, the connection portion 7, the current limiting resistor 17
And the control voltage (5 V) through the small loop antenna 2
Is applied. Further, since the L voltage (5V) is applied to the strip line 9, the collector of the transistor 15 is biased to 5V. As a result, the transistor
Since 15 is biased to the operating state, the signal induced by the small loop antenna 2 is amplified by 5 to 10 dB and transmitted to the strip line 9.

When the small loop antenna 2 is not selected, the control voltage applied through the control pattern 5 is controlled to GND (0 V), and the base of the transistor 15 is not biased and does not operate.

In the measuring device of this embodiment, the sensitivity of the selected state is improved by the operation of the transistor 15, and as a result, the distinction from the small loop antenna 2 in the non-selected state becomes clear, and the iso-state in the non-selected state becomes clear. Is improved.

Note that the connection method of the transistor and the bias voltage are not limited to the above description, and the same effect can be obtained in other methods as long as the method can obtain an amplifying function. The same effect can be obtained by substituting a high-frequency FET for the transistor. Also, a transistor or F
If ET is connected in cascade or Darlington,
A higher amplification degree is obtained, and the effect is further improved.

(Fourth Embodiment) In the electromagnetic radiation measuring apparatus according to the fourth embodiment, a plurality of measuring units having different sizes of measuring cells are arranged so that they can be used properly.

This apparatus is, as shown in FIG.
20, a first measuring unit 18 having a large measuring cell, a second measuring unit 19 having a small measuring cell, a first output terminal 23 for outputting a signal from the first measuring unit 18, and a second measuring unit 19 And a second output terminal 24 for outputting a signal from

In FIG. 4, the first measuring section 18 and the second measuring section 19 are formed on the same multilayer substrate 20, and the first measuring section 18 has a small loop antenna formed on the multilayer substrate 20. A large number of measurement cells 25 each having one (for example, one
In the second measurement section 19, a large number (for example, 1000) of measurement cells 27 each having one small loop antenna 28 formed on the multilayer substrate 20 are arranged.

The loop length of the minute loop antenna 26 is set to, for example, 7 mm, and the measuring cell 25 is set to a square of 7 mm square. The loop length of the minute loop antenna 28 is set to, for example, 4 mm, and the measuring cell 27 is set to a square of 4 mm square.

The minute loop antennas 26 and 28 are a multilayer substrate.
An induced voltage corresponding to the electromagnetic radiation from the device under test arranged above 20 is generated. FIG. 4 shows minute loop antennas 26 and 28 which are formed on the multilayer substrate 20 in a copper foil pattern in a planar manner. The signal guided by the small loop antenna is transmitted to the measurement system selection units 21 and 22 through a strip line formed on the inner layer of the multilayer substrate 20. In the measurement system selection units 21 and 22,
A signal from each measurement system is selected and the first and second output terminals 23 are selected.
And 24. The configuration of this small loop antenna is
The configurations shown in the first to third embodiments can be adopted.

In this electromagnetic radiation measuring apparatus, the first measuring section 18
The measurable frequency range of the small loop antenna 26
Has a loop length of 7 mm, so that 10 to 1000 MH
z. The frequency range that can be measured by the second measuring unit 19 is 1000 to 2000 MHz because the loop length of the minute loop antenna 28 is 4 mm. The measurement position resolution of the first measurement unit 18 is 7 mm, and that of the second measurement unit is 4 mm. The first measuring unit is capable of measuring a low frequency band at the expense of positional resolution, and the second measuring unit is capable of measuring a high frequency at the expense of measuring a low frequency band. The position resolution is also
Higher than the first measurement unit.

As described above, in the electromagnetic radiation measuring apparatus according to the fourth embodiment, the measuring section having the optimum performance at each of the low frequency and the high frequency can be selectively used, and therefore, it is possible to cope with a wide measuring frequency.

The configuration of the minute loop antenna of the first and second measuring units is not limited to the configuration of FIG. 4 or the configurations of the first to third embodiments.

The type and number of measuring units are not limited to those described above, and similar effects can be obtained by a configuration having three or more measuring units, for example.

(Fifth Embodiment) The electromagnetic radiation measuring apparatus of the fifth embodiment is provided with a first measuring section 30 having a large measuring cell on one surface of a housing 29, as shown in FIG. , A second measuring section having a small measuring cell on the other surface of the housing 29
31 are provided.

The first measuring section 30 and the second measuring section 31 are measuring sections provided with a large number of small loop antennas as shown in the first to fourth embodiments. Further, the loop length of the minute loop antenna of the first measuring unit 30 is set to, for example, 7 mm, and the loop length of the minute loop antenna of the second measuring unit 31 is set to, for example, 4 mm.
Set to mm. Therefore, the measurable frequency of the first measurement unit 30 is 10 to 1000 MHz, and the second measurement unit 31
Is measurable frequency of 1000 to 2000 MHz. The first measuring unit 30 is arranged on the upper surface of the housing 29 with the measuring surface facing upward, and the second measuring unit 31 is arranged on the lower surface of the housing 29 with the measuring surface facing downward.

The housing 29 is provided with a first measuring section 30 provided with a first measuring section 30.
A multi-layer substrate and a second multi-layer substrate provided with the second measuring unit 31;
The measurement surfaces may be fixed to face each other so that the measurement surfaces face in opposite directions.

By inverting the housing 29 in accordance with the measurement frequency to be measured and performing the measurement, it is possible to perform the optimum measurement at each of the low frequency and the high frequency, and to apply to a wide frequency range. Becomes possible. In addition, since the plurality of measurement units are arranged using the upper and lower surfaces of the housing 29, an increase in the planar area of the electromagnetic radiation measurement device can be suppressed.

As described above, in the electromagnetic radiation measuring apparatus according to the fifth embodiment, the occupied area can be reduced.
It is compatible with a small and wide measurement frequency.

(Sixth Embodiment) The electromagnetic radiation measuring apparatus of the sixth embodiment has a large measuring cell provided on one surface of a multilayer substrate and a small measuring cell provided on the other surface of the multilayer substrate. .

As shown in the cross-sectional view of FIG. 6, this electromagnetic radiation measuring apparatus forms a loop pattern 33 on the surface of the multilayer substrate 32 on the side of the first measurement surface 39, and together with the through holes 34 formed in the substrate. Construct a small loop antenna. A loop pattern 36 is formed on the surface of the multilayer substrate 32 on the side of the second measurement surface 40.
To form a small loop antenna together with the through hole 37 formed in the substrate. Further, GND for achieving electromagnetic separation between the first measurement surface 39 side and the second measurement surface 40 side
Layer 38 is arranged.

The multilayer substrate 32 is a dielectric substrate having a thickness of about 6 to 8 mm, and is electromagnetically separated by a GND layer 38 into a first measurement surface 39 side and a second measurement surface 40 side. The loop pattern 33 is a copper foil pattern formed on the surface of the first measurement surface 39, and its loop length is set to, for example, 7 mm. The loop pattern 33 forms a small loop antenna together with the through hole. The loop pattern 36 is a copper foil pattern formed on the surface of the second measurement surface 40, and its loop length is set to, for example, 4 mm. The loop pattern 36 forms a small loop antenna together with the through hole 37. In FIG. 6, a surface mount component 35 represents a PIN diode or a high-frequency grounding capacitor mounted on each surface.

In this measuring device, the first and second devices having the optimum performance at each of the low frequency and the high frequency are provided.
The measurement units are separately arranged on the upper and lower surfaces on the same multilayer substrate. Therefore, it is possible to configure the electromagnetic radiation measuring apparatus capable of supporting a wide frequency range as a simple structure in which a single multilayer substrate is arranged without increasing a planar area.

As described above, in the electromagnetic radiation measuring apparatus according to the sixth embodiment, the area occupied by the measuring section is reduced, and
Since two measurement units can be configured with one multi-layer substrate, a simple configuration can be applied to a wide range of measurement frequencies.

(Seventh Embodiment) The electromagnetic radiation measuring apparatus according to the seventh embodiment shares the output terminals of the first and second measuring units having the optimum performance for each of the low frequency and the high frequency.

As shown in FIG. 7, this measuring device
A high-frequency SW 41 for switching the outputs from the measuring unit 18 and the second measuring unit 19 and a shared output terminal 42 are provided. Other configurations are the same as those of the fourth embodiment (FIG. 4).

The high-frequency SW 41 of this device is constituted by a PIN diode or a GaAs-MMIC.
Implemented above. The outputs from the measurement system selection units 21 and 22 of the first measurement unit 18 and the second measurement unit 19 are input to the high-frequency SW 41, and the output of the high-frequency SW 41 is guided to the output terminal 42. The high-frequency SW 41 is controlled so as to select the first measuring section when using the first measuring section 18 and to select the second measuring section when using the second measuring section 19.

In the measuring device of this embodiment, the result measured by the first or second measuring section is selected and output.
Therefore, the measurement cannot be performed by using the first and second measurement units at the same time, but since the output terminals can be shared by the two measurement units, the number of output terminals can be reduced, and one output terminal can be used. The level measuring device can be shared by each measuring unit.

As described above, in the electromagnetic radiation measuring apparatus according to the seventh embodiment, the output terminal can be shared by the two measuring sections, and it is possible to cope with an economical and wide band measuring frequency.

(Eighth Embodiment) The electromagnetic radiation measuring apparatus according to the eighth embodiment can simultaneously measure electromagnetic radiation from the front surface or the back surface of the device to be measured.

In this measuring device, as shown in FIG. 8, a first measuring section 45 is provided on a main body section 43 of a housing, a second measuring section 46 is provided on a side of a lid section 44, and a main body section 43 and a lid section are provided. The section 44 is connected to the movable connection section 47.

The first measuring section 45 and the second measuring section 46 are measuring sections provided with a large number of small loop antennas as shown in the first to fourth embodiments. The first measuring section 45 is built in the main body section 43, and the second measuring section 46 is built in the lid section 44. The lid 44 is
It is fixed to the main body 43 by the movable connection part 47. Main unit 43
When the device under test 48 (for example, a mobile phone terminal) is placed on the first measuring unit 45 of the above, and the lid 44 is turned down to the main body 43 side and the lid is closed, the device under test 48 is vertically It will be sandwiched between the first and second measurement units.

In this electromagnetic radiation measuring apparatus, for example, the first
When the loop length of the small loop antenna of the second measuring unit is the same and the measurable frequency range is the same, the electromagnetic radiation of the same frequency radiated from both the upper and lower surfaces of the device under test 48 is simultaneously transmitted. Can be measured. Also,
If the horizontal resolution is matched so that the position resolutions of the first and second measuring units are matched and the opposing positions of the minute loop antennas of the first and second measuring units are matched, Electromagnetic radiation emitted from the same site can be measured simultaneously from both the top and bottom surfaces.

For example, when the loop lengths of the small loop antennas of the first and second measuring units are different and the measurable frequency ranges are different, different frequencies radiated from both the upper surface and the lower surface of the device under test 48 are used. Electromagnetic radiation can be measured simultaneously.

As described above, in the electromagnetic radiation measuring apparatus according to the eighth embodiment, the electromagnetic radiation from the front surface or the back surface of the device to be measured can be measured at the same time, so that high-speed measurement is possible. In addition, since measurement can be performed simultaneously by using the measurement unit having the optimum performance at each of the low frequency and the high frequency, a wide measurement frequency range can be measured at high speed.

