JPH11326252A - 微細孔を有する蒸発表面付き熱蒸気センサ― - Google Patents
微細孔を有する蒸発表面付き熱蒸気センサ―Info
- Publication number
- JPH11326252A JPH11326252A JP11095415A JP9541599A JPH11326252A JP H11326252 A JPH11326252 A JP H11326252A JP 11095415 A JP11095415 A JP 11095415A JP 9541599 A JP9541599 A JP 9541599A JP H11326252 A JPH11326252 A JP H11326252A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- liquid
- sensor
- wet
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 64
- 230000008020 evaporation Effects 0.000 title claims abstract description 52
- 239000007788 liquid Substances 0.000 claims abstract description 113
- 238000001514 detection method Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 116
- 238000006243 chemical reaction Methods 0.000 description 99
- 229910052751 metal Inorganic materials 0.000 description 42
- 239000002184 metal Substances 0.000 description 42
- 239000000463 material Substances 0.000 description 24
- 238000000034 method Methods 0.000 description 24
- 230000009977 dual effect Effects 0.000 description 22
- 239000012212 insulator Substances 0.000 description 20
- 238000012546 transfer Methods 0.000 description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 18
- 238000005530 etching Methods 0.000 description 16
- 239000007787 solid Substances 0.000 description 16
- 239000003570 air Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 229910052582 BN Inorganic materials 0.000 description 6
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- 239000004642 Polyimide Substances 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 229920001721 polyimide Polymers 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 4
- 239000011324 bead Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 230000008016 vaporization Effects 0.000 description 4
- 229910001006 Constantan Inorganic materials 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 230000000875 corresponding effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 235000020030 perry Nutrition 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229960001866 silicon dioxide Drugs 0.000 description 3
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000002657 fibrous material Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- 230000005291 magnetic effect Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 2
- 238000010977 unit operation Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 101150097524 Mccc1 gene Proteins 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 235000010627 Phaseolus vulgaris Nutrition 0.000 description 1
- 244000046052 Phaseolus vulgaris Species 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001299 aldehydes Chemical class 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000003444 anaesthetic effect Effects 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 238000003889 chemical engineering Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- -1 for example Chemical compound 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000035987 intoxication Effects 0.000 description 1
- 231100000566 intoxication Toxicity 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000004962 physiological condition Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 210000002345 respiratory system Anatomy 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000008400 supply water Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 239000002470 thermal conductor Substances 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/56—Investigating or analyzing materials by the use of thermal means by investigating moisture content
- G01N25/62—Investigating or analyzing materials by the use of thermal means by investigating moisture content by psychrometric means, e.g. wet-and-dry bulb thermometers
- G01N25/64—Investigating or analyzing materials by the use of thermal means by investigating moisture content by psychrometric means, e.g. wet-and-dry bulb thermometers using electric temperature-responsive elements
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/054,852 US6202480B1 (en) | 1998-04-02 | 1998-04-02 | Thermometric vapor sensor with evaporation surface having micropores |
| US09/054-852 | 1998-04-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11326252A true JPH11326252A (ja) | 1999-11-26 |
| JPH11326252A5 JPH11326252A5 (https=) | 2006-06-15 |
Family
ID=21993929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11095415A Pending JPH11326252A (ja) | 1998-04-02 | 1999-04-01 | 微細孔を有する蒸発表面付き熱蒸気センサ― |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US6202480B1 (https=) |
| JP (1) | JPH11326252A (https=) |
| DE (1) | DE19914977A1 (https=) |
| GB (1) | GB2335992B (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008538815A (ja) * | 2005-04-25 | 2008-11-06 | メトラー−トレド アクチェンゲゼルシャフト | 熱分析センサー |
