JPH11324917A - Cryopump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate the manufacture, fitting and removal of a heater. SOLUTION: In this cryopump 1, a cold cylinder 17 is arranged in a vacuum chamber 5, and a sheath heater 60 formed by fitting a first heating part 65 and a second heating part 66 separated from each other in the longitudinal direction to the cold cylinder 17 is provided. In this case, the sheath heater 60 is formed straight at a part over from the first heating part to the second heating part.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cryopump used for generating a high vacuum pressure in a semiconductor manufacturing process or the like.
In particular, it relates to a cryopump equipped with a regeneration heater.

[0002]

2. Description of the Related Art In order to maintain a processing space in a high vacuum state, a cryopump is provided along with a mechanical vacuum pump (hereinafter referred to as a roughing pump) in various processing apparatuses and the like in a semiconductor manufacturing line. I have. The cryopump evacuates the processing space roughly evacuated by the roughing pump to further increase the vacuum pressure. The cryogenic refrigerator creates a cryogenic temperature, the cold panel held in the cold cylinder of the refrigerator, and the surface of the cold panel. Activated carbon, a cold chamber, and a vacuum chamber for accommodating a cold panel. Exhaust by the cryopump is performed by condensing and solidifying gas molecules on the surface of the cold panel cooled to an extremely low temperature, or by adsorbing gas molecules on the adsorption surface of activated carbon.

[0003] In the cryopump, when the evacuation operation is performed for a long time, gas molecules are gradually condensed and adsorbed on the surface of the cold panel and the adsorbed surface of the activated carbon, and the evacuation efficiency is reduced to end. Can hardly exhaust. Therefore, it is necessary to appropriately perform a regeneration operation for releasing the condensed or adsorbed gas molecules. In this case, a regeneration gas (generally, nitrogen gas) is introduced into the vacuum chamber,
This raises the temperature of the cold panel or cold cylinder to near normal temperature.

In a cryopump, the temperature of a cold cylinder or the like is extremely low (about 20 K) during the evacuation operation.
The temperature difference from room temperature (about 25 ° C. (= 298 K)) is very large (about 280 K). Therefore, when the temperature is raised only by introducing the regeneration gas at normal temperature, it takes a long time from the start of the regeneration operation to the release of the gas molecules, so that the semiconductor production line must be stopped for a long time. And the production efficiency had to be reduced.

[0005] To address this, Japanese Patent Publication No. 4-501175 discloses an apparatus in which a heater is mounted on a cold cylinder, and the heater is connected to a power supply provided outside the vacuum chamber by an electric wire. In this apparatus, by energizing the heater during the regeneration operation, the cold cylinder is quickly heated to room temperature, and the regeneration operation time is greatly reduced.

According to the invention described in the above publication, the radiation shield (64) installed on the first cold head (50) of the refrigerator and the mounting base (54) installed on the second cold head (54) of the refrigerator. 73), the first heating unit and the second heating unit of the heater are attached in a state where their respective end faces are in contact with each other, and the heater is provided between the first heating unit and the second heating unit. Each of them is bent twice at substantially right angles.

[0007]

As described above, since the heater is bent twice at substantially right angles between the first heating unit and the second heating unit, it is not easy to manufacture the heater. In addition, installation and removal are complicated.

Further, since the heater is attached to the refrigerator at the end faces of the first and second heating sections, the heat transfer area is small, and the heat transfer from the heater to the refrigerator during the regeneration operation is insufficient. And lacks reliability. In order to ensure sufficient heat transfer from the heater to the refrigerator, the heater may need to be heated to a temperature close to the heat-resistant temperature, and the life of the heater may be shortened.

In view of the above circumstances, it is an object of the present invention to provide a cryopump capable of facilitating the manufacture, attachment and detachment of a heater. An object of the invention described in (1) is to provide a cryopump capable of securing sufficient heat transfer from the heater and achieving high reliability and long life of the heater.

[0010]

According to the first aspect of the present invention,
A cryopump provided with a heater in which a cold cylinder is disposed in a vacuum chamber and a first heating unit and a second heating unit which are separated by a predetermined distance in a longitudinal direction are attached to the cold cylinder. The shape from the heating section to the second heating section is formed in a linear shape.

