JPH11318090A - Oscillatory driver, its manufacture, and apparatus equipped with the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an oscillatory driver using a hardening film making use of the property of an electroless plated film, for the contact face of a contactor, at low cost and with good mass-productivity. SOLUTION: In an oscillatory driver which drives an oscillator 2 for exciting vibration and a contactor 7 to contact with this oscillator relatively through friction, one sliding face between the oscillator 2 and the contactor 7 is processed for leveling, and then electroless plating is applied to make a hardening film, and the other sliding face is made of a composite resin layer 6 containing the reinforcing material in resin or a resin composition.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration-type driving device, and more particularly, to a vibration-type driving device for forming a sliding contact surface between a vibrating body and a contact body which are members of the vibration-type driving device.
The present invention relates to a method of manufacturing the same and a device including the same.

[0002]

2. Description of the Related Art A vibration-type driving device called a vibration wave motor or the like uses the friction between a vibrating body and a contact body that comes into pressure contact with the vibrating body to contact vibration energy of high-frequency vibration of the vibrating body. It is a power source of the type that converts it into continuous mechanical kinetic energy of the body (moving body). For this reason, it is necessary that both sliding contact surfaces are made of a material having high wear resistance.

In the conventional vibration type driving device, the sliding surface of the vibrating body is made of an electroless nickel film in which a fluororesin (for example, PTFE) having an average particle diameter of about 1 μm is uniformly dispersed in a volume ratio of 5 to 25%. Alternatively, a ternary alloy electroless nickel film (e.g., Ni-P-B) is formed to a thickness of about 20 to 30 [mu] m, and then subjected to heat hardening treatment at 400 [deg.] C. or less to make a sliding contact surface of a hardened hard film. Was getting. The sliding surface of the high hardness cured film is further wrapped for flatness with an abrasive using fine diamond particles having a particle diameter of 3 μm or less, for example, to have a flatness of 3 μm or less and a center line average roughness. The surface was finished to have a surface Ra (μm) of 0.03 or less.

On the sliding surface of the moving body, a base resin such as a heat-resistant thermoplastic resin or a liquid-crystalline wholly aromatic polyester resin, and carbon beads as a reinforcing material in a weight ratio of 10 to 10 are used.
A composite resin layer filled with 30% and, if necessary, with a fluororesin (PTFE) as a lubricant at a weight ratio of about 5 to 10% was provided.

[0005] As described above, when the cured film is formed on the sliding contact surface of the vibrating body and the composite resin layer is formed on the sliding contact surface of the moving body, the friction coefficient between both sliding contact surfaces is stable, and This is because a large driving output can be expected, and the sliding surface of the vibrating body is hardly worn every time, and the wear of the composite resin layer on the sliding surface of the moving body can be minimized.

A heat-resistant thermoplastic resin is used as the base resin of the composite resin layer. However, this resin has relatively small temperature dependence of the physical properties of the material. The phenomenon of torque down due to softening does not occur,
This is because driving performance and accuracy can be stabilized.

Further, the fluororesin (PTFE) as a lubricant is filled in the composite resin layer because the fluororesin has properties such as lubricity, non-adhesion and water repellency.
By forming a fluorocarbon resin transfer film on the sliding contact surface (on the cured film) of the vibrator, lubrication between both sliding contact surfaces is improved,
This is for stabilizing the coefficient of friction and reducing the wear of the composite resin layer.

[0008]

However, in the above-described conventional vibration-type driving device, the sliding surface of the vibrating body has a predetermined flatness (3 μm or less) and a surface roughness Ra (0.03 μm).
(μm or less), it is necessary to thicken the cured film to about 25 μm because the flatness of the sliding contact surface before plating is poor, and the flatness of the sliding contact surface after plating is poor. Factors of cost increase, such as processing time, such as a large thickness of the cured film for removal, have been a problem.

Further, since a predetermined flatness (3 μm or less) or surface roughness (0.03 μm or less) is formed on the sliding surface of the vibrating body having a high hardness, lapping with an abrasive is premised. In addition to the long processing time, there was also a problem that mass productivity was lacking.

The present invention has been made to solve such a problem of the prior art, and uses a cured film utilizing the characteristics of an electroless plating film on a sliding surface of a vibrating body or a contact body. An object of the present invention is to provide a vibration type driving device at low cost and with good mass productivity. It is another object of the present invention to provide a device provided with the vibration type driving device.

[0011]

That is, a first aspect of the present invention is directed to a vibration type driving device which relatively frictionally drives a vibrating body whose vibration is excited and a contact body which comes into contact with the vibrating body. , One of the vibrating body and the contact body is flattened to form a cured film by performing electroless plating after processing to form a cured film, and the other sliding contact surface is made of a resin or a resin composition containing a reinforcing material. And a vibration type driving device formed of a composite resin layer.

