JPH1014264A - Oscillatory driver and apparatus with oscillatory driver - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the accuracy and the lifetime by providing an electroless nickel film of a ternary alloy on one sliding face of an oscillator or a contactor, while providing a composite resin layer of a resin or a resin compound added with a reinforcing material on the other sliding face, thereby reducing abrasion on the sliding face. SOLUTION: An electroless nickel film of a ternary alloy, e.g. Ni-P-B, is provided on one sliding face of an oscillator 2 or a mover 7, while a composite resin layer 6 where a reinforcing material, e.g. carbon fibers, is added to a base resin, i.e., fluororesin, is formed on the other sliding face. Since one of the sliding faces contains no hard silicon carbide, abrasion of the composite resin layer can be retarded on the other sliding face. Furthermore, lubrication can be enhanced in the initial stage of motion of a driver, by forming the fluororesin film uniformly on one sliding face, and adhesion of abrasive powder to the electroless nickel film or deposition thereof onto the composite resin layer 6 can be prevented by suppressing the generation of abrasive powder from the composite resin layer.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration type driving device, and more particularly, to a material for a sliding contact surface between a vibrating member and a contact member which are members of the vibration type driving device.

[0002]

2. Description of the Related Art A vibration-type driving device called a vibration wave motor or the like uses the friction between a vibrating body and a contact body that comes into pressure contact with the vibrating body to contact vibration energy of high-frequency vibration of the vibrating body. It is a power source of the type that converts it into continuous mechanical kinetic energy of the body (moving body). For this reason, it is necessary that both sliding contact surfaces are made of a material having high wear resistance.

In a conventional vibration type driving device, a silicon carbide (S) having an average particle size of 0.5 to 3 μm is formed on a sliding contact surface of a vibrating body.
An electroless nickel alloy film (Ni-P) in which iC) is uniformly dispersed in a volume ratio of 8 to 20% is formed in a thickness of 20 to 30 μm, which is heated and cured at 100 to 400 ° C. for 900.
Vickers hardness (Hv) of １1400 was obtained.

On the sliding surface of the moving body, a base resin such as a heat-resistant thermoplastic resin or a liquid-crystalline wholly aromatic polyester resin, and carbon beads as a reinforcing material in a weight ratio of 10 to 10 are used.
A layer of a composite resin filled with 40% and, if necessary, a fluororesin (PTFE) as a lubricant at a weight ratio of about 5% was provided.

The formation of the alloy film on the sliding contact surface of the vibrating body and the formation of the composite resin layer on the sliding contact surface of the moving body as described above have a relatively large friction coefficient between both surfaces, and a large drive output is expected. This is because the sliding surface of the vibrating body is hardly worn, and the wear of the composite resin layer on the sliding surface of the moving body can be minimized.

A heat-resistant thermoplastic resin is used as the base resin of the composite resin layer. However, this resin has relatively small temperature dependence of the physical properties of the material. The phenomenon of torque down due to softening does not occur,
This is because driving performance and accuracy can be stabilized.

Further, the fluororesin (PTFE) as a lubricant is filled in the composite resin layer because the fluororesin has properties such as lubricity, non-adhesion and water repellency.
By forming a fluorocarbon resin transfer film on the sliding contact surface (on the alloy film) of the vibrating body, lubricity between both sliding contact surfaces is improved,
This is for stabilizing the coefficient of friction and reducing the wear of the composite resin layer.

[0008]

However, in the above-described conventional vibration type driving device, for example, carbon beads are filled at a weight ratio of 30% as a reinforcing material, and a fluororesin (PTFE) is used as a lubricant. The use of% filled polyether nitrile (PEN) for the composite resin layer not only tends to slightly increase the fluctuation range of the wow and flutter value during continuous operation, but also causes damage to the alloy film and occurs from the composite resin layer. There was a problem that the amount of wear powder was large.

When a polyether nitrile filled with only carbon beads at a weight ratio of 30% without filling with a fluororesin is used as a composite resin layer, the wow and flutter value during continuous operation is reduced, and a part of the alloy film is reduced. There was a problem that the composite resin adhered.

Accordingly, a first object of the present invention is to provide a vibration type driving device which has a small amount of wear on the sliding contact surface, has high accuracy and has a long service life.