| JP2011209008A (ja) * | 2010-03-29 | 2011-10-20 | Yamatake Corp | 発熱量算出式作成システム、発熱量算出式の作成方法、発熱量測定システム、及び発熱量の測定方法 |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE0100379D0 (sv) * | 2001-02-07 | 2001-02-07 | Siemens Elema Ab | Arrangement for and method of acoustic determination of fluid temperature |
| US6561023B2 (en) * | 2001-04-23 | 2003-05-13 | The United States Of America As Represented By The Secretary Of The Navy | Cellulose-based water sensing actuator |
| AU2002351721A1 (en) * | 2001-11-20 | 2003-06-10 | Aalborg Universitet | Dynamic dew point analysis method and a device for determining the dew point temperature and relative humidity |
| WO2003091679A1 (en) * | 2002-04-25 | 2003-11-06 | Glaxo Group Limited | Magnetoacoustic sensor system and associated method for sensing environmental conditions |
| US7018096B2 (en) * | 2003-04-25 | 2006-03-28 | Universal Leaf Tobacco Company, Inc. | Packed product temperature measuring device |
| US7059170B2 (en) | 2004-02-27 | 2006-06-13 | Nielsen-Kellerman, Inc. | Method and apparatus for measuring relative humidity of a mixture |
| US7297639B2 (en) * | 2005-09-01 | 2007-11-20 | Micron Technology, Inc. | Methods for etching doped oxides in the manufacture of microfeature devices |
| US20080273572A1 (en) * | 2006-06-02 | 2008-11-06 | James Madison University | Thermal detector for chemical or biological agents |
| US7902625B2 (en) * | 2008-04-21 | 2011-03-08 | International Business Machines Corporation | Metal-gate thermocouple |
| KR20090124011A (ko) * | 2008-05-29 | 2009-12-03 | (주)엠투엔 | 패키징 기판과 이를 포함하는 가스 센싱 장치 및 그 제조방법 |
| US9759610B2 (en) * | 2012-08-01 | 2017-09-12 | General Electric Company | Method and device for dissolved gas analysis |
| US9689819B2 (en) * | 2014-08-29 | 2017-06-27 | The University Of Vermont And State Agricultural College | Electronic psychrometer and/or humidistat with low temperature and high humidity capability |
| TWI510778B (zh) | 2014-09-18 | 2015-12-01 | Ind Tech Res Inst | 液體濃度檢測裝置 |
| US10732135B2 (en) * | 2015-06-16 | 2020-08-04 | Multicore Technologies, Llc | System and method for determining one or more fluid concentrations in a fluid stream |
| US11623064B2 (en) * | 2016-07-14 | 2023-04-11 | Drägerwerk AG & Co. KGaA | Dispensing device for introducing an anesthetic into a breathing gas stream |
| US10598635B2 (en) * | 2017-03-31 | 2020-03-24 | Hexagon Technology As | Systems and methods of capturing transient elastic vibrations in bodies using arrays of transducers for increased signal to noise ratio and source directionality |
| KR101885660B1 (ko) * | 2017-04-03 | 2018-09-06 | 한국원자력연구원 | 열전달률 측정 소자 |
| CN110057871B (zh) * | 2019-05-06 | 2022-07-08 | 宁波大学 | 基于stm32的智能液态蒸发式voc气体测试方法 |
| CN110057870B (zh) * | 2019-05-06 | 2022-07-08 | 宁波大学 | 基于stm32的智能液态蒸发式voc气体测试表征仪 |
| WO2022056120A1 (en) * | 2020-09-11 | 2022-03-17 | Matrix Sensors, Inc. | Self-calibrating analyte sensor |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1484129A (en) | 1923-03-17 | 1924-02-19 | Hermann Albert | Hygrometer |
| US1586351A (en) | 1924-03-15 | 1926-05-25 | Foxboro Co | Fitting for thermometers |
| US2494769A (en) | 1945-02-17 | 1950-01-17 | Bristol Company | Wet bulb thermometer |
| NL6914656A (https=) | 1968-11-14 | 1970-05-19 | ||
| IT1162176B (it) * | 1978-08-29 | 1987-03-25 | Lombardi Arnaldo | Metodo per rilevare il rapporto tra un gas o miscela di gas ed il vapore prodotto da liquido anestetico volatile allo scopo di conoscere il dosaggio dell'anestitico stesso ed effettuare anche eventualmente il dosaggio automatico |
| DE68928739T2 (de) | 1988-12-29 | 1999-02-11 | Sharp K.K., Osaka | Detecteur d'humidite |
| US5608374A (en) | 1992-02-14 | 1997-03-04 | Seiko Epson Corporation | Humidity sensor and a method of producing the humidity sensor |
| US5460041A (en) | 1993-11-08 | 1995-10-24 | Electric Power Research Institute, Inc. | Apparatus and method for continuous measurement of the wet bulb temperature of a flue gas stream |
-
1998
- 1998-04-02 US US09/054,852 patent/US6202480B1/en not_active Expired - Fee Related
-
1999
- 1999-04-01 GB GB9907697A patent/GB2335992B/en not_active Expired - Fee Related
- 1999-04-01 JP JP11095415A patent/JPH11326252A/ja active Pending
- 1999-04-01 DE DE19914977A patent/DE19914977A1/de not_active Withdrawn
-
2000
- 2000-12-07 US US09/733,511 patent/US6276196B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008538815A (ja) * | 2005-04-25 | 2008-11-06 | メトラー−トレド アクチェンゲゼルシャフト | 熱分析センサー |
| JP2011209008A (ja) * | 2010-03-29 | 2011-10-20 | Yamatake Corp | 発熱量算出式作成システム、発熱量算出式の作成方法、発熱量測定システム、及び発熱量の測定方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US6276196B2 (en) | 2001-08-21 |
| GB2335992A (en) | 1999-10-06 |
| DE19914977A1 (de) | 1999-10-14 |
| GB2335992B (en) | 2002-02-13 |
| US6202480B1 (en) | 2001-03-20 |
| GB9907697D0 (en) | 1999-05-26 |
| US20010000852A1 (en) | 2001-05-10 |
| GB2335992A8 (en) | 2000-01-13 |
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