According to a second aspect of the present invention, a cold cylinder is disposed in a vacuum chamber, and a heater is provided in which a first heating unit and a second heating unit which are separated by a predetermined distance in a longitudinal direction are attached to the cold cylinder. In the cryopump, the heater includes a long cylindrical heater pipe, a heating coil disposed inside the heater pipe at a position corresponding to the first and second heating units, and a first and second heater pipe.
A heat transfer member having good heat conductivity fixed to the outer peripheral surface of the heater pipe at a corresponding position of the heating portion, and the outer surface of the heat transfer member is in contact with the cold cylinder, and A heater is attached to the cold cylinder.

According to a third aspect of the present invention, a cold cylinder is provided in a vacuum chamber, and a heater is provided in which a first heating unit and a second heating unit which are separated by a predetermined distance in a longitudinal direction are attached to the cold cylinder. In the cryopump, the heater includes a long cylindrical heater pipe, a heating coil disposed inside the heater pipe at a position corresponding to the first and second heating units, and a first and second heater pipe.
A heat transfer member having good thermal conductivity fixed to the outer peripheral surface of the heater pipe at a position corresponding to the heating section, wherein a shape of the heater pipe from the first heating section to the second heating section is formed. 5. The invention according to claim 4, wherein the heater is attached to the cold cylinder in a state where the heater is formed in a linear shape and the outer surface of the heat transfer member is in contact with the cold cylinder. According to a second aspect of the present invention, in the heat transfer member, a cutout portion is formed in a longitudinal direction of the heat transfer member.

According to a fifth aspect of the present invention, in any one of the second to fourth aspects, a heater flange for attaching the heater to a vacuum chamber is formed at one end of a heater pipe of the heater. In addition, a sealing portion for sealing an electric wire extending from the heating portion is provided, and a sealing member is hermetically mounted on the heater flange so as to cover the sealing portion.

The invention according to claim 1 or 3 has the following operation.

Since the shape of the heater from the first heating section to the second heating section is formed in a linear shape, the heater is bent twice at substantially right angles between the first heating section and the second heating section. As a result, the manufacturing becomes easier, and the operation of attaching or detaching the first and second heating portions of the heater to or from the cold cylinder can be facilitated.

The invention according to claim 2 or 3 has the following operation.

In the first and second heat transfer sections, the heater includes:
Since the outer surface of the heat transfer member having good heat conductivity is brought into contact with the cold cylinder to increase the heat transfer area and is attached to the cold cylinder, the thermal resistance between the heater and the cold cylinder can be reduced. As a result, sufficient heat transfer from the heater to the cold cylinder can be ensured, and it is not necessary to raise the temperature of the heater to a temperature higher than the heat-resistant temperature, so that the reliability of the heater can be improved and the life can be extended.

The third aspect of the invention has the following operation.

Since the shape of the heater pipe from the first heating section to the second heating section is linear, a heating member is easily inserted into the outer peripheral surface of the heater pipe corresponding to the first and second heating sections. Can be attached.

[0020] The invention described in claim 4 has the following operation.

Since the notch is formed in the heat transfer member, a welding material such as a molten brazing material can be poured between the outer peripheral surface of the heater pipe and the inner peripheral surface of the heat transfer member through the notch. At this time, since the notch is formed in the longitudinal direction of the heat transfer member, the welding material can be turned around by a surface tension over substantially the entire inner peripheral surface of the heat transfer member. The heat conduction between them can be improved.

The fifth aspect of the invention has the following operation.

Since the electric wire taken out from one end of the heater pipe of the heater is double-sealed by the sealing portion and the sealing member at the one end of the heater pipe, moisture in the atmosphere passes through the surface of the electric wire and passes through the heater. Intrusion into the pipe can be reliably prevented, and as a result, insulation failure of the heater can be avoided.

[0024]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a side sectional view showing an embodiment of a cryopump according to the present invention.

As shown in FIG. 1, the cryopump 1 of the present embodiment comprises a cryogenic refrigerator 3 using a Gifford-McMahon cycle, a cylindrical vacuum chamber 5, and the like. Line vacuum processing tank 7
Is provided on the lower surface of the main body. In FIG. 1, reference numeral 9 denotes a gate valve, which shuts off communication between the vacuum processing tank 7 and the cryopump 1 by a sliding valve element 11.

The refrigerator 3 includes a body 15 fastened to the lower surface of the vacuum chamber 5, a cold cylinder 17 disposed in the vacuum chamber 5, a displacer 19 sliding in the cold cylinder 17 in the axial direction, and a crank mechanism (not shown). Shown)
The motor 25 drives the displacer 19 via the like.