[0011]

In order to achieve the above object, according to the first aspect of the present invention, a vibrating body whose vibration is excited,
In a vibration-type driving device that relatively frictionally drives a contact body that comes into contact with the vibrating body, a ternary alloy (for example, nickel (Ni)-
An electroless nickel film of phosphorus (P) -boron (B) alloy is provided, and a composite resin layer containing a reinforcing material in a resin or a resin composition is provided on the other sliding contact surface.

That is, by forming an alloy film containing no harder silicon carbide particles on one sliding contact surface, the generation of wear powder from the composite resin layer on the other sliding contact surface is suppressed. I have.

The electroless nickel film is made of Ni-P
In addition to -B, N such as Ni-P-Co and Ni-P-W
i-P-based alloy film, Ni-B-Co and Ni-B-W
Ni-B-based alloy films may be used, and these electroless nickel films are heat-cured at 100 to 400 ° C.
It is desirable to form a hard and stable alloy film.

The composite resin layer may be made of a thermoplastic resin such as polyether nitrile (PEN), polyether ether ketone (PEEK) or liquid crystalline wholly aromatic polyester (LCP), or ethylene tetrafluoride resin (PTFE). ) Or the like, and a reinforcing material such as carbon fiber, granular or spherical carbon beads or a mixture of carbon fibers and carbon beads is used as a base resin, or a fluororesin and polyoxybenzoyl (PO
It is desirable to use a resin composition comprising B) or polyimide (PI) containing the above-mentioned reinforcing material.

Here, if the fluororesin is used as the base resin, a uniform film-like film of the fluororesin can be formed on the alloy film in the early stage of the operation of the driving device, so that the lubricity can be improved. It is possible to avoid the generation of wear powder from the surface and the accumulation of the wear powder on the composite resin layer, thereby extending the life of the drive device and improving the rotational accuracy.

Further, if carbon fibers are used as the reinforcing material,
It is possible to form a composite resin layer having excellent heat resistance, lubricity and wear resistance. In addition, if carbon beads (e.g., having an average particle size of 10 to 30 [mu] m) having excellent dispersibility and fluidity as compared with carbon fibers and low orientation are used as the reinforcing material, the content of the reinforcing material is uniform. Not only is it possible to form a composite resin layer that is easy to mold and process,
Depending on the material and the sintering temperature, a wide selection can be made from a composite resin device containing hard carbonized carbon to a composite resin layer containing soft graphitized carbon.

Further, these composite resin layers may contain a lubricant such as a fluororesin or a mixture of a fluororesin and graphite powder. When the composite resin layer is formed using a thermoplastic resin that is harder than a fluororesin, it is desirable to include graphite powder as a lubricant to reduce the hardness.

Further, according to the second invention of the present application, in a vibration type driving device that relatively frictionally drives a vibrating body whose vibration is excited and a contacting body that comes into contact with the vibrating body, An electroless nickel film such as a nickel-phosphorus alloy or a nickel-boron alloy obtained by eutectoid deposition of a fluororesin in a weight ratio of 1.5 to 8.5% is provided on one of the sliding surfaces, and the other sliding surface is made of a resin. Alternatively, a composite resin layer containing a reinforcing material in the resin composition is provided. That is, by replacing the hard silicon carbide particles on one of the sliding contact surfaces with eutectoid fluorocarbon resin having excellent lubricity, the friction coefficient is stabilized from the early stage of operation of the driving device, and the other sliding contact is achieved. The generation of abrasion powder from the composite resin layer on the contact surface is suppressed. In addition, the fluororesin film is formed on the alloy film even if the composite resin layer does not contain the fluororesin, thereby extending the life of the driving device and improving the rotational accuracy.

It is desirable that the electroless nickel film is heat-cured at 100 to 400 ° C., as in the first invention.

Further, as in the first invention, a thermoplastic resin such as polyether nitrile (PEN), polyether ether ketone (PEEK) or liquid crystalline aromatic polyester (LCP), or Using a fluororesin such as tetrafluoroethylene resin (PTFE) as a base resin and containing a reinforcing agent such as carbon fiber, granular or spherical carbon beads, or a mixture of carbon fibers and carbon beads, It is desirable to use a resin composition comprising a resin and polyoxybenzoyl (POB) or polyimide (PI) containing the above-mentioned reinforcing material.

Further, a lubricating agent such as a fluororesin or a mixture of a fluororesin and a graphite powder may be contained in these composite resin layers to improve lubricity.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) FIG. 1 shows an overall configuration of a vibration wave motor (vibration type driving device) according to a first embodiment of the present invention, and FIG. The body and the moving body (contact body) are shown in an enlarged manner.