(Embodiment 9) The electromagnetic radiation measuring apparatus according to the ninth embodiment includes a PIN diode used for a measuring section having an optimum performance at a low frequency and a measuring section having an optimum performance at a high frequency. By differing the characteristics from the PIN diode used, high sensitivity over a wide band is ensured.

In this measuring device, as shown in FIG. 9, the small loop antenna 49 of the first measuring section 18 having the optimum performance at a low frequency is stripped via a PIN diode 51 having a small ON resistance and a large OFF capacitance. The small loop antenna 50 of the second measuring unit 19 connected to the line 9 and having the optimum performance at a high frequency is connected to the strip line 9 via a PIN diode 52 having a large ON resistance and a small OFF capacitance.
Connect to

The loop length of the minute loop antenna 49 is set to, for example, 7 mm, and the loop length of the minute loop antenna 50 is set to, for example, 4 mm. Therefore, the first measuring unit 18
The measurable frequency range is 10 to 1000 MHz, and the measurable frequency range of the second measuring unit 19 is 1000 to 2000 MHz.

In general, a PIN diode having a small ON resistance tends to have a large OFF capacitance, and a PIN diode having a large ON resistance tends to have a small OFF capacitance. In this measuring device, ON as PIN diode 51
Use a resistor with a small resistance and a large OFF capacitance.
A diode having a large ON resistance and a small OFF capacitance is used as the diode 52.

In this electromagnetic radiation measuring apparatus, one measuring system is constituted by a transmission system in which, for example, 20 micro loop antennas 49 and 50 and PIN diodes 51 and 52 are connected to the strip line 9. In this measurement system, the selected state (P
There is only one small loop antenna in which the IN diode is in the ON state, and the other 19 small loop antennas are in the non-selected state (the PIN diode is in the OFF state). The small loop antenna in the non-selected state is a PIN diode O
A trap circuit in which the FF capacitance and the loop inductance are connected in series is formed, and the resonance frequency is determined by the OFF capacitance of the PIN diode and the loop inductance. Therefore, 19 trap circuits are always connected in parallel to the measurement system. This trap circuit is the largest factor that hinders the frequency characteristics (especially sensitivity at high frequencies) of the measurement system. Also, when the ON resistance of the PIN diode is large, the sensitivity of the measurement system deteriorates.

Here, in the first measuring section 18, since the upper limit of the measuring frequency is relatively low at 1000 MHz, the resonance frequency of the trap circuit is relatively low (for example, 130 MHz).
(Approximately 0 MHz) can be set, so that if the PIN diode 51 has a small ON resistance and a large OFF capacitance, a configuration in which the sensitivity at a particularly low frequency is emphasized can be adopted.

In the second measuring section 19, since the upper limit of the measuring frequency is as high as 2000 MHz, the resonance frequency of the trap circuit is increased (for example, about 2300 MHz).
It is necessary to set the PIN diode 52. If a PIN diode 52 having a large ON resistance and a small OFF capacitance is employed, a configuration in which sensitivity at a particularly high frequency is emphasized can be achieved.

As described above, the electromagnetic radiation measuring apparatus according to the ninth embodiment can ensure high sensitivity at high frequencies,
Compatible with a wide range of measurement frequencies.

The configuration of the small loop antenna is not limited to the above description, and similar effects can be obtained with other configurations.

(Tenth Embodiment) As shown in FIG. 10, an electromagnetic radiation measuring apparatus according to a tenth embodiment has a PIN diode of a second measuring section having an optimum performance at a high frequency.
The effect of the trap is reduced by connecting a coil 53 and a capacitor 54 in parallel to 52.

The capacitance of the capacitor 54 is set sufficiently large for the purpose of blocking DC. The inductance value of the coil 53 is such that the parallel resonance frequency with the OFF capacitance of the PIN diode 52 is within the measurement frequency range (for example, 1000 to 200).
0 MHz).

In this electromagnetic radiation measuring apparatus, when the small loop antenna is in the selected state (the PIN diode 52 is in the ON state), the ON resistance of the PIN diode 52 is sufficiently smaller than the impedance of the series circuit of the coil 53 and the capacitor 54. The coil 53 and the capacitor 54 can be ignored. Conversely, when the minute loop antenna is not selected (the PIN diode 52 is in the OFF state), the O of the PIN diode 52 is
Due to the parallel resonance circuit of the FF capacitor and the coil 53, the impedance on the small loop antenna side as viewed from the strip line 9 becomes a very high value. Therefore, the influence of the trap due to the OFF capacitance and the loop inductance of the PIN diode 52 can be reduced.

Here, in the above parallel resonance circuit, when the frequency is considerably lower than the resonance frequency (several hundred MHz or less), the impedance on the side of the minute loop antenna viewed from the strip line 9 shows a low inductive value. In addition, the sensitivity of the entire measurement system is significantly deteriorated. However, in the second measurement unit 19, the lower limit of the measurement frequency is 1000 MHz,
This phenomenon is not a problem. Conversely, this method cannot be used in the first measurement section (the measurement frequency range is 1000 MHz or less).

As described above, in the electromagnetic radiation measuring apparatus according to the tenth embodiment, high sensitivity can be secured at a high frequency, and a wide range of measuring frequencies can be supported.

(Eleventh Embodiment) As shown in FIG. 11, the electromagnetic radiation measuring apparatus of the eleventh embodiment is constructed by grounding both ends of a minute loop antenna 50 via capacitors 55 and 56. The measurement sensitivity is improved.

This minute loop antenna 50 is a minute loop antenna of a measuring section having a specific measurement frequency range (for example, 1500 to 2000 MHz).

The capacitor 55 is connected to the minute loop antenna.
It is inserted between the connection point of 50 and the PIN diode 52 and GND. The other end of the minute loop antenna 50 is connected to the control pattern 5 and to a capacitor 56. The capacitor 56 has the other end of the minute loop antenna 50 grounded at a high frequency. This capacitor 56 is a bypass capacitor and is set to a sufficiently large capacitance value. On the other hand, the capacitance value of the capacitor 55 is set so that the resonance frequency with the loop inductance of the minute loop antenna 50 is within the measurement frequency range (for example, 1500 to 2000 MHz).

In this electromagnetic radiation measuring apparatus, when the minute loop antenna is in the selected state (the PIN diode 52 is in the ON state), the resonance between the capacitor 55 and the loop inductance of the minute loop antenna 50 causes the resonance with the strip line 9 at the measurement frequency. As a result, the sensitivity of the entire measurement system is improved. Conversely, when the small loop antenna is in the non-selected state (the PIN diode 52 is in the OFF state),
The parallel resonance circuit of the capacitor 55 and the loop inductance of the small loop antenna 50 turns off the PIN diode 52.
Although seen through the capacitance, this impedance has a very large value within the measurement frequency range. Therefore, the influence of the trap due to the OFF capacitance and the loop inductance of the PIN diode 52 can be reduced.

Here, in the above parallel resonance circuit,
When the frequency is considerably lower than the resonance frequency (1500 MHz
In the following, the matching with the strip line 9 is not achieved, and the sensitivity of the entire measurement system is significantly deteriorated. However, when the measurement frequency of the measurement unit is in the range (1500 to 2000 MHz),
This phenomenon is not a problem.

As described above, in the electromagnetic radiation measuring apparatus according to the eleventh embodiment, high sensitivity can be ensured in a specific frequency range.

(Twelfth Embodiment) An electromagnetic radiation measuring apparatus according to a twelfth embodiment has the circuit configuration of FIG. 11 embodied by reducing the number of capacitors.

In this electromagnetic radiation measuring apparatus, FIG.
As shown in (b), a loop pattern 57 is formed on the measurement surface 63 of the multilayer substrate 62 with a copper foil pattern, and the back surface 64 of the multilayer substrate 62 is formed.
To form a capacitor pattern 59 and lands 61 and 60,
A PIN diode 52 and a capacitor 56 are mounted. The circuit between the measurement surface 63 and the back surface 64 of the multilayer substrate 62 is connected by a through hole 58.

The loop pattern 57 formed on the measurement surface 63 of the multilayer substrate 62 has two ends connected to the back surface 64 of the multilayer substrate 62 through two through holes 58 to form a minute loop antenna. The PIN diode 52 mounted on the back surface 64 is connected to one of the through holes 58 and is connected to the strip line via the land 61. The other through hole 58 is connected to a ground land 60 via a capacitor 56 mounted on the back surface 64.
Connected to The capacitor pattern 59 is a distributed constant circuit formed by a copper foil pattern on the back surface 64 of the multilayer substrate 62, and is disposed between the through holes 58 as a capacitor element.

In this electromagnetic radiation measuring apparatus, capacitor pattern 59 performs the same operation as capacitor 55 in FIG. By setting the capacitance value of the capacitor pattern 59 so that the resonance frequency with the loop inductance formed by the loop pattern 57 and the through hole 58 is within the measurement frequency range, the same effect as that of FIG. 11 can be obtained.

In this device, the capacitor pattern 59 is determined at the time of manufacturing the substrate, so there is no flexibility. However, as compared with FIG. 11, the number of capacitor components can be reduced, which is economically advantageous. is there.

As described above, in the electromagnetic radiation measuring apparatus according to the twelfth embodiment, high sensitivity can be secured in a specific frequency range.

(Thirteenth Embodiment) The electromagnetic radiation measuring apparatus of the thirteenth embodiment is designed to improve the isolation performance.

In this measuring device, as shown in FIG.
A PIN diode 65 is connected to a connection point between the small loop antenna 50 and the PIN diode 52, and the PI
The anode of the N diode 65 is grounded by a capacitor 66 and connected to the control pattern 5 via a resistor 67. The other end of the small loop antenna 50 is the same as that of FIG. 11, is grounded at high frequency by a capacitor 56, and is connected to the control pattern 5.

FIG. 13 shows a small loop antenna 50 and a PIN diode 52 of a measuring section having a specific measuring frequency range (for example, 1500 to 2000 MHz). P
The cathode of the IN diode 65 is connected to the connection point between the small loop antenna 50 and the PIN diode 52, and the anode is grounded by the capacitor 66 and connected to the control pattern 5 via the resistor 67. The capacitance value of the capacitor 66 is such that the resonance frequency with the loop inductance of the minute loop antenna 50 is within the measurement frequency range (for example, 1500 to 2).
000 MHz). The resistance 67 is P
This is a DC bias resistor for the IN diodes 65 and 52, and is set to a resistance value that does not affect high-frequency operation.

In this electromagnetic radiation measuring apparatus, when the minute loop antenna is in the selected state (the PIN diode 52 is in the ON state), the PIN diode 65 is also controlled to be in the ON state, and the capacitor 66 is connected. The operation in this case is the same as in the case of FIG. 11, and the resonance between the capacitor 66 and the loop inductance of the minute loop antenna 50 causes the measurement frequency (15
00 to 2000 MHz).
And the sensitivity of the entire measurement system is improved. Conversely, when the minute loop antenna is not selected (the PIN diode 52 is in the OFF state), the PIN diode
65 is also in the OFF state, the capacitor 66 can be ignored, and the minute loop antenna 50 does not form a resonance circuit.

Therefore, the minute loop antenna close to the minute loop antenna 50 in the selected state is in the non-selected state and has a low sensitivity. Thereby, the isolation at the measurement frequency (1500 to 2000 MHz) between the adjacent minute loop antennas is improved.

As described above, the electromagnetic radiation measuring apparatus according to the thirteenth embodiment can ensure high isolation performance in a specific frequency range.

(Fourteenth Embodiment) The electromagnetic radiation measuring apparatus according to the fourteenth embodiment can change the frequency range having high sensitivity.