It is preferable that the flatness of the sliding contact surface of the vibrating body or the contacting body is ground by a grinding process or a rotary flat plate containing an abrasive. It is preferable that the sliding surfaces of the vibrating body and the moving body are formed on a flat surface having a flatness of 5 μm or less and a center line average roughness Ra (μm) of 0.4 or less. It is preferable that the cured film of the electroless plating is electroless nickel plating in which hard fine particles or fluorine resin (for example, PTFE) are folded together.

Preferably, the cured film of the electroless plating is a ternary alloy electroless plating. The cured film of the electroless plating is a fluororesin (for example,
It is preferably an electroless nickel film encapsulating PTFE). The cured film of the electroless plating is 100 to 400 ° C.
Is preferably heat-cured.

It is preferable that the base material of the vibrator is martensitic stainless steel. It is preferable that a base material of the vibrating body is an iron-based (including stainless) sintered alloy.

The vibrating body is preferably subjected to a stress relief heat treatment before or after the flatness machining.
Preferably, a base material of the contact body is an aluminum alloy.
Preferably, the aluminum alloy of the contact body is a heat treatment type alloy.

According to a second aspect of the present invention, there is provided a vibration type driving apparatus for relatively driving a vibrating body for exciting vibration and a contacting body having a pressurizing portion in contact with the vibrating body. One of the sliding contact surfaces of the body and the contact body is processed into a flat surface or a tapered shape, and after processing, an electroless plating is performed to form a cured film, and the other sliding contact surface is formed of a tapered or flat resin or The resin composition is preferably formed of a composite resin layer containing a reinforcing material.

Preferably, the tapered shape of the sliding contact surface of the vibrating body or the contacting body is formed by applying a processing pressure to a pressing portion and performing a grinding process on a rotating flat plate containing an abrasive.
It is preferable to form the tapered sliding contact surface of the vibrating body or the contact body with a center line roughness Ra (μm) of 0.4 or less.

According to a third aspect of the present invention, there is provided a method of manufacturing a vibration-type drive device for relatively driving a vibrating body, which is excited by vibration, and a contact body that comes into contact with the vibrating body, A step of forming a cured film by applying electroless plating after processing one of the sliding bodies of the contact body to obtain flatness, a composite in which a reinforcing material is contained in a resin or a resin composition on the other sliding body. A method of manufacturing a vibration-type driving device, comprising: a step of forming a resin layer; and a step of bringing the vibrating body and the contact body into contact with each other on a sliding contact surface. It is preferable that the flatness of the sliding contact surface of the vibrating body or the contact body is ground by a grinding process or a rotary flat plate containing an abrasive.

According to a fourth aspect of the present invention, there is provided a method of manufacturing a vibration-type driving device for relatively driving a vibrating body which is excited by vibration and a contacting body having a pressurizing portion which comes into contact with the vibrating body. Forming one of the vibrating body and the contact body into a flat or tapered shape, and then applying an electroless plating to form a hardened film; and forming the other sliding contact surface into a tapered or flat shape. Forming a composite resin layer containing a reinforcing material in the resin or resin composition of the above, further comprising a step of bringing the vibrating body and the contact body into contact with each other by pressing the sliding body with a sliding surface. It is a manufacturing method.

It is preferable that one of the vibrating body and the contact body is brought into contact with a tapered shape and the other is pressed by a flat sliding contact surface. It is preferable that the tapered shape of the sliding contact surface of the vibrating body or the contact body is formed by applying a processing pressure to a pressing portion and grinding with a rotary flat plate containing an abrasive.

According to a fifth aspect of the present invention, there is provided a vibration wave motor comprising the above vibration wave driving device. Further, the present invention is a device provided with the above-mentioned vibration wave driving device or vibration wave motor as a driving source.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail.
In order to achieve the above object, in the first embodiment of the present invention, in a vibration type driving device that relatively frictionally drives a vibration body whose vibration is excited and a contact body that comes into contact with the vibration body,
A composite in which one of the vibrating body and the contact body is flattened to form a cured film by performing electroless plating after processing, and the other sliding contact surface is made of a resin or a resin composition containing a hardening material. It is formed of a resin layer. At that time, the flatness of the vibrating body or the contact body is determined by polishing or grinding with a rotating flat plate containing an abrasive, and the flatness of the sliding surface of the vibrating body or the contact body is 5 μm or less. It is formed on a plane having a center line average roughness Ra (μm) of 0.4 or less.

The cured film of the electroless plating is formed by co-folding hard fine particles or fluororesin (PTFE), an electroless nickel plating film, a ternary alloy electroless plating film, and a fluororesin (PTFE) on a plating film having a recess. Are electroless nickel plated films, and these electroless plated films are cured films that have been subjected to heat curing at 100 to 400 ° C.

The base material of the vibrating body is a martensitic stainless steel or an iron-based (including stainless steel) sintered alloy, and is subjected to a stress relief heat treatment before or after machining. The base material of the contact body is formed of an aluminum alloy, and the heat treatment type alloy is used as the aluminum alloy.