In these figures, reference numeral 1 denotes a thin ring-shaped piezoelectric element. Reference numeral 2 denotes a vibrating body made of an elastic material, and four protrusions (comb teeth) per [lambda] / 2 are formed on the sliding surface side of the vibrating body 2 at equal intervals over the entire circumference. An alloy film to be described later is formed on the surface (sliding contact surface) of each comb tooth. In addition, the entire surface of the electrode surface of the piezoelectric element 1 is fixed to the surface of the vibrating body 2 opposite to the sliding contact surface, and both form a stator.

Reference numeral 3 denotes a housing of the vibration wave motor, and a vibrating body 2 is concentrically fixed to the housing 3 by screws 4. The outer ring of the first ball bearing 11 is fixed to the center of the housing 3. Reference numeral 10 denotes a rotating shaft, and an intermediate member 15 is fixed to an axially intermediate portion of the rotating shaft 10 by, for example, shrink fitting. One end of the rotating shaft 10 is axially slidably supported by the inner ring of the first ball bearing 11, and the other end is axially slidably supported by the inner ring of the second ball bearing 12. The second ball bearing 1
The outer ring 2 is fixed to a central axis of a housing cover 8 fixed to the housing 3 with screws 9.

On the outer peripheral portion of the intermediate member 15, an annular moving body 7 is provided so as to fit concentrically. This moving body 7
Is composed of an annular support 5 made of an aluminum alloy or the like, and a composite resin layer 6 concentrically fixed to the surface of the support 5 with an adhesive. An elastic sheet material 17 made of rubber is interposed between the back surface of the support 5 and the flange portion of the intermediate member 15, and a compression member provided between the intermediate member 15 and the inner ring of the second ball bearing 12. The axial biasing force generated by the spring member 14 acts on the support 5 in the axial direction via the elastic sheet member 17. The sliding surface (the surface of the composite resin layer 6) of the moving body 7 is pressed against the sliding surface of the vibrating body 2 by the axial urging force. The axial biasing force generated by the compression spring member 14 (that is, the moving body 7)
The pressure contact force between the second ball bearing 12 and the compression member 14 can be adjusted by a spacer member (not shown) provided between the inner ring of the second ball bearing 12 and the compression spring member 14.

Table 1 shows the required characteristics of the vibration wave motor configured as described above.

[0027]

[Table 1]

Table 2 shows the main design specifications of the vibration wave motor.

[0029]

[Table 2]

Further, the structure of the alloy film of the vibrating body of the conventional vibrating wave motor and the vibrating body 2 of the vibrating wave motor of the present embodiment, the Vickers hardness (Hv) and the coefficient of friction when heat-hardened at 300 ° C. Are shown in Table 3.

[0031]

[Table 3]

In the conventional vibration wave motor, Tables 2 and 3
As shown in the figure, silicon carbide (SiC) having an average particle size of about 1 μm is formed on a sliding contact surface of stainless steel processed to a predetermined size.
Is formed into a Ni-P-SiC alloy film having a thickness of 25 [mu] m by electroless plating, and the alloy film is heated and hardened to a Vickers hardness of about 1,100 to form a vibrating body. Made.

On the other hand, in the vibrating body of the vibration wave motor of the present embodiment, an electroless nickel film which does not bend carbon silicon is formed. For example, as shown in Example 1 in Table 3, a Ni—P—B alloy film, which is an electroless nickel film of a ternary alloy, is formed to a thickness of about 25 μm, and the alloy film is heated and cured to form a Vickers hardened film. A vibrating body is manufactured with a height of about 1,000.

Here, the Ni—P—B alloy film has a composition of phosphorus (P) of 1 to 2% by weight and boron (B) of 1% by weight or less, which is close to pure nickel in composition and is similar to general electroless nickel. Compared to the electroless nickel film (Ni-P), the content of phosphorus (P) is smaller than that of the electroless nickel film (Ni-P) because the content of phosphorus (P) is small, so that it is excellent in toughness and film strength.

In the vibration wave motor according to the present embodiment, as shown in Examples 2 and 3, the average particle diameter is 1 μm.
1. The following fluororesins (PTFE) were each added at a weight ratio of 2.
A 5% or 7.5% co-folded binary alloy electroless nickel film (Ni-P) is formed to a thickness of about 25 μm, and the alloy film is heat-cured to a Vickers hardness of about 800 or 450. We are making vibrators. In the vibrating bodies of these embodiments, the coefficient of friction is even smaller than that of the Ni-P-B film.

