JPH11316197A - Method and device for internal inspection of flat plate material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and device for internal inspection of plane sheet material, which is suitable for a continuous inspection of a plane sheet material in an automated line, can detect the position in the thickness direction of the plane sheet material and extension degree of an internal defect, and can be miniaturized. SOLUTION: While continuously moving a plane sheet material A for an electromagnetic irradiation machine 3, a plurality of transmission images, different in an illuminating angle, of the plane sheet material A obtained by the electromagnetic irradiation are taken out. Among these transmission images, two or more transmission images A1, A2 projecting internal defect images a1 to c2 are selected to analyze changes in the internal defect images a1 to c2 corresponding to the transmission images A1, A2, so that the positions in the thickness direction and extension degrees of the internal defects a, b, c of the plane sheet material A can be distinguished.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an internal inspection method and an internal inspection apparatus for inspecting an internal defect of a flat plate.

[0002]

2. Description of the Related Art Conventionally, various methods and apparatuses using a transmission image of an electromagnetic wave transmitted through an inside of an object have been proposed for nondestructively inspecting an internal defect of a flat plate. However, in the conventional method using a transmission image of an electromagnetic wave, analysis is performed using one type of transmission image for one flat material.
The positional information such as the position of the internal defect in the thickness direction of the flat material and the degree of spread could not be inspected. In addition, since the test object is fixed and the electromagnetic wave irradiator and the transmission image sensor are moved for inspection, it is necessary to fix the test object once for inspection. Could not be inspected while moving continuously.

Further, a moving device for simultaneously moving the electromagnetic irradiator and the transmission image sensor has been large. The following has been proposed as an internal inspection method or apparatus for solving such a problem. Japanese Patent Application Laid-Open No. 61-288187 discloses that a transmission image is double-exposed by radiating the thickness of a concrete wall, the position of an internal reinforcing bar, and the like to a photographic film by changing the position of a radiation generator, and performing a double exposure on the photographic film. We have proposed a method for measuring the radiation transmission of structures. In this method, the position information in the thickness direction of the inspection object can be obtained by using different transmission images, but the inspection object is fixed and is not suitable as an inspection method in an automated line. Was.

On the other hand, Japanese Patent Application Laid-Open No. 61-10749 discloses that an object to be inspected is a moving traveling plate, and the surface of the traveling plate is irradiated with continuous X-rays at a predetermined incident angle, and the transmitted X-ray on the opposite side of the traveling plate is exposed. X-rays and transmission diffracted X-rays are detected, and the thickness of the traveling plate is obtained from the amount of attenuation of the transmitted X-rays. From the relationship between the obtained thickness and the energy intensity of the transmitted diffraction X-rays, A device for measuring the surface and internal characteristics of a traveling plate for measuring the surface and internal characteristics of the traveling plate has been proposed. In this product, the running plate is used as the inspection object, so it is suitable for automation lines. Also, the surface condition and internal characteristics of the inspection object can be measured, but the position and spread of internal defects in the thickness direction, etc. Is
It could not be measured.

[0005]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and is suitable for continuous inspection of a flat plate in an automation line. Can inspect the position and extent of the
It is another object of the present invention to provide an internal inspection method and an internal inspection device that can be miniaturized.

[0006]

In order to achieve the above object, the present invention proposes an internal inspection method for a flat plate material in claims 1 to 4, and an internal inspection apparatus using the method in claims 5 to 14. ing. The internal inspection method for a flat plate material according to claim 1, wherein a transmission image image obtained by irradiating the flat plate material with an electromagnetic wave is analyzed to inspect an internal defect. While continuously moving, a plurality of transmission image images obtained by irradiating the same plate material with different irradiation angles obtained by irradiating an electromagnetic wave were taken in, and from among the transmission image images thus obtained, an internal defect image was projected. The above-described transmission image images are selected, and by analyzing the change of the corresponding internal defect image in each transmission image image, the position and the extent of the internal defect of the flat material in the thickness direction are identified.

The inspection apparatus including the electromagnetic wave irradiator is fixed, and the inspection is performed while continuously moving the flat plate material to be inspected. Therefore, the inspection apparatus is suitable as an inspection method in an automated line. In addition, since the analysis is performed using different transmission image images obtained by moving the same flat plate with respect to the electromagnetic wave irradiator, these different transmission image images are obtained at different irradiation angles with respect to internal defects of the flat plate. Different internal defect images due to the irradiated electromagnetic waves are obtained, and by comparing at least two types of such different internal defect images, the plane direction of the internal defect in the flat plate material can be obtained using a simple geometric triangle theorem. Not only the position and size of the object, but also the position in the thickness direction and the degree of spread. In other words, in other words, it is possible to know the laminated structure inside the flat plate material.

Further, in addition to the above-described analysis by calculation, the same internal defect image is continuously or intermittently displayed even when the obtained transmission image is displayed on a CRT or the like and visually observed by a person. Since the analysis can be performed while observing how the internal defect gradually changes, it is possible to more specifically and clearly grasp the three-dimensional position and the spread of the internal defect inside the flat plate material.

Here, the term "flat material" refers to a material whose spread in the flat plate direction is relatively large compared to its thickness direction, and whose thickness is constant in the spread direction of the flat plate. . Furthermore, the internal configuration basically refers to a configuration that is constant in the spreading direction of the flat plate. However, a laminated structure may be formed in the thickness direction, and the physical properties of each layer may be different. Specifically, laminated plywood, various plate materials, synthetic resin plate materials and laminate materials,
A transparent or translucent plate material corresponds to this.

Electromagnetic waves are electromagnetic waves in physics,
It includes everything that has the ability to penetrate objects,
In addition to so-called radiation, X-rays, etc., they include visible light, invisible light, infrared rays, far infrared rays, ultraviolet rays, and the like.
According to a second aspect of the present invention, in the method for inspecting the inside of a flat plate according to the first aspect, X-rays are used as the electromagnetic waves.