According to a second embodiment of the present invention, there is provided a vibration-type driving device which relatively frictionally drives a vibrating body in which a vibrating body is excited and a contacting body having a pressurizing portion in contact with the vibrating body. One of the vibrating body and the contact body is processed into a flat or tapered shape, and after the processing, electroless plating is performed to form a cured film, and the other sliding contact surface is formed into a tapered or flat resin. Alternatively, a composite resin layer containing a hardening material in a resin composition is provided. At that time, the tapered shape of the sliding contact surface of the vibrating body or the contacting body is formed by applying a processing pressure to the pressurizing portion and performing grinding by a rotating flat plate containing an abrasive. The center line average roughness Ra is the tapered sliding surface.
(Μm) is 0.4 or less.

The working process will be described using a specific example in which SUS420J2 which is a martensitic stainless steel is used as the base material of the vibrating body.
Heating is performed for a period of time, followed by slow cooling to perform a stress relief heat treatment (annealing). Next, a plane having a predetermined flatness (5 μm or less) and a center line average roughness Ra (0.4 μm or less) is formed by measuring the flatness of the sliding contact surface of the vibrating body.

When the accuracy of the sliding surface of the vibrating body is extremely severe, polishing using diamond particles of about 3 μm is performed to obtain a flat surface having a flatness of about 2 μm and a center line average roughness Ra of about 0.03 μm. Is obtained.

When it is desired to form the sliding contact surface of the vibrating body in a more mass-produced manner, the sliding contact surface of the vibrating body is placed on, for example, a rotating platen containing an abrasive, and an appropriate load is applied as necessary. Then, the flatness is ground and the flatness is about 4 μm and the center line average roughness Ra is about 0.3 μm.

Next, the vibrating body that has been finished with the flatness processing is subjected to electroless plating. Electroless plating forms a film with a uniform thickness on all plating surfaces. In particular, nickel-based plating is the most common and well-established technology, and is a reliable plating film.

The film thickness of the electroless plating is the conventional film thickness of 20 to 3
The thickness may be as thin as 5 to 10 μm with respect to 0 μm. As the types of electroless plating, there are well-known eutectoid types. These include hard composite plating that co-folds hard fine particles such as silicon carbide (SiC) and fluororesin having a particle size of about 1 μm. There is a self-lubricating plating for eutectoid (PTFE).
The self-lubricating electroless nickel plating, in which the fluororesin is eutectoid at a volume ratio of 5 to 15%, has a Vickers hardness (Hv) of 1000 to 60 when heat-cured at 100 to 400 ° C.
A cured film of about 0 is obtained.

The next effective electroless plating is ternary alloy electroless plating. Nickel-phosphorus-boron electroless nickel plating (Ni-P-B) is performed at 300 ° C. and 2 ° C.
A cured film having a high hardness of Vickers hardness (Hv) of 1000 and 900, respectively, can be obtained by heat curing at 00 ° C.

For the electroless plating of a ternary alloy, the above Ni-
In addition to P-B, Ni- such as Ni-P-W and N-P-Co
Known are Ni-B based alloy films such as P-based, Ni-B-W and Ni-B-Co, and electroless cobalt-plated alloy films such as Co-P-W and Co-B-W. The electroless plating of these ternary alloys is 100 to 400
Heat cured at ℃ to use as a hard cured film.

As a special electroless plating, there is a self-lubricating composite cured film in which a fluorine resin (PTFE) is sealed in a plating film having a recess. This plating film has a porous surface property. For example, PTFE is heated to a temperature higher than the melting point, for example, 3 μm in a dotted part having a diameter of 60 μm and a depth of about 6 μm.
It is a hard electroless plating film fused and sealed at 60 ° C.

Next, a description will be given of a processing step of an aluminum alloy contact body.
1-Mg alloys (specifically, A5056-H34) and heat-treated alloys of 2000, 6000, and 7000 aluminum alloys are used, but the contact body is subjected to electroless plating and then heat hardening. Considering the deformation of
A6061-T4 material or the like, which is a heat treatment type alloy solution-treated at 515 to 550 ° C, is preferably used.

After the contact body is turned, the sliding surface is polished with diamond particles to a flatness of about 2 μm and a center line average roughness Ra of about 0.03 μm.

When it is desired to form the sliding contact surface in a more mass-produced manner, the sliding contact surface of the contact body is placed on a rotary flat plate containing an abrasive and finished by grinding. At that time, an appropriate load is applied just above the sliding contact surface to shorten the processing time, and the flatness is ground. The flatness is about 4 μm, and the center line average roughness Ra is about 0.3 μm. A plane is obtained.

When an appropriate load is applied to the pressurized portion of the contact body and grinding is performed, the center line average roughness Ra is 0.3 μm.
A sliding contact surface having a tapered shape of a degree is obtained.

Next, the contact body that has been finished with the flatness processing is subjected to electroless plating. As the electroless plating, for example, ternary alloy electroless nickel plating (Ni-P-B) is selected, a plating film having a thickness of 20 to 30 μm is formed on the sliding contact surface of the contact body, and heat-cured at 200 ° C. Thus, a cured film having a Vickers hardness (Hv) of about 850 is formed. The reason why the thickness of the plating film is made as large as 20 to 30 μm is that the base material of the contact body is an aluminum alloy, which is a relatively soft material and is easily deformed.