The body 15 of the refrigerator 3 has a refrigerant introduction pipe 27
And a refrigerant discharge pipe 29 connected to a compressor unit (not shown), and helium gas as a refrigerant circulates between the refrigerator 3 and the compressor unit. Further, the vacuum chamber 5 is connected to a roughing pump (not shown) through a roughing pipe 31, and the vacuuming of the vacuum chamber 5 is performed by the roughing pump.

The cold cylinder 17 has a first cold head 33 having a relatively large mass at a substantially middle position in the vertical direction.
Is formed, and a second cold head 35 having a relatively small mass is formed at the upper end. At the upper end of the first cold head 33, a radiation shield 37 opening upward is provided.
Is attached. Radiation shield 37
Is formed in a cylindrical shape having a diameter slightly smaller than that of the vacuum chamber 5, and holds a plurality of baffle rings 39 inside an opening extending to near the upper end of the vacuum chamber 5.

At the upper end of the second cold head 35, a cold panel holder 41 opened downward is attached. The cold panel holder 41 has a U-shaped cross section, and holds a plurality of cold panels 43 on its upper end surface and side surfaces. Cold panel 4
Activated carbon 45 is adhered to the upper surface of 3 except for the uppermost one.

On the other hand, the vacuum chamber 5 has a body 51 for accommodating the cold cylinder 17 and the radiation shield 37, a chamber flange 53 fastened to the gate valve 9, and a bottom plate 68 fastened to the body 15 of the refrigerator 3. It consists of A regeneration gas introduction pipe 57 connected to a regeneration gas supply source (not shown) is connected to and opened in the body 51, and a regeneration gas discharge pipe 59 connected to an exhaust treatment device (not shown) penetrates. The regeneration gas introduction pipe 57 opens into the radiation shield 37.

A sheath heater 60 as a heater removably mounted on the cold cylinder 17 is installed in the vacuum chamber 5. This sheath heater 60
As shown in FIG. 6A, a heater pipe 61, a heating coil 62, a heater flange 63, and a heater cover 64 as a heat transfer member are provided.

The heater pipe 61 is made of a long cylindrical stainless steel pipe. The heating coil 62 is provided inside the first heating unit 65 and the second heating unit 66 at a predetermined distance in the longitudinal direction of the heater pipe 61.
The heater pipe 61 is connected to a heater wire 67 (FIG. 5).
Is connected to a power supply device (not shown) through the power supply, and generates heat when energized.

The heater flange 63 is connected to the heater pipe 61.
, One end of the heater wire 67 connected to the heating coil 62 on the side from which the heater wire 67 is taken out (the lower end in FIG. 6A)
And are integrally fixed by welding or brazing. The heater flange 63 is made of stainless steel, and detachably fixes the heater pipe 61 to the bottom plate 68 of the vacuum chamber 5 as described later.

Here, the second heating section 6 of the heater pipe 61
A lid plate 69 shown in FIG. 6B is welded to the end on the 6th side (upper end in FIG. 6A), and a glass or ceramic sealing for sealing the heater electric wire 67 is attached to the end on the heater flange 63 side. The stopper 70 (FIG. 5) is provided, and the sheath heater 60 is configured in a sealed structure. Further, as shown in FIG. 6A, the heater pipe 61 is connected to the first heating section 65 from the second heating section 66.
The first heating portion 65 is formed in a linear shape.
From the heater flange 63 to the mounting portion at a right angle or more.

The heater cover 64 is formed in a straight pipe shape from a material having good heat conductivity such as copper. The heater cover 64 is inserted from the end of the heater pipe 61 on the side of the second heating section, and the first heating section 65 and the second heating section 66 are inserted.
Is fixed to the outer peripheral surface of the heater pipe 61 at a position corresponding to. As shown in FIGS. 6A and 6C, a slit 71 as a notch is formed in the heater cover 64 over the entire length in the longitudinal direction, and a molten wax is poured into the slit 71. The molten wax is supplied to the heater pipe 6
The heater cover 64 is securely fixed to the heater pipe 61 by wrapping around the outer peripheral surface of the heater cover 64 and the inner peripheral surface of the heater cover 64 without any gap. Reference numeral 50 in FIG.
The solidified brazing material is shown.