In this measuring device, as shown in FIG.
Connect one end of the small loop antenna 50 to the variable capacitance diode 68
And to the strip line 9, and to the ground via a variable capacitance diode 69. The other end of the small loop antenna 50 is the same as in FIG.

FIG. 14 shows a minute loop antenna 50 of a measuring section having a specific measuring frequency range (for example, 1000 to 2000 MHz). Variable capacitance diode 68 and
The cathode of 69 is connected to one end of the small loop antenna 50. The anode of the variable capacitance diode 68 is connected to the strip line 9. The anode of the variable capacitance diode 69 is grounded to GND.

In this electromagnetic radiation measuring apparatus, when the small loop antenna is in the selected state, a low voltage (for example, 5 V or less) is applied to the control pattern 5. At this time, the capacitance values of the variable capacitance diodes 68 and 69 are large, the variable capacitance diode 68 increases the degree of coupling between the small loop antenna 50 and the strip line 9, and the variable capacitance diode 69 is connected in parallel with the small loop antenna 50. It operates so as to match the strip line 9 by resonance. Further, by changing the voltage of the control pattern 5 to, for example, 5 V or less, it is possible to change the frequency at which the optimum matching can be obtained.

Conversely, when the small loop antenna 50 is in the non-selected state, a high voltage (for example, 15
V or more) is applied. At this time, the variable capacitance diode
The capacitance values of 68 and 69 become small values, the variable capacitance diode 68 reduces the degree of coupling between the minute loop antenna 50 and the strip line 9, and the resonance frequency of the variable capacitance diode 69 and the minute loop antenna 50 becomes a high frequency (for example, 2000
MHz or more).

As described above, in the electromagnetic radiation measuring apparatus according to the fourteenth embodiment, the reverse bias voltage of the variable capacitance diode connected to one end of the minute loop antenna 50 is set low in the selected state and high in the non-selected state. The coupling degree between the small loop antenna 50 and the strip line 9 at the time of selection is increased, and the coupling degree at the time of non-selection is reduced. Further, by changing the reverse bias voltage in the selected state, a specific frequency range having high sensitivity can be changed, and a relatively wide frequency range can be handled.

(Fifteenth Embodiment) The fifteenth embodiment shows a configuration in which an induced voltage transmitted from a small loop antenna via a strip line is output to a next-stage circuit.

In this electromagnetic radiation measuring apparatus, as shown in FIG. 15, each strip line 9 selectively connected to a plurality of small loop antennas is coupled via a PIN diode 70 constituting a SW circuit, 70 O
The signal of the strip line 9 selected by N is output to the next stage circuit 73. Both ends of a PIN diode 70 connected to each strip line 9 are connected to a coil 71 and a capacitor.
A series circuit with 72 is connected in parallel.

FIG. 15 shows a part of a circuit for selecting a measuring system of a measuring section having a specific measuring frequency range (for example, 1500 to 2000 MHz). Stripline 9
Are selectively connected to a plurality of small loop antennas, each of which constitutes one measurement system. In this embodiment, a SW circuit using a PIN diode 70 is configured as a circuit for selecting three measurement systems. The anode of a PIN diode 70 is connected to the strip line 9, and the cathodes of the three PIN diodes are connected in common and connected to the next-stage circuit 73. A series circuit of a coil 71 and a capacitor 72 is connected in parallel to both ends of the PIN diode 70. The capacitor 72 is a DC blocking capacitor, and its capacitance value is set sufficiently large. The inductance value of the coil 71 is set so that the resonance frequency with the OFF capacitance of the PIN diode 70 falls within the measurement frequency range.

In this electromagnetic radiation measuring apparatus, the L voltage (5 V) is biased to the strip line 9 of the selected measuring system, the PIN diode 70 of the measuring system is turned on, and the measuring system of the other unselected state is turned on. O PIN diode 70
An operation for setting the FF state is performed. At this time, the coil 71 of the selected measurement system is ignored. On the other hand, in the non-selected measurement system, a parallel resonance circuit of the PIN diode 70 and the coil 71 is formed. Therefore, the impedance of the measurement system in the non-selected state viewed from the next stage circuit 73 has a large value, and this measurement system can be ignored.

Here, when the frequency is, for example, 1000 MHz or less, the impedance of the parallel resonance circuit has a low inductive value, and the level after the next-stage circuit 73 is significantly reduced. Therefore, in the case where a broadband measurement frequency range is supported as in a conventional electromagnetic radiation measurement apparatus, the coil 71 cannot be inserted, but the operation limited to a specific frequency range as in this embodiment is performed. For the purpose, the above method can be adopted.

As described above, in the electromagnetic radiation measuring apparatus according to the fifteenth embodiment, high sensitivity can be secured in a specific frequency range.

(Sixteenth Embodiment) The electromagnetic radiation measuring apparatus according to the sixteenth embodiment can switch the frequency range to be measured. In this measurement device, as shown in FIG. 16, the minute loop antenna has an E shape, and both ends 74 and 75 of the minute loop antenna are connected to a strip line 82 via a PIN diode 78, respectively. PI
It is connected to the strip line 9 via an N diode 76. The midpoint of the small loop antennas 74 and 75 is P
It is connected to a series circuit of an IN diode 77 and a capacitor 80, and is connected to a control pattern 81 in the middle of the PIN diode 77 and the capacitor 80. Similarly, the minute loop antenna 74 is also connected to a series circuit of a PIN diode 79 and a capacitor 56, and is connected to the control pattern 5 between the PIN diode 79 and the capacitor 56.

The minute loop antennas 74 and 75 are formed in a copper foil pattern on a substrate, and the total loop length is set to, for example, 7 mm.

In this electromagnetic radiation measuring apparatus, when a low frequency range (10 to 1000 MHz) is selected,
The H voltage (12V) is applied to the control pattern 5, and the control pattern 81 is controlled to GND (0V). Therefore,
PIN diodes 76 and 79 are turned on, and PIN diode 77 is turned off. For this reason, the minute loop antennas 74 and 75 operate as a minute loop antenna having a loop length of 7 mm, and the measurement signal is transmitted to the strip line 9.

In the high frequency range (1000 to 20)
When (00 MHz) is selected, the control pattern 5 is controlled to GND (0 V), and the H voltage (12 V) is applied to the control pattern 81. Therefore, the PIN diodes 76, 77 and 78 are turned on, and the PIN diode 79
Is turned off. Therefore, the small loop antenna 74
And 75 operate as two small loop antennas having a loop length of 3.5 mm, and the measurement signals are separately transmitted to the strip line 9 and the strip line 82.

As described above, in the electromagnetic radiation measuring apparatus according to the sixteenth embodiment, by switching the selection of the frequency range to be measured, a wide frequency range (for example, 10 to 2000) is obtained.
MHz), and the position resolution can be doubled when measuring a high frequency range.

(Seventeenth Embodiment) The electromagnetic radiation measuring apparatus according to the seventeenth embodiment has a configuration in which a plurality of types of loop patterns are provided in one measuring cell and the selection of the frequency range to be measured can be switched. doing.

As shown in FIG. 17, in this measuring apparatus, a loop pattern 83 having a loop length of, for example, 7 mm and a loop length of, for example, 3.5 m are formed on a measuring surface 63 of a multilayer substrate 62.
Two loop patterns 84 set to m are arranged in parallel, and three small loop antennas composed of these are included in one measurement cell. Both ends of the loop pattern 83 are connected to through holes 85, and one of the through holes 85 is connected to the control pattern 5 formed on the back surface 64 of the multilayer substrate 62.
The other through hole 85 is connected to the inner layer strip line 9 via the PIN diode 76 mounted on the back surface 64 and the through hole. Further, both ends of the loop pattern 84 are connected to through holes 86, one of the through holes 86 is connected to a control pattern 81 formed on the back surface 64 of the multilayer substrate 62, and the other through hole 86 is connected to the back surface.
The other loop pattern 84 is similarly connected to another strip line 82 (not shown) via a PIN diode 78 mounted on the circuit 64 and a through hole and connected to an inner layer strip line 82. ing). The strip lines 9 and 82 formed in the inner layer are arranged so as to cross each other vertically in a horizontal plane.

The loop pattern 83 has two through holes.
Low frequency band with 85 (10-1000MHz)
, A small loop antenna corresponding to. Further, the loop pattern 84 constitutes a minute loop antenna corresponding to a high frequency band (1000 to 2000 MHz) together with the two through holes 86.

In this electromagnetic radiation measuring apparatus, when a low frequency range (10 to 1000 MHz) is selected,
H voltage (12V) is applied to the control pattern 5, and PIN
The diode 76 is turned on. When a high frequency range (1000 to 2000 MHz) is selected, an H voltage (12 V) is applied to the control pattern 81 and P
The IN diode 78 is turned on. Here, since one small loop antenna for low frequency and two small loop antennas for high frequency are provided in the same measurement cell 87, when a high frequency range is selected, the measurement position resolution is low. Double. Also, the strip line 9 and
By arranging the 82 in different layers and vertically, it is possible to improve the isolation between both measurement systems in the high frequency range and the low frequency range.

As described above, in the electromagnetic radiation measuring apparatus according to the seventeenth embodiment, a wide frequency range (for example, 10 to 200
0 MHz). Further, when measuring a high frequency range, the position resolution can be doubled.

(Eighteenth Embodiment) As shown in FIG. 18, the electromagnetic radiation measuring apparatus according to the eighteenth embodiment has a loop pattern 83 having a long loop length and a short loop length in one measuring cell 88. Two loop patterns 84 are provided, and these two loop patterns 84 are arranged so as to sandwich the loop pattern 83 from both sides in the vertical direction. Here, since the loop pattern 84 requires a loop length of about 3.5 mm, the cell size of the measurement cell 88 becomes as large as 8 mm square or more.

Each of the loop patterns 83 and 84 is connected to a strip line and operates in the same manner as the loop patterns 83 and 84 in FIG. However, when looking at the loop patterns 83 and 84 from the surface of the board,
17 differs from FIG. 17 only in that the direction of the loop pattern 84 is orthogonal to the direction of the loop pattern 84.

In this electromagnetic radiation measuring apparatus, the loop pattern 83 corresponding to the low frequency range (10 to 1000 MHz) is compared with the high frequency range (1000 to 2000 MHz).
MHz) are arranged in the vertical direction, and the maximum detection direction of the magnetic field becomes vertical, so that isolation between the two small loop antennas due to electromagnetic induction is reduced. Further, the minute loop antenna having the loop pattern 83 also functions as a shield for two minute loop antennas having the loop pattern 84.

As described above, the electromagnetic radiation measuring apparatus according to the eighteenth embodiment has a wide frequency range (for example, 10 to 2000).
MHz) and high isolation can be secured.

(Nineteenth Embodiment) As shown in FIG. 19, an electromagnetic radiation measuring apparatus according to a nineteenth embodiment has a loop pattern 84 disposed on an inner layer so as to intersect a loop pattern 83 in a vertical direction. Then, the size of the cell 89 is reduced. When the loop pattern 84 is set to, for example, 3.5 mm, the cell size of the measurement cell 89 can be reduced to 7 mm square or less.

In this electromagnetic radiation measuring apparatus, the loop pattern 83 corresponding to the low frequency range (10 to 1000 MHz) is compared with the high frequency range (1000 to 2000 MHz).
MHz) is formed in another layer, so that there is no physical interference. Therefore, the cell size of the measurement cell 89 can be reduced while arranging three loop patterns in the same cell 89.