In the present invention, the other sliding contact surface of the vibrating body or the moving body is formed of a resin or a composite resin layer containing a resin composition containing a hardening material.

The composite resin layer has a glass transition point of 14
The base resin is polyether nitrile (Idemitsu PEN) which is a crystalline thermoplastic resin at 5 ° C., and PAN-based carbon fiber (CF) is used as a reinforcing material in a weight ratio of 20%, and a fluorine resin as a lubricant is used. (PTFE) and graphite are formed of a filled composite resin at a weight ratio of 10% and 5%, respectively.

A method of forming a composite resin layer on a vibrating body or a contact body is, for example, by shaving a ring-shaped washer from an injection-molded product of a composite resin and then fixing the ring-shaped washer to the vibrating body or a contact body. After the formation of the resin layer, the composite resin layer of the vibrating body or the contact body is finished to a predetermined shape and size by cutting, and finally a sliding contact surface is formed by the above-described processing method.

The method of manufacturing a vibration type driving device according to the present invention includes a step of forming a hardened film by subjecting one of the vibrating body and the contact body to a sliding contact surface to flatness, and then performing electroless plating. The step of forming a composite resin layer containing a resin or a resin composition containing a reinforcing material on the other sliding contact surface and the step of bringing the vibrating body and the contact body into contact with each other on the sliding contact surface are performed.

In the method of manufacturing a vibration type driving device according to the present invention, one of the vibrating body and the contacting body may be formed into a flat or tapered sliding contact surface and then subjected to electroless plating to form a cured film. Forming a composite resin layer containing a reinforcing material in a resin or resin composition having a tapered or flat surface on the other sliding contact surface, and pressing the vibrating body and the contact body with the sliding contact surface. The contact is performed by the step of contacting with

The vibration wave driving device of the present invention can be used for, for example, a vibration wave motor, a paper feeder, a linear motor and the like. Further, the vibration wave driving device of the present invention can be used for various devices as a driving source. Specific examples of the equipment include optical equipment such as a camera, office equipment such as a printer and a copying machine, and automobile-related equipment such as a power window and an active suspension.

[0045]

EXAMPLES The present invention will be specifically described below with reference to examples. FIG. 1 is a cross-sectional view showing the overall configuration of a vibration wave motor (vibration type driving device) according to a first embodiment of the present invention. FIG. FIG. 2 shows a partially enlarged sectional view of the body.

In these figures, reference numeral 1 denotes a thin ring-shaped piezoelectric element. Reference numeral 2 denotes a vibrating body made of an elastic material, and four protrusions (comb teeth) per [lambda] / 2 are formed on the sliding surface side of the vibrating body 2 at equal intervals over the entire circumference. A hardened film described later is formed on the surface (sliding contact surface) of each comb tooth. In addition, the entire surface of the electrode surface of the piezoelectric element 1 is fixed to the surface of the vibrating body 2 opposite to the sliding contact surface, and both form a stator.

Reference numeral 3 denotes a housing of the vibration wave motor, and a vibrating body 2 is fixed to the housing 3 by screws 4 concentrically. The outer ring of the first ball bearing 11 is fixed to the center of the housing 3. Reference numeral 10 denotes a rotating shaft, and an intermediate member 15 is fixed to an axially intermediate portion of the rotating shaft 10 by, for example, shrink fitting. One end of the rotating shaft 10 is axially slidably supported by the inner ring of the first ball bearing 11, and the other end is axially slidably supported by the inner ring of the second ball bearing 12. The second ball bearing 1
The outer ring 2 is fixed to a central axis of a housing cover 8 fixed to the housing 3 with screws 9.

On the outer peripheral portion of the intermediate member 15, an annular contact body 7 is provided so as to fit concentrically. This contact body 7
Is composed of an annular support 5 made of an aluminum alloy or the like, and a composite resin layer 6 concentrically fixed to the surface of the support 5 with an adhesive. An elastic sheet material 17 made of rubber is interposed between the back surface of the support 5 and the flange portion of the intermediate member 15, and a compression member provided between the intermediate member 15 and the inner ring of the second ball bearing 12. The axial pressure generated by the spring member 14 acts on the support 5 in the axial direction via the elastic sheet member 17. By this axial pressure, the sliding contact surface of the contact body 7 (the surface of the composite resin layer 6) is pressed against the sliding contact surface of the vibrating body 2. The axial force generated by the compression spring member 14 (that is, the contact body 7)
The pressure contact force between the second ball bearing 12 and the compression member 14 can be adjusted by a spacer member (not shown) provided between the inner ring of the second ball bearing 12 and the compression spring member 14.

Table 1 shows the required characteristics of the vibration wave motor configured as described above.

[0050]

[Table 1]

Table 2 shows the main design specifications of the vibration wave motor.
Shown in

[0052]

[Table 2]

An example of the cured film of the vibrating body 2 of the vibration wave motor according to the first embodiment, its curing temperature and load 5
Table 3 shows the measured values of the Vickers hardness (Hv) at 0 gf.