The alloy films of the conventional example and Examples 1 to 3 were wrapped so that the flatness was 2 μm or less and the surface roughness was 0.02 μm or less in center line average roughness (Ra). I have.

Next, Table 4 shows the structure of the composite resin layer provided on the moving body 7 of the vibration wave motor of this embodiment.

[0038]

[Table 4]

In this embodiment, PE is used as the base resin.
N, PEEK, LCP, LCP or PTFE, which is filled with carbon fiber (CF) or carbon beads (CB) as a reinforcing material, a fluororesin or a graphite powder as a lubricant, and a composite resin having a predetermined size And affixed to the support 5 using an epoxy-based adhesive to produce a total of 13 types of composite resin layers (Examples 1 to 13).

The composite resin layers of Examples 1 to 9 were prepared by filling a thermoplastic resin as a base resin with a reinforcing material or a mixture of a reinforcing material and a lubricant, injection-molding into an annular shape, and then shaving the resin into a predetermined size. It has a thrust washer shape.
The composite resin layers of Examples 10 and 11 were prepared by filling a liquid crystalline wholly aromatic polyester as a base resin with a reinforcing material, extruding the sheet into a sheet, and then pressing the sheet to a predetermined size and shape. It was done. In addition, the composite resin layers of Example 12 and Example 13 were prepared by filling a resin composition in which another resin was mixed with a fluororesin with a reinforcing material, and shaving a compression-molded composite resin round bar into a scribing sheet. After that, it is pressed into a predetermined size and shape.

The sliding surface of the composite resin layer of each embodiment is
Lapping is performed to achieve a flatness of 3 μm or less and a surface roughness of 0.05 μm or less in center line average roughness (Ra).

Next, the various alloy films of the vibrating body described above (conventional alloy films and the alloy films of Examples 1 to 3) and the composite resin layers of the moving body (composite resin layers of Examples 1 to 13) The evaluation result of the vibration wave motor using the combination of the above will be described with reference to Table 5. In addition, this evaluation result shows that a rotating load of 8 kg · cm is applied to one end of the rotating shaft 10, a laser rotary encoder is attached to the other end of the rotating shaft 10, and continuous operation is performed at a rated rotation speed of 60 rpm and a torque of 8 kg · cm. It is an evaluation result when performing.

[0043]

[Table 5]

The "motor performance" of the evaluation items in the table is a relative evaluation of the input value after 500 hours of continuous operation at the rated value, and is represented by .largecircle., .DELTA., And x from the smaller input value. “Rotation accuracy” is a relative evaluation of the flutter value when the number of rotations is 33.3 rpm and the load is 1 kg · cm after continuous operation for 500 hours. It is represented by Also,
"Relative wear amount" is a relative evaluation of the wear amount of the composite resin layer after continuous operation at the rated time of 1,000 hours, and is represented by △, Δ and × from the smaller wear amount.

Table 5 shows that the motor was disassembled after 500 hours of continuous operation, and the sliding surface of the vibrating body 2 and the sliding surface of the composite resin layer 6 of the moving body 7 were observed with an optical microscope. Is shown.

The conventional vibrator Ni-P-SiC alloy film and polyethernitrile (PEN) are used as reinforcing materials in the form of spherical carbonized carbon (CB) having an average particle diameter of 10 μm.
Is combined with the composite resin layer of Example 1 in which 30% by weight is filled, and the Ni-P-SiC alloy film and the composite resin layer of Example 1 are combined with a fluororesin (PTF) as a lubricant.
The evaluation results of the motor when the composite resin layer of Example 2 in which E) was added at a weight ratio of 5% were combined showed that the motor performance was particularly good and “○”. The relative wear amount was “Δ”.

The reason for this is that although the motor performance is good because the friction coefficient of the alloy film is relatively large, silicon carbide particles having high hardness fall off from the alloy film to become an abrasive, and the sliding of the mating composite resin layer occurs. It is considered to promote wear of the contact surface.

The Ni—P—B alloy film of Example 1 and PEN
When the composite resin layers of Examples 1 to 8 in which the reinforcing material or the mixture of the reinforcing material and the lubricant was filled, almost good evaluation results were obtained for almost all combinations.