As shown in FIG. 1, the sheath heater 60 constructed as described above is connected to the bottom plate 68 of the vacuum chamber 5.
The first heating unit 65 is inserted into the first cold head 33 of the cold cylinder 17, and the second heating unit 66 is inserted into the second cold head of the cold cylinder 17 through the insertion hole 77 (FIG. 5) formed in the cold cylinder 17. The heater flange 63 is detachably attached to the head 35 to the bottom plate 68 of the vacuum chamber 5.

That is, the first heating unit 65 and the second heating unit 6
6 are mounted in a similar structure, and
Here, the mounting structure of the first heating unit 65 is shown as a representative. The first heating unit 65 of the sheath heater 60 is connected to the first cold head 33.
73 attached to the first cold head 3
3 and the first heating unit 65 as shown in FIGS.
Are formed respectively.
These engagement recesses 74 and 75 are set to dimensions such that the depth is substantially equal to the radius of the first heating section 65.
Then, a gasket 72 is wrapped around the outer periphery of the heater cover 64 in the first heating section 65, and the first heating section 65 around which the gasket 72 is wrapped is fitted into the engagement recess 74 of the clamp 73 and the engagement recess 75 of the first cold head. By engaging and fixing the clamp 73 to the first cold head 33 with the fixing screw 76, the sheath heater 60
Is detachably attached to the first cold head 33 of the cold cylinder 17.

As described above, the second heating section 66 of the sheath heater 60 is connected to the second cold head 3 of the cold cylinder 17.
5 is carried out in the same manner as in the case of the first heating unit 65 described above. Thereby, the first heating unit 65 and the second
The heater cover 64 of the heating section 66 has a heater cover outer side surface 64 </ b> A with a first cold head 33 and a second cold head 3 of the cold cylinder 17 via a gasket 72.
5 comes into contact.

Here, the gasket 72 is made of a soft thin film material such as indium foil, and when the first heating unit 65 and the second heating unit 66 of the sheath heater 60 are attached,
The outer surface of the heater cover 64, the engaging recess 74 of the clamp 73, the first cold head 33, the second cold head 3
The heat transfer areas of the heater cover 64, the clamp 73, and the first and second cold heads 33 and 35 are increased by filling the unevenness existing on the inner surface of the engagement recess 75 of the fifth embodiment.

As shown in FIG. 1, fixing screws 78 are screwed into the heater flange 63 at a plurality of positions in the circumferential direction, and the heater flange 63 is attached to the bottom plate 68 of the vacuum chamber 5. As shown in FIG. 5, a sealing material such as an O-ring 79 is interposed between the heater flange 63 and the bottom plate 68 so that the inside of the vacuum chamber 5 is kept airtight and the high vacuum pressure in the vacuum chamber 5 is reduced. Secured.

On the lower surface of the heater flange 63, a sealing case 80 as a sealing member including the sealing portion 70 is attached. The sealed case 80 has a substantially cylindrical shape and a case flange 81, and a sealing material such as an O-ring 82 is interposed between the case flange 81 and the heater flange 63. The case flange 81 is detachably fixed to the heater flange 63 by fixing screws 83 at a plurality of positions in the circumferential direction, and the sealed case 80 covers the sealing portion 70 of the heater flange 63 so as to cover the heater flange 63.
Attached to. Since the O-ring 82 functions as an airtight member, a portion where the heater electric wire 67 is taken out from the sheath heater 60 is connected to the sealing portion 70 and the sealing case 80.
This prevents the moisture and the like in the atmosphere from entering the sheath heater 60 through the surface of the heater wire 67.

Hereinafter, the operation of the present embodiment will be described.

In the sputtering process of the semiconductor wafer, the inside of the vacuum processing tank 7 is kept at a high vacuum pressure in order to prevent unnecessary gas molecules from adhering to the surface of the semiconductor wafer. First, a vacuum pressure of about 10 ^-2 Torr is obtained by roughly vacuuming the vacuum chamber 5 with a roughing pump. At this point, the gate valve 9
The communication between the vacuum chamber 5 and the vacuum processing tank 7 is shut off.

Next, the refrigerator 3 of the cryopump 1 is driven, and the high-pressure helium gas supplied from the compressor is repeatedly adiabatically expanded in the cold cylinder 17. Then, the cold storage material in the displacer 19 is gradually cooled,
The temperature of the cold cylinder 17 decreases. And the first
When the temperature of the cold head 33 becomes about 80K and the temperature of the second cold head 35 becomes about 15K, the gate valve 9 is opened to connect the vacuum chamber 5 and the vacuum processing tank 7. At this time, the vacuum processing tank 7 is roughly evacuated to a crossover pressure or lower by a roughing pump (not shown).