[0054]

[Table 3]

(Note) * 1 Ceramics Kanigen (trade name Nippon Kanigen) * 2 Kaniflon B (trade name Nippon Kanigen) * 3 Nimflon T (trade name Uemura Kogyo) * 4 Canibolone (trade name Nippon Kanigen) * 5 Nidax (Product name: ULVAC TECHNO)

Table 4 shows an example of the composite resin layer 6 of the contact body, its material constitution, and Rockwell M scale hardness (HRM).

[0057]

[Table 4]

(Note) * 1 Polyethernitrile (Idemitsu Material PEN) * 2 Polyetheretherketone (Victrex PEEK) * 3 Wholly aromatic polyester (Amoco Sider SRT-500) * 4 Carbon fiber (PAN-based) * 5 Carbon fine particles (Kanebo Bellpearl C-2000) * 6 Polytetrafluoroethylene resin (Daikin L2)

The vibrating body 2 shown in FIGS. 1 and 2 is made of SUS420.
After machining with T2 as the base material, the sliding surface is ground with a rotating flat plate containing an abrasive by applying a load directly above the sliding surface, and has a flatness of about 4 μm and a center line average. Roughness (R
a) was finished to about 0.3 μm. Next, by a method of electroless nickel plating, a cured film of electroless plating having a film thickness of 5 to 10 μm shown in Table 3 is formed, and when subjected to heat curing treatment, the sliding surface of the vibrator has a flatness of about 5 μm and a center. The surface is finished to have a linear average roughness (Ra) of about 0.4 μm.

The contact body 7 forms a composite resin layer 6 by fixing a ring-shaped composite resin shown in Table 4 to an aluminum alloy support 5 and forming the composite resin layer 6. The sliding contact surface of the composite resin layer 6 of the contact body 7 is applied with a load right above the sliding contact surface, and is ground by a rotary flat plate containing an abrasive. The linear average roughness (Ra) varies depending on the material composition of the composite resin layer, but is about 0.3 to 0.5 μm.

Table 5 shows an outline of the accuracy of polishing and grinding of the sliding contact surface between the vibrating body (plane) and the contact body (plane) in the first embodiment.

[0062]

[Table 5] (Note) Figures in parentheses indicate the accuracy after electroless plating.

FIG. 3 is a partially enlarged sectional view of a vibrating body and a contact body constituting a vibration wave motor (vibration type driving device) according to a second embodiment of the present invention. The combination of the vibrating body and the contact body of the present embodiment is compatible with the combination of the vibrating body and the contact body of the vibration wave motor shown in FIG. The vibration wave motor of the second embodiment can be obtained by incorporating the vibration wave motor into the motor.

In FIG. 3, the piezoelectric element 1 and the vibrating body 2 are the same as those in FIG. 2 of the first embodiment, and the contact body 107 is a composite resin on the support 5 like the contact body 7 of the first embodiment. Is fixed and cut to form the composite resin layer 106. The sliding contact surface of the composite resin layer is tapered.

FIG. 4 is an explanatory view when the composite resin layer of the contact body 107 is ground into a tapered shape, and the contact body 107 is partially enlarged. In FIG. 4 (a), 20 is the particle size of 5-1.
The sample is rotated at 500 rpm on a rotary platen made of # 2000 having a particle size of # 2000 containing an abrasive of 0 μm. Reference numeral 21 denotes an annular support jig having an outer diameter of φd, which supports the contact body 107, and applies a processing pressure F to the pressing portion 5b having an outer diameter of the support 5 of φD. As shown in the figure, the outer diameter φd of the support jig is smaller than the diameter φD of the pressing portion 5b of the support 5. The processing pressure F is set in consideration of the flexibility of the vibrating body 2, but is generally larger than the axial pressure of the vibration wave motor (19 kgf in Table 2).
For example, it is 22 kgf.

FIG. 4B shows the dimensions and shape of the contact body 107 after the grinding process. The inclination of the sliding contact surface of the composite resin layer 106 fixed to the support 5 is θ = 9 minutes (0.15 minutes). Degree), the axial dimension difference L becomes a tapered shape of about 2.6 μm,
The center line average roughness Ra is 0.3 to 0.5 μm.

As described above, when the sliding contact surface of the vibrating body is made flat and the sliding contact surface of the contact body is made tapered, the sliding contact surfaces are familiar with each other quickly, and the pressing force per unit area of the sliding contact surface is fast. This is because the predetermined design value is obtained, which is effective in reducing the wear of the sliding contact surface, and also reduces the fluctuation over time of the motor performance.

Therefore, in the second embodiment of the present invention, the same effect can be expected even if the sliding contact surface of the vibrating body is formed in a tapered shape and the sliding contact surface of the contacting member is made flat. The shape is such that a pressing force for processing is applied to the pressing portion 2b of the vibrating body 2 in FIG.