According to a third aspect of the present invention, in the first aspect, the flat plate is made of a transparent or translucent material, and an electromagnetic wave in a visible region is used as the electromagnetic wave. It is characterized by the following. An internal inspection apparatus for a flat plate material according to claim 4, wherein the flat plate material moving means for continuously moving the flat plate material, an electromagnetic wave irradiator, an electromagnetic wave transmission image pickup device including a transmission image sensor, and a flat plate material. While continuously moving, two or more transmission image images showing the internal defect image are selected from a plurality of transmission image images of the same flat plate with different irradiation angles obtained by the transmission image sensor, and each transmission image image is selected. And a calculation device for calculating the position and extent of the internal defect of the flat plate material in the thickness direction by analyzing the change of the corresponding internal defect image.

This apparatus is an internal inspection apparatus using the internal inspection method according to the first aspect. Here, the flat plate moving means is not limited as long as it can continuously move the flat plate. For example, a belt conveyor, a rotary table, a chain moving unit, and the like are included. The moving direction is desirably a linear movement in one direction and a moving speed that does not change is desirable, but is not limited to this. Also,
Here, although the flat plate moving means is described as being included in the internal inspection device, a belt conveyor or the like of a normal automation line can be used as it is.

Since the arithmetic device has a simple arithmetic process, a general-purpose arithmetic device such as a personal computer can be used. Further, since the electromagnetic wave transmission image capturing device and the arithmetic device do not need to be moved, they can be fixedly installed at an appropriate position on the automation line, and the device can be downsized. According to a fifth aspect of the present invention, in the flat plate internal inspection apparatus according to the fourth aspect, a plurality of the electromagnetic wave transmission image pickup devices are provided at different positions with respect to the continuously moved flat plate material. A plurality of transmission image images of the same flat plate member having different irradiation angles obtained from the plurality of electromagnetic wave transmission image capturing devices are used.

[0014] Since the electromagnetic wave transmission image pickup devices are provided at different positions, even if the transmission image images are obtained from both at the same time, the image of the internal defect may be in a parallel direction or along the moving direction of the flat plate material. Since transmitted images are obtained by electromagnetic waves having different irradiation angles from electromagnetic wave irradiators at different positions in the perpendicular direction, different internal defect images can be obtained in a shorter time, which is suitable for short-time processing. In addition, the number of types of obtained transmission image images having different irradiation angles is increased, so that more judgment information can be obtained.

According to a sixth aspect of the present invention, in the flat plate internal inspection apparatus according to any one of the fourth and fifth aspects, the arithmetic unit moves the flat plate in a plane in which the flat plate is continuously moved. A plurality of different transmission image images of the same plate material obtained by passing the electromagnetic wave transmission image pickup device through the electromagnetic wave transmission image capturing device a plurality of times by making the direction of the plate material different at right angles to the direction are used. Features.

Since transmission image images of different modes can be obtained, it becomes more judgment material and more detailed inspection can be performed. According to a seventh aspect of the present invention, in the flat plate internal inspection apparatus according to the fifth aspect, the plurality of electromagnetic wave transmission image capturing apparatuses are provided at different positions in a direction perpendicular to a continuous moving direction of the flat material. It is characterized by.

According to an eighth aspect of the present invention, in the flat panel material internal inspection apparatus according to the fifth aspect, the plurality of electromagnetic wave transmission image capturing devices are provided at different positions in a parallel direction along a continuous moving direction of the flat material. It is characterized by having. According to a ninth aspect of the present invention, in the flat material internal inspection apparatus according to the ninth aspect, the flat material is caused to pass through the first electromagnetic wave transmission image capturing device among the plurality of electromagnetic wave transmission image capturing devices provided at the different positions. Then, after rotating the direction of the flat plate material at right angles to the moving direction in the moving plane, the plate material is passed through the second electromagnetic wave transmission image capturing apparatus.

[0018] A different transmission image in the same mode as in claim 6 can be obtained on an automation line. According to a tenth aspect of the present invention, in the flat plate internal inspection device according to the eighth aspect, the electromagnetic wave irradiators of the plurality of electromagnetic wave transmission image capturing devices provided at the different positions irradiate electromagnetic waves of different intensities. I do.

By adjusting the intensity of the electromagnetic wave, it is possible to obtain a transmission image of an internal defect in which a transmission image is not formed with an electromagnetic wave of a single intensity, and it is also possible to adjust the contrast of the transmission image and reduce noise. it can. here,
The strength of electromagnetic waves refers to the strength of electromagnetic wave energy and the strength of penetrating power to an object.

According to an eleventh aspect of the present invention, in the apparatus for inspecting the inside of a flat plate according to any one of the fourth to tenth aspects, the electromagnetic wave irradiator irradiates X-rays. Claim 1
The internal inspection device for a flat plate material according to claim 2, wherein
In any one of the above, the internal inspection device further includes an external appearance imaging device for imaging the external appearance of the flat plate material, and inspects an internal defect using a combination of the external appearance image of the flat plate material obtained by the external appearance imaging device. It is characterized by the following.

Since the appearance image can also be used as a judgment material, a more accurate inspection of the internal defect can be performed when the internal defect also appears on the surface of the flat plate. An internal inspection apparatus for a flat plate according to claim 13, wherein the flat plate is made of a transparent or translucent material according to any one of claims 4 to 9, and the electromagnetic wave irradiator is in a visible region. Irradiating the electromagnetic waves.

When the object to be inspected is transparent or translucent, even if electromagnetic waves in the visible region, for example, visible light are used,
A transmission image can be obtained. In this case, the electromagnetic wave irradiator can be made cheaper, and the cost can be reduced. According to a fourteenth aspect of the present invention, in the tenth aspect of the present invention, the flat plate member is made of a transparent or translucent material, and a plurality of electromagnetic wave transmission image pickups provided at the different positions are provided. The electromagnetic wave irradiator of the device irradiates electromagnetic waves having different wavelengths in the visible region.