When the vacuum chamber 5 is communicated with the vacuum processing tank 7, gas molecules in the vacuum processing tank 7 are condensed or adsorbed in the radiation shield 37, and a high vacuum pressure is obtained. That is, gas molecules having a high condensation temperature, such as water, condense and solidify in the form of frost on the surfaces of the baffle ring 39 and the radiation shield 37, and gas molecules such as argon, oxygen, and nitrogen form frost on the surface of the cold panel 43. Condensed and solidified. Gas molecules such as helium, hydrogen, and neon are adsorbed on the activated carbon 45 adhered to the cold panel 43. Thereby, in the vacuum processing tank 7, 10 ^-9 Torr
A high vacuum pressure of about r can be obtained.

On the other hand, if the evacuation by the cryopump 1 is performed continuously, the baffle ring 39 and the cold panel 43
And the like are covered by the condensed gas molecules, the exhaust efficiency is reduced, and a high vacuum pressure cannot be obtained. Therefore, when the temperature of the second cold head 35 does not drop below a predetermined value or when a predetermined vacuum pressure cannot be obtained, the cryopump 1 is regenerated.

In the regeneration, after the communication between the vacuum chamber 5 and the vacuum processing tank 7 is cut off by the gate valve 9, the heating coil 62 in the sheath heater 60 is energized, and the first and second cold heads 33 and 35 are turned on. Heat.
Then, the gas molecules condensed on the baffle ring 39, the cold panel 43, and the like are vaporized, and the gas molecules are discharged from the regeneration gas discharge pipe 59 together with the regeneration gas introduced from the regeneration gas introduction pipe 57.

According to the above embodiment, the following effects are obtained.
To play.

Since the shape from the first heating section 65 to the second heating section 66 of the sheath heater 60 is formed in a linear shape, the sheath heating section 60 is bent twice at substantially right angles between the first heating section 65 and the second heating section 66. The manufacturing becomes easier as compared with the case where it is processed, and the first heating unit 65 and the second heating unit 6 of the sheath heater 60 are formed.
6 is the first cold head 33 of the cold cylinder 17,
The work of attaching or detaching each of the second cold heads 35 can be facilitated.

The sheath heater 60 includes a first heating unit 65,
In the second heating section 66, the outer side surface 64 </ b> A of the heater cover 64 having good thermal conductivity is brought into contact with the first cold head 33 and the second cold head 35 of the cold cylinder 17, respectively, thereby increasing the heat transfer area. Since the sheath heater 60 and the cold cylinder 17 are attached to the first cold head 33 and the second cold head 35, respectively.
Cold head 33 and second cold head 35
And the thermal resistance can be reduced. As a result, from the sheath heater 60 to the first cold head 3 of the cold cylinder 17
Since sufficient heat transfer to the third and second cold heads 35 can be ensured, and the sheath heater 60 does not need to be heated to a temperature higher than the allowable temperature limit, the reliability of the sheath heater 60 can be improved and its life can be extended. be able to.

The heater pipe 61 of the sheath heater 60
However, since the shape from the first heating unit 65 to the second heating unit 66 is a linear shape, the first heating unit 65 and the second heating unit 66
The heater cover 64 can be easily attached to the heater pipe 61 by inserting the heater cover 64 into the outer peripheral surface of the heater pipe 61 corresponding to the above.

Since the slit 71 is formed in the heater cover 64 of the sheath heater 60, the molten brazing material can be poured between the outer peripheral surface of the heater pipe 61 and the inner peripheral surface of the heater cover 64 through the slit 71. At this time, since the slit 71 is formed over the entire length in the longitudinal direction of the heater cover 64, the molten brazing material can be turned around by a surface tension over substantially the entire inner peripheral surface of the heater cover 64. 64 can be improved.

Since the heater electric wire 67 taken out from one end of the heater pipe 61 of the sheath heater 60 is double-sealed by the sealing portion 70 and the sealing case 80 at one end of the heater pipe 61, the moisture in the atmosphere is reduced. Can be reliably prevented from entering the inside of the heater pipe 61 through the surface of the heater wire 67, and as a result, insulation failure of the sheath heater 60 can be avoided.

As described above, the present invention has been described based on one embodiment, but the present invention is not limited to this.