As described above, in the electromagnetic radiation measuring apparatus according to the nineteenth embodiment, a wide frequency range (for example, 10 to 200
0 MHz) and the measurement cell size can be reduced, so that the position resolution can be improved.

(Embodiment 20) In the electromagnetic radiation measuring apparatus according to the twentieth embodiment, as shown in FIG. 20, a minute loop antenna comprising a loop pattern 84 and a through hole 86 is provided in the same measuring cell 90. The antenna is arranged so as to be parallel to the minute loop antenna including the loop pattern 83 and the through hole 85. Further, one end of the loop pattern 84 is connected to the control pattern 5 via a through hole 86, and the control pattern 5 is commonly used with the loop pattern 83 side. The commonly connected through holes 85 and 86 are grounded to a high frequency to GND via a capacitor (not shown). Here, the loop pattern 84 is set to, for example, 3.5 mm. Other configurations are the same as those in FIG.

In this electromagnetic radiation measuring apparatus, when an H voltage (12 V) is applied to the control pattern 5, a loop pattern corresponding to a low frequency range (10 to 1000 MHz) is obtained.
The output of 83 is transmitted to the strip line 9, and the output of the loop pattern 84 corresponding to the high frequency range (1000 to 2000 MHz) is transmitted to the strip line 82. Therefore, a wide frequency band (for example, 10 to 2
000 MHz) at the same time, and there is an advantage that only one control pattern is required.

To measure only the low frequency range, the PIN diode 76 is turned on and the PIN diode 78 is turned on.
When different bias voltages are applied to the strip lines 9 and 82 so as to turn OFF, and only the high frequency range is measured, the PIN diode 78 is turned ON and the PIN
Different bias voltages are applied to the strip lines 9 and 82 so that the diode 76 is turned off.

As described above, the electromagnetic radiation measuring apparatus according to the twentieth embodiment can support a wide frequency range,
The bias supply circuit can have a simple configuration.

(Twenty-First Embodiment) The electromagnetic radiation measuring apparatus according to the twenty-first embodiment has a minute loop antenna formed in a circular pattern.

As shown in FIG. 21, each measuring cell of this measuring apparatus has a circular pattern 91 having a diameter of 2.5 mm formed of a copper foil pattern on a measuring surface 63 of a multilayer substrate 62. This horizontal small loop antenna generates an induced voltage in response to a magnetic field component in the Z direction. The circumference of the circular pattern 91 is set to about 7 mm, and both ends are guided to the back surface 64 by the through holes 85, and one of the two ends is a PI mounted on the back surface 64.
It is connected to the strip line 9 via an N diode 76 and a through hole, and the other is connected to the control pattern 5. The center of the circular pattern 91 is the PIN diode 78.
, And further connected to a strip line 82 via a through hole 86.

In this electromagnetic radiation measuring apparatus, when a low frequency range (10 to 1000 MHz) is selected,
H voltage (12V) is applied to the control pattern 5, and PIN
The diode 76 is turned on, and the PIN diode 78 is turned off. At this time, the circular pattern 91 operates as a horizontal minute loop antenna having a circumference of 7 mm. When a high frequency range (1000 to 2000 MHz) is selected, the control pattern 5 is set to GND (0 V).
, An L voltage (5 V) is applied to the strip line 82, and an H voltage (12 V) is applied to the strip line 9. Therefore, the PIN diode 78 is turned on, and the PIN diode 76 is turned off. At this time, the circular pattern 91 and the through holes 85 and 86 operate as a vertical minute loop antenna, and the loop length is about 3.5 mm. Here, since the diameter of the circular pattern 91 is 2.5 mm, the measuring cell 92 can be extremely small, about 4 mm square.

As described above, in the electromagnetic radiation measuring apparatus according to the twenty-first embodiment, a wide frequency range (for example, 10 to 200
0 MHz), and the measurement cell size can be reduced, so that the position resolution can be improved and the bias supply circuit can have a simple configuration.

(22nd Embodiment) In the electromagnetic radiation measuring apparatus according to the 22nd embodiment, the measuring cell shown in FIG.
A configuration for shielding has been added.

This measuring device forms a GND pattern 93 around the measuring cell of FIG. 19 having a loop pattern 83 and two loop patterns 84 as shown in FIG.
Many through holes 94 connected to this GND pattern 93
Is formed. The GND pattern 93 is formed of a copper foil pattern on the measurement surface of the multilayer substrate, and is arranged near the boundary between the measurement cells and the gap between the two loop patterns 84. Further, it is similarly formed on the back surface of the multilayer substrate. Through hole 94
Are connected to this GND pattern 93 and are arranged in a large number in the vicinity of the boundary of the measurement cell and in the gap between the two loop patterns 84, and connect the GND pattern 93 to the GND on the back surface.

In this electromagnetic radiation measuring apparatus, a large number of through holes 94 perform the same operation as a vertical shield plate, thereby improving the isolation between adjacent measuring cells and the two loop patterns 84.

As described above, in the electromagnetic radiation measuring apparatus according to the twenty-second embodiment, high isolation can be ensured.

(Twenty-third Embodiment) The electromagnetic radiation measuring apparatus according to the twenty-third embodiment has a configuration similar to FIG. 15 in which a signal of one measurement system is selected and output from a plurality of measurement systems. High isolation is ensured.

In this measuring apparatus, as shown in FIG. 23, a wide band amplifier 95 is arranged between the strip line 9 and the anode of the PIN diode 70, and the cathode of the PIN diode 70 is shared and connected to the next stage circuit 73. doing. The broadband amplifier 95 has a measurement frequency range (10 to 2000 MHz).
In z), the gain is about 10 to 20 dB, and the isolation in the reverse direction is 20 to 30 dB.

In this electromagnetic radiation measuring apparatus, the broadband amplifier 95 and the PIN diode 70 of the selected measurement system are turned on, and the broadband amplifier 95 and the PIN diode 70 of the other unselected measurement systems are turned off. Works. At this time, the selected measurement system signal is
In the measurement system which is amplified by 10 to 20 dB at 95 and is in the non-selected state, the sum of the isolation in the OFF state of the PIN diode 70 and the reverse isolation of the wideband amplifier 95 (40
To 60 dB) of isolation.

As described above, in the electromagnetic radiation measuring apparatus according to the twenty-third embodiment, high isolation can be ensured in a high measuring frequency range.

(Twenty-fourth Embodiment) The electromagnetic radiation measuring apparatus according to the twenty-fourth embodiment has a filter 96 provided between the broadband amplifier 95 and the PIN diode 70 of the apparatus shown in FIG. 23, as shown in FIG. The frequency characteristics of the signal output to the next stage circuit are flattened.

The filter 96 is a filter circuit including a coil and a capacitor, and is set so as to have, as a transfer function, a frequency characteristic opposite to the frequency characteristic of the entire measurement system using the strip line 9 as a transmission system.

In this electromagnetic radiation measuring apparatus, the signal of the selected measuring system is amplified by the broadband amplifier 95 and then filtered.
At 96, the frequency characteristics are corrected. Therefore, a signal having flat frequency characteristics is transmitted to the next stage circuit 73.

As described above, in the electromagnetic radiation measuring apparatus according to the twenty-fourth embodiment, a wide measuring frequency range (for example, 10 to 2
000 MHz), a flat frequency characteristic and high isolation can be secured.

(Twenty-Fifth Embodiment) The electromagnetic radiation measuring apparatus according to the twenty-fifth embodiment outputs the result of the electromagnetic radiation measurement as an intermediate frequency signal using a local oscillation signal.

In this measuring device, as shown in FIG.
One end of the small loop antenna 50 is connected to the strip line 9 via the mixer diode 97, and the other end of the small loop antenna 50 is connected to the parallel resonance circuit including the coil 98 and the capacitor 56 and the strip line 99. A local oscillation signal is supplied to 99 from a local oscillation circuit 100 provided outside the measurement unit.

The mixer diode 97 connected to one end of the minute loop antenna 50 performs an operation of mixing and outputting frequency components of a signal, and here, a high-frequency Schottky barrier diode is used. The parallel resonance circuit consisting of the coil 98 and the capacitor 56 is a small loop antenna.
It is inserted between the other end of 50 and GND. The resonance frequency of this parallel resonance circuit is within the range of the frequency of the local oscillation signal output from the local oscillation circuit 100 (900 to 1200 MHz).
Is set to

In this electromagnetic radiation measuring device, for example, 19
When measuring 00 MHz electromagnetic radiation 101, the frequency of the signal output by local oscillation circuit 100 is set to 1100 MHz. Here, the impedance of the parallel resonance circuit including the coil 98 and the capacitor 56 has a large value near the local oscillation frequency, and has a small capacitance value at a higher frequency (frequency of electromagnetic radiation to be measured of 1700 to 2000 MHz). . Therefore, at a frequency of 1700 to 2000 MHz of electromagnetic radiation, it is equivalent to one end of the minute loop antenna 50 being grounded at a high frequency.

At this time, the mixer diode 97 mixes the 1900 MHz signal component induced by the minute loop antenna 50 with the 1100 MHz local oscillation signal, and
An intermediate frequency signal of 0 MHz is generated. This signal is output through the strip line 9.

As described above, by observing the intermediate frequency (800 MHz) at the output of the strip line 9 and changing the signal frequency of the local oscillation circuit 100 from 900 to 1200 MHz, a specific measurement frequency range (1700 to 2000 MHz) is obtained. ) Can be measured.

At this time, the strip line 9 is transmitted,
The signal selected by the measurement system selection circuit is an intermediate frequency (800
MHz), the influence of the deterioration of the frequency characteristics and isolation in the measurement system and the measurement system selection circuit is very small.

As described above, in the electromagnetic radiation measuring apparatus according to the twenty-fifth embodiment, a local oscillation signal can be applied efficiently, and high sensitivity and high isolation can be ensured in a specific frequency range (for example, 1700 to 2000 MHz). it can. Here, a diode is connected to one end of the small loop antenna 50 to output a signal to the strip line 9, and no DC bias is applied to this diode. Therefore, current consumption can be reduced.

(Twenty-Sixth Embodiment) The electromagnetic radiation measuring apparatus according to the twenty-sixth embodiment has the structure shown in FIG.
Loop pattern 83 and loop pattern 102)
Are arranged in parallel in the same measurement cell, and the local oscillation signal supplied from the supply means 100 to the loop pattern 102 side is used in the loop pattern 83 by using the electromagnetic induction coupling between the small loop antennas.

The loop pattern 102 forms a small loop antenna together with the through hole 103, and is arranged close to the loop pattern 83. The loop pattern 102 is connected to the strip line 99 via the through hole 103, and a local oscillation signal from the local oscillation circuit 100 is supplied. The supplied local oscillation signal is supplied from the loop pattern 102 to the loop pattern 83 by electromagnetic induction coupling. Loop pattern
One of the through holes 85 connected to 83 is connected to the control pattern 5, and the other through hole 85 is connected to the strip line 9 via the mixer diode 97.

In this electromagnetic radiation measuring apparatus, for example, 19
When measuring the electromagnetic radiation 101 of 00 MHz, the frequency of the signal output from the local oscillation circuit 100 is set to 1100 MHz and supplied to the mixer diode 97 via the loop patterns 102 and 83. At this time, the mixer diode 97
Then, 1900 MH guided to the small loop antenna 83
The signal component of z and the local oscillation signal of 1100 MHz are mixed to generate an 800 MHz intermediate frequency signal. This intermediate frequency signal is transmitted through the strip line 9 and output.