FIG. 5 shows another example of the second embodiment in which a composite resin layer forming one sliding contact surface is formed on the vibrator side. 1 is a piezoelectric element, 52 is a vibrating body fixed to the piezoelectric element 1 and is made of the same material (see Table 2) as the vibrating body 2 of the vibration wave motor of the first embodiment and has the same shape.
Reference numeral 56 denotes a composite resin layer.
It is fixed to the surface (sliding contact surface) of the comb teeth with an adhesive.
The composite resin layer 56 is formed of a composite resin in which a base resin or a resin composition is filled with a reinforcing material or a mixture of a reinforcing material and a lubricant (see Table 4).

The sliding surface (composite resin layer 5b) of the vibrating body is ground by a rotating flat plate containing an abrasive by applying an appropriate load directly above the sliding surface, and has a flatness of 5 μm and a center line average. It is launched on a plane having a roughness (Ra) of about 0.3 to 0.5 μm. Reference numeral 57 denotes a contact body made of an aluminum alloy, particularly a heat-treatable alloy A6061-T4 material or the like is used, and the sliding contact surface is made to have the same shape and dimensions as the support 5 of the vibration wave motor of the first embodiment. Finished in shape.

FIG. 6 is an explanatory view when the sliding contact surface of the contact body 57 is machined into a tapered shape.
The pressing portion 57b having a diameter φD is placed on the sliding surface of the contact body 57.
Then, the support jig 21 of the contact body 57 is placed, and a grinding force is applied by applying a processing pressure to make the sliding contact surface tapered.

When the processing pressure F is larger than the axial pressure of the vibration wave motor (see Table 2), for example, 22 kgf, the inclination of the sliding contact surface of the contact body is θ = 9 minutes, and the dimension difference l in the axial direction is l.
Has a tapered shape of about 2.6 μm, and its center line average roughness Ra is about 0.3 μm.

Next, electroless nickel plating shown in Table 3 was performed.
When a plating film having a thickness of 20 to 30 μm is formed and subjected to heat curing treatment, the sliding surface of the contact body has a center line average roughness (Ra).
Has a tapered shape of about 0.4 μm.

As described above, the sliding surface of the vibrator (composite resin layer)
Is a flat surface and the sliding surface of the contact body is tapered, whereas the sliding surface of the vibrating body is tapered and the sliding surface of the contact body is flat. This is the same as in the second embodiment.

Table 6 shows an outline of the accuracy of the grinding processing of the sliding contact surface between the vibrating body (flat surface) and the contact body (taper surface) in the second embodiment.

[0076]

[Table 6] (Note) Figures in parentheses indicate the accuracy after electroless plating.

A vibration wave motor according to the second embodiment of the present invention was manufactured, and a continuous operation test was performed according to the target performance shown in Table 1. In the first motor, the sliding surface of the vibrating body 2 is ground, and the flatness is 4 μm and the center line average roughness (Ra) is 0.3 μm.
m, a 5 to 10 μm-thick film of electroless nickel obtained by eutectoid deposition of PTFE in Table 3 at a volume ratio of 5%, and heat-hardening treatment at 300 ° C.
The sliding surface had a thickness of about μm, a center line average roughness (Ra) of 0.4 μm, and a Vickers hardness (Hv) of about 900.

The contact body 107 is made of an aluminum alloy (A5056).
-H34 material) as a base resin using the polyether nitrile (PEN) shown in Table 4 as a base resin, and PAN as a reinforcing agent.
20% carbon fiber by weight, PTFE as lubricant
And a composite resin layer 106 formed by filling graphite at a weight ratio of 10% and 5%, respectively, and the sliding surface is finished in a tapered shape having a center line average roughness (Ra) of about 0.4 μm. .

As a second motor, polyethernitrile (PEN) shown in Table 4 was used as a base resin on the sliding surface of the vibrating body 52, and PAN-based carbon fibers were added thereto in a weight ratio of 10%.
%, And a composite resin layer 56 formed by filling 5% by weight of PTFE and graphite, respectively, is fixed, and the sliding contact surface has a flatness of about 5 μm and a center line average roughness (Ra) of 0.5%.
Finished to a surface of about 3 μm.

One contact body 57 is made of an aluminum alloy (A606).
1-T4 material), and the sliding contact surface is formed in a tapered shape having a center line average roughness (Ra) of about 0.3 μm, and then a ternary alloy electroless nickel (Ni-P-B) shown in Table 3 ) To 20
A film having a thickness of about 30 μm was formed and heat-cured at 200 ° C. to form a tapered sliding contact surface having a center line average roughness (Ra) of about 0.4 μm and a Vickers hardness (Hv) of about 850.

In the test, a perma torque (manufactured by Kojin Seisakusho) was connected to the output side of the rotating shaft 10 of the motor, and the rotating load was reduced to 5
Kgcm, the rotation shaft of the encoder was supported at the other end of the rotation shaft, and the control was performed at a constant 64 rpm.

The performance of the motor was measured at 300 hour intervals,
Continuous operation was performed up to 3000 hours, and the time variation of the performance was confirmed. After continuous operation for 3000 hours, the motor was disassembled, and the wear amount and the center line average roughness Ra (μm) of the respective sliding contact surfaces of the vibrating body and the contacting body were measured.