In the case of using electromagnetic waves in the visible region, light of different colors can be used by adjusting the wavelength. Here, an application example is proposed. By doing so, the mode of the internal inspection device increases,
Selection according to the conditions becomes possible. When light rays of different colors are used, the internal defect can be specified by measuring the change in color of the synthesized transmission image.

[0024]

Embodiments of the present invention will be described below with reference to the drawings. First, the basic concept of the flat plate internal inspection method of the present invention will be described. FIG.
(A), (b) is a basic conceptual diagram of the internal inspection method of the flat plate material of the present invention. In FIG. 1, reference numeral 2 denotes a plate material moving means conceptually shown, 3 denotes an electromagnetic wave irradiator, 4 denotes a transmission image sensor conceptually shown, A denotes a plate material to be inspected, A1,
A2 is a transmission image image having different electromagnetic wave irradiation angles obtained by intermittently irradiating the electromagnetic wave with the electromagnetic wave irradiator 3 while continuously moving the flat plate material A.

A, b, and c are internal defects existing inside the flat plate material A, and have different forms as described later. a1, b1, c1 are the internal defect images in the transmission image A1 of the internal defects a, b, c, and a2, b2, c2 are the internal defects a, b, c.
5 is an internal defect image in the transmission image A2. In the side view of the flat plate material A in FIGS. 1A and 1B, the internal defects a, b, and c are shown in a transparent manner, and the electromagnetic wave irradiation device 3
The trajectory of the irradiated electromagnetic wave is schematically indicated by a solid line only for the one passing through the end of the internal defect.
Also, in FIG. 1 (a), on the right side of the figure, there is shown an X arrow view showing the position of an internal defect inside the flat plate material A, and this figure also shows the internal defects a, b, c. This is shown in a transparent manner from the direction of the arrow X. This X view is shown in FIG.
(B) is the same as FIG. 1 (a) and is not particularly shown.

As can be seen from the side view of the plate material A in FIG. 1A and the view taken in the direction of the arrow X, the internal defect a is a linear defect extending vertically in the thickness direction of the plate material A, and the internal defect b is A flat defect c at the lower portion of the flat plate A and extending in the front-rear and left-right directions in the flat plate direction, and a linear defect c at the upper portion of the flat plate A and extending in the moving direction of the flat plate A. The internal inspection method of the present invention obtains internal defect images of transmission image images having a plurality of different irradiation angles with respect to these internal defects, and obtains the internal defect images in the thickness direction of the flat material of the internal defects from the different internal defect images. It is characterized in that the position and the degree of spread are identified.

The flat plate A placed on the flat plate moving means 2 such as a belt conveyor continuously moves at a predetermined speed. At a certain point, when an electromagnetic wave is emitted from the electromagnetic wave irradiator 3 to the flat plate material A, the electromagnetic wave passes through the flat plate material A as shown by a solid line in the figure, and the transmitted electromagnetic wave is imaged by the transmission image sensor 4. The transmission image A1 in FIG. 1A is obtained by the transmission image sensor 4 in this manner, and the transmission images of the internal defects a, b, and c of the flat plate material A are the internal defect images a1, b1. , C1.

FIG. 1B shows a state in which the electromagnetic wave is applied when the flat plate material A moves by the moving distance L as compared with FIG. 1A. Here, in FIG. 1 (b), the position of the flat plate material A at the time of FIG. 1 (a) is indicated by an dashed-dotted imaginary line. In this case, as shown in the figure, when the same flat plate material A moves with respect to the electromagnetic wave irradiator 3, a specific portion of the flat plate material A, for example, when attention is paid to internal defects a, b, and c, Different transmission image images A2 can be obtained when the internal defect is irradiated with electromagnetic waves at different irradiation angles. In this case, the obtained internal defect images a2, b2, and c2 are also different from the internal defect images a1, b1, and c1 of the transmission image A1.

According to the present invention, as described later, not only the planar positions of the internal defects a, b, and c but also the position in the thickness direction and the like are compared by comparing and contrasting the changes of the different internal defect images. The extent of spread can be identified. Also, if there are two types of transparent image images as shown in FIG.
The position and extent of the internal defect in the thickness direction can be identified. However, when a person makes a visual judgment, a transmission image is obtained continuously or intermittently at a predetermined interval, such as a CRT. If you try to project on
It is possible to intuitively know the position of the internal defect in the thickness direction.

For example, the internal defect c at a position closer to the surface of the flat plate material A on the electromagnetic wave irradiation side has a higher speed in the transmission image than the internal defect b at a position farther from the surface. Since the position of the flat plate A in the moving direction is changed, it is intuitively understood that the internal defect c is located closer to the surface of the flat plate A than the internal defect b due to the difference in the moving speed.

FIGS. 2A and 2B are explanatory views of an example of an inspection method for an internal defect in the internal inspection method for a flat plate material according to the present invention. With reference to this drawing, it will be described that the position and the extent of the internal defect in the thickness direction can be identified by using different internal defect images of two different transmission image images. 2A and 2B are FIGS. 1A and 1B, respectively.
The same scene as that described above is shown in an enlarged manner, paying particular attention to the internal defect a. The same portions are denoted by the same reference numerals, and redundant description will be omitted. Here, since only the positions of the internal defect images a1 and a2 on the transmission image images A1 and A2 in the moving direction of the flat plate material A are necessary, the transmission image images A1 and A2
A2 is also shown in its side view. Therefore, the signs of the transmission image images A1, A2 and the transmission image sensor 4 overlap.