As described above, in the electromagnetic radiation measuring apparatus according to the twenty-sixth embodiment, high sensitivity and high isolation can be ensured in a specific frequency range (for example, 1700 to 2000 MHz) with a small number of circuit elements.

(Twenty-Seventh Embodiment) As shown in FIG. 27, the electromagnetic radiation measuring apparatus of the twenty-seventh embodiment has a capacitor connected to the strip line 9 of the small loop antenna shown in FIG.
By adding a series resonance circuit consisting of 104 and a coil 105, high isolation between measurement cells is ensured.

The resonance frequency of the series resonance circuit including the capacitor 104 and the coil 105 is set to the intermediate frequency (800 MHz) for transmitting the strip line 9.

In this electromagnetic radiation measuring device, the capacitor 10
Since the impedance of the series resonance circuit including the coil 4 and the coil 105 is sufficiently low at the intermediate frequency (800 MHz), the intermediate frequency signal is transmitted without loss. However, the local oscillation frequency and the frequency of the measured electromagnetic radiation (1700 to 20
(00 MHz), the impedance is high and the strip line 9 is not transmitted. Therefore, it is possible to reduce the degradation of the isolation caused by the local oscillation signal and the electromagnetic radiation signal leaking through the strip line 9.

As described above, in the electromagnetic radiation measuring apparatus according to the twenty-seventh embodiment, high sensitivity and particularly high isolation can be ensured in a specific frequency range (for example, 1700 to 2000 MHz).

Twenty-Eighth Embodiment As shown in FIG. 28, the electromagnetic radiation measuring apparatus according to the twenty-eighth embodiment has a capacitor 107 and a strip line 99 for transmitting a local oscillation signal to the small loop antenna of FIG. By adding a series resonance circuit including the coil 106, high isolation between the measurement cells is ensured.

The resonance frequency of the series resonance circuit including the capacitor 106 and the coil 107 is set to a local oscillation frequency (900 to 1200 MHz) for transmitting the strip line 99.

In this electromagnetic radiation measuring device, the capacitor 10
Since the impedance of the series resonance circuit including the coil 6 and the coil 107 is sufficiently low at the local oscillation frequency, the local oscillation signal is transmitted without loss. However, at the intermediate frequency and the frequency of the measured electromagnetic radiation (1700 to 2000 MHz), the impedance is high and the stripline 99 is not transmitted. Therefore, it is possible to reduce the degradation of the isolation caused by the local oscillation signal and the electromagnetic radiation signal leaking through the strip line 99.

As described above, in the electromagnetic radiation measuring apparatus according to the twenty-eighth embodiment, high sensitivity and particularly high isolation can be ensured in a specific frequency range (for example, 1700 to 2000 MHz).

(29th Embodiment) As shown in FIG. 29, the electromagnetic radiation measuring apparatus of the 29th embodiment uses a transistor 108 as a mixer element of FIG. Output to Further, a terminal 111 for applying a control voltage of the transistor 108 through the strip line 99 is provided.
The local oscillation circuit 100 is connected to the strip line 9 through a bypass capacitor 109 for a DC element.

The transistor 108 is a high-frequency transistor. The base is connected to the minute loop antenna 50, the collector is connected to the strip line 99, and the emitter is connected to GND.

In this electromagnetic radiation measuring apparatus, when the measurement frequency is set to 1900 MHz and the small loop antenna 50 is selected, the control voltage is supplied to the terminal 111 under current limitation. The strip line 9 is supplied with an L voltage (5 V). At this time, the transistor 108 is biased to the operating state, and mixes the local oscillation signal (1100 MHz) supplied by the strip line 99 with the electromagnetic radiation signal induced by the small loop antenna 50 to generate an intermediate frequency (800 MHz). Then, the signal is output via the strip line 9. Here, the transistor 10 is used as a mixer element.
8, and a frequency conversion gain of 5 to 10 dB can be obtained.

As described above, in the electromagnetic radiation measuring apparatus according to the twenty-ninth embodiment, particularly high sensitivity can be secured in a specific frequency range (for example, 1700 to 2000 MHz).

(Thirtieth Embodiment) In a thirtieth embodiment, a measurement system for simultaneously measuring electromagnetic radiation from different measurement units will be described.

As shown in FIG. 30, the measuring system includes a main body 43 and a lid 44, and the main body 43 includes a first measuring section.
45, an electromagnetic radiation measuring apparatus having a second measuring section 46 in the lid section 44, a selected level measuring apparatus 116 for selecting a measuring frequency and detecting level information from the first measuring section 45, A selected level measuring device 117 for selecting and detecting level information from the second measuring section 46;
The control unit 118 includes a control unit 118 that controls the measurement frequency of 117 and the measurement cell selection of the first measurement unit 45 and the second measurement unit 46, and a display unit 120 that displays the measurement result.

This measuring system simultaneously measures electromagnetic radiation radiated from the upper and lower surfaces of the non-measuring device 48 (for example, a portable telephone) at a high speed. The output of the first measuring unit 45 is an output terminal
The signal is input to the selected level measuring device 116 via the cable 112 and 112. Similarly, the output of the second measuring section 46 is input to the selected level measuring device 117. The control unit 118 includes a personal computer (PC) and software, and controls the measurement frequencies of the two selection level measurement devices 116 and 117 and the measurement cell selection of the first measurement unit 45 and the second measurement unit 46.

In addition, two selection level measuring devices 116 and 1
The detection level information output from 17 is input to the control unit 118, where it is stored and processed. The display unit 120 is a CRT for displaying a measurement result.

The measurement results of the two selection level measuring devices 116 and 117 are displayed on the display unit 120 with the horizontal axis as the position and the vertical axis as the level (electromagnetic radiation position distribution).

In this measurement system, when sweeping the measurement position at a specific frequency, the control unit 118
Control is performed so that the minute loop antenna at the same position of the measuring unit 45 and the second measuring unit 46 is selected, and the level detection result at that time is stored. After completing the level measurement of the entire measurement range, the result 121 of the first measurement unit and the result 122 of the second measurement unit are displayed on the display unit 120 in a superimposed manner.

Here, since the first measuring unit 45 and the second measuring unit 46 can measure at the same time, the measurement can be performed at high speed, and the results of both can be superimposed on the display unit 120 immediately. Since comparisons can be made, it is convenient in analyzing the measurement results.

As described above, in the measuring system according to the thirtieth embodiment, since the electromagnetic radiation of different measuring sections can be measured at the same time, a high-speed measurement can be performed, and the measurement results can be visually compared with each other. .

(Thirty-First Embodiment) As shown in FIG. 31, the measurement system of the thirty-first embodiment includes a broadband measurement unit 123 shown in FIG. The broadband measurement unit 123 includes, in the same measurement cell, a minute loop antenna that measures a low frequency band having a loop pattern 83 and a minute loop antenna that measures a high frequency band having a loop pattern 84. And the low frequency band (10 to 1000 M
The (Hz) side output is input to the selection level measuring device 116 via the output terminal 112 and the cable 114. Similarly, the high frequency band (1000 to 2000 MHz)
The z) side output is input to the selected level measuring device 117. The measurement frequency range of the selection level measurement device 116 is 10 to 10
00 MHz, and the measurement frequency range of the selection level measuring device 117 is 1000 to 2000 MHz.

The detection level information output from the two selection level measuring devices 116 and 117 is input to the control section 118, and the control section 118 adds a certain correction coefficient to the detection level information input from the selection level measuring apparatus 116. Is multiplied by 10 to 1000
A frequency spectrum in the frequency range of MHz is obtained, and the detection level information input from the selection level measuring device 117 is multiplied by a certain correction coefficient to obtain a frequency spectrum of 1000 to 2000 M.
The frequency spectrum of the frequency range of Hz is obtained and stored, and the stored frequency spectrum is displayed on the display unit 120.
The horizontal axis represents the frequency, and the vertical axis represents the level (frequency spectrum), which are combined and displayed.

In this measurement system, the control unit 118 controls the low frequency band (1
0 to 1000 MHz) and a high frequency band (100
Display section 1 with a spectrum 125 of 0 to 2000 MHz).
Connected to 20 and displayed. Here, a low frequency band (10
To 1000 MHz) and a high frequency band (1000 to 2000 MHz) can be measured simultaneously.

As described above, the measurement system of the thirty-first embodiment can measure and display a frequency spectrum in a wide frequency range at high speed.

(Thirty-second Embodiment) The measurement system according to the thirty-second embodiment can estimate the position in the height direction of a radiation source existing inside a device under test.

In this measuring system, as shown in FIG. 32, the lid 44 of the electromagnetic radiation measuring device is closed and the device under test 48 is closed.
(For example, a mobile phone) is measured. The first measurement unit 45 and the second measurement unit 46 have the same measurement cell size and the same frequency characteristic, and the measurement cells face each other one-to-one, that is, the horizontal plane positions of the measurement cells match. Are arranged as follows. In this measurement system, the control unit 118 determines the result of simultaneously measuring the signals from the first measurement unit 45 and the second measurement unit 46 as the position on the horizontal axis and the electromagnetic radiation level (position distribution of electromagnetic radiation) on the vertical axis. It is displayed on the display unit 120. The display 127 shows the higher level result of both measurement units. The display 126 displays the result of calculating the difference between the measurement results of the first measurement unit 45 and the second measurement unit 46 as the vertical axis.

Here, assuming that the distance from the wave source to the first measuring unit 45 is h1, and the distance from the wave source to the second measuring unit 46 is h2, the detection levels detected by the first and second measuring units are as follows. Is represented by (Equation 1).

Detection level difference (dB) = 20 Log (h
1 / h2) (Equation 1) Thereby, the display 126
The vertical height of the wave source of the electromagnetic radiation can be estimated from the level difference shown in FIG.

As described above, in the measuring system according to the thirty-second embodiment, the position in the height direction of the radiation source existing inside the device under test can be estimated (the thirty-third embodiment). As shown in FIG. 33, the measurement system according to the embodiment includes memories 128 and 129 that store inspection information of the electromagnetic radiation detection sensitivity (antenna factor) of the first and second measurement units of the electromagnetic radiation measurement device at the time of inspection. ing.

The memories 128 and 129 are composed of writable and readable semiconductor memories, and are built in the main body 43 and the lid 44, respectively. When the first and second measuring units 45 and 46 are inspected, the results of inspecting the frequency characteristics of the detection sensitivity of the respective measuring units are written into the memories 128 and 129.

At the time of measuring the electromagnetic radiation of the device under test, the control unit 118 reads out information on the frequency characteristics of the detection sensitivity from the memories 128 and 129 via the data line 130. The control unit 118 displays or outputs the read value of the frequency characteristic of the detection sensitivity with addition and subtraction of the measurement results obtained from both the measurement units by addition and subtraction.

For example, when the detection sensitivity at a specific frequency is 2
In the case of the measurement unit having a low dB, the control unit 118 operates to add 2 dB to the result of the specific frequency. By doing so, the absolute value of the electromagnetic radiation obtained from each measurement unit can be measured with high accuracy over a wide frequency range, and a relative error between the measurement units can be suppressed. In addition, even when the main unit or the lid is replaced for reasons such as replacement due to failure or model change, since the memory storing frequency characteristic information of the detection sensitivity of the built-in measuring unit corresponds one-to-one, High accuracy is always obtained.

As described above, in the measurement system according to the thirty-third embodiment, high measurement accuracy can be obtained by suppressing the dispersion of the measurement results among the plurality of measurement units.