When the time variation of the motor performance of the first motor of the second embodiment is viewed at the maximum output (W), the maximum value is 6.5 W at the start and 7.2 W on the way, and 3000 hours later, The required characteristics were satisfied at about 7.0 W.

Next, regarding the amount of abrasion and the surface properties of the sliding contact surface after the test, the vibrating body cured film was 1.5 μm on the inner diameter side and 0.7 μm on the outer diameter side of the contact width of 0.7 mm. 1.35μ
m wear, wear amount per hour is 0.00045μ
m and the target plane were satisfied. Also, the center line average roughness Ra of the sliding contact surface was 0.4 μm at the start, but decreased to 1.5 μm, while the composite resin layer of the contact body was worn by about 12 μm. The target value is satisfied at 0.004 μm, and the center line average roughness of the sliding contact surface is 0.4 μm.
m was changed to about 3 μm.

As described above, in the vibration wave motor according to the present embodiment, the center line average roughness (Ra) of the vibrating body or the contacting surface of the vibrating body is reduced after prolonged motion, but the maximum output value of the performance is as follows. The target value was attained, and the variation over time of the performance was relatively small, and the wear amount of the sliding contact surface satisfied the target value for the time being. Therefore, it can be seen that there is no particular problem with the sliding contact surface accuracy such as flatness or center line average roughness (Ra) obtained by grinding the vibrating body or the contact body in the present embodiment.

In the second motor of the second embodiment, the time variation of the motor performance was still small, but the maximum output after 3000 hours was about 6.7 W, which did not satisfy the required characteristics. It turned out to be necessary.

The wear amount of the composite resin layer of the vibrating body was 18 μm, and the wear amount per hour was 0.006 μm.
It was a bit big. On the other hand, the wear amount of the cured film of the contact body was 1.
At 5 μm, it was equal to the target value. The center line average roughness (Ra) of the sliding contact surface is 0.3 μm to 2 μm for the composite resin layer of the vibrator.
The thickness of the cured film of the contact body was 0.4 μm to 1.3 μm, which was also lower.

In the second motor, the amount of wear can be further reduced by changing the composite resin layer forming the sliding contact surface between the vibrating body and the contacting body and the material type of the electroless nickel plating. Can also be expected to improve. In addition, it can be said that the sliding surface accuracy obtained by grinding the vibrating body or the contact body in the present embodiment is also effective.

FIG. 7 is a schematic view of an apparatus using a vibration wave motor as a drive source as an example of the vibration wave driving device of the present invention. A gear 23 has a large gear 23a and a small gear 23b, and the large gear 23a meshes with the gear 20 on the vibration wave motor A side. Reference numeral 24 denotes a driven member, for example, a lens barrel.
Are rotated by the driving force of the motor. On the other hand, an encoder slit plate 25 is attached to the gear 23, and the rotation of the gear 23 is detected by the photocoupler 26, and the rotation and stop of the motor are controlled, for example, for autofocus.

[0090]

As described above, according to the present invention, the vibrating body or the contact body is subjected to a stress relieving heat treatment before or after machining, and thereafter, the flatness of the sliding contact surface is processed. The contact body or vibrating body is heat-treated using a heat-treated alloy, and after machining, flatness or taper processing of the sliding contact surface is performed to maximize the accuracy of the sliding contact surface, and then electroless plating is performed, followed by heat hardening. By performing the treatment, the sliding contact surface of the vibrating body or the contact body can be formed of a hard cured film having a relatively thin plated film and high accuracy.

Therefore, in the step of forming the sliding contact surface,
The plating film may be thin. In that there is no need to remove the hard cured film, the processing time can be reduced and the cost can be reduced. Further, since the cured film of the heat-cured plating is used as the sliding surface without fabricating the post-processing, it is possible to utilize the characteristics of the plating film.

Although the flatness or the center line average roughness of the sliding surface obtained by grinding with a rotary platen containing an abrasive is lower than the accuracy in grinding, it is not suitable for long-term durability. There is no problem in the result of evaluating the amount of wear and the performance over time, and the above-mentioned grinding is very effective for mass production, shortening the processing time, and reducing the cost. Further, the present invention can provide a vibration wave motor including the above-described vibration wave driving device and a device using the same.

[Brief description of the drawings]

FIG. 1 is a sectional view of a vibration wave motor according to a first embodiment of the present invention.

FIG. 2 is a partially enlarged cross-sectional view of a vibrating body and a contact body constituting the vibration wave motor of the first embodiment.

FIG. 3 is a partially enlarged sectional view of a vibrating body and a contact body of a vibration wave motor according to a second embodiment.

FIG. 4 is an explanatory diagram of processing of a sliding surface of a vibrating body according to a second embodiment.

FIG. 5 is a partially enlarged sectional view of another vibrating body and a contact body of the second embodiment.

FIG. 6 is an explanatory diagram of a sliding contact surface processing of another contact body of the second embodiment.

