WO2009031420A1 - Method and device for detecting micro foreign matter within transparent plate - Google Patents

Method and device for detecting micro foreign matter within transparent plate Download PDF

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Publication number
WO2009031420A1
WO2009031420A1 PCT/JP2008/065041 JP2008065041W WO2009031420A1 WO 2009031420 A1 WO2009031420 A1 WO 2009031420A1 JP 2008065041 W JP2008065041 W JP 2008065041W WO 2009031420 A1 WO2009031420 A1 WO 2009031420A1
Authority
WO
WIPO (PCT)
Prior art keywords
transparent plate
foreign matter
light beam
micro foreign
produced
Prior art date
Application number
PCT/JP2008/065041
Other languages
French (fr)
Japanese (ja)
Inventor
Kimiaki Oto
Original Assignee
Asahi Glass Company, Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Company, Limited filed Critical Asahi Glass Company, Limited
Priority to JP2009531186A priority Critical patent/JPWO2009031420A1/en
Priority to CN200880104499.3A priority patent/CN101790679B/en
Publication of WO2009031420A1 publication Critical patent/WO2009031420A1/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901Optical details; Scanning details
    • G01N2021/8905Directional selective optics, e.g. slits, spatial filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8967Discriminating defects on opposite sides or at different depths of sheet or rod
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/94Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A light-blocking micro foreign matter within a transparent plate, if any, is stably detected and information on the depth of the micro foreign matter is acquired. A method is used for detecting a micro foreign matter (4), if any, present in a transparent plate (1) having a uniform index of refraction and a specific thickness by measuring bright spots (E, F) produced by scattering or the like of the projected light beam (2). The method is characterized in that the light beam (2) is made to enter the inside of the transparent plate at a predetermined angle of inclination with respect to the thickness direction of the transparent plate, thereby an inside light beam (I) entering the inside and an inside light beam (II) of when the inside light beam (I) is reflected by the surface of the transparent plate are produced inside the transparent plate, the transparent plate and the light beam (2) are relatively moved (in a direction G) without varying the entering angle of the light beam, the bright spots (E, F) produced when the same micro foreign matter is illuminated with the respective inside light beams (I, II) are measured in the thickness direction of the transparent plate, and the position of the micro foreign matter in the transparent plate is determined.
PCT/JP2008/065041 2007-09-04 2008-08-22 Method and device for detecting micro foreign matter within transparent plate WO2009031420A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009531186A JPWO2009031420A1 (en) 2007-09-04 2008-08-22 Method and apparatus for detecting minute foreign matter inside transparent plate
CN200880104499.3A CN101790679B (en) 2007-09-04 2008-08-22 Method and device for detecting micro foreign matter within transparent plate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-229468 2007-09-04
JP2007229468 2007-09-04

Publications (1)

Publication Number Publication Date
WO2009031420A1 true WO2009031420A1 (en) 2009-03-12

Family

ID=40428740

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065041 WO2009031420A1 (en) 2007-09-04 2008-08-22 Method and device for detecting micro foreign matter within transparent plate

Country Status (3)

Country Link
JP (3) JPWO2009031420A1 (en)
CN (1) CN101790679B (en)
WO (1) WO2009031420A1 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010249552A (en) * 2009-04-13 2010-11-04 Central Glass Co Ltd Method and device for discriminating flaw of glass plate
WO2012077683A1 (en) * 2010-12-09 2012-06-14 旭硝子株式会社 Method and system for measuring defect in glass ribbon
WO2012077542A1 (en) * 2010-12-09 2012-06-14 旭硝子株式会社 Glass substrate
JP2015135266A (en) * 2014-01-17 2015-07-27 旭硝子株式会社 Method of stably detecting minute foreign matter within glass plate, and apparatus for implementing the same
WO2015162303A1 (en) * 2014-04-25 2015-10-29 Boraident Gmbh Method and device for detecting nickel sulphide inclusions in a glass plate
EP2895847A4 (en) * 2012-09-14 2016-05-25 Luoyang Landglass Tech Co Ltd Detection system based on modulation of line structured laser image of glass
CN111487191A (en) * 2020-04-26 2020-08-04 山东创策电气科技有限公司 Toughened glass spontaneous explosion hidden danger detection method and device based on image processing
CN111721774A (en) * 2020-06-23 2020-09-29 湖南正中制药机械有限公司 Lamp inspection detection method for automatic lamp inspection machine