(Thirty-Fourth Embodiment) The measurement system of the thirty-fourth embodiment includes, as shown in FIG. 34, a measurement part shown in FIG.
Level measuring device 116 for detecting level information from
And a control voltage generating unit 13 for generating a reverse bias voltage of the variable capacitance diode applied to the control pattern 5 of the measuring unit 131.
And a control unit 118 that controls the reverse bias voltage generated by the control voltage generation unit 132 in conjunction with the measurement frequency.

The measuring section 131 has a large number of measuring cells shown in FIG. The control pattern 5 is connected to the control terminal 132, and a voltage generated by the control voltage generator 133 according to a command from the controller 118 is applied.

Here, the control unit 118 sets the measurement frequency of the selection level measurement device 116 and, at the same time, controls so as to generate a control voltage corresponding to the measurement frequency so that optimum matching can be achieved at this measurement frequency. Voltage generator 13
Issue a command to 3. Therefore, the measurement unit 131 is always adjusted to the best state for the current measurement frequency.

As described above, in the measurement system of the thirty-fourth embodiment, high sensitivity can be ensured by matching the measurement frequency of the selection level measurement device 116 with the resonance frequency of the minute loop antenna.

(Thirty-Fifth Embodiment) As shown in FIG. 35, a measurement system according to a thirty-fifth embodiment outputs a signal of an intermediate frequency using a local oscillation signal as a measurement unit 134 of a main unit 43. 26, and a local oscillation signal is supplied to the measuring unit 134 from a selection level measuring device 144 having a superheterodyne configuration.

The selection level measuring device 144 includes an input terminal 136 to which a signal is input, a local oscillator 141 for generating a local oscillation signal, and a mixer for mixing the input signal with the local oscillation signal to generate an intermediate frequency signal. 140, a logarithmic amplifier 143 for converting an input signal into a logarithm, a local oscillation output terminal 138 for outputting a local oscillation signal oscillated by the local oscillation unit 141, and an intermediate output from the measurement unit 134. An intermediate frequency input terminal 137 to which a frequency signal is input, and an intermediate frequency SW 142 that selects a signal input from the intermediate frequency input terminal 137 or a signal output from the mixer 140 and supplies the selected signal to the logarithmic amplifier 143.

The measuring section 134 has many measuring cells shown in FIG. As the local oscillation signal applied to the strip line 99 of the measurement unit 134, the signal generated by the local oscillation unit 141 of the selection level measurement device 116 is used, and is output from the local oscillation output terminal 138 of the selection level measurement device 116. Input to the local oscillation signal terminal 135.

The frequency of measurement at the measuring section 134 is set to 1700 to 2000 MHz, and the frequency of the local oscillation section 141 is set to 90.
When the frequency is set to 0 to 1200 MHz, the intermediate frequency output from the measuring unit 134 is 800 MHz.

The intermediate frequency signal output from the measuring section 134 is input from the intermediate frequency output section 112 of the measuring section 134 to the intermediate frequency input terminal 137 of the selected level measuring device 144, and is converted into level information by the logarithmic amplifier 143. You.

The selected level measuring device 144 is a general super-heterodyne level measuring device for detecting a level by frequency conversion. A signal input from an input terminal 136 is supplied to a mixer 140 by a local oscillator 141 of a local oscillator 141. It is mixed with the signal and converted to an intermediate frequency. In this measurement system, the output of the local oscillation unit 141 of the selection level measurement device 144 is used by the measurement unit 134, so that it is not necessary to provide a separate oscillator for the local oscillation signal of the electromagnetic radiation measurement device.

As described above, in the measurement system according to the thirty-fourth embodiment, without adding a local oscillation signal generator,
Since the functions of the existing selection level measuring device can be effectively used, a simple system configuration can be realized.

(Thirty-Sixth Embodiment) A measuring system according to a thirty-sixth embodiment employs a fixing jig 145 as shown in FIG.
Is used to fix the device under test 48 at the same position, and the electromagnetic radiation is measured. The control unit 118 determines whether or not the device under test 48 has a failure, and specifies a failure site. Other configurations are the same as those in FIG.

The fixing jig 145 is a jig for supporting the device under test 48 (for example, a mobile phone) so that it can be always fixed at the same position, and is made of a material such as wood or plastic that does not affect electromagnetic radiation. Be composed. Below, the device under test 48
In the description, it is assumed that the measurement is always performed at the same position by the fixing jig 145.

As a preparation before the measurement, a normal device to be measured (for example, a reference cellular phone) is measured in advance.
The control unit 118 stores the three-dimensional position of the main source of electromagnetic radiation emitted from the device and information on the frequency of the electromagnetic radiation as reference data. Here, when the device to be measured is a mobile phone, for example, main electromagnetic radiation is detected from the local oscillation unit, the transmission circuit unit, and the antenna unit.

Next, a device to be measured (a mobile phone of the same type as the reference mobile phone) to be inspected is measured, and the control unit 118 is operated.
However, the comparison with the reference data is performed by a software program. At this time, for example, if the electromagnetic radiation from the antenna unit is extremely small and the electromagnetic radiation from other parts (the local oscillation unit and the transmission circuit unit) is normal, it is determined that the antenna unit has failed. Also, for example,
If an abnormality is found in the frequency of electromagnetic radiation from a portion corresponding to the three-dimensional position of the local oscillator, it can be determined that the frequency control function of the local oscillator is abnormal. By programming the examples of these failure modes by software in advance, it is possible to specify a failure part.

As described above, in the measuring system according to the thirty-sixth embodiment, it is possible to determine whether or not a device to be measured has a failure and to specify a failed part.

[0273]

As is clear from the above description, the electromagnetic radiation measuring apparatus of the present invention can ensure high isolation at a high measuring frequency.

Further, high sensitivity can be secured at a high measurement frequency.

Further, since the measuring section having the optimum performance can be used for each of the low frequency and the high frequency, it is possible to cope with a wide measuring frequency.

Also, since the area occupied by the measuring section can be reduced, it is possible to cope with a small and wide band measuring frequency.

Also, since the area occupied by the measuring section is reduced and two measuring sections can be formed by one multi-layer substrate, a simple configuration and a wide range of measuring frequencies can be supported.

Further, the measurement can be performed simultaneously using two measurement units.

Further, the output terminal can be shared by the two measuring sections, and it is possible to cope with an economical and wide band measuring frequency.

Also, since electromagnetic radiation from the front or back surface of the device to be measured can be measured simultaneously, high-speed measurement is possible.

Further, high sensitivity can be ensured in a specific frequency range.

Also, high isolation performance can be ensured in a specific frequency range.

Further, a specific frequency range having high sensitivity can be changed.

Further, it is possible to cope with a wide frequency range.
Can be doubled.

Further, since a wide frequency range can be handled and the measurement cell size can be reduced, the position resolution can be improved.

Further, a wide frequency range can be handled, and the bias supply circuit can have a simple configuration.

Also, the isolation between the low-frequency measurement system and the high-frequency measurement system can be improved.

Further, flat frequency characteristics and high isolation can be ensured in the measurement frequency range.

Also, high sensitivity and high isolation can be ensured in a specific frequency range.

Also, a local oscillation signal can be applied efficiently,
High sensitivity and high isolation can be ensured in a specific frequency range.

Further, in the measuring system of the present invention, since electromagnetic radiation in different measuring sections or measuring frequency ranges can be measured simultaneously, high-speed measurement is possible.

Further, it is possible to visually observe the electromagnetic radiation of different measuring units or measuring frequency ranges while comparing them.

Further, a frequency spectrum in a wide frequency range can be displayed.

Further, the position in the height direction of the radiation source existing inside the device to be measured can be estimated.

[0295] Also, high measurement accuracy can be obtained by suppressing variations in the measurement results among the plurality of measurement units.

Also, by matching the measurement frequency of the selection level measurement device with the resonance frequency of the minute loop antenna,
High sensitivity can be secured.

Further, since an existing selection level measuring device can be effectively used without adding a local oscillation signal generating device, a simple system configuration can be realized.

Further, failure detection can be performed in a non-contact manner.

Further, it is possible to estimate a failure site without contact.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an electromagnetic radiation measuring device according to a first embodiment,

FIG. 2 is a configuration diagram illustrating an electromagnetic radiation measurement device according to a second embodiment;

FIG. 3 is a configuration diagram illustrating an electromagnetic radiation measurement device according to a third embodiment;

FIG. 4 is a configuration diagram showing an electromagnetic radiation measuring apparatus according to a fourth embodiment;

FIG. 5 is a configuration diagram showing an electromagnetic radiation measuring device according to a fifth embodiment;

FIG. 6 is a configuration diagram showing an electromagnetic radiation measuring device according to a sixth embodiment;

FIG. 7 is a configuration diagram illustrating an electromagnetic radiation measurement device according to a seventh embodiment;

FIG. 8 is a configuration diagram showing an electromagnetic radiation measurement device according to an eighth embodiment;

FIG. 9 is a configuration diagram illustrating an electromagnetic radiation measurement device according to a ninth embodiment;

FIG. 10 is a configuration diagram showing an electromagnetic radiation measurement device according to a tenth embodiment;

FIG. 11 is a configuration diagram illustrating an electromagnetic radiation measurement device according to an eleventh embodiment;

FIG. 12 is a configuration diagram showing an electromagnetic radiation measurement device according to a twelfth embodiment;

FIG. 13 is a configuration diagram showing an electromagnetic radiation measurement device according to a thirteenth embodiment;

FIG. 14 is a configuration diagram showing an electromagnetic radiation measurement device according to a fourteenth embodiment;

FIG. 15 is a configuration diagram showing an electromagnetic radiation measurement device according to a fifteenth embodiment;

FIG. 16 is a configuration diagram showing an electromagnetic radiation measurement device according to a sixteenth embodiment;

FIG. 17 is a configuration diagram showing an electromagnetic radiation measuring device according to a seventeenth embodiment;

FIG. 18 is a configuration diagram showing an electromagnetic radiation measurement device according to an eighteenth embodiment;

FIG. 19 is a configuration diagram showing an electromagnetic radiation measurement device according to a nineteenth embodiment;

FIG. 20 is a configuration diagram showing an electromagnetic radiation measurement device according to a twentieth embodiment;

FIG. 21 is a configuration diagram showing an electromagnetic radiation measurement device according to a twenty-first embodiment;

FIG. 22 is a configuration diagram showing an electromagnetic radiation measuring device according to a twenty-second embodiment;

FIG. 23 is a configuration diagram showing an electromagnetic radiation measurement device according to a twenty-third embodiment;

FIG. 24 is a configuration diagram showing an electromagnetic radiation measurement device according to a twenty-fourth embodiment;

FIG. 25 is a configuration diagram showing an electromagnetic radiation measuring apparatus according to a twenty-fifth embodiment;

FIG. 26 is a configuration diagram showing an electromagnetic radiation measuring device according to a twenty-sixth embodiment;

FIG. 27 is a configuration diagram showing an electromagnetic radiation measuring device according to a twenty-seventh embodiment;

FIG. 28 is a configuration diagram showing an electromagnetic radiation measurement device according to a twenty-eighth embodiment;

FIG. 29 is a configuration diagram showing an electromagnetic radiation measuring apparatus according to a twenty-ninth embodiment;

FIG. 30 is a configuration diagram showing a measurement system according to a thirtieth embodiment;

FIG. 31 is a configuration diagram showing a measurement system according to a thirty-first embodiment;

FIG. 32 is a configuration diagram showing a measurement system according to a thirty-second embodiment;

FIG. 33 is a configuration diagram showing a measurement system according to a thirty-third embodiment;

FIG. 34 is a configuration diagram illustrating a measurement system according to a thirty-fourth embodiment;