However, graphitized carbon (CB) having an average particle diameter of about 25 μm and a slightly lower hardness was used in an amount of 30% by weight.
When the filled composite resin layer of Example 4 was used, the motor performance and the rotation accuracy were “Δ”, and the relative wear amount was “X”. If you disassemble the motor in this case,
Deposits of the composite resin were relatively large on a part of the sliding surface of the vibrating body 2.

Further, the Ni—P—B alloy film of Example 1
When PEN is combined with the composite resin layer of Example 1 in which only the reinforcing material is filled, and when the same alloy film and PEN are in the form of particulate carbonized carbon (CB) having an average particle diameter of 12 μm
Were mixed with the composite resin layer of Example 5 in which 30% by weight was filled, the motor performance and the relative wear amount were all “○”, but the rotation accuracy was noticeably fluctuated in the flutter value. "Met. It is considered that this factor is because the lubricant PTFE is not filled, and a stable friction surface is not constantly obtained.

Further, the Ni—P—B alloy film of Example 1
Carbonized carbon (CB,) is added to PEN at a weight ratio of 30.
%, And the combination of the composite resin layers of Examples 2, 3, and 6 in which only the fluororesin was filled as the lubricant, both the motor performance and the rotational accuracy were “○”. However,
When the composite resin layer of Example 2 in which the fluororesin was filled at a weight ratio of 5% was used, the relative abrasion amount was “」 ”.
When the composite resin layers of Examples 3 and 6 filled with% were used, the relative wear amount was “Δ”. Thus, it was found that when the amount of the fluorine resin was large, the wear of the composite resin layer was increased.

Further, the Ni—P—B alloy film of Example 1
Particulate carbonized carbon (CB) as a reinforcement in PEN
35), 5% by weight of fluororesin, and 5% by weight of graphite powder which is also a lubricant to lower the hardness of the composite resin, in combination with the composite resin layer of Example 7; Alloy film and P as reinforcement for PEN
When all were combined with the composite resin layer of Example 8 in which AN-based carbon fiber (CF) was filled by 20% by weight and a mixture of 5% of fluororesin and 5% of graphite powder was used as a lubricant, A good result was obtained with the evaluation item of “○”.

Further, the Ni—P—B alloy film of Example 1
When the composite resin layer of Example 9 in which polyetheretherketone (PEEK) is filled with 30% of spherical carbonized carbon (CB) is combined, the composite of Example 1 in which PEN is filled with the same amount of the same reinforcing material is used. The same evaluation result as in the case of combining with the resin layer was obtained. As a result, it was found that PEEK as a base resin has the same performance as PEN.

Further, the Ni—P—B alloy film of Example 1
When the liquid crystalline wholly aromatic polyester (LCP) was combined with the composite resin layer of Example 10 in which spherical carbonized carbon (CB) was filled at a weight ratio of 30%, the motor performance and the relative wear amount were “○”. , But the rotation accuracy was "△". It is considered that the rotation accuracy was deteriorated because the thickness of the composite resin layer was slightly large.

Further, the Ni—P—B alloy film of Example 1
PA to another liquid crystalline wholly aromatic polyester (LCP)
When combined with the composite resin layer of Example 11 in which N-based carbon fibers (CF) were filled by 30% by weight, the motor performance was particularly good and the rotation accuracy and the relative wear amount were also good. With good results.

Further, the Ni—P—B alloy film of Example 1
A resin composition in which polyoxybenzoyl (POB) or non-thermoplastic polyimide (PI) is blended at a weight ratio of 15% to a fluororesin as a base resin to improve the strength of the fluororesin, and a spherical carbonization as a reinforcing agent. Carbon (CB1)
When 15% was filled with the composite resin layers of Examples 12 and 13, the motor performance was slightly inferior in both cases, "△", but the rotational accuracy was particularly good, "回 転".
The relative wear amount was also “○”.

A composite resin using a fluororesin as a base resin has a particularly low hardness and a large vibration damping characteristic as compared with a thermoplastic resin having a high hardness. Is smaller,
The characteristic fluctuation width is particularly small, and stable motor characteristics can be obtained.

The Ni—P-based alloy film of Example 2 and Example 5
8 and 10 to 13, the motor performance was exactly the same as that obtained when the alloy film of the example was used, but the motor performance was relatively small. Was inferior. This is because the coefficient of friction was Ni of Example 1.
The Ni-P alloy film of Example 2 in which the fluorine resin was co-folded by 2.5% was 0.1%, while the Ni-P alloy film of 0.17 was 0.17.
It is considered that this is as small as 11.