In FIG. 2, the ends of the internal defects a of the flat plate material A are denoted by aa and ab, and transmission image images A1 and A2 thereof.
The ends of the corresponding internal defect images a1 and a2 are denoted by aa1 and a2.
b1, aa2, and ab2, and the positions of the ends in the moving direction of the flat plate material A with respect to the vertical lower part of the electromagnetic wave irradiator 3 as the origin, x [aa1], x [ab1], x [aa
2] and x [ab2]. In addition, the electromagnetic wave irradiator 3
The vertical height from the surface of the flat plate A to the position z0, the vertical height from the surface of the transmission image sensor 4 to the position z, the depth aa and ab of the internal defect a from the surface of the flat plate A, That is, positions in the thickness direction are set as positions z1 and z2.

These two types of transmission image images A1,
It suffices if the position and the extent of the internal defect a in the depth direction, that is, the positions z1 and z2 can be obtained from the data obtained from A2. The moving distance L of the flat plate material A is given. From the two types of transmission image images A1 and A2, the positions x [aa1], x [ab1] in the moving direction of the internal defect image,
x [aa2] and x [ab2] can be obtained.

Here, first, the position z1 is obtained. A right-angled triangle having a hypotenuse as a line connecting the electromagnetic wave irradiator 3 and the end aa of the internal defect a, the electromagnetic wave irradiator 3 and the transmission image image A1
Is a similar triangle having a common apex angle with the line connecting the end aa1 of the internal defect image a1 being a hypotenuse, and the same holds for the transmission image A2. Therefore, the following equation is established based on the similarity between these triangles. However, in the following equations, in order to avoid confusion, multiplication is indicated by the symbol “*” and division is indicated by the symbol “/”.

(X [aa1] * (z0 + z1) / z) + (x [aa2] * (z0 + z1) / z) = L (Formula 1) In this formula 1, the unknown is only the position z1, and the other Since the value is known, the position z1 can be obtained from Equation 1. z1 = (z * L / (x [aa1] + x [aa2]))-z0 (Equation 2) Similarly, for z2, (x [ab1] * (z0 + z2) / z) + (x [ab2] * (Z0 + z2) / z) = L (Equation 3) holds, and the position z2 can be obtained from this equation 3.

Z2 = (z * L / (x [ab1] + x [ab2]))-z0 (Equation 4) In this manner, the depths of the end points aa and ab of the internal defect a from the surface of the flat plate material A That is, positions z1 and z2 in the thickness direction
It can be seen that the internal defect a is a linear defect extending vertically in the thickness direction of the flat plate material A, and the defect extends from the position z1 to the position z2.

In the same manner, with respect to the other internal defects b and c, not only the position on the plane of the flat material but also the position in the thickness direction and the degree of spread can be identified by this method. Next, an internal inspection apparatus for a flat plate material using the internal inspection method of the present invention will be described.

FIG. 3 is a block diagram showing an example of the flat plate internal inspection apparatus of the present invention. The internal inspection device 1 is constituted by a belt conveyor or the like, and receives a transmitted electromagnetic wave by visualizing the electromagnetic wave radiator 3 for irradiating the electromagnetic wave to the flat material A, a flat material moving means 2 for continuously moving the flat material A, and visualizing the electromagnetic wave. Image sensor 4 composed of a detector 41 which performs the transmission, a CCD camera 42 which captures the visualized transmission image as a transmission image image, and a transmission image image obtained by the CCD camera 42 which is composed of a personal computer or the like. And an arithmetic unit 6 for calculating the position of the internal defect. The electromagnetic wave irradiator 3 and the transmission image sensor 4 constitute an electromagnetic wave transmission image pickup device 5.

In the internal inspection apparatus 1, the flat plate material A is continuously moved by the flat plate material moving means 2 between the electromagnetic wave irradiator 3 and the detector 41 of the fixedly provided electromagnetic wave transmission image pickup device 5. The electromagnetic wave is applied from the electromagnetic wave irradiator 3 to the flat plate material A at an appropriate time interval or continuously while being moved.
And illuminate the transmission image as a transmission image image.
Obtained by the transmission image sensor 4.

From the plurality of transmission image images having different irradiation angles obtained for the same flat plate member A, image processing is performed by the arithmetic unit 6 to select two or more transmission image images showing the internal defect image. By analyzing the change of the corresponding internal defect image in each transmission image image, the position and the extent of the internal defect of the flat plate material in the thickness direction are calculated. The details of this method have already been described with reference to FIGS.

The moving method of the flat plate member 2 is not limited as long as the flat plate member can be continuously moved. For example, in addition to the belt conveyor, a rotary table, a chain moving unit, and the like are included. The moving direction is
For the subsequent calculation by the arithmetic unit, it is desirable that the linear movement in one direction be performed and that the movement speed does not change. However, the present invention is not limited to this. Although the flat plate moving means 2 is described as being included in the internal inspection device 1 here, a belt conveyor or the like of a normal automation line can be used as it is.

The electromagnetic wave irradiator 3 and the transmission image sensor 4 of the electromagnetic wave transmission image pickup device 5 use a belt conveyor or the like of an automated line as the flat plate material moving means 2 so that a line such as a belt conveyor is sandwiched in an appropriate place. Can be fixedly provided. Therefore, it is not necessary to newly provide a plate material moving means, and the cost of the entire apparatus can be reduced. In this respect, the moving means of the electromagnetic wave transmission image capturing apparatus is not required as compared with the conventional method in which the flat plate material to be inspected is fixed and the electromagnetic wave transmission image capturing apparatus is moved in the internal inspection apparatus. As a result, it is possible to greatly reduce the cost, and it is suitable for an automation line, and can be attached without making a large change to the automation line, which is convenient.