For example, although the heater cover 64 is described as having a pipe shape, it may be formed in a block shape. Further, the heater cover 64 may be fixed to the heater pipe 61 by soldering or welding instead of brazing. Further, the heater cover 64 may be fixed to the heater pipe 61 with a substance having good thermal conductivity interposed between the heater cover 64 and the heater pipe 61.

The heater cover 64 has slits 7.
Instead of one, a plurality of through holes may be scattered in the longitudinal direction of the heater cover 64.

Further, the fixing screw 78 and the fixing screw 83 may be made common parts, and the heater flange 63 of the sheath heater 60 and the case flange 81 of the sealing case 80 may be fastened together to the bottom plate 68 of the vacuum chamber 5.

[0059]

As described above, according to the cryopump according to the first or third aspect of the present invention, the shape of the heater from the first heating portion to the second heating portion is formed in a linear shape. The manufacture, attachment and detachment of the heater can be facilitated. Further, according to the cryopump according to the second to fifth aspects of the present invention, the heat transfer member having good thermal conductivity is fixed to the outer peripheral surface of the heater pipe at the position corresponding to the first and second heating portions of the heater. Since the heater is attached to the cold cylinder with the outer surface of the heat transfer member in contact with the cold cylinder, sufficient heat transfer from the heater to the cold cylinder can be secured during the regeneration operation of the cryopump. High reliability and long life can be achieved.

[Brief description of the drawings]

FIG. 1 is a side sectional view showing one embodiment of a cryopump according to the present invention.

FIG. 2 is an enlarged side view showing a portion II of FIG. 1 in an enlarged manner.

FIG. 3 is a sectional view taken along line III-III in FIG. 2;

FIG. 4 is a sectional view taken along line IV-IV in FIG. 3;

FIG. 5 is an enlarged sectional view showing a portion V of FIG.

6A is a side view showing the sheath heater of FIG. 1, FIG. 6B is an enlarged sectional view of a VIB part of FIG. 6A,
FIG. 7C is a plan view showing the heater cover of FIG.

[Explanation of symbols]

 1 Cryopump 5 Vacuum Chamber 17 Cold Cylinder 33 First Cold Head 35 Second Cold Head 60 Sheath Heater (Heater) 61 Heater Pipe 62 Heating Coil 63 Heater Flange 64 Heater Cover (Heat Transfer Member) 64A Outer Side 65 First Heating Section 66 Second heating part 67 Heater wire 70 Sealing part 71 Slit (notch) 80 Sealed case

Claims (5)

[Claims] 1. A cryopump having a heater in which a cold cylinder is disposed in a vacuum chamber and a first heating unit and a second heating unit which are separated by a predetermined distance in a longitudinal direction are attached to the cold cylinder. A cryopump characterized in that a shape from the first heating section to the second heating section is formed in a linear shape. 2. A cryopump having a heater in which a cold cylinder is disposed in a vacuum chamber and a first heating unit and a second heating unit separated by a predetermined distance in a longitudinal direction are attached to the cold cylinder. A heating pipe disposed inside the heater pipe at a position corresponding to the first and second heating units, and a heater coil disposed at a position corresponding to the first and second heating units. A heat transfer member having good heat conductivity fixed to the outer peripheral surface of the pipe, and the heater is attached to the cold cylinder while the outer surface of the heat transfer member is in contact with the cold cylinder. Cryopump characterized by the following. 3. A cryopump having a heater in which a cold cylinder is provided in a vacuum chamber and a first heating unit and a second heating unit which are separated by a predetermined distance in a longitudinal direction are attached to the cold cylinder. Is a long cylindrical heater pipe,
And a heating coil disposed inside the heater pipe at a position corresponding to the second heating unit, and a good heat conductivity fixed to an outer peripheral surface of the heater pipe at a position corresponding to the first and second heating units. A heat transfer member;
A cryopump characterized in that a shape reaching a heating portion is formed in a linear shape, and the heater is attached to the cold cylinder in a state where an outer surface of the heat transfer member is in contact with the cold cylinder. 4. The cryopump according to claim 2, wherein a cutout is formed in the heat transfer member in a longitudinal direction thereof. 5. An end of a heater pipe of the heater,
A heater flange for attaching the heater to the vacuum chamber is formed, and a sealing portion for sealing an electric wire extending from the heat generating portion is provided. A sealing member is hermetically sealed to the heater flange so as to cover the sealing portion. The cryopump according to claim 2, wherein the cryopump is installed.