FIG. 35 is a configuration diagram showing a measurement system according to a thirty-fifth embodiment;

FIG. 36 is a configuration diagram illustrating a measurement system according to a thirty-sixth embodiment.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 antenna substrate 2 small loop antenna 3 PIN diode 4 control GND substrate 6, 10 GND pattern 8 through hole 9 strip line 12 GND substrate 13 GND pattern 15 high-frequency transistor 18, 30 first measurement unit 19, 31 second measurement unit 20 Multilayer board 21, 22 Measurement system selector 23 First output terminal 24 Second output terminal 25 Measurement cell 26, 28 Micro loop antenna 27 Measurement cell 29 Housing 32 Multilayer substrate 33, 36 Loop pattern 34, 37 Through hole 35 Surface mount Components 39 First measurement surface 40 Second measurement surface 41 High-frequency SW 42 Output terminal 43 Main unit 44 Lid 45 First measurement unit 46 Second measurement unit 47 Movable connection unit 48 Device under test 49, 50 Micro loop antenna 51, 52 PIN diode 53 Coil 54 Capacitor 55, 56 Capacitor 57 Loop pattern 58 Through hole 59 Capacitor pattern 60, 61 Land 62 Multi-layer board 63 Measurement surface 64 Back 65, 76 PIN diode 66, 72 Capacitor 67 Resistance 68, 69 Variable capacitance diode 70 PIN diode 73 Next stage circuit 74, 75 Micro loop antenna 77, 78 PIN diode 79 PIN diode 80 Capacitor 81 Control pattern 82 Strip line 83, 84 Loop pattern 85, 86 Through hole 88, 89 Measurement cell 91 Circular pattern 93 GND pattern 94 Through hole 95 Broadband amplifier 96 Filter 97 Mixer diode 98 Coil 99 Strip line 100 Local oscillation circuit 101 Electromagnetic radiation 102 Loop pattern 103 Through hole 104, 107 Capacitor 105, 106 Coil 108 Transistor 109 Bypass capacitor 110 Coil 111 Terminal 116, 117 Selection level measurement device 118 Control unit 120 Display unit 121 Result of first measurement unit 122 Result of second measurement unit 123 Broadband measurement unit 128, 129 Memory 130 Data line 131, 134 measurement 132 and 133 control voltage generation unit 136 input terminal 137 an intermediate frequency input terminal 138 the local oscillation output terminal 141 local oscillator 140 Mixer 142 intermediate frequency SW 143 logarithmic amplifier 144 selected level measuring device 145 fixture

Claims (48)