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5791101B2 (en) * 2011-05-16 2015-10-07 芝浦メカトロニクス株式会社 Bonded plate inspection apparatus and method
CN104634789A (en) * 2014-04-24 2015-05-20 东旭集团有限公司 System and method for performing foreign matter inspection on upper surface of ultrathin glass substrate
CN105699400A (en) * 2014-11-28 2016-06-22 中电电气(上海)太阳能科技有限公司 Visual inspection device of toughened glass
CN106770315A (en) * 2016-11-30 2017-05-31 浙江宜佳新材料股份有限公司 A kind of adhesive film laser monitoring device of bond paper
CN106932406A (en) * 2017-04-28 2017-07-07 许迪 A kind of device for detecting transparent substance defect
WO2019041087A1 (en) * 2017-08-28 2019-03-07 深圳市兴华炜科技有限公司 Transparent object testing method and related product
CN111712473B (en) * 2018-03-07 2022-02-25 佳殿玻璃有限公司 Method and system for detecting inclusions in float glass based on wavelength analysis
CN109632828B (en) * 2018-10-29 2021-11-09 彩虹显示器件股份有限公司 Sheet glass defect rechecking system and rechecking method
CN110082361B (en) * 2019-05-27 2024-04-30 成都领益科技有限公司 Object appearance and crack detection device and detection method
CN111451188A (en) * 2020-04-13 2020-07-28 徐洪 Dust removal device for lens and using method thereof
JP7077523B2 (en) * 2020-06-03 2022-05-31 株式会社東京精密 Crack detection device and crack detection method
CN113310993A (en) * 2021-06-24 2021-08-27 宗子凯 Transparent plate point defect detection system and method
CN116282869B (en) * 2023-03-24 2023-09-29 南京我乐家居股份有限公司 Intelligent production control method and system for toughened glass

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11242001A (en) * 1997-07-17 1999-09-07 Hoya Corp Method and device for inspecting an unevenness of light-transmission material, and method for selecting light-transmission substrate
JPH11316197A (en) * 1998-05-06 1999-11-16 Matsushita Electric Works Ltd Method and device for internal inspection of flat plate material
JP2005300275A (en) * 2004-04-08 2005-10-27 Central Glass Co Ltd Method for detecting defect in transparent plate and its apparatus
JP2006071284A (en) * 2004-08-31 2006-03-16 Central Glass Co Ltd Inside and outside discrimination method of flaw of glass substrate

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54106289A (en) * 1978-02-07 1979-08-21 Nippon Sheet Glass Co Ltd Defect detector for glass sheet
FR2681429B1 (en) * 1991-09-13 1995-05-24 Thomson Csf METHOD AND DEVICE FOR INSPECTING GLASS.
JPH0882602A (en) * 1994-09-13 1996-03-26 Nippon Electric Glass Co Ltd Method and apparatus for inspecting fault of plate glass
JP2769797B2 (en) * 1995-03-15 1998-06-25 東洋ガラス株式会社 Method for detecting minute defects in transparent objects
AUPQ262299A0 (en) * 1999-09-02 1999-09-23 Resolve Engineering Pty Ltd Detection of inclusions in glass

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11242001A (en) * 1997-07-17 1999-09-07 Hoya Corp Method and device for inspecting an unevenness of light-transmission material, and method for selecting light-transmission substrate
JPH11316197A (en) * 1998-05-06 1999-11-16 Matsushita Electric Works Ltd Method and device for internal inspection of flat plate material
JP2005300275A (en) * 2004-04-08 2005-10-27 Central Glass Co Ltd Method for detecting defect in transparent plate and its apparatus
JP2006071284A (en) * 2004-08-31 2006-03-16 Central Glass Co Ltd Inside and outside discrimination method of flaw of glass substrate

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010249552A (en) * 2009-04-13 2010-11-04 Central Glass Co Ltd Method and device for discriminating flaw of glass plate
WO2012077683A1 (en) * 2010-12-09 2012-06-14 旭硝子株式会社 Method and system for measuring defect in glass ribbon
WO2012077542A1 (en) * 2010-12-09 2012-06-14 旭硝子株式会社 Glass substrate
EP2895847A4 (en) * 2012-09-14 2016-05-25 Luoyang Landglass Tech Co Ltd Detection system based on modulation of line structured laser image of glass
JP2015135266A (en) * 2014-01-17 2015-07-27 旭硝子株式会社 Method of stably detecting minute foreign matter within glass plate, and apparatus for implementing the same
WO2015162303A1 (en) * 2014-04-25 2015-10-29 Boraident Gmbh Method and device for detecting nickel sulphide inclusions in a glass plate
CN111487191A (en) * 2020-04-26 2020-08-04 山东创策电气科技有限公司 Toughened glass spontaneous explosion hidden danger detection method and device based on image processing
CN111721774A (en) * 2020-06-23 2020-09-29 湖南正中制药机械有限公司 Lamp inspection detection method for automatic lamp inspection machine

Also Published As

Publication number Publication date
JPWO2009031420A1 (en) 2010-12-09
JP2014044209A (en) 2014-03-13
JP5696984B2 (en) 2015-04-08
CN101790679B (en) 2012-05-09
JP2014006271A (en) 2014-01-16
CN101790679A (en) 2010-07-28

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