Further, since the inspection device including the arithmetic device 6 does not need to be moved for the inspection, the size of the device can be reduced. Further, as described above, the arithmetic unit 6
Since the arithmetic processing is simple, a general-purpose arithmetic device such as a personal computer can be used. In addition, the transmission image sensor is not limited to the above-described combination in which the detector for visualizing the electromagnetic wave transmission image and the CCD camera for capturing the image are separate bodies, and may be an integrated one. An intensifier, an electromagnetic imaging tube, an X-ray cassette film, or the like can also be used. Next, various patterns of the flat plate internal inspection apparatus of the present invention will be described. In each case,
The basic part is common in that, while continuously moving the object to be inspected, the transmission images of electromagnetic waves at different irradiation angles of a plurality of irradiation angles are used, but industrial requirements, and various types of the object to be inspected are used. The device pattern is changed according to the mode and material.

FIGS. 4A and 4B are external views of an essential part showing an example of an internal inspection apparatus for a flat plate material according to the present invention, which is characterized by providing a plurality of electromagnetic wave transmission image pickup devices. In the following description, the same portions as those described with reference to FIG. 3 are denoted by the same reference numerals, and redundant description will be omitted. Although not specifically shown, only one computing device is basically provided for a plurality of electromagnetic wave transmission image capturing devices, and may be provided for each electromagnetic wave transmission image capturing device as needed.

In the internal inspection apparatus 1A shown in FIG. 4A, in the direction parallel to the moving direction of the plate material A,
The electromagnetic wave transmission image capturing device 5 is located at two different positions before and after.
The table, that is, two transmission image sensors 4 each including the electromagnetic wave irradiator 3, the detector 41, and the CCD camera 42 are provided. In FIG. 1 and the like, it was necessary to irradiate the electromagnetic waves twice at different times in order to obtain transmission image images of the electromagnetic waves having different irradiation angles.
By operating the respective electromagnetic wave transmission image capturing devices 5 at the same time, transmission image images of electromagnetic waves having different irradiation angles can be obtained at the same time, and necessary transmission image images different in a shorter time can be obtained and high-speed processing can be performed. Therefore, in particular,
This is suitable when the flat plate material A is continuously moved at a high speed.

In the internal inspection device 1B shown in FIG. 4B, two electromagnetic wave transmission image pickup devices 5 are provided at different positions on the right and left sides in a direction perpendicular to the moving direction of the flat plate material A. In the internal inspection method used by the internal inspection apparatus of the present invention, as can be inferred from the description of FIGS. 1 and 2, the different irradiation angles of the electromagnetic waves are different not only in the moving direction of the flat plate material A but also in the moving direction. On the other hand, even if the direction differs at right angles, the position and extent of the internal defect can be similarly recognized by using the transmission image images at the different irradiation angles.

Therefore, also in the case where two electromagnetic wave transmission image pickup devices 5 are provided in the direction perpendicular to the moving direction, necessary different transmission image images can be obtained in a short time as in the case of FIG. Suitable for high-speed processing. FIG. 5 is an external view of a main part showing another example of the internal inspection apparatus for a flat plate material according to the present invention. In the internal inspection device 1C, two electromagnetic wave transmission image pickup devices 5 are provided in the moving direction of the flat plate material A, similarly to the internal inspection device described with reference to FIG. After passing through one electromagnetic wave transmission image capturing device 5 to obtain a transmission image image, the flat plate material A is rotated at right angles to the moving direction, and then the second electromagnetic wave transmission image capturing device 5 is moved. It is characterized by passing through.

In this manner, not only transmission image images of electromagnetic waves having different irradiation angles with respect to the moving direction of the internal defect of the flat plate material A but also transmission of electromagnetic waves having the irradiation angle rotated at right angles to the moving direction. Image images can be obtained and more aspects of the image from different angles can be used to identify the location and extent of internal defects, providing more accurate and more complex internal defect images. Can be identified.

Also, instead of providing the two electromagnetic wave transmission image capturing devices 5 in front and behind as described above and obtaining an image in which the irradiation angle is rotated at a right angle, only one electromagnetic wave transmission image capturing device 5 is used. Even when the direction of the material is made different at right angles and the same electromagnetic wave transmission image capturing device 5 is passed through a plurality of times, similar different transmission image images can be obtained. By doing so, time and labor for associating the first and second data are increased, but different transmission image images obtained by rotating the irradiation angle at right angles are obtained with only one electromagnetic wave transmission image imaging apparatus. be able to.

FIG. 6A is an external view of a main part showing another example of the internal inspection apparatus for a flat plate material according to the present invention, and FIG. 6B is a view showing an example of a transmission image image obtained by the internal inspection apparatus. . In the internal inspection device 1D, two electromagnetic wave transmission image capturing devices 5 are provided in the moving direction of the flat plate material A, similarly to the internal inspection device in FIG. It is characterized in that the intensity of electromagnetic waves emitted by the electromagnetic wave irradiator 3 of each electromagnetic wave transmission image capturing device 5 is different.

In FIG. 6A, as shown in the figure, the electromagnetic wave irradiator of the first electromagnetic wave transmission image pickup device 5 of the two electromagnetic wave transmission image pickup devices 5 along the moving direction of the flat plate material A. The intensity of the electromagnetic wave emitted by the third electromagnetic wave irradiator 3 of the second electromagnetic wave transmission image capturing apparatus 5 is set to be low. In FIG. 6B, the transmission image image A3 obtained by the first electromagnetic wave transmission image capturing device 5 and the transmission image image A4 obtained by the subsequent electromagnetic wave transmission image imaging device 5 correspond to the positions thereof. Is shown.

In the transmission image A3, since an electromagnetic wave having a high energy is irradiated, not only an internal defect image d3 of an internal defect having a high transmittance but also an internal defect image e3 of an internal defect having a low transmittance can be obtained. ing. On the other hand, noise components having a small transmittance are also picked up, so that noise components also increase.
In the transmission image A4, since an electromagnetic wave having low energy is irradiated, an internal defect image of an internal defect having a small transmittance is not obtained, and only an internal defect image d4 of an internal defect having a large transmittance is obtained. . Therefore, in this case, although the noise component is reduced, a minute internal defect having a small transmittance cannot be recognized.