[Claims] An electromagnetic radiation measuring apparatus for measuring a near electromagnetic field radiated from an electronic device, comprising: a plurality of first substrates having a surface orthogonal to the plane and arranged in parallel on the same plane; A plurality of second substrates having a surface orthogonal to the plane, the plurality of second substrates being arranged in parallel with the first substrate so as to form a lattice shape, wherein each of the first substrates includes a plurality of minute loop antennas;
A plurality of semiconductor elements for selectively connecting each of the micro loop antennas to a transmission line, and a strip line as the transmission line; each of the second substrates includes a GND pattern and a control signal pattern; The electromagnetic radiation measuring apparatus according to claim 1, wherein the minute loop antenna is connected to the control signal pattern at a position where the first substrate and the second substrate intersect. 2. A plurality of third patterns on which a GND pattern is formed.
A substrate, wherein each of the third substrates is arranged in parallel between the first substrates in the arrangement of the first substrates, and at a point where the third substrate and the second substrate intersect, the third substrate 2. The GND pattern is connected.
An electromagnetic radiation measuring device according to claim 1. 3. A micro loop antenna comprising a PIN diode as the semiconductor element, one end of the PIN diode connected to a first end of the micro loop antenna, and the other end of the PIN diode connected to the strip line. Is connected to the control signal pattern, and the PIN diode is turned on or off by a bias voltage applied to the control signal pattern and the strip line.
The electromagnetic radiation measuring apparatus according to claim 1 or 2, wherein F is performed. 4. A transistor as the semiconductor element, a base of the transistor is connected to a first end of the small loop antenna, a collector of the transistor is connected to the strip line, and an emitter of the transistor is connected to the GND pattern. A second end of the small loop antenna is connected to the control signal pattern, and the transistor is turned on or off by a bias voltage applied to the control signal pattern and a strip line. 3. The electromagnetic radiation measuring device according to 2. 5. An electromagnetic radiation measuring apparatus for measuring a near electromagnetic field radiated from an electronic device, comprising: a plurality of first minute loop antennas; and means for selecting the first minute loop antenna. A second measuring unit comprising: a plurality of second minute loop antennas; and means for selecting the second minute loop antenna;
The loop length of the first minute loop antenna and the loop length of the second minute loop antenna are set to different values, and the measurable frequency range of the first measuring unit and the measurable frequency range of the second measuring unit are set. An electromagnetic radiation measuring apparatus characterized by differently setting the following. 6. The first measuring unit is formed on a first multilayer substrate, the second measuring unit is formed on a second multilayer substrate, and the first and second multilayer substrates are respectively measured. The first and second measuring units are fixed to face each other so that the surfaces face in opposite directions, the first measuring unit is used upward when using the first measuring unit, and the second measuring unit is used when using the second measuring unit. The electromagnetic radiation measuring apparatus according to claim 5, wherein the electromagnetic radiation measuring apparatus is used with the upper side facing upward. 7. The first measuring section is formed in a plurality of layers on one side of the multilayer substrate, and the second measuring section is formed in a plurality of layers on the other side of the multilayer substrate, and the first measuring section is used. Sometimes the first
The electromagnetic radiation measuring apparatus according to claim 5, wherein the measuring unit is used facing upward, and the second measuring unit is used facing upward when using the second measuring unit. 8. The first measuring section and the second measuring section are formed on the same multilayer substrate, and an output terminal of the first measuring section and an output terminal of the second measuring section are separately provided. The electromagnetic radiation measuring apparatus according to claim 5, wherein: 9. The first measuring section and the second measuring section are formed on the same multilayer substrate, and one of an output of the first measuring section and an output of the second measuring section is selected. High frequency S
The electromagnetic radiation measuring apparatus according to claim 5, wherein W is provided on the multilayer substrate, and a selected output of the high-frequency SW is connected to an output terminal. 10. An electromagnetic radiation measuring apparatus for measuring a near electromagnetic field radiated from an electronic device, comprising: a plurality of first minute loop antennas; and means for selecting the first minute loop antenna. A second measuring unit comprising: a plurality of second minute loop antennas; and a means for selecting the second minute loop antenna; and a housing having an open / close structure for accommodating the first measuring unit and the second measuring unit. Body, the first measurement unit is housed in the main body of the housing with the measurement surface facing the lid, and the second measurement unit is mounted on the lid of the housing with the measurement surface facing the main body. An electromagnetic radiation measuring apparatus, wherein the apparatus is housed, a device to be measured is arranged between the main body and the lid, and electromagnetic radiation from the device to be measured is measured. 11. The loop length of the first minute loop antenna and the loop length of the second minute loop antenna are set to different values, and the frequency range that can be measured by the first measurement unit and the loop length of the second measurement unit are different. The electromagnetic radiation measuring apparatus according to claim 10, wherein the measurable frequency range is set differently. 12. As a means for selecting a small loop antenna of the first measurement unit and the second measurement unit, a PIN diode for SW is provided between the small loop antenna and a transmission line, When the measurable frequency range is higher than the measurable frequency range of the second measurement unit,
12. The electromagnetic radiation measuring apparatus according to claim 5, wherein the OFF capacitance of the PIN diode of the first measuring unit is set lower than the OFF capacitance of the PIN diode of the second measuring unit. 13. As a means for selecting a minute loop antenna of the first measuring unit and the second measuring unit, a PIN diode for SW is provided between the minute loop antenna and a transmission line, Second measurable frequency range
When the frequency is higher than the measurable frequency range of the measuring unit, a reactance element is connected in parallel to both ends of the PIN diode of the first measuring unit, and the PIN diode is turned off when the PIN diode of the first measuring unit is OFF. 12. The electromagnetic radiation measuring apparatus according to claim 5, wherein a parallel resonance frequency of a parallel circuit of the first measuring unit and a reactance element is set to be in a measurable frequency range of the first measuring unit. 14. The electromagnetic radiation measuring apparatus according to claim 13, wherein a circuit in which a coil and a DC element capacitor are connected in series is used as the reactance element. 15. An electromagnetic radiation measuring device for measuring a near electromagnetic field in a limited frequency range radiated from an electronic device, comprising: a plurality of minute loop antennas; and a first end of the minute loop antenna connected to a transmission line. A PIN diode to be connected, a first capacitor for grounding the second end of the small loop antenna to GND at a high frequency, and between the first end and the second end of the small loop antenna or between the first end and GND. And a value of the second capacitor is set such that a resonance frequency of a parallel circuit formed by the small loop antenna and the second capacitor is equal to a measurement frequency. To measure electromagnetic radiation. 16. The electromagnetic radiation measuring apparatus according to claim 15, wherein said second capacitor is constituted by a distributed constant circuit comprising a conductor pattern formed on a multilayer substrate. 17. A second PI connected in series with the second capacitor.
17. The electromagnetic radiation measuring apparatus according to claim 16, wherein an N diode is inserted, and the second PIN diode is turned off when the small loop antenna is not selected. 18. An electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a limited frequency range radiated from an electronic device, comprising: a plurality of minute loop antennas; and a first end of the minute loop antenna connected to a transmission line. A first variable capacitance diode to be connected, a first capacitor for grounding the second end of the minute loop antenna to GND at a high frequency, and between the first end and the second end of the minute loop antenna or between the first end and GND And a second variable capacitance diode disposed between the first variable capacitance diode and the second variable capacitance diode connected to the selected small loop antenna.
An electromagnetic radiation measuring apparatus characterized in that it is set lower than the reverse bias voltage of the first variable capacitance diode and the second variable capacitance diode connected to the non-selected minute loop antenna. 19. An electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a limited frequency range radiated from an electronic device, wherein a plurality of micro loop antennas are selectively connected to one measuring system. In order to select signals from a plurality of measurement systems and transmit the signals to the next stage, one end of a PIN diode is connected to the transmission line end of each measurement system, and the other end of the PIN diode is shared to And a reactive element connected in parallel to both ends of the PIN diode, so that the PIN when the PIN diode is in an OFF state is
An electromagnetic radiation measuring apparatus, wherein a parallel resonance frequency of a parallel circuit of a diode and the reactance element is set in a measurable frequency range. 20. An electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, comprising: a plurality of minute loop antennas; and a first end of the minute loop antenna connected to a first transmission line. A first PIN diode to be connected, a second PIN diode to connect a second end of the small loop antenna to a second transmission line, and a GN to the second end.
And a fourth PIN diode connecting the midpoint of the small loop antenna to GND. When measuring a low frequency range, the first PIN diode and the third PIN diode are turned ON and the second PIN diode is turned ON. When measuring a high frequency range by turning off the diode and the fourth PIN diode, setting the first PIN diode, the second PIN diode, and the fourth PIN diode to ON, and setting the third PIN diode to OFF, . 21. An electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, wherein each measuring cell has a first minute loop antenna, a second minute loop antenna, and a third minute loop antenna. And the first
The loop surface of the minute loop antenna is arranged diagonally to the measurement cell, the second minute loop antenna and the third minute loop antenna are arranged near the first minute loop antenna, and the second minute loop antenna and the third minute loop antenna are arranged. Setting the loop length of the minute loop antenna to be shorter than the loop length of the first minute loop antenna, connecting the first minute loop antenna to the first transmission line via the first PIN diode,
When connecting the second minute loop antenna to the second transmission line via the second PIN diode and connecting the third minute loop antenna to the third transmission line via the third PIN diode, and measuring a low frequency range, When the first PIN diode is turned ON, the second PIN diode and the third PIN diode are turned OFF, and a high frequency range is measured, the second PIN diode and the third PIN diode are turned ON and the first PIN diode is set OFF. Electromagnetic radiation measurement device. 22. In the measurement cell, the second minute loop antenna and the third minute loop antenna are arranged on both sides of the first minute loop antenna so as to sandwich the first minute loop antenna. An electromagnetic radiation measuring device according to claim 21. 23. The measurement cell, wherein the loop surface of the first minute loop antenna and the loop surfaces of the second minute loop antenna and the third minute loop antenna are arranged to be perpendicular to each other. An electromagnetic radiation measuring device according to claim 21. 24. The first minute loop antenna, the second minute loop antenna, and the third minute loop antenna each include one loop pattern parallel to the surface of the multilayer substrate and two through holes perpendicular to the surface of the multilayer substrate. And the first
The loop pattern of the minute loop antenna and the loop patterns of the second minute loop antenna and the third minute loop antenna are arranged on different layers, and the loop surface of the first minute loop antenna and the second minute loop antenna and the third minute loop antenna are arranged on different layers. The electromagnetic radiation measuring apparatus according to claim 21, wherein the loop antenna and the loop surface of the loop antenna are arranged so as to intersect perpendicularly with each other. 25. An electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, wherein each measuring cell has a first minute loop antenna and a loop length of the first minute loop antenna. A second minute loop antenna set to be shorter than the loop length, and a first end of the first minute loop antenna is connected to a first pin via a first PIN diode.
Connected to a transmission line, and connected to a first
One end is connected to a second transmission line via a second PIN diode, the second ends of the first micro loop antenna and the second micro loop antenna are connected, high frequency grounded via a capacitor, and a low frequency range is measured. In case, the first PIN
An electromagnetic radiation measuring apparatus characterized in that the diode is turned on, the second PIN diode is turned off, and when measuring a high frequency range, the second PIN diode is turned on and the first PIN diode is turned off. 26. An electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, comprising: a horizontal minute loop antenna disposed on a measurement side surface of a multilayer substrate; A first PIN diode connecting the first end of the horizontal transmission line to the first transmission line; a through hole connecting the second end of the horizontal micro loop antenna to the back surface of the multilayer substrate; A capacitor connected to the ground; and a second PIN diode connecting a middle point of the horizontal minute loop antenna to a second transmission line. By applying different bias voltages to the first transmission line and the second transmission line, a low bias voltage is applied. When measuring the frequency range, the first PIN
An electromagnetic radiation measuring apparatus characterized in that the diode is turned on, the second PIN diode is turned off, and when measuring a high frequency range, the second PIN diode is turned on and the first PIN diode is turned off. 27. An electromagnetic radiation measuring device for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, wherein the measuring cell on a measuring surface of a multi-layer substrate on which a large number of measuring cells having a small loop antenna are formed GND around
A pattern is formed, and a G
An electromagnetic radiation measuring apparatus, wherein an ND pattern is formed, and a large number of through holes for connecting the GND pattern on the measurement surface and the GND pattern on the back surface are arranged. 28. When the measurement cell includes a plurality of minute loop antennas having parallel loop surfaces, a GND pattern extending in parallel between the loop surfaces is formed, and the GND pattern and the GND pattern on the back surface are formed. 28. The electromagnetic radiation measuring apparatus according to claim 27, wherein a large number of through-holes are provided to connect the two. 29. The first transmission line and the second transmission line are configured as strip lines formed on an inner layer of a multilayer substrate, and the strip line of the first transmission line and the second transmission line are connected to each other.
29. The electromagnetic radiation measuring apparatus according to claim 20, wherein the transmission line and the strip line are arranged on different layers. 30. The electromagnetic radiation measuring apparatus according to claim 29, wherein the strip line of the first transmission line and the strip line of the second transmission line are arranged so as to intersect at right angles. 31. An electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a wide frequency range radiated from an electronic device, wherein one measuring system is constituted by a transmission line to which a plurality of minute loop antennas are selectively connected. Then, in order to select signals from a plurality of measurement systems and transmit the signals to the next stage, an amplification circuit and a circuit for selecting a measurement system are connected to the transmission line end of each measurement system, and the measurement system is in a selected state. An electromagnetic radiation measuring apparatus characterized in that the amplifier circuit is operated only at the time of operation. 32. A frequency characteristic of a gain of the amplifier circuit,
32. The electromagnetic device according to claim 31, wherein the frequency characteristics of a signal transmitted to the next stage are flattened by adjusting the frequency characteristics of the measurement system in which the amplification circuit is inserted so as to have the opposite characteristics. Radiometric device. 33. An electromagnetic radiation measuring apparatus for measuring a near electromagnetic field in a limited frequency range radiated from an electronic device, comprising: a plurality of minute loop antennas; and a first end of the minute loop antenna connected to a transmission line. A mixer element to be connected; and means for applying a local oscillation signal input from the outside to the micro loop antenna, wherein the high frequency signal received by the micro loop antenna and the local oscillation signal are mixed by the mixer element. An electromagnetic radiation measuring device for converting the signal to a low intermediate frequency and outputting the converted signal via the transmission line. 34. As means for applying the local oscillation signal to the small loop antenna, a second transmission line is connected to a second end of the small loop antenna, and a second transmission line is connected between the second end of the small loop antenna and GND. Providing a parallel resonance circuit of a capacitor and a coil, setting the resonance frequency of the parallel resonance circuit to the frequency of the local oscillation signal, and applying the externally input local oscillation signal to the second transmission line. The electromagnetic radiation measuring apparatus according to claim 33, wherein: 35. As means for applying the local oscillation signal to the small loop antenna, a second loop antenna is arranged near the small loop antenna, and the local oscillation signal inputted from the outside to the second loop antenna is provided. 34. A signal is applied to mutually inductively couple the small loop antenna and the second loop antenna.
An electromagnetic radiation measuring device according to claim 1. 36. A transmission line in which a first end of the small loop antenna is connected via a mixer element and a first end of the small loop antenna of an adjacent measurement cell is connected via a mixer element. A series resonance circuit of a coil and a capacitor is inserted between a point on the line and a resonance frequency of the series resonance circuit is set to an intermediate frequency for transmission on the transmission line. 36. The electromagnetic radiation measuring device according to 35. 37. A point on the second transmission line to which the second end of the minute loop antenna connects, and a point on the second transmission line to which the second end of the minute loop antenna of an adjacent measurement cell connects. 35. The electromagnetic radiation according to claim 34, wherein a series resonance circuit of a coil and a capacitor is inserted therebetween, and a resonance frequency of the series resonance circuit is set to a local oscillation frequency transmitting on the second transmission line. measuring device. 38. The electromagnetic radiation measuring apparatus according to claim 33, wherein a diode is used as said mixer element. 39. A transistor as the mixer element, wherein a base or an emitter of the transistor is connected to a minute loop antenna, a collector of the transistor is connected to the transmission line, and a DC bias is applied to the transistor. 38. The electromagnetic radiation measuring device according to claim 33, wherein: 40. A measurement system for measuring electromagnetic radiation from a device to be measured using an electromagnetic radiation measuring device having a large number of measuring cells, wherein the electromagnetic radiation measuring device differs in electromagnetic radiation from the device to be measured. Two kinds of measurement signals are output as a first output signal and a second output signal by measuring from different directions or in different frequency ranges, and an electromagnetic radiation level is obtained from each measurement signal output from the electromagnetic radiation measuring device. A level measuring device, and a control device that controls the selection or measurement frequency of a measuring cell from which a measurement signal is read from the electromagnetic radiation measuring device and that processes the level information obtained by the level measuring device, A measurement from different directions for different electromagnetic radiations or a measurement in different frequency ranges is performed simultaneously. 41. Display means for displaying the position distribution of the electromagnetic radiation level, wherein the position distribution of the electromagnetic radiation level obtained from the first output signal and the second output signal is displayed on the display means in a superimposed manner. 41. The measurement system according to claim 40, wherein: 42. A display means for displaying the frequency spectrum of the electromagnetic radiation level, wherein the display means is connected to the frequency spectrum of the electromagnetic radiation level obtained from the first output signal and the second output signal and displayed. 41. The measurement system according to claim 40, wherein: 43. The electromagnetic radiation measuring apparatus measures the electromagnetic radiation of the device to be measured by two measuring units disposed so as to sandwich the device to be measured, and outputs the measurement signal measured by each measuring unit to the second measuring unit. The control device calculates the difference between the electromagnetic radiation levels of the measurement cells at the positions opposed to each other by the two level measurement devices, which are output as one output signal and the second output signal. 41. The measurement system according to claim 40, wherein the position in the height direction of the electromagnetic radiation source inside the device under test is estimated based on the measurement. 44. The electromagnetic radiation measuring apparatus further comprises a readable and writable storage means, and the inspection result of the antenna factor is written in the storage means at the time of inspection of the electromagnetic radiation measuring apparatus, and is used at the time of measuring the electromagnetic radiation of the device under test. The inspection result stored in the storage means is transmitted to the control device, and the control device corrects the measurement result at the time of measurement based on the inspection result, wherein: The described measuring system. 45. A measurement system for measuring electromagnetic radiation from a device to be measured using the electromagnetic radiation measuring device according to claim 18, wherein the electromagnetic radiation level is determined from a measurement signal output from the electromagnetic radiation measuring device. A level measuring device to be obtained; a control device for controlling a measurement cell from which a measurement signal is read out from the electromagnetic radiation measuring device and a measurement frequency; a first variable connected to the selected minute loop antenna of the electromagnetic radiation measuring device Control voltage generation means for controlling a reverse bias voltage of the capacitance diode and the second variable capacitance diode, wherein the control voltage generation means varies the reverse bias voltage in conjunction with a measurement frequency controlled by the control device. A measurement system characterized by the following: 46. A measurement system for measuring electromagnetic radiation from a device to be measured using the electromagnetic radiation measuring device according to claim 33, wherein a measurement signal of an intermediate frequency output from the electromagnetic radiation measuring device. A level measuring device for obtaining an electromagnetic radiation level from a control device for controlling selection and a measuring frequency of a measuring cell from which a measurement signal is read out from the electromagnetic radiation measuring device, wherein the level measuring device has a built-in local oscillator. A measurement system, wherein a local oscillation output is output to the electromagnetic radiation measuring device, and the electromagnetic radiation measuring device generates a measurement signal of an intermediate frequency using a local oscillation signal input from the level measuring device. 47. A storage unit for storing a measurement result of an electromagnetic radiation level from a device under measurement as a reference, and comparing the measurement result of the device under measurement as a reference with the measurement result of another device under measurement. 47. The measurement system according to claim 40, wherein a failure of said another device to be measured is detected. 48. A recognizing means for recognizing a frequency and a three-dimensional position of a source of electromagnetic radiation from a measurement result of an electromagnetic radiation level of a device to be measured as a reference; Storage means for storing a three-dimensional position as reference information, wherein the reference information is compared with a result obtained by measuring another device to be measured, and a failure portion of the another device to be measured is estimated. Claims 40 to 4
7. The measurement system according to 6.