FIG. 7 is a schematic diagram of a device using a vibration wave motor as a driving source.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Piezoelectric element 2, 52 Vibration body 3 Case 5 Support body 6, 106, 56 Composite resin layer 7, 107, 57 Contact body 20 Rotating flat plate

Claims (22)

[Claims] In a vibration type driving device for relatively frictionally driving a vibrating body for which vibration is excited and a contacting body that comes into contact with the vibrating body, a sliding contact surface of one of the vibrating body and the contacting body. A vibration type drive characterized by forming a cured film by applying electroless plating after processing to obtain flatness and forming the other sliding contact surface with a resin or a composite resin layer containing a reinforcing material in a resin composition. apparatus. 2. The vibrating mold according to claim 1, wherein the flatness of the sliding contact surface of the vibrating body or the contacting body is determined by polishing or grinding with a rotary flat plate containing an abrasive. Drive. 3. The sliding surface of the vibrating body and the contact body is formed as a flat surface having a flatness of 5 μm or less and a center line average roughness Ra (μm) of 0.4 or less. 1
Or the vibration type driving device according to 2. 4. The vibration type driving device according to claim 1, wherein the cured film of the electroless plating is an electroless nickel plating in which hard fine particles or a fluorine resin are folded together. 5. The vibration type driving device according to claim 1, wherein the cured film of the electroless plating is a ternary alloy electroless plating. 6. The vibration type driving device according to claim 1, wherein the cured film of the electroless plating is an electroless nickel film in which a fluororesin is sealed in a plating film having a recess. 7. The cured film of the electroless plating has a thickness of 100 to 4
The vibration-type driving device according to any one of claims 1, 4, 5, and 6, wherein the vibration-type driving device is heat-cured at 00 ° C. 8. The vibration type driving device according to claim 1, wherein a base material of said vibrating body is martensitic stainless steel. 9. The vibration type driving device according to claim 1, wherein a base material of the vibrating body is an iron-based sintered alloy. 10. The method according to claim 1, wherein the vibrating body is subjected to a stress relief heat treatment before or after the flatness machining. Vibration type driving device. 11. The vibration type driving device according to claim 1, wherein a base material of the contact body is an aluminum alloy. 12. The vibration type driving device according to claim 11, wherein the aluminum alloy of the contact body is a heat treatment type alloy. 13. A vibratory drive device that relatively frictionally drives a vibrating body for which vibration is excited and a contacting body having a pressurizing portion that comes into contact with the vibrating body. One of the sliding surfaces is processed into a flat or tapered shape, and after the processing, electroless plating is performed to form a cured film, and the other sliding contact surface is formed of a tapered or flat resin or resin composition with a reinforcing material. A vibration type driving device characterized by comprising a composite resin layer containing the same. 14. A tapered shape of a sliding contact surface of the vibrating body or the contact body is formed by applying a processing pressure to a pressurizing portion and performing a grinding process on a rotary flat plate containing an abrasive. The vibration type driving device according to claim 13, wherein: 15. The vibration according to claim 13, wherein a center line roughness Ra (μm) of 0.4 or less is formed in the tapered sliding contact surface of the vibrator or the contact body. Mold drive. 16. A method of manufacturing a vibration-type driving device for relatively driving a vibrating body excited by vibration and a contacting body that comes into contact with the vibrating body, wherein one of the vibrating body and the contacting body is provided. After the sliding contact surface is processed for flatness, a step of forming a cured film by applying electroless plating, a step of forming a composite resin layer containing a reinforcing material in a resin or a resin composition on the other sliding contact surface, A method of manufacturing a vibration-type driving device, comprising a step of bringing the vibrating body and the contact body into contact with each other on a sliding contact surface. 17. The vibration-type drive according to claim 16, wherein the flatness of the sliding contact surface of the vibrating body or the contact body is ground by grinding or a rotary flat plate containing an abrasive. Device manufacturing method. 18. A method of manufacturing a vibration-type drive device for relatively driving a vibrating body in which vibration is excited and a contacting body having a pressurizing portion in contact with the vibrating body, the vibrating body and the contact After processing one sliding contact surface of the body into a flat or tapered shape, forming a cured film by applying electroless plating, and applying the other sliding contact surface to a tapered or flat resin or resin composition. A method of manufacturing a vibration-type driving device, comprising: forming a composite resin layer containing a reinforcing material; and bringing the vibrating body and the contact body into contact with each other by pressing the respective sliding surfaces. 19. The method of manufacturing a vibration-type driving device according to claim 18, wherein one of the vibrating body and the contact body is brought into contact with a tapered shape and the other is pressed by a flat sliding contact surface. 20. The tapered shape of the sliding contact surface of the vibrating body or the contacting body is formed by applying a processing pressure to a pressurizing portion and performing a grinding process on a rotary flat plate containing an abrasive. The method for manufacturing a vibration type driving device according to claim 18, wherein 21. A vibration wave motor comprising the vibration wave drive device according to claim 1. Description: 22. An apparatus provided with the vibration wave driving device according to claim 1 as a driving source.