JPH11320410A - Sandblast device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To appropriately and relatively easily grasp the speed fluctuation and vibration of a nozzle by providing monitoring functions for measuring the speed fluctuation and the vibration of the nozzle. SOLUTION: A sandblast device 100 is provided with a monitoring function for measuring speed fluctuation of a nozzle and a monitoring function for measuring the vibration. For example, as for the monitoring function for the speed fluctuation, a fitting part 142 of a wire 141 tip of a stroke sensor 140 is attached to a nozzle 110, and a signal obtained from the stroke sensor 140 is processed by a processing system (signal processing part) to be expressed into a voltage waveform by an oscilloscope so that the speed fluctuation is detected. As for the vibration monitoring function, a piezoelectric acceleration sensor 150 is attached to the nozzle 10 to obtain the change in impedance and the obtained signal is directly inputted in an FFT analyzer 155 so that the vibration is directly detected.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sandblasting apparatus for performing a sandblasting process in which abrasive sand powder such as glass beads is sprayed by using high-pressure air, and more particularly to monitoring for detecting unevenness in speed and vibration of a nozzle portion. The present invention relates to a sandblasting device provided with a function.

[0002]

2. Description of the Related Art In recent years, plasma display panels (hereinafter, also referred to as PDPs) have been used in various display devices because of their small depth, light weight, clear display, and wide viewing angle compared to liquid crystal panels. It is being used.
Generally, a plasma display panel (PDP) has two
A pair of regularly arranged electrodes are provided on a pair of opposed glass substrates, and a gas mainly containing neon, xenon, or the like is sealed between the pair of electrodes. Then, a voltage is applied between these electrodes, and a discharge is generated in minute cells around the electrodes, so that each cell emits light and display is performed. In particular, in order to display information, regularly arranged cells are selectively discharged to emit light.

Here, the structure of the PDP is shown in FIG.
An example of the type PDP will be described. FIG. 6 is a perspective view of the PDP structure, but shows the front plate (glass substrate 610) and the rear plate (glass substrate 620) apart from the actual case for easy understanding. As shown in FIG. 6, two glass substrates 610 and 620 are arranged in parallel and opposed to each other, and both are barriers (cell barriers) provided in parallel on a glass substrate 620 serving as a back plate. 630)
Are held at regular intervals. On the back side of the glass substrate 610 serving as a front plate, composite electrodes composed of a transparent electrode 640 serving as a sustain electrode and a metal electrode 650 serving as a bus electrode are formed in parallel with each other.
A dielectric layer 660 is formed, and a protective layer (MgO layer) 670 is further formed thereon. In addition, on the front side of the glass substrate 620 serving as a back plate, an address electrode 680 is positioned between the barriers 630 so as to be orthogonal to the composite electrode.
Are formed in parallel with each other, and a fluorescent surface 690 is provided so as to cover the wall surface of the barrier 630 and the cell bottom surface. The barrier 630 is for defining a discharge space, and each partitioned discharge space is called a cell or a unit light emitting region.
This AC type PDP is of a surface discharge type, and has a structure in which an AC voltage is applied between composite electrodes on the front panel to cause discharge.
In this case, since the alternating current is applied, the direction of the electric field changes according to the frequency. Then, the phosphor 690 emits light by the ultraviolet light generated by the discharge, and the light transmitted through the front plate can be visually recognized by an observer. In addition, DC type PD
In the case of P, the electrode is different from the AC type in that the electrode has a structure not coated with the dielectric layer, but the discharge effect is the same. 6 has a structure in which a base layer 667 is provided on one surface of a glass substrate 620 and a dielectric layer 665 is provided thereon.
5 is not necessarily required.

[0004] Conventionally, as a method of forming a barrier of a back plate used in the above-mentioned PDP, a barrier forming material is repeatedly printed on a glass substrate in a barrier pattern shape by screen printing a plurality of times, and a required pattern is formed. The first method of stacking and drying at a height (called a screen printing method), or applying a barrier-forming material over the entire surface of a glass substrate and then patterning a resist having sandblast resistance on the applied surface into a predetermined shape A second method (called a sandblast method) of forming a barrier-forming material into a predetermined shape by sandblasting using the resist as a mask has been employed. However, in forming the barrier of the back plate used in the PDP by the first method, it is necessary to screen-print the paste several times to several tens times to obtain a predetermined thickness as the barrier, which is troublesome. In addition, it is necessary to control the printing accuracy, and it is difficult to obtain satisfactory printing quality. At present, the second method is mainly used.