When the composite resin layer of Example 5 in which only carbonized carbon was filled was used, the rotation accuracy was "o" because the fluororesin was folded together on the sliding surface of the vibrator. However, because the hardness of the alloy film on this sliding contact surface is slightly low,
The relative wear amount was “△”.

The Ni—P-based alloy film of Example 5 and Example 5
When five types of composite resin layers of 7, 11 and 12 were combined, the Ni—P alloy film of Example 3 in which the fluorine resin was co-folded at a weight ratio of 7.5% had a friction coefficient of 0.08. Perhaps because the motor performance is all “Δ” because the Vickers hardness (450) is considerably low. When the composite resin layer of Example 11 is used, the Ni—P alloy film of Example 2 Both the rotation accuracy and the relative wear amount were lower than those of the combination, and became “△”.

Further, when the motor using the combination of the Ni—P alloy film of Example 3 and the above five types of composite resin layers was disassembled after continuous operation, it was found that the alloy on the sliding contact surface of any vibrating body was The film also had scratches in the sliding direction, indicating that the hardness of the alloy film was insufficient.

In the present embodiment, the case where the alloy film is formed on the sliding contact surface of the vibrating body 2 and the composite resin layer is provided on the sliding contact surface of the moving body 7 has been described. May be provided with a composite resin layer on the sliding contact surface, and an alloy film may be provided on the sliding contact surface of the moving body.

(Second Embodiment) FIG. 3 shows a second embodiment of the present invention.
The vibrating body and the moving body of the vibration wave motor according to the embodiment are shown in an enlarged manner. The combination of the vibrating body and the moving body of the present embodiment is compatible with the combination of the vibrating body and the moving body of the vibration wave motor shown in FIG. 2, and these are combined with the vibration wave of the first embodiment shown in FIG. By incorporating the vibration wave motor into the motor, the vibration wave motor according to the second embodiment can be configured.

In FIG. 3, reference numeral 51 denotes a piezoelectric element, and reference numeral 52 denotes a vibrating body to which the piezoelectric element 51 is fixed. Vibrator 52
Are made of the same material (see Table 2) and in the same shape as the vibrating body of the vibration wave motor of the first embodiment.

Reference numeral 56 denotes a composite resin layer, which is fixed to the surface (sliding contact surface) of the comb teeth of the vibrator 52 with an epoxy adhesive in this embodiment. The composite resin layer 56 is formed of a composite resin in which a base resin or a resin composition is filled with a reinforcing material or a mixture of a reinforcing material and a lubricant.

A moving body 57 is made of an aluminum alloy and has the same shape and dimensions as the support 5 of the vibration wave motor of the first embodiment. A ternary alloy electroless nickel film is formed on the surface of the moving body 57 (the surface in sliding contact with the composite resin layer 56), or a fluororesin is used in a weight ratio of 1.5 to 8.5.
% Electroformed nickel film (Ni-P).

Here, Table 6 shows an alloy film formed on the sliding contact surface of the moving body 57 in this embodiment, and Table 7 shows a composite resin layer provided on the sliding contact surface of the vibrating body 52 in this embodiment. Is shown.

[0068]

[Table 6]

The examples 1 and 2 of the alloy film shown in Table 6 correspond to the examples 1 and 2 of the alloy film (see Table 3) of the vibration wave motor of the first embodiment. In this embodiment, since the electroless nickel film is formed on the moving body 57 of the aluminum alloy, the temperature is set to 200 ° C. in consideration of thermal deformation.
To obtain the Vickers hardness shown in Table 6.

[0070]

[Table 7]

Six examples of the composite resin layer shown in Table 7 are as follows.
Composite resin layer of vibration wave motor of first embodiment (see Table 4)
Therefore, detailed description is omitted here.

Next, the alloy film of the moving body 57 (the alloy film of the first and second embodiments) described above is combined with the various composite resin layers of the vibrator 52 (the composite resin layers of the fifth to thirteenth embodiments). The evaluation results of the vibration wave motor used will be described with reference to Table 8. Note that, as with the motor of the first embodiment, the evaluation result is a rated rotation speed of 60 rpm and a torque of 8 kg ·
It is an evaluation result when performing continuous operation in cm.