As described above, when a plurality of electromagnetic wave transmission image capturing devices are provided and the intensity of the electromagnetic wave is adjusted stepwise in accordance with the object to be inspected and irradiated so as to obtain different transmission image images, the identification can be performed. The range of possible internal defects increases.
FIG. 7A is an external view of a main part showing another example of the internal inspection device for a flat plate material according to the present invention, and FIG. 7B is a diagram showing an example of an external appearance image of the flat plate material obtained by the internal inspection device. (c) is a cross-sectional view of the flat plate.

The internal inspection apparatus 1E includes an appearance imaging device 7 for imaging the appearance of the surface of the flat plate to be inspected, in addition to the electromagnetic wave transmission image imaging device 5 using the transmission image so far. In addition to the above, an internal defect is inspected by using a combination of an appearance image of a flat plate material. In the internal inspection device 1E, the electromagnetic wave is emitted from the electromagnetic wave irradiator 3 of the electromagnetic wave transmission image capturing device 5 to the flat plate material A, and at the same time, the appearance of the flat plate material A is also imaged by the external appearance imaging device 7, and the transmission image image of the flat plate material is obtained. In addition, an appearance image can be obtained.

FIG. 7 (b) shows an external appearance image A0 of the surface of the flat plate material A having the internal defect f on which the defect appears also on the external surface, and the internal defect appearing on the surface of the internal defect f. The surface image f0 is shown. Also, for reference,
The shape of the internal defect f is indicated by a dotted line. FIG. 7 (c)
FIG. 8 is a cross-sectional view of the flat plate material A showing a state of the internal defect f, and shows a cross section cut vertically in the state of FIG.

As described above, in addition to the transparent image image,
Since the appearance image can also be used, when a part of the internal defect appears on the surface, the recognition of the defect can be made more sure and clear. FIG. 8A is an external view of a main part showing another example of the flat plate internal inspection apparatus of the present invention.
(B), (c) is a conceptual explanatory diagram of different transmission image images obtained by the internal inspection device.

In the internal inspection apparatus 1F, the flat plate material to be inspected is a flat plate material B made of a transparent or translucent material, for example, a plastic material. The device 3A is characterized in that it emits electromagnetic waves in the visible region, for example, visible light. In this case, as the detector 41A, a detector corresponding to electromagnetic waves in the visible region is used. However, in the case of visible light, both the irradiator 3A and the detector 41A can be simpler and cheaper, and the cost can be reduced. Down can be planned.

In the case of this internal inspection device 1F, two electromagnetic wave radiators 3A are provided before and after in the traveling direction of the flat plate B,
The front electromagnetic wave irradiator 3A irradiates red visible light, the rear electromagnetic wave irradiator 3A irradiates green visible light, and the transmitted image is received by the detector 41A, and the CCD camera 42A
To obtain a transmission image. FIG.
(B) and (c) show the transmission obtained by simultaneously irradiating red and green visible rays with the internal inspection apparatus 1F while continuously moving the flat plate material B having the internal defect g at different times. It explains the concept of generating an image image, and shows a first irradiation state and a later irradiation state, respectively.

In FIGS. 8B and 8C, the initial state is indicated by a suffix 1 and the subsequent state is indicated by a suffix 2.
g and y indicate a transmission image generated by red irradiation, a transmission image generated by green irradiation, and a transmission image based on yellow generated by combining red irradiation and green irradiation, respectively. That is, when the red and green visible light rays are simultaneously irradiated in this way, red transmission images B1r and B2r and green transmission images B1g and B2g are generated, and as a result, a yellow tone obtained by combining them is used. The transmission image images B1y and B2y are generated. Correspondingly, the transmission images of the internal defect g also include transmission images g1r and g2r for red and transmission images g1 for green.
g, g2g are generated, and as a result, the internal defect images g1y,
g2y is generated. These internal defect images g1y and g2
Even if y is used, the position and extent of the internal defect can be identified in the same manner as the method described with reference to FIGS.

Thus, even when visible light of different colors is used, the position and extent of the internal defect can be identified, the inspection apparatus can be diversified, and the irradiator and detector can be made simple and inexpensive. Since such a device can be used, the cost of the apparatus can be reduced. In addition,
In the above description, a plurality of irradiators and the like are provided as a plurality of examples. However, it goes without saying that three or more irradiators may be provided.

[0061]

As can be understood from the above description, according to the method for inspecting the inside of a flat plate according to the first aspect, the inspection apparatus including the electromagnetic wave irradiator is fixed and the flat plate to be inspected is fixed. Since the inspection is performed while continuously moving one of them, it is suitable as an inspection method in an automated line.

Further, since different transmission image images obtained by moving the same flat plate member with respect to the electromagnetic wave irradiator are analyzed, these different transmission image images are different from each other with respect to the internal defect of the flat plate member. Different internal defect images due to electromagnetic waves irradiated at the irradiation angle are obtained, and by comparing at least two kinds of such different internal defect images, the flat plate material of the internal defect is obtained using a simple geometric triangle theorem. Not only the position and size in the plane direction but also the position and degree of spread in the thickness direction can be known.
In other words, it is possible to know the laminated structure inside the flat material.

Further, the obtained transmission image is converted to a CR image.
Even if it is projected on T etc., and people observe visually,
Analysis can be performed while observing the same internal defect image that changes gradually or intermittently, so the three-dimensional position and extent of the internal defect inside the flat plate material can be specified more specifically. And it can be grasped clearly. According to the internal inspection method for a flat plate material according to the second aspect, since the X-ray is used as the electromagnetic wave, the internal inspection method of the present invention can be easily realized.

According to the method for inspecting the inside of a flat plate material according to the third aspect, the transparent or translucent flat plate material is irradiated with electromagnetic waves in the visible region, so that the inspection can be performed easily at low cost. According to the internal inspection apparatus for a flat plate material according to the fourth aspect, since the internal inspection apparatus uses the internal inspection method according to the first aspect, the effect of the internal inspection method according to the first aspect can be obtained. it can.