Here, the second method (sand blast method)
FIG. 5 shows an example of the barrier formation by the sand blast method, and the barrier formation method by the sand blast method will be further described. FIG.
As shown in (a), after the electrode wiring 530 is formed on one surface of the glass substrate 510 via the undercoat layer 520, the electrode wiring 530 is formed on the surface of the glass substrate 510 so as to cover the surface of the glass substrate 510.
Further, a dielectric layer 550 is formed. Next, the dielectric layer 5
After a processing material 560 made of a low-melting glass paste for forming a barrier is applied to the entire surface on the top 50 (FIG. 5B), a photosensitive resist 540 resistant to sandblasting is applied on the processing material 560. Then, only a predetermined area of the resist 540 is exposed using a photomask having a pattern of a predetermined shape corresponding to the shape of a barrier to be formed, and is developed to a predetermined level. Pattern into shape. (FIG. 5D) Then, the resist 540 is used as a mask when the processing material 560 is sandblasted, and sandblasting is performed, and only the processing material 560 exposed from the mask is cut into a predetermined shape. I do. (FIG. 5E) Thereafter, the resist 540 is removed, and a baking process is performed to form a barrier 560A on the dielectric layer 550. (FIG. 5 (f))

In forming a barrier on a glass substrate serving as a back plate used in a PDP by the second method, a barrier-forming material coated on the glass substrate is covered with a sandblast-resistant mask to form a plurality of barriers. Polishing sand such as glass beads is blown from the nozzle with high-pressure air, and the portion exposed from the mask is selectively cut to form a barrier.To obtain a desired barrier, the moving speed of the nozzle and the glass Strict control of processing conditions such as the moving speed of the substrate (back plate) and the jetting conditions of the nozzles is required. And, while ever higher quality is required, it has been found that unevenness in the speed and vibration of the nozzle greatly affects the quality of the barrier. The movement of the nozzle is usually performed by directly or indirectly fixing and transporting a shaft supporting the nozzle to a transport plate moving along a predetermined slideway. In this case, the cause of the nozzle speed unevenness or vibration is mainly mechanical deterioration of the nozzle transfer mechanism itself, particularly wear of the slide portion of the slide way,
Wear of a contact portion (for example, a bearing) of the transport plate that moves the slideway with the slideway may be mentioned. However, there has been no problem because there is no method for relatively easily grasping the speed unevenness or vibration of the nozzle.

[0007]

As described above, the PDP
When the barrier of the back plate used in the method is formed by the sand blast method, the unevenness in the speed and the vibration of the nozzles are problematic in terms of quality, and the measures have been required. Under such circumstances, the present invention is to directly or indirectly fix and transport the shaft supporting the nozzle to the transport plate moving along the predetermined slideway, and to move the nozzle at a desired speed. In addition, a sandblasting device that blows abrasive sand from a nozzle with high-pressure air through a mask to selectively cut off and remove surface materials on a processing substrate. It seeks to provide a possible way.

[0008]

According to the sand blasting apparatus of the present invention, a nozzle supporting a nozzle is directly or indirectly fixed to a transfer plate which moves along a predetermined slideway, and is conveyed, so that a desired nozzle is provided. A sandblasting device that moves at a speed and blows abrasive sand from a nozzle with high-pressure air through a mask to selectively cut and remove surface materials on a processing substrate, and measures the speed unevenness or vibration of the nozzle. It is characterized by having a monitoring function for monitoring. And in the above, the monitoring function of the speed unevenness is to attach a stroke sensor to the nozzle unit, process a signal obtained from the stroke sensor, and detect the speed unevenness, and further, the signal processing includes: Amplify the signal obtained from the stroke sensor, and further perform frequency-voltage conversion, and detect uneven speed by observing the processing result of the signal with an oscilloscope. is there.

Further, in the above, the vibration monitoring function is characterized in that an acceleration sensor is attached to a nozzle portion, and an obtained signal is directly input to an FFT analyzer to detect vibration of a predetermined frequency. It is assumed that.