[0073]

[Table 8]

First, the Ni—P—B alloy film of Example 1
When PEN was combined with the composite resin layer of Example 5 in which only the reinforcing material was filled, the motor performance was “○”,
The rotation accuracy and the relative wear amount were slightly poor in △.

Further, the Ni—P—B alloy film of Example 1
When the composite resin layer of Example 6 in which PEN was filled with a reinforcing material and a fluororesin as a lubricant was combined, the motor performance and rotational accuracy were “「 ”, and the relative wear amount was“ △ ”.

Further, the Ni—P—B alloy film of Example 1
When the composite resin layer of Example 7 in which PEN is filled with carbonized carbon (CB) as a reinforcing material at a weight ratio of 35% and filled with a fluororesin and a graphite powder as a lubricant, the motor performance and the rotation were improved. Accuracy is "○",
The relative wear amount was “△”. Then, when the motor was disassembled, a very small amount of deposit was observed on a part of the alloy film.

Further, the Ni—P—B alloy film of Example 1
Carbon fiber (CF) as a reinforcing material is added to PEN in a weight ratio of 20.
%, All the evaluation items were “○” when the composite resin layer of Example 8 was filled with the fluororesin and graphite powder as lubricants.

Further, the Ni—P—B alloy film of Example 1
When the liquid crystalline wholly aromatic polyester (LCP2) was combined with the composite resin layer of Example 11 in which carbon fiber (CF) was filled at 30%, the motor performance and the relative wear amount were “○”.
And the rotation accuracy was “△”. In this case, it is necessary to fill the composite resin layer with a fluororesin as a lubricant to obtain a stable sliding contact surface.

Further, the Ni—P—B alloy film of the embodiment,
The motor performance of the composite resin layer of Example 12 in which carbonized carbon beads (CB) were filled with 15% by weight of the resin composition of PTFE and POB was “△”, but the rotation accuracy and relative wear were good. ○ ”.

A composite of Example 7 and Example 8 wherein the Ni-P alloy film obtained by co-folding 2.5% of the fluororesin of Example 2 and PEN were filled with a reinforcing agent, a fluororesin as a lubricant and graphite powder. When combined with the resin layer, exactly the same evaluation results were obtained as when combined with the Ni-P-B alloy film of Example. However, when the composite resin layer of Example 8 was used, a slight scratch in the sliding direction was found on the mating alloy film.

When the Ni—P alloy film of Example 2 was combined with the composite resin layers of Examples 11 and 12,
The same result as that obtained by combining with the Ni—P—B alloy film of Example 1 was obtained, and when the composite resin layer of Example 11 was used, scratches in the sliding direction were found in the alloy film.

In this embodiment, the case where the composite resin layer is provided on the sliding contact surface of the vibrating member 52 and the alloy film is provided on the sliding contact surface of the moving member 57 has been described. An alloy film may be formed on the sliding contact surface, and a composite resin layer may be provided on the sliding contact surface of the moving body.

The rotating shaft 10 of the vibration wave motor described in each of the above embodiments is connected to a transfer drum driving mechanism of a copying machine as shown in FIG. 1, for example, to stably drive the transfer drum. It is used as a drive source for various devices.

The present invention may use the above embodiments and modified examples, or their technical elements in combination as needed.

[0085]

As described above, according to the first aspect of the present invention, a ternary alloy electroless nickel film is formed on one sliding surface of the vibrating body and the contact body, and fluorine is formed on the other sliding surface. A composite resin layer containing a reinforcing material such as a resin is formed. Further, in the second invention of the present application, an electroless nickel film in which a fluororesin is eutectoid is formed on one sliding contact surface, and a composite resin layer containing a reinforcing material such as carbon fiber is formed on the other sliding contact surface. ing.

For this reason, according to the first aspect of the present invention, one of the sliding surfaces does not contain hard silicon carbide particles, so that the abrasion of the composite resin layer on the other sliding surface can be suppressed. Can be.

Further, according to the first and second aspects of the present invention, it is possible to improve the lubricity by uniformly forming the fluororesin film on the one sliding contact surface at the beginning of the operation of the driving device. Generation of abrasion powder from the composite resin layer can be suppressed, and adhesion of the abrasion powder to the electroless nickel film and deposition on the composite resin layer can be prevented. Therefore, it is possible to stabilize the coefficient of friction between the vibrating body and the contacting body, and realize a vibration type driving device having excellent driving performance and rotational accuracy and a long life.