Further, since the flat plate moving means can use a belt conveyor or the like of a normal automation line as it is, the cost of the apparatus can be reduced. Further, since the arithmetic device has simple arithmetic processing, a general-purpose arithmetic device such as a personal computer can be used, and the arithmetic device can be configured at a low cost. In addition, since the electromagnetic wave transmission image capturing device and the arithmetic device do not need to be moved for inspection, they can be fixedly installed at an appropriate position on the automation line, and the device can be downsized.

According to the flat plate internal inspection apparatus of the fifth aspect, since the electromagnetic wave transmission image pickup devices are provided at different positions, different transmission image images of the same flat plate material can be simultaneously, that is, in a short time. It is suitable for high-speed processing. In addition, the number of types of obtained transmission image images having different irradiation angles is increased, so that more judgment information can be obtained.

According to the internal inspection device for a flat plate according to the sixth aspect, the arithmetic unit is configured to move the flat plate in a plane in which the flat plate is continuously moved with respect to the moving direction of the flat plate. Of the same flat material obtained by passing through the electromagnetic wave transmission image pickup device a plurality of times at different angles at different right angles, so that transmission image images of different modes are obtained. As a result, it can be used as a source of more judgment and a more detailed inspection can be performed.

According to the flat plate internal inspection device of the present invention, the plurality of electromagnetic wave transmission image pickup devices are provided at different positions in the direction perpendicular to the continuous moving direction of the flat plate. It is possible to simultaneously obtain transmission image images by electromagnetic waves having different irradiation angles in a direction perpendicular to the moving direction of the flat plate. According to the flat plate internal inspection device of the eighth aspect, since the plurality of electromagnetic wave transmission image capturing devices are provided at different positions in the parallel direction along the continuous movement direction of the flat plate, It is possible to simultaneously obtain transmission image images by electromagnetic waves having different irradiation angles in the moving direction.

According to the internal inspection apparatus for a flat plate material according to the ninth aspect, the flat plate material is passed through the first electromagnetic wave transmission image pickup device among the plurality of electromagnetic wave transmission image pickup devices provided at the different positions. After that, after rotating the direction of the flat plate material at right angles to the moving direction in the moving plane, the plate material is passed through the second electromagnetic wave transmission image capturing apparatus, so that a transmission image image of a different mode is formed on the automation line. Obtainable.

According to the flat plate internal inspection device of the present invention, the electromagnetic wave irradiators of the plurality of electromagnetic wave transmission image pickup devices provided at different positions irradiate electromagnetic waves of different intensities. By adjusting the electromagnetic wave of a single intensity, it is possible to obtain a transmission image of an internal defect in which a transmission image is not formed by using an electromagnetic wave of a single intensity. The range of defects expands.

According to the internal inspection apparatus for a flat plate material according to the eleventh aspect, since the electromagnetic wave irradiator irradiates X-rays, a general-purpose irradiator or the like can be used, and the apparatus is less expensive. , Can be simply configured. Claim 12
According to the internal inspection device for a flat material described in the above, the internal inspection device further includes an external appearance imaging device for imaging the external appearance of the flat material, and combines the external appearance image of the flat material obtained by the external appearance imaging device. To inspect for internal defects,
When the internal defect also appears on the surface of the flat plate, more accurate inspection of the internal defect can be performed.

According to the internal inspection apparatus for a flat plate according to the thirteenth aspect, the flat plate is made of a transparent or translucent material, and the electromagnetic wave irradiator irradiates an electromagnetic wave in a visible region. Therefore, the electromagnetic wave irradiator can be made cheaper, and the cost can be reduced. According to the flat plate internal inspection apparatus of claim 14, the flat plate is made of a transparent or translucent material, and the electromagnetic wave irradiators of a plurality of electromagnetic wave transmission image pickup devices provided at different positions. Is designed to irradiate electromagnetic waves of different wavelengths in the visible region, so that the number of modes of the internal inspection device increases, and selection according to conditions becomes possible.

[Brief description of the drawings]

FIGS. 1 (a) and 1 (b) are basic conceptual diagrams of an internal inspection method for a flat plate material according to the present invention.

FIGS. 2A and 2B are explanatory views of an example of an internal defect inspection method in a flat material internal inspection method according to the present invention.

FIG. 3 is a configuration diagram showing an example of the flat plate internal inspection apparatus according to the present invention.

FIGS. 4 (a) and 4 (b) are external views of a main part showing an example of an internal inspection apparatus for a flat plate material according to the present invention.

FIG. 5 is an external view of a main part showing another example of the flat plate internal inspection apparatus of the present invention.

6A is an external view of a main part showing another example of the flat plate internal inspection device of the present invention, and FIG. 6B is a diagram showing an example of a transmission image obtained by the internal inspection device.

FIG. 7A is an external view of a main part showing another example of the internal inspection device for a flat plate material of the present invention, and FIG. 7B is a diagram showing an example of an external appearance image of the flat plate material obtained by the internal inspection device. , (C)
Cross section of the flat plate

FIG. 8A is an external view of a main part showing another example of the internal inspection apparatus for a flat plate material according to the present invention, and FIGS. 8B and 8C are conceptual illustrations of different transmission image images obtained by the internal inspection apparatus. Figure

[Explanation of symbols]

 1 to 1F Internal inspection device 2 Plate material moving means 3 Electromagnetic wave irradiator 4 Transmission image sensor 41, 41A Detector 42, 42A CCD camera 5, 5A Electromagnetic wave transmission image imaging device 6 Arithmetic device 7 Appearance imaging device A, B Plate material A1 -A4 Transmission image image B1, B2 Transmission image image ag Internal defect a1-e3 Internal defect image aa, ab End point of internal defect aa1-ab2 End point image of internal defect g1r-g2y Internal defect image L Moving distance x [aa1] ~ X [ab2] Position of end point image of internal defect z0 Position of flat plate surface z1, z2 Position of end point of internal defect

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[Procedure amendment]

[Submission date] June 22, 1998

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0003

[Correction method] Change

[Correction contents]

Further, a moving device for simultaneously moving the electromagnetic irradiator and the transmission image sensor has been large. The following has been proposed as an internal inspection method or apparatus for solving such a problem. Japanese Patent Application Laid-Open No. Sho 61-288187 discloses that the transmission image is double-exposed by radiating the thickness of a concrete wall, the position of an internal reinforcing bar, and the like to a photographic film by changing the position of a radiation generating device, thereby causing a difference in the transmission image. Proposes a method for measuring the radiation transmission of a structure, which is determined by the following. In this method, the position information in the thickness direction of the inspection object can be obtained by using different transmission images, but the inspection object is fixed and is not suitable as an inspection method in an automated line. Was.

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0004

[Correction method] Change

[Correction contents]

On the other hand, Japanese Patent Application Laid-Open No. 61-10749 discloses that an object to be inspected is a moving traveling plate, and the surface of the traveling plate is irradiated with continuous X-rays at a predetermined angle of incidence, and the transmitted light on the opposite side of the traveling plate. X-rays and transmission diffraction X-rays are detected, and the thickness of the traveling plate material is obtained from the attenuation of the transmission X-rays. From the relationship between the obtained thickness and the energy intensity of the transmission diffraction X-rays, A surface and internal characteristic measuring device for measuring the surface and internal characteristics of the traveling plate is proposed. In this product, the running plate is used as the inspection object, so it is suitable for automation lines. Also, the surface condition and internal characteristics of the inspection object can be measured, but the position and spread of internal defects in the thickness direction, etc. Is
It could not be measured.

Claims (14)

[Claims] 1. A method for inspecting an internal defect by analyzing a transmission image image obtained by irradiating an electromagnetic wave to a flat plate material, wherein the flat plate material is irradiated with the electromagnetic wave while continuously moving the flat material with respect to an electromagnetic wave irradiator. A plurality of transmission image images of the same flat plate obtained at different irradiation angles are captured, and two or more transmission image images showing the internal defect image are selected from the transmission image images thus obtained,
A method for inspecting the inside of a flat plate, wherein the position and the extent of the internal defect of the flat plate in the thickness direction are analyzed by analyzing a change in a corresponding internal defect image in each transmission image. 2. The method according to claim 1, wherein X-rays are used as the electromagnetic waves. 3. The method according to claim 1, wherein the flat plate is made of a transparent or translucent material, and an electromagnetic wave in a visible region is used as the electromagnetic wave. 4. An electromagnetic wave transmission image pickup device comprising: a plate material moving means for continuously moving a plate material; an electromagnetic wave irradiator; and a transmission image sensor; and a transmission image sensor while continuously moving the plate material. From the plurality of obtained transmission image images of the same flat plate with different irradiation angles, two or more transmission image images showing the internal defect image are selected, and the change of the corresponding internal defect image in each transmission image image is determined. An apparatus for inspecting the inside of a flat plate material, comprising: a calculating device for calculating a position and a spread degree of an internal defect in the flat plate material in a thickness direction by analyzing the same. 5. The electromagnetic wave transmission image capturing apparatus according to claim 4, wherein a plurality of the electromagnetic wave transmission image capturing apparatuses are provided at different positions with respect to the continuously moved flat plate member. A flat plate internal inspection apparatus characterized by using a plurality of transmission image images of the same flat plate obtained at different irradiation angles. 6. The flat panel device according to claim 4, wherein the arithmetic unit moves the flat plate at a right angle to a moving direction of the flat plate in a plane in which the flat plate is continuously moved. A plurality of transmission image images of the same plate material having different irradiation angles obtained by passing through the electromagnetic wave transmission image pickup device a plurality of times differently from the above. 7. The internal inspection of a flat plate material according to claim 5, wherein the plurality of electromagnetic wave transmission image pickup devices are provided at different positions in a direction perpendicular to a continuous moving direction of the flat plate material. apparatus. 8. The internal inspection of a flat plate material according to claim 5, wherein the plurality of electromagnetic wave transmission image pickup devices are provided at different positions in a parallel direction along a continuous moving direction of the flat plate material. apparatus. 9. The apparatus according to claim 8, wherein the plate material is passed through a first electromagnetic wave transmission image pickup device among the plurality of electromagnetic wave transmission image pickup devices provided at the different positions, and then, in a moving plane thereof. An internal inspection apparatus for a flat plate, wherein the flat plate is rotated at a right angle to a moving direction and then passed through a second electromagnetic wave transmission image pickup device. 10. The apparatus according to claim 8, wherein the electromagnetic wave irradiators of the plurality of electromagnetic wave transmission image capturing devices provided at the different positions irradiate electromagnetic waves of different intensities. 11. The apparatus according to claim 4, wherein the electromagnetic wave irradiator irradiates X-rays. 12. The internal inspection device according to claim 4, further comprising an external appearance imaging device for imaging the external shape of the flat material, wherein the external appearance of the flat material obtained by the external appearance imaging device is provided. An internal inspection apparatus for a flat plate material, wherein an internal defect is inspected using a combination of images. 13. The apparatus according to claim 4, wherein said flat plate member is made of a transparent or translucent material, and said electromagnetic wave irradiator irradiates an electromagnetic wave in a visible region. Internal inspection equipment for flat materials. 14. The electromagnetic wave irradiator of the plurality of electromagnetic wave transmission image pickup devices provided at the different positions, wherein the flat plate member is made of a transparent or translucent material. An internal inspection apparatus for a flat plate material, which irradiates electromagnetic waves in the visible region.