[0010]

According to the sand blasting apparatus of the present invention, a shaft supporting a nozzle is directly or indirectly fixed to a transport plate moving along a predetermined slideway and transported by such a configuration. A sandblasting device that moves the nozzle at a desired speed and blows polishing sand from the nozzle with high-pressure air through a mask to selectively cut and remove surface materials on the processing substrate. It is possible to provide a method that can be grasped relatively easily as appropriate. Specifically, the shaft supporting the nozzle is directly or indirectly fixed and transported to a transport plate that moves along a predetermined slideway, the nozzle is moved at a desired speed, and via a mask. A sandblasting device that blows abrasive sand from a nozzle with high-pressure air to selectively cut and remove surface materials on a processing substrate, and has a monitoring function for measuring speed unevenness or vibration of the nozzle. Has achieved this. More specifically, a monitoring function for monitoring uneven speed is
A stroke sensor is attached to the nozzle portion, and a signal obtained from the stroke sensor is processed to detect speed unevenness. The signal processing amplifies a signal obtained from the stroke sensor, and further includes a frequency- Since the voltage conversion is performed and the speed unevenness is detected by observing the processing result of the signal with an oscilloscope, the speed unevenness can be relatively easily measured at any time. In addition, the monitoring function for monitoring the vibration is such that an acceleration sensor is attached to the nozzle portion, the obtained signal is directly input to the FFT analyzer, and the vibration of a predetermined frequency is detected. Vibration can be measured at any time.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of a sand blasting apparatus according to the present invention will be described with reference to the drawings. FIG.
FIG. 1A is a schematic view of a characteristic portion of a sand blasting device according to a first example of the embodiment, FIG. 1B is a diagram viewed from the direction of an alternate long and short dash line in FIG. 1A, and FIG. FIG. 3A is a schematic configuration diagram of a measurement system for speed unevenness, FIG. 3B is a diagram showing the configuration of an FFT analyzer, and FIG. FIG. 4 is a diagram of a detection waveform of an oscilloscope for explaining detection. Here, only one set of the nozzle and the shaft is shown, but this is for easy understanding of the description, and actually has a plurality of sets. FIG. 2A includes a partially developed view. 1 to 4, reference numeral 100 denotes a sand blasting apparatus, 105 denotes a processing chamber, 110 denotes a nozzle, 111 denotes a shaft, 113 denotes a shaft fixing part, 115 denotes a shaft conveying part, 120 denotes a conveying plate, 125 denotes a precision polishing bearing, and 127 denotes a precision polishing bearing. Screw, 128 is cap seal, 129
Is a fixed journal, 130 is a slideway, 140 is a stroke sensor, 141 is a wire, 142 is a mounting part, 145 is a processing system (signal processing part), 147 is an oscilloscope, 150 is an acceleration sensor (pickup), 15
5 is an FFT analyzer, 170 is a transport roll, 180 is a glass substrate (back plate), 190 is a processing chamber wall, 191 is a ceiling, 195 is a slit, 311 is a pulse amplifier, 31
2 is a frequency-voltage converter, 313 is a graphic display, 321 is an amplifier, 322 is a low-pass filter, 323 is an A / D converter, 324 is a waveform memory, 32
5 is an FFT operation function unit, 326 is a display data creation unit, 3
27 is a graphic display.

In this embodiment, a shaft supporting a nozzle is directly or indirectly fixed and conveyed to a conveyance plate moving along a predetermined slideway, the nozzle is moved at a desired speed, and the mask is moved. A sandblasting device that blows abrasive sand from a nozzle by high-pressure air through the nozzle to selectively cut and remove a surface material on a processing substrate, and a monitoring function for measuring the speed unevenness of the nozzle,
It has both a monitoring function for measuring vibration. As shown in FIG. 1B, the transport plate 120 that slides along the slide way 130.
The shaft conveyance section 115 is fixed to the shaft conveyance section 115, and the shaft 111 is fixed to the shaft conveyance section 115. The nozzle 110 is supported by a shaft 111,
As the transport plate 120 moves along the slide way 130, the shaft transport section 115, the shaft 111, and the nozzle 110 move integrally with the transport way.

The speed unevenness monitoring function of the present embodiment is performed by attaching a mounting portion 142 at the tip of a wire 141 of a stroke sensor 140 to the nozzle 110,
The signal obtained from the signal processing unit 40 is processed by a processing system (signal processing unit) 145 shown in FIG.
Are used to detect speed unevenness. Here, the signal processing will be briefly described based on FIG. The signal obtained from the stroke sensor 140 is first amplified by the pulse amplifier 311, and is further converted into a voltage by the frequency-voltage converter 312. This voltage is displayed on a graphic display 313 such as an oscilloscope on the time axis to detect speed unevenness. The stroke sensor 140 generates a predetermined number of pulses per rotation. When the nozzle is moving at a predetermined constant speed, the stroke sensor 140 generates a predetermined number of pulses per unit time. The number of pulses in a time increases, and the number of pulses in a unit time decreases as the number of pulses decreases. Since the change in speed is captured as a change in the number of pulses in this manner, by performing frequency-voltage conversion, a change in frequency corresponding to the change in speed can be captured as a change in voltage. FIG. 4A shows the waveform of the oscilloscope 147 from the stroke sensor 140 before the slide way 130 and the transfer plate 120 are replaced, and FIG. 4B shows the waveform of the oscilloscope 147 before and after the replacement of the slide way 130 and the transfer plate 120. . During the movement of the conveyance of the nozzle 110, speed unevenness from a predetermined speed is detected as a wave within a dotted circle. After replacement, the amplitude of the wave becomes
It turns out that it is smaller than before the replacement. As described above, the magnitude of the speed unevenness can be known from the magnitude of the amplitude of the wave, the state of the apparatus can be grasped, and the apparatus can be modified if necessary. In addition, in FIG. 4, T1 is a nozzle at 20 m / min.
It is a running time for one stroke when the vehicle is run at the speed described above, which is approximately 3.1 sec.

The vibration monitoring function of this embodiment is based on the nozzle 1
10, an acceleration sensor 150 of a piezoelectric type is attached, a change in impedance is obtained, and the obtained signal is directly subjected to FFT.
It is input to the analyzer 155 to directly detect vibration. Many FFT analyzers have an analysis band of 0 to 10 KHz, but some have an analysis band of DC to 10 MHz. In addition, FFT is fast fourie.
Abbreviation of "transformation", which means a method of performing a fast Fourier transform on a waveform in a waveform memory. In an FFT analyzer, a transient waveform can be stored and held, and the frequency spectrum of the waveform can be measured. It is. FFT analyzers are generally
The one used in the field of vibration and sound and used in this example has a configuration as shown in FIG. 3 (b), and has a low-pass filter, F
This is a configuration to which an FT calculation function is added. The acceleration sensor (pickup) used in this example is of a piezoelectric type, but is not limited to this.

[0015]

According to the present invention, as described above, the shaft supporting the nozzle is directly or indirectly fixed to the transport plate moving along the predetermined slideway and transported, and the nozzle is moved at a desired speed. A sandblasting device that moves and sprays abrasive sand from a nozzle with high-pressure air through a mask to selectively cut and remove surface materials on a processing substrate. It is possible to provide a device that can be easily grasped. PDP
In the case where the present invention is applied to a sandblasting device when forming a barrier of a back plate used in a sandblasting method, it is particularly effective in production.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing an example of an embodiment.

FIG. 2 is a perspective view showing a slideway and a transport plate.

FIG. 3A is a diagram for explaining a schematic configuration of a measurement system for speed unevenness, and FIG. 3B is a schematic configuration diagram of an FFT analyzer.

FIG. 4 is a diagram of a detection waveform from an output of a stroke sensor.

FIG. 5 is a diagram for explaining formation of a barrier by sandblasting.

FIG. 6 is a diagram illustrating a PDP substrate.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 100 Sand blast apparatus 105 Processing chamber 110 Nozzle 111 Shaft 113 Shaft fixing part 115 Shaft conveying part 120 Conveying plate 125 Precision polishing bearing 127 Screw 128 Cap seal 129 Fixed journal 130 Slide way 140 Stroke sensor 141 Wire 142 Mounting part 145 Processing system (signal processing) Part) 147 oscilloscope 150 acceleration sensor 155 FFT analyzer 170 transport roll 180 glass substrate (back plate) 190 sandblast processing chamber wall 191 ceiling 195 slit 311 pulse amplifier 312 frequency-voltage converter 313 graphic display 321 amplifier 322 low-pass filter 323 A / D converter 234 Waveform memory 325 FFT operation function unit 326 Display data Creating section 327 graphic display

Claims (4)

[Claims] 1. A nozzle supporting a nozzle is moved at a desired speed by directly or indirectly fixing and transporting the shaft supporting a nozzle to a transport plate moving along a predetermined slideway, and via a mask. A sandblasting device that blows abrasive sand from a nozzle with high-pressure air to selectively cut and remove surface materials on a processing substrate, and has a monitoring function for measuring unevenness or vibration of the nozzle. And sandblasting equipment. 2. The method according to claim 1, wherein the speed unevenness monitoring function includes a step of attaching a stroke sensor to the nozzle portion.
A sandblasting apparatus for processing a signal obtained from the stroke sensor to detect speed unevenness. 3. The signal processing according to claim 2, wherein the signal obtained from the stroke sensor is amplified, and
A sandblast apparatus for performing voltage conversion and detecting speed unevenness by observing a processing result of the signal with an oscilloscope. 4. The vibration monitoring function according to claim 1, wherein an acceleration sensor is attached to the nozzle portion, and an obtained signal is directly input to an FFT analyzer to detect vibration at a predetermined frequency. Characteristic sandblasting equipment.