The electroless nickel film was formed to a thickness of 100 to 400.
By performing the heat hardening treatment at ℃, a harder and more stable alloy film can be formed.

Further, when a lubricant is contained in the composite resin layer, more excellent driving performance and the like can be obtained.

[Brief description of the drawings]

FIG. 1 is a sectional view of a vibration wave motor according to a first embodiment of the present invention.

FIG. 2 is a partially enlarged sectional view of a vibrating body and a moving body constituting the vibration wave motor.

FIG. 3 is a sectional view of a vibration wave motor according to a second embodiment of the present invention.

[Explanation of symbols]

 1,51 Piezoelectric element 2,52 Vibrator 5 Support 6,56 Composite resin layer 7,57 Moving body

Claims (21)

[Claims] 1. A vibration-type driving device that relatively frictionally drives a vibrating body in which vibration is excited and a contact body that comes into contact with the vibrating body, wherein one of the vibrating body and the contacting body has a sliding contact surface. A ternary alloy electroless nickel film and a composite resin layer containing a resin or a resin composition containing a reinforcing material provided on the other sliding contact surface. 2. The method according to claim 1, wherein the electroless nickel film has a thickness of 100 to 40.
The vibration-type driving device according to claim 1, wherein the vibration-type driving device has been subjected to a heat curing treatment at 0 ° C. 3. The vibration type driving device according to claim 1, wherein the electroless nickel film is made of a nickel-phosphorus-boron alloy. 4. The vibration type driving device according to claim 1, wherein said resin is a thermoplastic resin or a fluororesin. 5. The method according to claim 1, wherein the thermoplastic resin is polyether nitrile (PEN), polyether ether ketone (PEE).
The vibration-type driving device according to claim 4, wherein the driving device is K) or a liquid-crystalline wholly aromatic polyester (LCP). 6. The vibration type driving device according to claim 4, wherein the fluororesin is a tetrafluoroethylene resin (PTFE). 7. The vibration type driving device according to claim 1, wherein the resin composition comprises a fluororesin and polyoxybenzoyl (POB) or polyimide (PI). 8. The vibration-type driving device according to claim 1, wherein the reinforcing material is carbon fiber, granular or spherical carbon beads, or a mixture of carbon fibers and carbon beads. 9. The vibration type driving device according to claim 1, wherein a lubricant is contained in the composite resin layer. 10. The vibration type driving device according to claim 9, wherein the lubricant is a fluororesin or a mixture of a fluororesin and graphite powder. 11. A vibration-type driving device that relatively frictionally drives a vibrating body for which vibration is excited and a contact body that comes into contact with the vibrating body, wherein one of the vibrating body and the contacting body has a sliding contact surface. Is provided with an electroless nickel film obtained by eutectoid deposition of a fluororesin in a weight ratio of 1.5 to 8.5%, and a composite resin layer containing a resin or a resin composition containing a reinforcing material is provided on the other sliding contact surface. A vibration type driving device characterized by the above-mentioned. 12. The electroless nickel film according to claim 1, wherein
The vibration-type driving device according to claim 11, wherein the vibration-type driving device has been subjected to a heat curing treatment at 00C. 13. The method as claimed in claim 13, wherein the electroless nickel film is made of nickel-
The vibration type driving device according to claim 11, wherein the vibration type driving device is made of a phosphorus alloy or a nickel-boron alloy. 14. The vibration type driving device according to claim 11, wherein the resin is a thermoplastic resin or a fluororesin. 15. The thermoplastic resin is made of polyether nitrile (PEN), polyether ether ketone (P
EEK) or liquid crystalline wholly aromatic polyester (LCP)
The vibration type driving device according to claim 14, wherein: 16. The vibration type driving device according to claim 14, wherein the fluororesin is a tetrafluoroethylene resin (PTFE). 17. The vibration type driving device according to claim 11, wherein the resin composition is made of a fluororesin and polyoxybenzoyl (POB) or polyimide (PI). 18. The vibration type driving device according to claim 11, wherein the reinforcing material is carbon fiber, granular or spherical carbon beads, or a mixture of carbon fibers and carbon beads. 19. The vibration-type driving device according to claim 11, wherein the composite resin layer contains a lubricant. 20. The vibration type driving device according to claim 19, wherein the lubricant is a fluororesin or a mixture of a fluororesin and graphite powder. 21. A device comprising the vibration type driving device according to claim 1. Description: